CN102811837B - The Ginding process of glass substrate maintenance film body and glass substrate - Google Patents
The Ginding process of glass substrate maintenance film body and glass substrate Download PDFInfo
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- CN102811837B CN102811837B CN201080065758.3A CN201080065758A CN102811837B CN 102811837 B CN102811837 B CN 102811837B CN 201080065758 A CN201080065758 A CN 201080065758A CN 102811837 B CN102811837 B CN 102811837B
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- Prior art keywords
- glass substrate
- adhesive tape
- faced adhesive
- double faced
- tape bonding
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
- B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/05—Interconnection of layers the layers not being connected over the whole surface, e.g. discontinuous connection or patterned connection
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
Abstract
The present invention relates to a kind of glass substrate maintenance film body, form by by double faced adhesive tape bonding die self-adsorption type sheet being pasted onto on backboard, and glass substrate absorption is held on described self-adsorption type sheet, wherein, described double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die be configured in the same face, and the mode that this multi-disc double faced adhesive tape bonding die separates predetermined gap separately with adjacent double faced adhesive tape bonding die is pasted onto on described self-adsorption type sheet and described backboard.
Description
Technical field
The present invention relates to for keeping the glass substrate maintenance film body of glass substrate and the Ginding process of glass substrate when processed glass substrate.
Background technology
For being applied to the glass substrate of liquid crystal display purposes, the minute asperities on its surface or fluctuating can cause image to produce distortion, therefore, use lapping device to remove this minute asperities or fluctuating.As this lapping device, the applicant Patent Document 1 discloses a kind of lapping device, wherein, by the glass substrate remained on grinding head to be pressed on the grinding pad that is pasted onto on grinding plate and to make grinding plate carry out relative rotation with grinding head and grind glass substrate.
In addition, in the lapping device of patent document 1, adsorb on the self-adsorption type maintenance film body being held in and being arranged on grinding head by making glass substrate and glass substrate is installed on grinding head.
In addition, recently, along with the maximization of liquid crystal display glass substrate, also maximize for making the size that this glass substrate adsorbs the maintenance film body remained on grinding head.This maintenance film body is formed by being pasted onto on backboard by porous self-adsorption type sheet by double faced adhesive tape bonding die, and glass substrate absorption remains on this self-adsorption type sheet.
But, particularly when carrying out attrition process to female glass substrate of the size (3130mm × 2880mm) being called G10, in the manufacture of the maintenance film body of the glass substrate for keeping this size, for self-adsorption type sheet and backboard, existing manufacturing equipment can be used to carry out the manufacturing dimension product corresponding with it, but for by self-adsorption type sheet, the double faced adhesive tape bonding die be glued on backboard cannot use existing manufacturing equipment to manufacture, need novel device to invest during manufacture, thus there is the problem that manufacturing cost increases.
Therefore, used the double faced adhesive tape bonding die of at least existing size of two panels to be held in gluing for self-adsorption type sheet on backboard in the past.
As self-adsorption type sheet, as shown in patent document 2, can exemplified as the urethane film of the flexible plastic sheet formed by polyurethane resin.The urethane film of patent document 2 is by forming many micropores and utilize the surface tension of the liquid penetrated in many micropores of superficial layer grinding pad to be glued to urethane film on grinding plate containing liquid such as water in superficial layer on its superficial layer, but utilize this urethane film that glass substrate also can be made to carry out from adsorbing maintenance, therefore, self-adsorption type sheet is it can be used as to use.
Prior art document
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2004-122351 publication
Patent document 2: Japanese Unexamined Patent Publication 2007-7824 publication
Summary of the invention
Invent problem to be solved
But, use in the existing maintenance film body of multi-disc double faced adhesive tape bonding die, be difficult to the end of adjacent double faced adhesive tape bonding die to be pasted in gapless mode.
Fig. 9 (A) shows and to be fitted in by self-adsorption type sheet 1 on backboard 3 by two panels double faced adhesive tape bonding die 2,2 and glass substrate G adsorbs the sectional view be held on self-adsorption type sheet 1.Paste in gapless mode each other to make the end of adjacent double faced adhesive tape bonding die 2,2, when making the end of double faced adhesive tape bonding die 2,2 carry out gluing in mode overlapping slightly each other as shown in Fig. 9 (A), the part of this overlap can form convex, and this convex is transferred on glass substrate G via self-adsorption type sheet 1 and forms convex shaped part 4.When glass substrate G being ground under the state transferred with convex shaped part 4, as shown in Fig. 9 (B), the part of this convex shaped part 4 of formation of the glass substrate G after grinding can show as concavity portion 4A on the contrary, therefore, the problem that the flatness quality that is impaired, glass substrate G that there is finished surface reduces.It should be noted that, shown in Fig. 9 (A) is the figure turned upside down, and grinds under the state being in fact in lower position at glass substrate G.
The present invention makes in view of the foregoing, its object is to the glass substrate maintenance film body of the quality providing the glass substrate after can improving grinding and the Ginding process of glass substrate.
For the means of dealing with problems
In order to achieve the above object, the invention provides a kind of glass substrate maintenance film body, form by by double faced adhesive tape bonding die self-adsorption type sheet being pasted onto on backboard, and glass substrate absorption is held on above-mentioned self-adsorption type sheet, wherein, above-mentioned double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die be configured in the same face, and the mode that this multi-disc double faced adhesive tape bonding die separates predetermined gap separately with adjacent double faced adhesive tape bonding die is pasted onto on above-mentioned self-adsorption type sheet and above-mentioned backboard.
According to the present invention, by using the multi-disc double faced adhesive tape bonding die be configured in the same face to be adhesive on backboard by a slice self-adsorption type sheet, now, adjacent double faced adhesive tape bonding die is pasted onto on self-adsorption type sheet and backboard in the mode separating predetermined gap.For glass substrate for being kept by this maintenance film body after grinding, although owing to carrying out grinding under the state that is transferred in above-mentioned gap and forming convex shaped part in its surface, but compared with the depth dose in concavity portion in the past, the absolute magnitude being formed in the amount of height of the convex shaped part on the surface of glass substrate reduces, therefore, the flatness of glass substrate can not be damaged.Thus, according to maintenance film body of the present invention, the quality of the glass substrate after grinding can be improved.
The present invention keeps the maintenance film body of large-size glass substrate as object for absorption, and therefore, a slice self-adsorption type sheet described in the present invention is the self-adsorption type sheet that size can tackle large-size glass substrate.In addition, the maximum sized double faced adhesive tape bonding die that a slice double faced adhesive tape bonding die in multi-disc double faced adhesive tape bonding die can manufacture for existing manufacturing equipment or size are slightly smaller than the double faced adhesive tape bonding die of above-mentioned size.
In order to achieve the above object, the invention provides a kind of glass substrate maintenance film body, form by by double faced adhesive tape bonding die self-adsorption type sheet being pasted onto on backboard, and glass substrate absorption is held on above-mentioned self-adsorption type sheet, wherein, above-mentioned self-adsorption type sheet and the above-mentioned double faced adhesive tape bonding die above-mentioned self-adsorption type sheet of each self-contained multi-disc be arranged in the same face and the above-mentioned double faced adhesive tape bonding die of multi-disc, the mode that this multi-disc self-adsorption type sheet and multi-disc double faced adhesive tape bonding die separate predetermined gap separately with adjacent self-adsorption type sheet and double faced adhesive tape bonding die is pasted onto on above-mentioned backboard.
According to the present invention, the multi-disc self-adsorption type sheet be configured in the same face can be used and to be fitted on each multi-disc self-adsorption type sheet and the double faced adhesive tape bonding die be configured in the same face is glued on backboard, now, adjacent self-adsorption type sheet and double faced adhesive tape bonding die are pasted onto on backboard in the mode separating predetermined gap separately.For glass substrate for being kept by this maintenance film body after grinding, although owing to carrying out grinding under the state that is transferred in above-mentioned gap and forming convex shaped part in its surface, but compared with the depth dose in concavity portion in the past, the absolute magnitude being formed in the amount of height of the convex shaped part on the surface of glass substrate reduces, therefore, the flatness of glass substrate can not be damaged.Thus, according to maintenance film body of the present invention, the quality of the glass substrate after grinding can be improved.
In order to achieve the above object, the invention provides a kind of glass substrate maintenance film body, form by by double faced adhesive tape bonding die self-adsorption type sheet being pasted onto on backboard, and glass substrate absorption is held on above-mentioned self-adsorption type sheet, wherein, above-mentioned double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die be configured in the same face, and the mode that this multi-disc double faced adhesive tape bonding die separates predetermined gap separately with adjacent double faced adhesive tape bonding die is pasted onto on above-mentioned self-adsorption type sheet and above-mentioned backboard.
According to the present invention, the multi-disc double faced adhesive tape bonding die be configured in the same face can be used to be glued on backboard by a slice self-adsorption type sheet, now, at least two panels double faced adhesive tape bonding die overlap laminating can be made.And, multi-disc double faced adhesive tape bonding die in the same face is pasted in the mode separating predetermined gap separately, and pastes in the mode that the predetermined gap between the predetermined gap between the double faced adhesive tape bonding die in same plane and double faced adhesive tape bonding die adjacent on the stacked direction of double faced adhesive tape bonding die does not overlap on the stacked direction of double faced adhesive tape bonding die.
For glass substrate for being kept by this maintenance film body after grinding, although owing to carrying out grinding under the state that is transferred in above-mentioned gap and forming convex shaped part in its surface, but because (namely above-mentioned gap adjacent on the stacked direction of double faced adhesive tape bonding die does not overlap on the stacked direction of double faced adhesive tape bonding die, stagger in the lateral direction in figure and do not overlap in the vertical direction), therefore, it is possible to the transfer printing amount caused by suppression gap.Therefore, according to the present invention, the height of the convex shaped part be formed on the surface of glass substrate can be suppressed at reduced levels, therefore, it is possible to further improve the quality of the glass substrate after grinding.
According to the present invention, above-mentioned predetermined gap is preferably set to 0.5mm ± 0.5mm.That is, in the present invention, said predetermined gap comprises 0mm, is preferably 0 ~ 1.0mm.When gap is 0mm, glass substrate after grinding can not produce the concavity portion caused by transfer printing, convex shaped part, in addition, when gap is below 1.0mm, form the quality of convex shaped part on the glass substrate on glass substrate for display not affect because of transfer printing, therefore preferably.
In addition, according to the present invention, preferred above-mentioned glass substrate is of a size of more than 3130 (mm) × 2880 (mm).That is, maintenance film body of the present invention can keep the glass substrate being of a size of more than the size being called G10 size, thus can grind this glass substrate.
In addition, according to the present invention, preferred above-mentioned maintenance film body is of a size of more than 3200 (mm) × 3000 (mm).In order to keep the glass substrate of more than above-mentioned G10 size, preferably use the maintenance film body with the size of more than 3200 (mm) × 3000 (mm).
In order to achieve the above object, the invention provides a kind of Ginding process of glass substrate, it is characterized in that, utilize glass substrate maintenance film body of the present invention to adsorb and keep glass substrate, the polished face of this glass substrate is pressed on grinding pad, and the polished face of glass substrate is ground to required flatness.
Thus, according to the present invention, the quality of the glass substrate after grinding can be improved.
Invention effect
As mentioned above, according to the present invention, by making the adjacent double faced adhesive tape bonding die of the multi-disc double faced adhesive tape bonding die be configured in the same face be pasted onto on backboard in the mode separating predetermined gap separately, the quality of the glass substrate after grinding can be improved.
Accompanying drawing explanation
Fig. 1 is the stereogram of the lapping device of the glass substrate of the glass substrate maintenance film body of application implementation mode.
Fig. 2 is the amplification profile of the major part structure representing the lapping device shown in Fig. 1.
Fig. 3 is the stereogram of the maintenance film body of the first embodiment.
Fig. 4 is the sectional view of the maintenance film body shown in Fig. 3.
Fig. 5 is the sectional view that absorption maintains glass substrate on the maintenance film body shown in Fig. 3.
Fig. 6 (A) utilizes the two panels double faced adhesive tape bonding die of fitting in the mode separating gap self-adsorption type sheet to be fitted in sectional view on backboard, and Fig. 6 (B) is formed in the key diagram of the convex shaped part on the surface of glass substrate.
Fig. 7 is the sectional view of the maintenance film body of the second embodiment.
Fig. 8 is the sectional view of the maintenance film body of the 3rd embodiment.
Fig. 9 (A) is the sectional view by the end of two panels double faced adhesive tape bonding die overlap being fitted in by self-adsorption type sheet on backboard, and Fig. 9 (B) is formed in the key diagram in the concavity portion on the surface of glass substrate.
Detailed description of the invention
Below, with reference to the accompanying drawings the preferred embodiment of the Ginding process of glass substrate maintenance film body of the present invention and glass substrate is described.
Fig. 1 shows the stereogram of the lapping device 10 of the glass substrate of the glass substrate maintenance film body of application implementation mode.In addition, the amplification profile of the major part structure representing lapping device 10 has been shown in Fig. 2.
This lapping device 10 is for manufacturing female glass substrate of rectangle (such as, the length of side for more than 3130mm × 2880mm (G10 size), thickness be 0.7mm) the polished face A of G is ground to the lapping device of the flatness needed for liquid crystal display glass substrate, form as it, glass substrate G remained on the grinding head 14 of its lower surface by the maintenance film body 12 by embodiment and form by the grinding table 20 that grinding pad 18 to be remained on its upper surface by aluminum flat board 16.Female glass substrate (hereinafter referred to as glass substrate) G keeps by comprising the maintenance film body 12 had from adsorbing back lining materials etc., and by grinding head 14, polished face A is pressed on grinding pad 18, thus, polished face A is ground to required flatness.In order to adsorb the large-size glass substrate G keeping above-mentioned size, preferred maintenance film body 12 has the size of more than 3200 (mm) × 3000 (mm).In addition, maintenance uses the detailed construction of film body 12 as described later.
As shown in Figure 2, in grinding, by the multiple slurry supply holes 22,22 be formed through in grinding table 20 and dull and stereotyped 16 ... the ground slurries such as the lower face side supply ceria aqueous solution of self-grind pad 18.Thus, form the state that grinding pad 18 is polished slurry immersion, in this condition glass substrate G is ground.Slurry supply hole 22,22 ... intensive and be formed uniformly on grinding table 20 and dull and stereotyped 16, therefore, ground slurry is supplied to grinding pad 18 equably.It should be noted that, as grinding pad 18, such as polyurathamc type or suede type grinding pad can be used, be fitted on dull and stereotyped 16.In addition, grinding pad 18 can be a slice, but due to the size of its size and glass substrate G correspondingly also comparatively large, therefore, also multi-disc can be split pad and be combined into a slice grinding pad 18.And, grinding table 20 has been formed through multiple SS 24,24 ..., these SSs 24,24 ... be connected with not shown suction pump by valve.Therefore, by opening above-mentioned valve, the attraction of suction pump is delivered to SS 24,24 ..., therefore, dull and stereotyped 16 are held in the upper surface of grinding table 20 by absorption.By closing above-mentioned valve, the attraction of suction pump is removed, and therefore, grinding pad 18 can be disassembled from grinding table 20 together with dull and stereotyped 16 when maintenance, the replacing of grinding pad 18.
As shown in Figure 1, be fixed with main shaft 26 in the center upper portion of grinding head 14, this main shaft 26 is connected with rotating-/ lifting device 28.Rotating-/ lifting device 28 controls to rotating speed and the down maneuver (pushing force) of the grinding of applicable glass substrate G by the unified control part 30 controlling whole lapping device 10.
The stereogram of the maintenance film body 12 of the first embodiment is shown in Fig. 3, the sectional view of maintenance film body 12 has been shown in Fig. 4.In addition, illustrated in Fig. 5 that absorption maintains the sectional view of glass substrate G on maintenance film body 12.It should be noted that, the maintenance of Fig. 3 represents in the mode turned upside down with film body 12.
As shown in above-mentioned figure, maintenance film body 12 is by being pasted onto a slice self-adsorption type sheet 32 on aluminum backboard 36 by the two panels double faced adhesive tape bonding die 34,34 be configured in the same face and forming, further, as shown in Figure 5, glass substrate G absorption is held on self-adsorption type sheet 32.It should be noted that, exemplified with use two panels double faced adhesive tape bonding die 34,34, a slice self-adsorption type sheet 32 is glued to the maintenance film body 12 that backboard 36 obtains in Fig. 3 ~ Fig. 5, but also can is use the double faced adhesive tape bonding die 34,34 of more than 3 be configured in the same face ... a slice self-adsorption type sheet 32 is glued to the maintenance film body 12 that backboard 36 obtains.
The urethane film of self-adsorption type sheet 32 for being formed by polyurethane resin disclosed in patent document 2, its thickness is about 0.8mm.The superficial layer of this urethane film being formed with many micropores, by making to contain the liquid such as water in superficial layer, the surface tension of the liquid penetrated in many micropores of superficial layer can being utilized adsorb maintenance glass substrate G.In addition, double faced adhesive tape bonding die 34 is consisted of coating binder 40,40 on the two sides of the base material 38 of PETG (PET) etc., and its thickness is about 0.2mm.
Maintenance shown in Fig. 3 ~ Fig. 5 is with in film body 12, a slice self-adsorption type sheet 32 uses the two panels double faced adhesive tape bonding die 34,34 be configured in the same face, and two panels double faced adhesive tape bonding die 34,34 is pasted onto on self-adsorption type sheet 32 and backboard 36 in the mode separating predetermined gap.
According to the maintenance film body 12 formed in the above described manner, two panels double faced adhesive tape bonding die 34,34 is used to be glued on backboard 36 by a slice self-adsorption type sheet 32, now, double faced adhesive tape bonding die 34,34 is made to be pasted onto on self-adsorption type sheet 32 and backboard 36 in the mode separating predetermined gap.
For glass substrate G after grinding for being kept by this maintenance film body 12, as shown in Fig. 6 (A), the a part of 32a being arranged in the self-adsorption type sheet 32 at s place, gap enters gap s because of the pushing force etc. during grinding, therefore, the adsorption plane of the self-adsorption type sheet 32 corresponding with this gap s produces concavity portion 32b.Therefore, absorption remains on a part of G of the glass substrate G on this concavity portion 32b
1be deformed into convex, the polished face that this convex is transferred to glass substrate G forms concavity portion 5.When grinding glass substrate G under the state transferred with concavity portion 5, this concavity portion 5 is not polished, and therefore, as shown in Fig. 6 (B), the part in this concavity portion 5 of formation of the glass substrate G after grinding can show as convex shaped part 5A on the contrary.But compared with the depth dose b of the concavity portion 4A in the past shown in Fig. 9, the absolute magnitude being formed in the amount of height a of the convex shaped part 5A on the surface of glass substrate G reduces, and therefore, can't damage the flatness of glass substrate G.
Thus, according to the maintenance film body 12 of the first embodiment, the quality of the glass substrate G after grinding can be improved.
In addition, as shown in Figure 5, the backboard 36 of maintenance film body 12 is provided with the elastic sheet material 42 of annular shape, is fixed with multiple combination member 44,44 in the periphery of this elastic sheet material 42 ...Maintenance film body 12 arranges elastic sheet material 42 by tensioning and makes these combination members 44,44 ... be combined in the hook portion (not shown) of the grinding head 14 of Fig. 1 and be installed on grinding head 14.
The sectional view of the maintenance film body 112 of the second embodiment is shown in Fig. 7, has marked same symbol to be described to component like maintenance film body 12 same class shown in Fig. 3.
Maintenance film body 112 uses and is configured in separately in the same face and is respectively self-adsorption type sheet 32A, 32A of two panels and double faced adhesive tape bonding die 34,34, further, respectively for self-adsorption type sheet 32A, 32A of two panels and double faced adhesive tape bonding die 34,34 are pasted onto on backboard 36 in the mode separating predetermined gap s.It should be noted that, exemplified with by respectively for self-adsorption type sheet 32A, 32A of two panels and double faced adhesive tape bonding die 34,34 are glued to the maintenance film body 112 that backboard 36 obtains in Fig. 7, but also can be to be respectively self-adsorption type sheet 32A, 32A of more than 3 ... with double faced adhesive tape bonding die 34,34 ... be glued to the maintenance film body 112 that backboard 36 obtains.
According to the maintenance film body 112 formed in the above described manner, two panels self-adsorption type sheet 32A, 32A are glued on backboard 36 by the double faced adhesive tape bonding die 34,34 using two panels to be fitted in separately on self-adsorption type sheet 32A, 32A, now, self-adsorption type sheet 32A, 32A and double faced adhesive tape bonding die 34,34 is made to be pasted onto on backboard 36 in the mode separating predetermined gap s.
As shown in Fig. 6 (A), Fig. 6 (B), for glass substrate G after grinding for being kept by this maintenance film body 112, although owing to carrying out grinding under the state that is transferred at gap s and forming convex shaped part 5A in its surface, but compared with the depth dose b of the concavity portion 4A shown in Fig. 9 (B), the absolute magnitude of the amount of height a of convex shaped part 5A reduces, and therefore can't damage the flatness of glass substrate G.
Thus, according to the maintenance film body 112 of the second embodiment, the quality of the glass substrate G after grinding can be improved.
It should be noted that, preferably make the formation direction of gap s identical as the pull-out direction of glass tape in the float glass process manufacturing installation of the plate glass of the former material of glass substrate G with manufacture.That is, by making the direction of the concave groove produced on glass substrate G because of gap s identical with the direction of the trace line produced on the surface of plate glass because glass tape pulls out, convex groove can be made to become not too obvious, therefore preferably.
In addition, predetermined gap s is preferably set to 0.5mm ± 0.5mm.That is, the predetermined gap s specified in embodiment comprises 0mm, is preferably 0 ~ 1.0mm.When gap is 0mm, glass substrate G after grinding can not produce concavity portion 4A, the convex shaped part 5A caused by transfer printing, in addition, when gap is 1.0mm, the quality of convex shaped part 5A on glass substrate for display G be formed in because of transfer printing on glass substrate G does not affect.
The sectional view of the maintenance film body 212 of the 3rd embodiment is shown in Fig. 8, has marked same symbol to be described to component like maintenance film body 12 same class shown in Fig. 3.
Keep with in film body 212, on a slice self-adsorption type sheet 32, overlap is fitted with two panels double faced adhesive tape bonding die 34A, 34A, 34B, 34B.In addition, double faced adhesive tape bonding die 34A, the 34A be directly pasted onto in the same face on self-adsorption type sheet 32 pastes in the mode separating predetermined gap s1, and double faced adhesive tape bonding die 34B, the 34B be pasted onto in the same face on above-mentioned double faced adhesive tape bonding die 34A, 34A pastes in the mode separating predetermined gap s2 too.And, do not overlap on the stacked direction of the double faced adhesive tape bonding die mode of (that is, staggering in the lateral direction in figure and do not overlap in the vertical direction) of double faced adhesive tape bonding die 34A, 34A, 34B, 34B and gap s1, s2 each double faced adhesive tape bonding die 34A, 34A, 34B, 34B between of laminating overlapping with two panels is fitted.
It should be noted that, the maintenance of embodiment is with in film body 212, show use 4 double faced adhesive tape bonding die 34A, 34A, 34B, 34B and the example these double faced adhesive tape bonding dies 34A, 34A, 34B, 34B are configured in the mode of two panels overlap, but also can be the double faced adhesive tape bonding die of use more than 6 and the maintenance film body be configured in more than 3 overlapping modes.
According to the maintenance film body 212 formed in the above described manner, use 4 double faced adhesive tape bonding die 34A, 34A, 34B, a slice self-adsorption type sheet 32 is glued on backboard 36 by 34B, now, double faced adhesive tape bonding die 34A, 34A, 34B, 34B is the laminating of two panels overlap at least, and, double faced adhesive tape bonding die 34A, 34A pastes in the mode separating predetermined gap s1, be pasted onto above-mentioned double faced adhesive tape bonding die 34A, double faced adhesive tape bonding die 34B in the same face on 34A, 34B is pasted onto on backboard 36 in the mode separating predetermined gap s2 too, and each double faced adhesive tape bonding die 34A of laminating with two panels overlap, 34A, 34B, gap s1 between 34B, (namely s2 does not overlap on the stacked direction of double faced adhesive tape bonding die, stagger in the lateral direction in figure and do not overlap in the vertical direction) mode paste.
For glass substrate G after grinding for being kept by this maintenance film body 212, although owing to carrying out grinding under the state that is transferred at gap s1, s2 and forming two convex shaped parts 5A, 5A (with reference to figure 6) in its surface, but (namely two gaps s1, s2 do not overlap on the stacked direction of double faced adhesive tape bonding die, stagger in the lateral direction in figure and do not overlap in the vertical direction), therefore, it is possible to suppress the transfer printing amount caused by gap s1, s2.Namely, in order to reinforce the distortion of the self-adsorption type sheet 32 caused by the s1 of this gap, the double faced adhesive tape bonding die 34B on right side in figure is configured with to block gap s1 in the below of the gap s1 of double faced adhesive tape bonding die 34A, 34A, in addition, in order to reinforce the distortion of the self-adsorption type sheet 32 caused by the s2 of this gap, above the gap s2 of double faced adhesive tape bonding die 34B, 34B, be configured with the double faced adhesive tape bonding die 34A in left side in figure to block gap s2.
Therefore, according to the maintenance film body 212 of embodiment, the height of the convex shaped part 5A (with reference to figure 6) be formed on the surface of glass substrate G can be suppressed at reduced levels, therefore, it is possible to further improve the quality of the glass substrate G after grinding.
It should be noted that, the gap s of preferred gap s1, s2 and Fig. 3 is identical.In addition, preferably make the formation direction of gap s1, s2 identical as the pull-out direction of glass tape in the float glass process manufacturing installation of the plate glass of the former material of glass substrate G with manufacture.
Label declaration
1 self-adsorption type sheet
2 double faced adhesive tape bonding dies
3 backboards
4 convex shaped parts
4A concavity portion
5 concavity portions
5A convex shaped part
10 lapping devices
12,112,212 maintenance film bodies
14 grinding heads
16 is dull and stereotyped
18 grinding pads
20 grinding tables
22 slurry supply holes
24 SSs
26 main shafts
28 rotating-/ lifting devices
30 control parts
32 self-adsorption type sheets
34,34A, 34B double faced adhesive tape bonding die
36 backboards
38 base materials
40 adhesive
42 elastic sheet materials
44 combination members
G glass substrate
Claims (5)
1. a glass substrate maintenance film body, form, and glass substrate absorption is held on described self-adsorption type sheet by being pasted onto on backboard by self-adsorption type sheet by double faced adhesive tape bonding die, wherein,
Described double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die be configured in the same face, and at least two panels double faced adhesive tape bonding die overlap laminating, multi-disc double faced adhesive tape bonding die in the same face is pasted in the mode separating predetermined gap separately, further, the predetermined gap between double faced adhesive tape bonding die and the predetermined gap between double faced adhesive tape bonding die adjacent on the stacked direction of double faced adhesive tape bonding die do not overlap on the stacked direction of double faced adhesive tape bonding die.
2. glass substrate maintenance film body as claimed in claim 1, wherein, described predetermined gap is 0.5mm ± 0.5mm.
3. glass substrate maintenance film body as claimed in claim 1 or 2, wherein, described glass substrate is of a size of 3130mm × more than 2880mm.
4. glass substrate maintenance film body as claimed in claim 3, wherein, described maintenance film body is of a size of 3200mm × more than 3000mm.
5. the Ginding process of a glass substrate, wherein, utilize the glass substrate maintenance film body absorption according to any one of claim 1 ~ 4 to keep glass substrate, the polished face of this glass substrate is pressed on grinding pad, and the polished face of glass substrate is ground to required flatness.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2010/055283 WO2011118010A1 (en) | 2010-03-25 | 2010-03-25 | Film for holding glass substrate and method for polishing glass substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102811837A CN102811837A (en) | 2012-12-05 |
| CN102811837B true CN102811837B (en) | 2015-12-02 |
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| CN201080065758.3A Active CN102811837B (en) | 2010-03-25 | 2010-03-25 | The Ginding process of glass substrate maintenance film body and glass substrate |
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| Country | Link |
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| JP (1) | JP5529258B2 (en) |
| KR (1) | KR101598248B1 (en) |
| CN (1) | CN102811837B (en) |
| WO (1) | WO2011118010A1 (en) |
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| JP7205423B2 (en) * | 2018-12-17 | 2023-01-17 | Ａｇｃ株式会社 | Film body for holding glass substrate and method for polishing glass substrate |
| CN110634400B (en) * | 2019-08-22 | 2021-04-27 | 武汉华星光电技术有限公司 | Backlight module, display device and manufacturing method of backlight module |
| CN116393336B (en) * | 2023-06-09 | 2023-08-18 | 太原科技大学 | Clamp for spin coating of magnetostrictive material film substrate and using method thereof |
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| WO2000017284A1 (en) * | 1998-09-17 | 2000-03-30 | Nitta Corporation | Workpiece retainer and method for attaching/detaching workpiece by using the same |
| CN1830076A (en) * | 2003-07-29 | 2006-09-06 | 东京毅力科创株式会社 | Laminating method and laminating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02220838A (en) * | 1989-02-22 | 1990-09-04 | Rodeele Nitta Kk | Laminate and support material of member to be polished and polishing cloth used therewith |
| JP2001138233A (en) * | 1999-11-19 | 2001-05-22 | Sony Corp | Grinding apparatus, grinding method and cleaning method of grinding tool |
| JP2002337048A (en) * | 2001-05-15 | 2002-11-26 | Shin Etsu Handotai Co Ltd | Method for polishing workpiece |
| JP4207153B2 (en) | 2002-07-31 | 2009-01-14 | 旭硝子株式会社 | Substrate polishing method and apparatus |
| JP4034320B2 (en) * | 2005-05-24 | 2008-01-16 | 富士紡ホールディングス株式会社 | Holding pad |
| JP4562598B2 (en) | 2005-07-04 | 2010-10-13 | 富士紡ホールディングス株式会社 | Polishing cloth |
| JP4948935B2 (en) * | 2006-08-08 | 2012-06-06 | 富士紡ホールディングス株式会社 | Polishing cloth |
| JP4943766B2 (en) * | 2006-08-09 | 2012-05-30 | ニッタ・ハース株式会社 | Workpiece holding material and method for manufacturing the same |
| JP5501561B2 (en) * | 2007-11-12 | 2014-05-21 | 富士紡ホールディングス株式会社 | Holding pad |
-
2010
- 2010-03-25 CN CN201080065758.3A patent/CN102811837B/en active Active
- 2010-03-25 WO PCT/JP2010/055283 patent/WO2011118010A1/en active Application Filing
- 2010-03-25 JP JP2012506727A patent/JP5529258B2/en active Active
- 2010-03-25 KR KR1020127025047A patent/KR101598248B1/en active IP Right Grant
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000017284A1 (en) * | 1998-09-17 | 2000-03-30 | Nitta Corporation | Workpiece retainer and method for attaching/detaching workpiece by using the same |
| CN1830076A (en) * | 2003-07-29 | 2006-09-06 | 东京毅力科创株式会社 | Laminating method and laminating device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130033360A (en) | 2013-04-03 |
| WO2011118010A1 (en) | 2011-09-29 |
| KR101598248B1 (en) | 2016-02-26 |
| JPWO2011118010A1 (en) | 2013-07-04 |
| JP5529258B2 (en) | 2014-06-25 |
| CN102811837A (en) | 2012-12-05 |
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