CN102811837A - Film for holding glass substrate and method for polishing glass substrate - Google Patents
Film for holding glass substrate and method for polishing glass substrate Download PDFInfo
- Publication number
- CN102811837A CN102811837A CN2010800657583A CN201080065758A CN102811837A CN 102811837 A CN102811837 A CN 102811837A CN 2010800657583 A CN2010800657583 A CN 2010800657583A CN 201080065758 A CN201080065758 A CN 201080065758A CN 102811837 A CN102811837 A CN 102811837A
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- Prior art keywords
- glass substrate
- adhesive tape
- faced adhesive
- double faced
- tape bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
- B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/05—Interconnection of layers the layers not being connected over the whole surface, e.g. discontinuous connection or patterned connection
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
Abstract
Disclosed is a film for holding a glass substrate, wherein a self-sucking sheet is attached, via a double-coated adhesive sheet, to a back plate, and the glass substrate is sucked and held by the self-sucking sheet, characterized in that the double-coated adhesive sheet comprises multiple double-coated adhesive sheet pieces that are located in a single plane and these double-coated adhesive sheet pieces are attached, at definite intervals between adjacent pieces, to the self-sucking sheet and the back plate.
Description
Technical field
The present invention relates to be used for when the processed glass substrate, keeping the glass substrate of glass substrate to keep Ginding process with film body and glass substrate.
Background technology
For the glass substrate that is applied to the LCD purposes, the small concavo-convex or fluctuating on its surface can cause image to produce distortion, therefore, uses lapping device to remove this small concavo-convex or fluctuating.As this lapping device; The applicant discloses a kind of lapping device in patent documentation 1; Wherein, be pressed on the grinding pad that sticks on the grinding plate and grinding plate and grinding head rotated relatively and glass substrate is ground through remaining on glass substrate on the grinding head.
In addition, in the lapping device of patent documentation 1, through glass substrate absorption is remained in be installed on the grinding head on absorbent-type keeps with film body and glass substrate is installed on the grinding head.
In addition, recently, along with the maximization of liquid crystal display glass substrate, the maintenance that is used to make this glass substrate absorption to remain on the grinding head is also maximized with the size of film body.Through by the double faced adhesive tape bonding die porous being sticked on the backboard and constitutes from the absorption matrix, and glass substrate absorption remains on this and adsorbs on the matrix certainly with film body in this maintenance.
But; Particularly in that (female glass substrate of 3130mm * 2880mm) carries out under the situation of attrition process to the size that is called G10; In the maintenance of the glass substrate that is used for keeping this size manufacturing with film body; For for absorption matrix and backboard, can use existing manufacturing equipment to come the manufacturing dimension product corresponding, but be used for to use existing manufacturing equipment to make adsorbing the double faced adhesive tape bonding die that matrix is glued on the backboard certainly with it; Need the novel device investment during manufacturing, thereby the problem that exists manufacturing cost to increase.
Therefore, used the double faced adhesive tape bonding die of at least two existing sizes will adsorb certainly that matrix is gluing to remain on the backboard in the past.
As adsorbing matrix certainly, shown in patent documentation 2, can illustration as the urethane film of the flexible plastic sheet that forms by polyurethane resin.Thereby the urethane film of patent documentation 2 is through the surface tension that on its superficial layer, forms many micropores and in superficial layer, contain the liquid in many micropores that liquid utilization such as water penetrates into superficial layer grinding pad to be glued to the urethane film on the grinding plate; But utilize this urethane film also can make glass substrate carry out keeping from absorption; Therefore, it is used as adsorbing matrix certainly.
The prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2004-122351 communique
Patent documentation 2: TOHKEMY 2007-7824 communique
Summary of the invention
Invent problem to be solved
But the existing maintenance of using multi-disc double faced adhesive tape bonding die is difficult to the end of adjacent double faced adhesive tape bonding die is pasted with gapless mode with in the film body.
Fig. 9 (A) shows and will adsorb matrix 1 certainly by two double faced adhesive tape bonding dies 2,2 and be fitted on the backboard 3 and glass substrate G absorption remains in from adsorbing the sectional view on the matrix 1.In order to paste with gapless mode each other the end that makes adjacent double faced adhesive tape bonding die 2,2; Carry out when gluing with overlapping slightly each other mode the end that shown in Fig. 9 (A), makes double faced adhesive tape bonding die 2,2; This overlapping part can form convex, and this convex goes up and formation convex shaped part 4 via being transferred to glass substrate G from absorption matrix 1.Have under the state of convex shaped part 4 when glass substrate G ground in transfer printing; Shown in Fig. 9 (B); The part of this convex shaped part 4 of formation of the glass substrate G after the grinding can show as the 4A of concavity portion on the contrary, the problem that therefore, exist the flatness of finished surface impaired, the quality of glass substrate G reduces.Need to prove that shown in Fig. 9 (A) is the figure that turns upside down, in fact under glass substrate G is in the state of lower position, grind.
The present invention In view of the foregoing makes, and its purpose is to provide the glass substrate of the quality that can improve the glass substrate after the grinding to keep the Ginding process with film body and glass substrate.
The means that are used to deal with problems
In order to achieve the above object; The present invention provides a kind of glass substrate to keep using film body; Constitute through sticking on the backboard from the absorption matrix, and glass substrate absorption remains in above-mentioned from adsorbing on the matrix, wherein by the double faced adhesive tape bonding die; Above-mentioned double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die that is configured in in the one side, and this multi-disc double faced adhesive tape bonding die sticks on above-mentioned from adsorbing on matrix and the above-mentioned backboard with the mode that adjacent double faced adhesive tape bonding die separates predetermined gap separately.
According to the present invention, be configured in simultaneously interior together multi-disc double faced adhesive tape bonding die through use a slice is adhesive on the backboard from adsorbing matrix, at this moment, adjacent double faced adhesive tape bonding die is sticked on from adsorbing on matrix and the backboard with the mode that separates predetermined gap.For the glass substrate for keeping with film body after grinding by this maintenance; Though form convex shaped part in its surface owing to grinding under the state that is transferred in above-mentioned gap; But compare with the depth dose of in the past concavity portion; The absolute magnitude of amount of height that is formed on the lip-deep convex shaped part of glass substrate reduces, and therefore, can not damage the flatness of glass substrate.Thus, film body is used in maintenance according to the present invention, can improve the quality of the glass substrate after the grinding.
The present invention be used to adsorb keep large-size glass substrate maintenance with film body as object, therefore, a slice described in the present invention is to adsorb matrix be the absorption matrix certainly that size can be tackled large-size glass substrate.In addition, the maximum sized double faced adhesive tape bonding die that can make for existing manufacturing equipment of a slice double faced adhesive tape bonding die in the multi-disc double faced adhesive tape bonding die or the size double faced adhesive tape bonding die that is slightly smaller than above-mentioned size.
In order to achieve the above object; The present invention provides a kind of glass substrate to keep using film body; Constitute through sticking on the backboard from the absorption matrix by the double faced adhesive tape bonding die; And glass substrate absorption remains in above-mentioned from adsorbing on the matrix; Wherein, above-mentioned each self-containedly is arranged on the multi-disc in the one side above-mentionedly from adsorbing matrix and the above-mentioned double faced adhesive tape bonding die of multi-disc from adsorbing matrix and above-mentioned double faced adhesive tape bonding die, and this multi-disc is adsorbed matrix and multi-disc double faced adhesive tape bonding die certainly and adsorbed the mode that matrix and double faced adhesive tape bonding die separate predetermined gap separately certainly and stick on the above-mentioned backboard with adjacent.
According to the present invention; Can use and to be fitted in each multi-disc and to be glued on the backboard from adsorbing matrix being configured in the multi-disc in the one side from adsorbing on the matrix and being configured in the double faced adhesive tape bonding die in the one side; At this moment, make and adjacent adsorb matrix certainly and the double faced adhesive tape bonding die sticks on the backboard with the mode that separates predetermined gap separately.For the glass substrate for keeping with film body after grinding by this maintenance; Though form convex shaped part in its surface owing to grinding under the state that is transferred in above-mentioned gap; But compare with the depth dose of in the past concavity portion; The absolute magnitude of amount of height that is formed on the lip-deep convex shaped part of glass substrate reduces, and therefore, can not damage the flatness of glass substrate.Thus, film body is used in maintenance according to the present invention, can improve the quality of the glass substrate after the grinding.
In order to achieve the above object; The present invention provides a kind of glass substrate to keep using film body; Constitute through sticking on the backboard from the absorption matrix, and glass substrate absorption remains in above-mentioned from adsorbing on the matrix, wherein by the double faced adhesive tape bonding die; Above-mentioned double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die that is configured in in the one side, and this multi-disc double faced adhesive tape bonding die sticks on above-mentioned from adsorbing on matrix and the above-mentioned backboard with the mode that adjacent double faced adhesive tape bonding die separates predetermined gap separately.
According to the present invention, can use to be configured in a slice is glued on the backboard from adsorbing matrix with the multi-disc double faced adhesive tape bonding die in the one side, at this moment, can make at least two overlapping applyings of double faced adhesive tape bonding die.And; Multi-disc double faced adhesive tape bonding die with in the one side is pasted with the mode that separates predetermined gap separately, and pastes with the mode that predetermined gap between the double faced adhesive tape bonding die in the same plane and predetermined gap between double faced adhesive tape bonding die adjacent on the stacked direction of double faced adhesive tape bonding die do not overlap on the stacked direction of double faced adhesive tape bonding die.
For the glass substrate for keeping with film body after grinding by this maintenance; Though form convex shaped part in its surface owing to grinding under the state that is transferred in above-mentioned gap; But owing on the stacked direction of double faced adhesive tape bonding die, do not overlap (promptly in above-mentioned gap adjacent on the stacked direction of double faced adhesive tape bonding die; Do not overlap on above-below direction staggering on the left and right directions among the figure), therefore, can suppress the transfer printing amount due to the gap.Therefore,, can the height of the lip-deep convex shaped part that is formed on glass substrate be suppressed at reduced levels, therefore, can further improve the quality of the glass substrate after the grinding according to the present invention.
According to the present invention, above-mentioned predetermined gap is preferably set to 0.5mm ± 0.5mm.That is, said predetermined gap comprises 0mm among the present invention, is preferably 0～1.0mm.When the gap is 0mm; Can on the glass substrate after the grinding, not produce concavity portion, convex shaped part due to the transfer printing, in addition, the gap is that 1.0mm is when following; Because of transfer printing is formed on convex shaped part on the glass substrate to the not influence of the quality of glass substrate for display, therefore preferred.
In addition, according to the present invention, preferred above-mentioned glass substrate is of a size of more than 3130 (mm) * 2880 (mm).That is, maintenance of the present invention can keep being of a size of the above glass substrate of size that is called the G10 size with film body, thereby can grind this glass substrate.
In addition, according to the present invention, preferred above-mentioned maintenance is of a size of more than 3200 (mm) * 3000 (mm) with film body.In order to keep the glass substrate more than the above-mentioned G10 size, preferred use has the maintenance of the above size in 3200 (mm) * 3000 (mm) and uses film body.
In order to achieve the above object; The present invention provides a kind of Ginding process of glass substrate; It is characterized in that; Utilize glass substrate of the present invention to keep keeping glass substrate,, and glass substrate is ground to required flatness by abradant surface being pressed on the grinding pad of this glass substrate by abradant surface with film body absorption.
Thus, according to the present invention, can improve the quality of the glass substrate after the grinding.
The invention effect
As stated,, stick on the backboard with the mode that separates predetermined gap separately, can improve the quality of the glass substrate after the grinding through making the adjacent double faced adhesive tape bonding die of multi-disc double faced adhesive tape bonding die that is configured in in the one side according to the present invention.
Description of drawings
Fig. 1 is the stereogram of the glass substrate maintenance of application implementation mode with the lapping device of the glass substrate of film body.
Fig. 2 is the amplification profile of the major part structure of expression lapping device shown in Figure 1.
Fig. 3 is the stereogram of the maintenance of first embodiment with film body.
Fig. 4 is a maintenance shown in Figure 3 sectional view with film body.
Fig. 5 be maintenance shown in Figure 3 with film body on absorption maintain the sectional view of glass substrate.
Fig. 6 (A) utilizes two double faced adhesive tape bonding dies of fitting with the mode that separates the gap will adsorb matrix certainly to be fitted in the sectional view on the backboard, and Fig. 6 (B) is formed in the key diagram of the lip-deep convex shaped part of glass substrate.
Fig. 7 is the sectional view of the maintenance of second embodiment with film body.
Fig. 8 is the sectional view of the maintenance of the 3rd embodiment with film body.
Fig. 9 (A) is through the end of two double faced adhesive tape bonding dies is overlapping and will adsorb matrix certainly and be fitted in the sectional view on the backboard, and Fig. 9 (B) is formed in the key diagram of the lip-deep concavity portion of glass substrate.
The specific embodiment
Below, according to accompanying drawing the preferred implementation of glass substrate maintenance of the present invention with the Ginding process of film body and glass substrate described.
Fig. 1 shows the stereogram of the glass substrate maintenance of application implementation mode with the lapping device 10 of the glass substrate of film body.The amplification profile of the major part structure of expression lapping device 10 has been shown among Fig. 2 in addition.
This lapping device 10 is with the female glass substrate that manufactures rectangle (for example to be used for; The length of side is that 3130mm * 2880mm (G10 size) is above, thickness is 0.7mm) lapping device that is ground to the required flatness of liquid crystal display glass substrate by abradant surface A of G; Constitute as it, with film body 12 glass substrate G is remained on the grinding head 14 of its lower surface and the grinding table 20 that grinding pad 18 remains on its upper surface is constituted by aluminum flat board 16 by maintenance by embodiment.Female glass substrate (below be called glass substrate) G is by comprising the maintenance that has from adsorbing back lining materials etc. with film body 12 maintenances, and will be pressed on the grinding pad 18 by abradant surface A by grinding head 14, thus, will be ground to required flatness by abradant surface A.In order to adsorb the large-size glass substrate G that keeps above-mentioned size, the preferred maintenance, have the above size in 3200 (mm) * 3000 (mm) with film body 12.In addition, keep of the back with the detailed structure of film body 12.
As shown in Figure 2, in grinding, be formed in a plurality of slurry supply holes 22,22 of grinding table 20 and flat board 16 by breakthrough form ... The lower face side of self-grind pad 18 is supplied with ground slurries such as the ceria aqueous solution.Thus, form grinding pad 18, under this state, glass substrate G is ground by the state that ground slurry soaks.Slurry supply hole 22,22 ... Intensive and be formed uniformly grinding table 20 with dull and stereotyped 16 on, therefore, ground slurry is supplied to grinding pad 18 equably.Need to prove,, can use for example polyurathamc type or suede type grinding pad, it is fitted on dull and stereotyped 16 as grinding pad 18.In addition, grinding pad 18 can be a slice, but because the size of its size and glass substrate G is correspondingly also bigger, therefore, also can multi-disc be cut apart pad and be combined into a slice grinding pad 18.And perforation is formed with a plurality of SSs 24,24 on grinding table 20 ..., these SSs 24,24 ... Be connected with not shown suction pump through valve.Therefore, through opening above-mentioned valve, the attraction of suction pump is delivered to SS 24,24 ..., therefore, dull and stereotyped 16 are adsorbed the upper surface that remains in grinding table 20.Through closing above-mentioned valve, the attraction of suction pump is disengaged, therefore, and in the maintenance of grinding pad 18, can grinding pad 18 and dull and stereotyped 16 be disassembled from grinding table 20 together when changing.
As shown in Figure 1, be fixed with main shaft 26 in the center upper portion of grinding head 14, be connected with rotating-/ lifting device 28 on this main shaft 26.Rotating-/ lifting device 28 is controlled to the rotating speed and the down maneuver (pushing force) of the grinding that is fit to glass substrate G by the control part 30 of the whole lapping device 10 of unified control.
The stereogram of the maintenance of first embodiment with film body 12 has been shown among Fig. 3, the sectional view of maintenance with film body 12 has been shown among Fig. 4.In addition, illustrated among Fig. 5 and on keeping, adsorbed the sectional view that maintains glass substrate G with film body 12.Need to prove that the maintenance of Fig. 3 is represented with the mode of putting upside down up and down with film body 12.
Shown in above-mentioned figure; Keep with film body 12 through a slice being sticked on the aluminum backboard 36 and constitutes from adsorbing matrix 32 by being configured in the two double faced adhesive tape bonding dies 34,34 in the one side; And as shown in Figure 5, glass substrate G absorption remains in from adsorbing on the matrix 32.Need to prove; Among Fig. 3～Fig. 5 illustration use two double faced adhesive tape bonding dies 34,34 with a slice from absorption matrix 32 be glued on the backboard 36 and the maintenance that obtains with film body 12, be configured in the interior double faced adhesive tape bonding die more than 3 34,34 of one side but also can be to use ... With a slice from absorption matrix 32 be glued on the backboard 36 and the maintenance that obtains with film body 12.
From absorption matrix 32 is the disclosed urethane film that is formed by polyurethane resin in the patent documentation 2, and its thickness is about 0.8mm.Be formed with many micropores on the superficial layer of this urethane film,, can utilize the surface tension of the liquid in the many micropores that penetrate into superficial layer to adsorb maintenance glass substrate G through making liquid such as containing water in the superficial layer.In addition, double faced adhesive tape bonding die 34 constitutes through coating binder 40,40 on the two sides of the base material 38 of PETG (PET) etc., and its thickness is about 0.2mm.
Maintenance shown in Fig. 3～Fig. 5 is with in the film body 12; Use the two double faced adhesive tape bonding dies 34,34 that are configured in in the one side in a slice on the matrix 32 from adsorbing, and two double faced adhesive tape bonding dies 34,34 stick on from adsorbing on matrix 32 and the backboard 36 with the mode that separates predetermined gap.
According to the maintenance that constitutes in the above described manner with film body 12; Use two double faced adhesive tape bonding dies 34,34 that a slice is glued on the backboard 36 from adsorbing matrix 32; At this moment, double faced adhesive tape bonding die 34,34 is sticked on from adsorbing on matrix 32 and the backboard 36 with the mode that separates predetermined gap.
For the glass substrate G for keeping with film body 12 after grinding by this maintenance; Shown in Fig. 6 (A); The pushing force of a part of 32a that adsorbs matrix 32 certainly that is arranged in s place, gap when grinding etc. gets into gap s; Therefore, on the adsorption plane that certainly adsorb matrix 32 corresponding, produce the concavity 32b of portion with this gap s.Therefore, absorption remains on a part of G of the glass substrate G on the 32b of this concavity portion
1Be deformed into convex, this convex be transferred to glass substrate G by on the abradant surface and form concavity portion 5.Have under the state of concavity portion 5 when glass substrate G ground in transfer printing, this concavity portion 5 is not ground, and therefore, shown in Fig. 6 (B), the part of this concavity portion 5 of formation of the glass substrate G after the grinding can show as convex shaped part 5A on the contrary.But, to compare with the depth dose b of the 4A of concavity portion in the past shown in Figure 9, the absolute magnitude of amount of height a that is formed on the lip-deep convex shaped part 5A of glass substrate G reduces, and therefore, can't damage the flatness of glass substrate G.
Thus, with film body 12, can improve the quality of the glass substrate G after the grinding according to the maintenance of first embodiment.
In addition, as shown in Figure 5, the elastic sheet material 42 of annular shape is installed on the backboard 36 that keeps with film body 12, be fixed with a plurality of combination members 44,44 in the periphery of this elastic sheet material 42 ...Keep through tensioning elastic sheet material 42 being set and making these combination members 44,44 with film body 12 ... Be combined in Fig. 1 grinding head 14 hook portion (not shown) and be installed on the grinding head 14.
The sectional view of the maintenance of second embodiment with film body 112 has been shown, to describing with film body 12 same similar member mark prosigns among Fig. 7 with maintenance shown in Figure 3.
Keep to use film body 112 to use to be configured in separately with in the one side and respectively be two the 32A of absorption matrix certainly, 32A and double faced adhesive tape bonding die 34,34; And, respectively be that two adsorb certainly matrix 32A, 32A and double faced adhesive tape bonding die 34,34 sticks on the backboard 36 with the mode that separates predetermined gap s.Need to prove; Among Fig. 7 illustration will respectively be two be glued to the maintenance that obtains on the backboard 36 with film body 112 from absorption matrix 32A, 32A and double faced adhesive tape bonding die 34,34, but also can be with respectively being the 32A of absorption matrix certainly, the 32A more than 3 ... With double faced adhesive tape bonding die 34,34 ... Be glued on the backboard 36 and the maintenance that obtains with film body 112.
According to the maintenance that constitutes in the above described manner with film body 112; Use two be fitted in separately from adsorb the last double faced adhesive tape bonding die 34,34 of matrix 32A, 32A with two from adsorb matrix 32A, 32A is glued on the backboard 36; At this moment, make from adsorbing matrix 32A, 32A and double faced adhesive tape bonding die 34,34 and stick on the backboard 36 with the mode that separates predetermined gap s.
Shown in Fig. 6 (A), Fig. 6 (B); For the glass substrate G for keeping with film body 112 after grinding by this maintenance; Though form convex shaped part 5A in its surface owing under the state that gap s is transferred, grind; But compare with the depth dose b of the 4A of concavity portion shown in Fig. 9 (B), the absolute magnitude of the amount of height a of convex shaped part 5A reduces, and therefore can't damage the flatness of glass substrate G.
Thus, with film body 112, can improve the quality of the glass substrate G after the grinding according to the maintenance of second embodiment.
Need to prove, preferably make the formation direction of gap s identical as the pull-out direction of glass tape in the float glass process manufacturing installation of the plate glass of the former material of glass substrate G with manufacturing.That is, identical through the direction that makes the trace line that on the direction of the concavity groove that produces on the glass substrate G and the surface of pulling out because of glass tape, produces because of gap s at plate glass, can make the convex groove become not too showy, therefore preferred.
In addition, predetermined gap s is preferably set to 0.5mm ± 0.5mm.That is, the predetermined gap s that stipulates among the embodiment comprises 0mm, is preferably 0～1.0mm.When the gap is 0mm, can on the glass substrate G after the grinding, not produce the 4A of concavity portion, convex shaped part 5A due to the transfer printing, in addition, when the gap is 1.0mm, because of transfer printing is formed on convex shaped part 5A on the glass substrate G to the not influence of quality of glass substrate for display G.
The sectional view of the maintenance of the 3rd embodiment with film body 212 has been shown, to describing with film body 12 same similar member mark prosigns among Fig. 8 with maintenance shown in Figure 3.
Keep with in the film body 212, adsorb overlapping two double faced adhesive tape bonding die 34A, 34A, 34B, the 34B of being fitted with on the matrix 32 certainly in a slice.In addition; Directly stick on from the double faced adhesive tape bonding die 34A, the 34A that adsorb in the same one side on the matrix 32 and paste with the mode that separates predetermined gap s1, the double faced adhesive tape bonding die 34B, the 34B that stick in the last same one side of above-mentioned double faced adhesive tape bonding die 34A, 34A paste with the mode that separates predetermined gap s2 too.And; Gap s1, s2 between double faced adhesive tape bonding die 34A, 34A, 34B, 34B and each double faced adhesive tape bonding die 34A of fitting overlapping with two, 34A, 34B, the 34B do not overlap the mode of (that is, not overlapping on above-below direction staggering on the left and right directions among the figure) and fits on the stacked direction of double faced adhesive tape bonding die.
Need to prove; The maintenance of embodiment is with in the film body 212; Show the example of using 4 double faced adhesive tape bonding die 34A, 34A, 34B, 34B and these double faced adhesive tape bonding dies 34A, 34A, 34B, 34B being configured with two overlapping modes, but also can be to use the double faced adhesive tape bonding die more than 6 and use film body with the maintenance that mode overlapping more than 3 is configured.
According to the maintenance that constitutes in the above described manner with film body 212; Use 4 double faced adhesive tape bonding die 34A, 34A, 34B, 34B that a slice is glued on the backboard 36 from adsorbing matrix 32; At this moment; Double faced adhesive tape bonding die 34A, 34A, 34B, at least two overlapping applyings of 34B; And double faced adhesive tape bonding die 34A, 34A paste with the mode that separates predetermined gap s1, and the double faced adhesive tape bonding die 34B, the 34B that stick in the last same one side of above-mentioned double faced adhesive tape bonding die 34A, 34A stick on the backboard 36 with the mode that separates predetermined gap s2 too; And gap s1, s2 between and each double faced adhesive tape bonding die 34A of fitting overlapping with two, 34A, 34B, the 34B do not overlap the mode of (that is, not overlapping on above-below direction staggering on the left and right directions among the figure) and paste on the stacked direction of double faced adhesive tape bonding die.
For the glass substrate G for keeping with film body 212 after grinding by this maintenance; Though form two convex shaped part 5A, 5A (with reference to figure 6) in its surface owing under the state that gap s1, s2 are transferred, grind; But two gap s1, s2 do not overlap (promptly on the stacked direction of double faced adhesive tape bonding die; Do not overlap on above-below direction staggering on the left and right directions among the figure), therefore, can suppress the transfer printing amount due to gap s1, the s2.Promptly; In order to reinforce the distortion of adsorbing matrix 32 certainly due to the s1 of this gap; The double faced adhesive tape bonding die 34B that below the gap s1 of double faced adhesive tape bonding die 34A, 34A, disposes right side among the figure is to block gap s1; In addition, in order to reinforce the distortion of adsorbing matrix 32 certainly due to the s2 of this gap, the double faced adhesive tape bonding die 34A that above the gap s2 of double faced adhesive tape bonding die 34B, 34B, disposes left side among the figure is to block gap s2.
Therefore, with film body 212, can the height of the lip-deep convex shaped part 5A (with reference to figure 6) that be formed on glass substrate G be suppressed at reduced levels, therefore, can further improve the quality of the glass substrate G after the grinding according to the maintenance of embodiment.
Need to prove that preferred gap s1, s2 are identical with the gap s of Fig. 3.In addition, preferably make the formation direction of gap s1, s2 identical as the pull-out direction of glass tape in the float glass process manufacturing installation of the plate glass of the former material of glass substrate G with manufacturing.
Label declaration
1 from adsorbing matrix
2 double faced adhesive tape bonding dies
3 backboards
4 convex shaped parts
4A concavity portion
5 concavity portions
The 5A convex shaped part
10 lapping devices
12,112,212 keep using film body
14 grinding heads
16 flat boards
18 grinding pads
20 grinding tables
22 slurry supply holes
24 SSs
26 main shafts
28 rotating-/ lifting devices
30 control parts
32 from adsorbing matrix
34,34A, 34B double faced adhesive tape bonding die
36 backboards
38 base materials
40 adhesive
42 elastic sheet materials
44 combination members
The G glass substrate
Claims (7)
1. a glass substrate keeps use film body, constitute through sticking on the backboard from the absorption matrix by the double faced adhesive tape bonding die, and glass substrate absorption remain in said oneself adsorb on the matrix, wherein,
Said double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die that is configured in in the one side, and this multi-disc double faced adhesive tape bonding die sticks on said from adsorbing on matrix and the said backboard with the mode that adjacent double faced adhesive tape bonding die separates predetermined gap separately.
2. a glass substrate keeps use film body, constitute through sticking on the backboard from the absorption matrix by the double faced adhesive tape bonding die, and glass substrate absorption remain in said oneself adsorb on the matrix, wherein,
Said each self-containedly is arranged on the multi-disc in the one side saidly from adsorbing matrix and the said double faced adhesive tape bonding die of multi-disc from adsorbing matrix and said double faced adhesive tape bonding die, and this multi-disc is adsorbed matrix and multi-disc double faced adhesive tape bonding die certainly and adsorbed the mode that matrix and double faced adhesive tape bonding die separate predetermined gap separately certainly and stick on the said backboard with adjacent.
3. a glass substrate keeps use film body, constitute through sticking on the backboard from the absorption matrix by the double faced adhesive tape bonding die, and glass substrate absorption remain in said oneself adsorb on the matrix, wherein,
Said double faced adhesive tape bonding die comprises the multi-disc double faced adhesive tape bonding die that is configured in in the one side; And at least two overlapping applyings of double faced adhesive tape bonding die; Multi-disc double faced adhesive tape bonding die with in the one side is pasted with the mode that separates predetermined gap separately; And the predetermined gap between the double faced adhesive tape bonding die does not overlap on the stacked direction of double faced adhesive tape bonding die with predetermined gap between double faced adhesive tape bonding die adjacent on the stacked direction of double faced adhesive tape bonding die.
4. keep using film body like the described glass substrate of claim 1～3, wherein, said predetermined gap is 0.5mm ± 0.5mm.
5. keep using film body like each described glass substrate in the claim 1～4, wherein, said glass substrate is of a size of more than 3130mm * 2880mm.
6. glass substrate as claimed in claim 5 keeps using film body, and wherein, said maintenance is of a size of more than 3200mm * 3000mm with film body.
7. the Ginding process of a glass substrate; Wherein, Utilize in the claim 1～6 each described glass substrate to keep keeping glass substrate,, and glass substrate is ground to required flatness by abradant surface being pressed on the grinding pad of this glass substrate by abradant surface with film body absorption.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2010/055283 WO2011118010A1 (en) | 2010-03-25 | 2010-03-25 | Film for holding glass substrate and method for polishing glass substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102811837A true CN102811837A (en) | 2012-12-05 |
| CN102811837B CN102811837B (en) | 2015-12-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080065758.3A Active CN102811837B (en) | 2010-03-25 | 2010-03-25 | The Ginding process of glass substrate maintenance film body and glass substrate |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5529258B2 (en) |
| KR (1) | KR101598248B1 (en) |
| CN (1) | CN102811837B (en) |
| WO (1) | WO2011118010A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111318958A (en) * | 2018-12-17 | 2020-06-23 | Ａｇｃ株式会社 | Film body for holding glass substrate and method for polishing glass substrate |
| WO2021031379A1 (en) * | 2019-08-22 | 2021-02-25 | 武汉华星光电技术有限公司 | Backlight module, display device, and manufacturing method for backlight module |
| CN116393336A (en) * | 2023-06-09 | 2023-07-07 | 太原科技大学 | Clamp for spin coating of magnetostrictive material film substrate and using method thereof |
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- 2010-03-25 WO PCT/JP2010/055283 patent/WO2011118010A1/en active Application Filing
- 2010-03-25 KR KR1020127025047A patent/KR101598248B1/en active IP Right Grant
- 2010-03-25 CN CN201080065758.3A patent/CN102811837B/en active Active
- 2010-03-25 JP JP2012506727A patent/JP5529258B2/en active Active
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| WO2000017284A1 (en) * | 1998-09-17 | 2000-03-30 | Nitta Corporation | Workpiece retainer and method for attaching/detaching workpiece by using the same |
| CN1830076A (en) * | 2003-07-29 | 2006-09-06 | 东京毅力科创株式会社 | Laminating method and laminating device |
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| CN111318958A (en) * | 2018-12-17 | 2020-06-23 | Ａｇｃ株式会社 | Film body for holding glass substrate and method for polishing glass substrate |
| CN111318958B (en) * | 2018-12-17 | 2023-07-14 | Ａｇｃ株式会社 | Film for holding glass substrate and method for polishing glass substrate |
| WO2021031379A1 (en) * | 2019-08-22 | 2021-02-25 | 武汉华星光电技术有限公司 | Backlight module, display device, and manufacturing method for backlight module |
| CN116393336A (en) * | 2023-06-09 | 2023-07-07 | 太原科技大学 | Clamp for spin coating of magnetostrictive material film substrate and using method thereof |
| CN116393336B (en) * | 2023-06-09 | 2023-08-18 | 太原科技大学 | Clamp for spin coating of magnetostrictive material film substrate and using method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102811837B (en) | 2015-12-02 |
| JP5529258B2 (en) | 2014-06-25 |
| KR101598248B1 (en) | 2016-02-26 |
| JPWO2011118010A1 (en) | 2013-07-04 |
| KR20130033360A (en) | 2013-04-03 |
| WO2011118010A1 (en) | 2011-09-29 |
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