WO2011118010A1 - Film for holding glass substrate and method for polishing glass substrate - Google Patents

Film for holding glass substrate and method for polishing glass substrate Download PDF

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Publication number
WO2011118010A1
WO2011118010A1 PCT/JP2010/055283 JP2010055283W WO2011118010A1 WO 2011118010 A1 WO2011118010 A1 WO 2011118010A1 JP 2010055283 W JP2010055283 W JP 2010055283W WO 2011118010 A1 WO2011118010 A1 WO 2011118010A1
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WO
WIPO (PCT)
Prior art keywords
glass substrate
double
sided adhesive
self
sheet
Prior art date
Application number
PCT/JP2010/055283
Other languages
French (fr)
Japanese (ja)
Inventor
横田　稔
充 古田
孝 笹森
Original Assignee
旭硝子株式会社
富士紡ホールディングス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 旭硝子株式会社, 富士紡ホールディングス株式会社 filed Critical 旭硝子株式会社
Priority to CN201080065758.3A priority Critical patent/CN102811837B/en
Priority to JP2012506727A priority patent/JP5529258B2/en
Priority to PCT/JP2010/055283 priority patent/WO2011118010A1/en
Priority to KR1020127025047A priority patent/KR101598248B1/en
Publication of WO2011118010A1 publication Critical patent/WO2011118010A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
    • B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/05—Interconnection of layers the layers not being connected over the whole surface, e.g. discontinuous connection or patterned connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties

Definitions

  • the present invention relates to a glass substrate holding film body that holds a glass substrate when the glass substrate is processed, and a glass substrate polishing method.
  • a glass substrate used for a liquid crystal display causes fine irregularities and undulations on the surface to cause distortion of the image, and therefore the minute irregularities and undulations are removed by a polishing apparatus.
  • a polishing apparatus As such a polishing apparatus, the glass substrate held by the polishing head is pressed against the polishing pad attached to the polishing surface plate, and the glass substrate is polished by relatively rotating the polishing surface plate and the polishing head.
  • the present applicant discloses a polishing apparatus in Patent Document 1. Further, in the polishing apparatus of Patent Document 1, the glass substrate is attached to the polishing head by adsorbing and holding the glass substrate on a self-adsorption type holding film body attached to the polishing head.
  • This holding film body is configured by attaching a porous self-adsorptive sheet to a back plate via a double-sided adhesive sheet, and the glass substrate is adsorbed and held on the self-adsorptive sheet.
  • a polyurethane sheet as a soft plastic sheet formed of a polyurethane resin can be exemplified.
  • the polyurethane sheet of Patent Document 2 has a microporous layer formed on the surface layer, and a liquid such as water is included in the surface layer, so that the polishing pad is placed on the polishing platen by the surface tension of the liquid that has entered the microporous layer of the surface layer.
  • the glass substrate can be self-adsorbed and held by this polyurethane sheet, it is used as a self-adsorption type sheet.
  • FIG. 9A is a cross-sectional view in which the self-adsorption sheet 1 is attached to the back plate 3 via the two double-sided adhesive sheets 2 and 2 and the glass substrate G is adsorbed and held on the self-adsorption sheet 1. It is shown.
  • This portion becomes convex, and this is transferred as a convex portion 4 to the glass substrate G via the self-adsorptive sheet 1.
  • the polished glass substrate G has a concave portion 4A on the contrary, as shown in FIG.
  • FIG. 9A shows an upside-down view, and the glass substrate G is actually polished with the glass substrate G in the lower position.
  • This invention is made
  • the present invention is configured such that a self-adsorbing sheet is attached to a back plate via a double-sided adhesive sheet, and a glass substrate is adsorbed and held on the self-adsorbing sheet.
  • the double-sided adhesive sheet is composed of a plurality of double-sided adhesive sheets arranged in the same plane, and the double-sided adhesive sheets are adjacent to each other with a predetermined gap therebetween.
  • a self-adsorptive sheet and a glass substrate holding film attached to the back plate are provided.
  • a single self-adhesive sheet is bonded to a back plate using a plurality of double-sided adhesive sheets arranged in the same plane.
  • adjacent double-sided adhesive sheets are bonded to each other with a predetermined gap.
  • the glass substrate held and polished by such a holding film body is formed on the surface of the glass substrate, although convex portions are formed on the surface by transferring the gap and polishing. Since the absolute amount of the height of the convex portion is smaller than the depth of the conventional concave portion, the flatness of the glass substrate is not impaired. Thereby, according to the film
  • one self-adsorbing sheet described in the claims is of a size that can accommodate a large glass substrate.
  • one double-sided adhesive sheet of the plurality of double-sided adhesive sheets has a maximum dimension that can be produced by existing production equipment, or a dimension that is slightly smaller than that dimension.
  • the present invention is configured such that a self-adsorbing sheet is attached to a back plate via a double-sided adhesive sheet, and a glass substrate is adsorbed and held on the self-adsorbing sheet.
  • the self-adsorptive sheet and the double-sided adhesive sheet are each composed of a plurality of self-adsorptive sheets and the double-sided adhesive sheets arranged in the same plane, and the plurality of self-adsorptive sheets
  • the double-sided adhesive sheet provides a glass substrate holding film body in which the adjacent self-adsorptive sheet and double-sided adhesive sheet are each attached to the back plate with a predetermined gap.
  • a plurality of self-adsorptive sheets disposed in the same plane are attached to each of the plurality of self-adsorptive sheets and a double-sided adhesive sheet disposed in the same plane is used.
  • seat and double-sided adhesive sheet which adjoin each other are affixed on a backplate with a predetermined clearance gap, respectively.
  • the glass substrate held and polished by such a holding film body is formed on the surface of the glass substrate, although convex portions are formed on the surface by transferring the gap and polishing.
  • the flatness of the glass substrate is not impaired. Therefore, according to the film
  • the present invention is configured such that a self-adsorbing sheet is attached to a back plate via a double-sided adhesive sheet, and a glass substrate is adsorbed and held on the self-adsorbing sheet.
  • the double-sided adhesive sheet is composed of a plurality of double-sided adhesive sheets arranged in the same plane, and the double-sided adhesive sheets are adjacent to each other with a predetermined gap therebetween.
  • a self-adsorptive sheet and a glass substrate holding film attached to the back plate are provided.
  • a single self-adhesive sheet may be adhered to the back plate using a plurality of double-sided adhesive sheets arranged in the same plane. It may be stuck on a stack of sheets.
  • the plurality of double-sided adhesive sheets in the same plane are each attached with a predetermined gap, and the predetermined gap between the double-sided adhesive sheets in the same plane is adjacent to the lamination direction of the double-sided adhesive sheet. Affixed so as not to overlap a predetermined gap between the sheets in the laminating direction of the double-sided adhesive sheet.
  • the glass substrate held and polished by such a holding film body has a convex portion formed on the surface when the gap is transferred and polished, but is adjacent to the lamination direction of the double-sided adhesive sheet. Since the gap does not overlap in the stacking direction of the double-sided adhesive sheet (that is, does not overlap in the vertical direction but shifts in the horizontal direction in the drawing), the transfer amount due to the gap can be suppressed. Therefore, according to this invention, since the height of the convex part formed in the surface of a glass substrate can be restrained low, the quality of the glass substrate after grinding
  • the predetermined gap is preferably set to 0.5 mm ⁇ 0.5 mm. That is, the predetermined gap referred to in the present invention includes 0 mm and is preferably 0 to 1.0 mm. When the gap is 0 mm, there are no concave parts or convex parts due to the transfer to the glass substrate after polishing, and when the gap is 1.0 mm or less, the convex parts formed by the transfer to the glass substrate are formed.
  • the shape portion is preferable because it does not affect the quality of the glass substrate for display.
  • the size of the glass substrate is preferably 3130 (mm) ⁇ 2880 (mm) or more. That is, the holding film body of the present invention can hold a glass substrate having a size equal to or larger than a size called G10 size and polish the glass substrate.
  • the size of the holding film body is 3200 (mm) ⁇ 3000 (mm) or more.
  • the present invention achieves the object by adsorbing and holding a glass substrate by the glass substrate holding film body of the present invention, pressing the polished surface of the glass substrate against a polishing pad, and polishing the surface of the glass substrate.
  • a method for polishing a glass substrate is provided, wherein the glass substrate is polished to a required flatness.
  • polishing can be improved.
  • the two-sided adhesive sheets adjacent to each other on the same surface are attached to the back plate with a predetermined gap, thereby polishing the glass substrate after polishing. Can improve the quality.
  • FIG. 1 is a perspective view of a glass substrate polishing apparatus to which the glass substrate holding film body of the embodiment is applied.
  • FIG. 2 is an enlarged cross-sectional view showing the main structure of the polishing apparatus shown in FIG.
  • FIG. 3 is a perspective view of the holding film body according to the first embodiment.
  • 4 is a cross-sectional view of the holding film body shown in FIG.
  • FIG. 5 is a sectional view in which a glass substrate is adsorbed and held on the holding film body shown in FIG.
  • FIG. 6A is a cross-sectional view in which a self-adhesive sheet is attached to the back plate by two double-sided adhesive sheets attached with a gap
  • FIG. 6B is a convex shape formed on the surface of the glass substrate.
  • FIG. 7 is a cross-sectional view of the holding film body according to the second embodiment.
  • FIG. 8 is a cross-sectional view of the holding film body according to the third embodiment.
  • FIG. 9A is a cross-sectional view in which the ends of two double-sided adhesive sheets are overlapped and the self-adhesive sheet is attached to the back plate, and
  • FIG. 9B is a concave portion formed on the surface of the glass substrate. It is explanatory drawing of.
  • FIG. 1 is a perspective view of a glass substrate polishing apparatus 10 to which the glass substrate holding film body of the embodiment is applied.
  • FIG. 2 is an enlarged cross-sectional view showing the main structure of the polishing apparatus 10.
  • This polishing apparatus 10 is a flat mother board having a rectangular shape and a surface to be polished A having a side of 3130 mm ⁇ 2880 mm (G10 size or more, thickness 0.7 mm) G required for a glass substrate for liquid crystal display.
  • the polishing apparatus is configured to polish the glass substrate G at its lower surface via the holding film body 12 of the embodiment and the polishing pad 18 via the aluminum plate 16. And a polishing table 20 that holds the upper surface thereof.
  • a mother glass substrate (hereinafter referred to as a glass substrate) G is held by a holding film body 12 made of a self-adsorbing backing material or the like, and the surface to be polished A is pressed against the polishing pad 18 by the polishing head 14.
  • the holding film body 12 preferably has a size of 3200 (mm) ⁇ 3000 (mm) or more in order to suck and hold the large glass substrate G having the above size.
  • the detailed structure of the holding film body 12 will be described later.
  • a polishing slurry such as a cerium oxide aqueous solution is supplied from the lower surface side of the polishing pad 18 through a large number of slurry supply holes 22 formed in the polishing table 20 and the plate 16. Is done. As a result, the polishing pad 18 is immersed in the polishing slurry, and the glass substrate G is polished in this state.
  • the slurry supply holes 22, 22... Are formed densely and uniformly in the polishing table 20 and the plate 16, so that the polishing slurry is supplied uniformly to the polishing pad 18.
  • a foamed polyurethane type or a suede type is used and is adhered to the plate 16.
  • the number of the polishing pad 18 may be one, but since the size thereof is large corresponding to the size of the glass substrate G, a single polishing pad 18 can be formed by combining a plurality of divided pads. Further, a large number of suction holes 24, 24... Are formed through the polishing table 20, and these suction holes 24, 24... Are connected to a suction pump (not shown) via a valve. Therefore, by opening the valve, the suction force of the suction pump is transmitted to the suction holes 24, 24..., So that the plate 16 is adsorbed and held on the upper surface of the polishing table 20. Further, since the suction force of the suction pump is released by closing the valve, the polishing pad 18 can be removed from the polishing table 20 together with the plate 16 when the polishing pad 18 is maintained or replaced.
  • a spindle 26 is fixed to the upper center of the polishing head 14, and a rotation / lifting device 28 is connected to the spindle 26.
  • the rotation / lifting device 28 is controlled to a rotation number and a lowering operation (pressing force) suitable for polishing the glass substrate G by a control unit 30 that performs overall control of the polishing device 10.
  • FIG. 3 is a perspective view of the holding film body 12 according to the first embodiment
  • FIG. 4 is a cross-sectional view of the holding film body 12.
  • FIG. 5 shows a cross-sectional view in which the glass substrate G is sucked and held on the holding film body 12.
  • the holding film body 12 in FIG. 3 is shown upside down.
  • the holding film body 12 is attached to an aluminum back plate 36 via two double-sided adhesive sheets 34 and 34 in which one self-adsorbing sheet 32 is arranged in the same plane.
  • the glass substrate G is adsorbed and held on the self-adsorption type sheet 32 as shown in FIG. 3 to 5 exemplify the holding film body 12 in which one self-adsorbing sheet 32 is bonded to the back plate 36 using two double-sided adhesive sheets 34, 34.
  • the self-adsorptive sheet 32 may be the holding film body 12 bonded to the back plate 36 using three or more double-sided adhesive sheets 34, 34... Arranged in the same plane.
  • the self-adsorbing sheet 32 is a polyurethane sheet formed of a polyurethane resin as disclosed in Patent Document 2 and has a thickness of about 0.8 mm.
  • a microporous layer is formed on the surface layer, and when the surface layer contains a liquid such as water, the glass substrate G can be adsorbed and held by the surface tension of the liquid that has entered the microporous layer of the surface layer. it can.
  • the double-sided adhesive sheet 34 is formed by applying adhesives 40 and 40 to both sides of a base material 38 such as polyethylene terephthalate (PET), and the thickness thereof is about 0.2 mm.
  • PET polyethylene terephthalate
  • two double-sided adhesive sheets 34, 34 arranged in the same plane are used for one self-adsorbing sheet 32, and two double-sided adhesive sheets 34 are used. , 34 are affixed to the self-adsorptive sheet 32 and the back plate 36 with a predetermined gap s.
  • the two self-adhesive sheets 32 are bonded to the back plate 36 using the two double-sided adhesive sheets 34, 34.
  • the sheets 34 and 34 are attached to the self-adsorptive sheet 32 and the back plate 36 with a predetermined gap s.
  • the glass substrate G held and polished by the holding film body 12 has a portion 32a of the self-adsorptive sheet 32 positioned in the gap s as shown in FIG. Therefore, the concave portion 32b is formed on the suction surface of the self-adsorptive sheet 32 corresponding to the gap s. Therefore, a part G1 of the glass substrate G adsorbed and held in the concave portion 32b is deformed in a convex shape, and this is transferred to the polished surface of the glass substrate G as the concave portion 5. When the glass substrate G is polished in a state where the concave portion 5 is transferred, the concave portion 5 is not polished.
  • the polished glass substrate G has a portion where the concave portion 5 is formed as shown in FIG. On the contrary, it appears as a convex portion 5A.
  • the height amount a of the convex portion 5A formed on the surface of the glass substrate G is smaller than the depth amount b of the conventional concave portion 4A shown in FIG. This does not impair the flatness of the substrate G.
  • the quality of the polished glass substrate G can be improved.
  • a donut-shaped elastic sheet material 42 is attached to the back plate 36 of the holding film body 12, and a plurality of engaging members 44, 44. It is fixed.
  • the holding film body 12 is attached to the polishing head 14 by stretching an elastic sheet material 42 and engaging these engaging members 44, 44... With a hook portion (not shown) of the polishing head 14 of FIG. Is done.
  • FIG. 7 shows a cross-sectional view of the holding film body 112 of the second embodiment, and members similar to those of the holding film body 12 shown in FIG. explain.
  • the holding film body 112 includes two self-adsorptive sheets 32A, 32A and two self-adsorptive sheets 32A, 32A and two self-adsorptive sheets 32A, 32A.
  • Double-sided adhesive sheets 34, 34 are attached to the back plate 36 with a predetermined gap s.
  • 7 illustrates the holding film body 112 in which the two self-adsorptive sheets 32A and 32A and the double-sided adhesive sheets 34 and 34 are bonded to the back plate 36, respectively.
  • the holding film body 112 in which the mold sheets 32A, 32A... And the double-sided adhesive sheets 34, 34.
  • the two self-adsorbing sheets 32A and 32A are bonded to the two self-adsorbing sheets 32A and 32A.
  • the self-adsorptive sheets 32A and 32A and the double-sided adhesive sheets 34 and 34 are attached to the back plate 36 with a predetermined gap s.
  • the glass substrate G held and polished by the holding film body 112 is polished with the gap s transferred and polished.
  • the convex portion 5A is formed on the surface, the absolute amount of the height amount a of the convex portion 5A is smaller than the depth amount b of the concave portion 4A shown in FIG. 9B. The flatness of the glass substrate G is not impaired.
  • the quality of the polished glass substrate G can be improved.
  • the forming direction of the gap s is the same as the drawing direction of the glass ribbon by the float manufacturing apparatus that manufactures the glass sheet that is the base of the glass substrate G. That is, it is preferable that the direction of the concave groove generated in the glass substrate G by the gap s is the same as the direction of the streaks generated on the surface of the plate glass generated by pulling out the glass ribbon, since the convex groove becomes inconspicuous.
  • the predetermined gap s is preferably set to 0.5 mm ⁇ 0.5 mm. That is, the predetermined gap s defined in the embodiment includes 0 mm and is preferably 0 to 1.0 mm.
  • the concave portion 4A and the convex portion 5A are not generated by the transfer on the polished glass substrate G, and when the gap is 1.0 mm or less, the glass substrate G is formed by transfer.
  • the convex portion 5A does not affect the quality of the display glass substrate G.
  • FIG. 8 shows a cross-sectional view of the holding film body 212 of the third embodiment, and members similar to those of the holding film body 12 shown in FIG. explain.
  • the holding film body 212 has a double-sided adhesive sheet 34 ⁇ / b> A, 34 ⁇ / b> A, 34 ⁇ / b> B, 34 ⁇ / b> B attached to one self-adsorptive sheet 32.
  • the double-sided adhesive sheets 34A and 34A in the same plane that are directly attached to the self-adsorption type sheet 32 are attached with a predetermined gap s1, and the same-side adhesives that are attached to these double-sided adhesive sheets 34A and 34A.
  • the double-sided adhesive sheets 34B and 34B are attached with a predetermined gap s2.
  • Double-sided adhesive sheets 34A, 34A, 34B, and 34B are attached so as to shift in the left-right direction.
  • the holding film body 212 of the embodiment four double-sided adhesive sheets 34A, 34A, 34B, and 34B are used, and these double-sided adhesive sheets 34A, 34A, 34B, and 34B are arranged in two layers.
  • it may be a holding film body in which three or more double-sided adhesive sheets are used and arranged in three or more layers.
  • the four self-adhesive sheets 32 are adhered to the back plate 36 using the four double-sided adhesive sheets 34A, 34A, 34B, 34B.
  • the double-sided adhesive sheets 34A, 34A, 34B, 34B are attached in a stack of two sheets, and the double-sided adhesive sheets 34A, 34A are attached with a predetermined gap s1, and are attached to these double-sided adhesive sheets 34A, 34A.
  • the attached double-sided adhesive sheets 34B and 34B in the same plane are similarly attached to the back plate 36 with a predetermined gap s2, and the double-sided adhesive sheets 34A, 34A, 34B and 34B attached in two layers are also attached.
  • the gaps s1 and s2 between them do not overlap in the laminating direction of the double-sided adhesive sheet (that is, they do not overlap in the vertical direction on the drawing and left Affixed to the displaced) so that the direction.
  • the glass substrate G held and polished by such a holding film body 212 is polished with the gaps s1 and s2 transferred, so that two convex portions 5A and 5A are formed on the surface (see FIG. 6).
  • the two gaps s1 and s2 do not overlap in the laminating direction of the double-sided adhesive sheet (that is, they do not overlap in the vertical direction but are shifted in the left-right direction on the drawing).
  • the amount can be reduced. That is, below the gap s1 between the double-sided adhesive sheets 34A and 34A, the double-sided adhesive sheet 34B on the right side in the drawing is arranged to close the gap s1 in order to reinforce the deformation of the self-adsorptive sheet 32 due to the gap s1.
  • the double-sided adhesive sheet 34A on the left side in the drawing closes the gap s2 in order to reinforce the deformation of the self-adsorptive sheet 32 due to the gap s2. It is because it is arranged like this.
  • the height of the convex portion 5A (see FIG. 6) formed on the surface of the glass substrate G can be kept low.
  • the quality of the product is further improved.
  • the gaps s1 and s2 are preferably the same as the gap s in FIG.
  • the formation direction of the gaps s1 and s2 is preferably the same as the drawing direction of the glass ribbon by the float manufacturing apparatus that manufactures the glass sheet that is the base of the glass substrate G.

Abstract

Disclosed is a film for holding a glass substrate, wherein a self-sucking sheet is attached, via a double-coated adhesive sheet, to a back plate, and the glass substrate is sucked and held by the self-sucking sheet, characterized in that the double-coated adhesive sheet comprises multiple double-coated adhesive sheet pieces that are located in a single plane and these double-coated adhesive sheet pieces are attached, at definite intervals between adjacent pieces, to the self-sucking sheet and the back plate.

Description

ガラス基板の保持用膜体、及びガラス基板の研磨方法Film body for holding glass substrate and method for polishing glass substrate
　本発明は、ガラス基板を加工する際に、ガラス基板を保持するガラス基板の保持用膜体、及びガラス基板の研磨方法に関する。 The present invention relates to a glass substrate holding film body that holds a glass substrate when the glass substrate is processed, and a glass substrate polishing method.
　液晶ディスプレイ用に適用されるガラス基板は、その表面の微小な凹凸やうねりが画像に歪みを与える原因となるために、その微小な凹凸やうねりが研磨装置によって除去される。このような研磨装置として、研磨定盤に貼り付けられた研磨パッドに、研磨ヘッドに保持されたガラス基板を押し当てるとともに、研磨定盤及び研磨ヘッドを相対的に回転させてガラス基板を研磨する研磨装置を、本願出願人が特許文献１において開示している。
　また、特許文献１の研磨装置では、研磨ヘッドに取り付けられる自己吸着型の保持用膜体にガラス基板を吸着保持させることにより、ガラス基板を研磨ヘッドに取り付けるようにしている。 A glass substrate used for a liquid crystal display causes fine irregularities and undulations on the surface to cause distortion of the image, and therefore the minute irregularities and undulations are removed by a polishing apparatus. As such a polishing apparatus, the glass substrate held by the polishing head is pressed against the polishing pad attached to the polishing surface plate, and the glass substrate is polished by relatively rotating the polishing surface plate and the polishing head. The present applicant discloses a polishing apparatus in Patent Document 1.
Further, in the polishing apparatus of Patent Document 1, the glass substrate is attached to the polishing head by adsorbing and holding the glass substrate on a self-adsorption type holding film body attached to the polishing head.
　ところで、最近では、液晶ディスプレイ用のガラス基板の大型化に伴い、このガラス基板を研磨ヘッドに吸着保持させるための保持用膜体のサイズも大型化している。この保持用膜体は、多孔質性の自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられることにより構成され、この自己吸着型シートにガラス基板が吸着保持される。 By the way, recently, as the glass substrate for the liquid crystal display is increased in size, the size of the holding film body for attracting and holding the glass substrate to the polishing head is also increased. This holding film body is configured by attaching a porous self-adsorptive sheet to a back plate via a double-sided adhesive sheet, and the glass substrate is adsorbed and held on the self-adsorptive sheet.
　しかしながら、特にＧ１０と称されるサイズ（３１３０ｍｍ×２８８０ｍｍ）のマザーガラス基板を研磨加工する場合、そのサイズのガラス基板を保持する保持用膜体の製造において、自己吸着型シートやバックプレートは、それに対応したサイズの製品を既存の製造設備で製造することができるが、自己吸着型シートをバックプレートに接着する両面接着シートは、既存の製造設備では製造することができず、製造する場合には新規設備投資が必要となり、製造コストが増大してしまうという問題があった。 However, especially when polishing a mother glass substrate of a size called G10 (3130 mm × 2880 mm), in the production of a holding film body that holds the glass substrate of that size, Products of the corresponding size can be manufactured with existing manufacturing equipment, but double-sided adhesive sheets that adhere self-adsorbing sheets to the back plate cannot be manufactured with existing manufacturing equipment. There was a problem that new equipment investment was required and the manufacturing cost increased.
　そこで、従来では、既存のサイズの両面接着シートを少なくとも２枚使用して、自己吸着型シートをバックプレートに接着保持していた。 Therefore, conventionally, at least two double-sided adhesive sheets of an existing size are used, and the self-adhesive sheet is adhered and held on the back plate.
　自己吸着型シートとしては特許文献２において示されるように、ポリウレタン樹脂で形成された軟質プラスチックシートとしてのポリウレタンシートを例示できる。特許文献２のポリウレタンシートは、その表面層に微多孔が形成され、表面層に水等の液体を含ませることで、表面層の微多孔に浸入した液体の表面張力により研磨定盤に研磨パッドを接着するものであるが、このポリウレタンシートによってガラス基板を自己吸着保持することもできるため、自己吸着型シートとして使用されている。 As the self-adsorbing sheet, as shown in Patent Document 2, a polyurethane sheet as a soft plastic sheet formed of a polyurethane resin can be exemplified. The polyurethane sheet of Patent Document 2 has a microporous layer formed on the surface layer, and a liquid such as water is included in the surface layer, so that the polishing pad is placed on the polishing platen by the surface tension of the liquid that has entered the microporous layer of the surface layer. Although the glass substrate can be self-adsorbed and held by this polyurethane sheet, it is used as a self-adsorption type sheet.
日本国特開２００４－１２２３５１号公報Japanese Unexamined Patent Publication No. 2004-122351 日本国特開２００７－７８２４号公報Japanese Unexamined Patent Publication No. 2007-7824
　しかしながら、複数枚の両面接着シートを使用する従来の保持用膜体においては、隣接する両面接着シートの端部を隙間無く貼り付けることは難しい。 However, in the conventional holding film body using a plurality of double-sided adhesive sheets, it is difficult to attach the end portions of adjacent double-sided adhesive sheets without any gaps.
　図９（Ａ）は、自己吸着型シート１が２枚の両面接着シート２、２を介してバックプレート３に貼着され、自己吸着型シート１にガラス基板Ｇが吸着保持された断面図が示されている。隣接する両面接着シート２、２の端部同士を隙間無く貼り付けるために、図９（Ａ）に示すように両面接着シート２、２の端部同士を若干量重なるように接着すると、その重なった部分が凸状となり、これが自己吸着型シート１を介してガラス基板Ｇに凸状部４となって転写される。凸状部４が転写された状態でガラス基板Ｇを研磨すると、研磨後のガラス基板Ｇは、この凸状部４となった部分が図９（Ｂ）に示すように逆に凹状部４Ａとなって現れるので、加工表面の平坦性が損なわれ、ガラス基板Ｇの品質が低下するという問題があった。なお、図９（Ａ）では、天地逆さまの図が示されており、実際にはガラス基板Ｇが下方位置にある状態で研磨される。 FIG. 9A is a cross-sectional view in which the self-adsorption sheet 1 is attached to the back plate 3 via the two double-sided adhesive sheets 2 and 2 and the glass substrate G is adsorbed and held on the self-adsorption sheet 1. It is shown. In order to affix the end portions of the adjacent double-sided adhesive sheets 2 and 2 without any gaps, as shown in FIG. This portion becomes convex, and this is transferred as a convex portion 4 to the glass substrate G via the self-adsorptive sheet 1. When the glass substrate G is polished in a state in which the convex portion 4 is transferred, the polished glass substrate G has a concave portion 4A on the contrary, as shown in FIG. As a result, the flatness of the processed surface is impaired and the quality of the glass substrate G is degraded. FIG. 9A shows an upside-down view, and the glass substrate G is actually polished with the glass substrate G in the lower position.
　本発明は、このような事情に鑑みてなされたものであり、研磨後のガラス基板の品質を向上させることができるガラス基板の保持用膜体、及びガラス基板の研磨方法を提供することを目的とする。 This invention is made | formed in view of such a situation, and it aims at providing the film body for glass substrate holding | maintenance which can improve the quality of the glass substrate after grinding | polishing, and the grinding | polishing method of a glass substrate. And
　本発明は、前記目的を達成するために、自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、前記両面接着シートが、同一面内に配置された複数枚の両面接着シートからなり、該複数枚の両面接着シートは、隣接する両面接着シートがそれぞれ所定の隙間をもって前記自己吸着型シート及び前記バックプレートに貼り付けられているガラス基板の保持用膜体を提供する。 In order to achieve the above object, the present invention is configured such that a self-adsorbing sheet is attached to a back plate via a double-sided adhesive sheet, and a glass substrate is adsorbed and held on the self-adsorbing sheet. In the holding film body, the double-sided adhesive sheet is composed of a plurality of double-sided adhesive sheets arranged in the same plane, and the double-sided adhesive sheets are adjacent to each other with a predetermined gap therebetween. A self-adsorptive sheet and a glass substrate holding film attached to the back plate are provided.
　本発明によれば、同一面内に配された複数枚の両面接着シートを使用して１枚の自己吸着型シートをバックプレートに接着させるが、このとき、隣接する両面接着シートを所定の隙間をもって自己吸着型シート及びバックプレートに貼り付ける。このような保持用膜体によって保持されて研磨されたガラス基板は、前記隙間が転写されて研磨されることで、その表面に凸状部が形成されるものの、ガラス基板の表面に形成される凸状部の高さ量は、従来の凹状部の深さ量と比較してその絶対量が小さくなるので、ガラス基板の平坦性を損なわせるものではない。これにより、本発明の保持用膜体によれば、研磨後のガラス基板の品質を向上させることができる。 According to the present invention, a single self-adhesive sheet is bonded to a back plate using a plurality of double-sided adhesive sheets arranged in the same plane. At this time, adjacent double-sided adhesive sheets are bonded to each other with a predetermined gap. Stick to the self-adsorption sheet and back plate. The glass substrate held and polished by such a holding film body is formed on the surface of the glass substrate, although convex portions are formed on the surface by transferring the gap and polishing. Since the absolute amount of the height of the convex portion is smaller than the depth of the conventional concave portion, the flatness of the glass substrate is not impaired. Thereby, according to the film | membrane body for holding | maintenance of this invention, the quality of the glass substrate after grinding | polishing can be improved.
　本発明は、大型のガラス基板を吸着保持する保持用膜体を対象としているため、請求項で述べる１枚の自己吸着型シートとは、大型のガラス基板に対応し得る寸法のものである。また、複数枚の両面接着シートの１枚の両面接着シートは、既存の製造設備で製造することができる最大寸法、又はその寸法よりも若干小さい寸法のものである。 Since the present invention is intended for a holding film body for adsorbing and holding a large glass substrate, one self-adsorbing sheet described in the claims is of a size that can accommodate a large glass substrate. In addition, one double-sided adhesive sheet of the plurality of double-sided adhesive sheets has a maximum dimension that can be produced by existing production equipment, or a dimension that is slightly smaller than that dimension.
　本発明は、前記目的を達成するために、自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、前記自己吸着シート及び前記両面接着シートが、各々同一面内に配置された複数枚の前記自己吸着型シート及び前記両面接着シートからなり、該複数枚の自己吸着型シート及び両面接着シートは、隣接する自己吸着型シート及び両面接着シートがそれぞれ所定の隙間をもって前記バックプレートに貼り付けられているガラス基板の保持用膜体を提供する。 In order to achieve the above object, the present invention is configured such that a self-adsorbing sheet is attached to a back plate via a double-sided adhesive sheet, and a glass substrate is adsorbed and held on the self-adsorbing sheet. The self-adsorptive sheet and the double-sided adhesive sheet are each composed of a plurality of self-adsorptive sheets and the double-sided adhesive sheets arranged in the same plane, and the plurality of self-adsorptive sheets The double-sided adhesive sheet provides a glass substrate holding film body in which the adjacent self-adsorptive sheet and double-sided adhesive sheet are each attached to the back plate with a predetermined gap.
　本発明によれば、同一面内に配される複数枚の自己吸着型シートを、複数枚の自己吸着型シート毎に貼着されるとともに同一面内に配される両面接着シートを使用してバックプレートに接着させてもよく、このとき、隣接する自己吸着型シート及び両面接着シートをそれぞれ所定の隙間をもってバックプレートに貼り付ける。このような保持用膜体によって保持されて研磨されたガラス基板は、前記隙間が転写されて研磨されることで、その表面に凸状部が形成されるものの、ガラス基板の表面に形成される凸状部の高さ量は、従来の凹状部の深さ量と比較してその絶対量が小さくなるので、ガラス基板の平坦性を損なわせるものではない。これにより、本発明の保持用膜体によれば、研磨後のガラス基板の品質を向上させることができる。 According to the present invention, a plurality of self-adsorptive sheets disposed in the same plane are attached to each of the plurality of self-adsorptive sheets and a double-sided adhesive sheet disposed in the same plane is used. You may make it adhere | attach on a backplate, At this time, the self-adsorption type sheet | seat and double-sided adhesive sheet which adjoin each other are affixed on a backplate with a predetermined clearance gap, respectively. The glass substrate held and polished by such a holding film body is formed on the surface of the glass substrate, although convex portions are formed on the surface by transferring the gap and polishing. Since the absolute amount of the height of the convex portion is smaller than the depth of the conventional concave portion, the flatness of the glass substrate is not impaired. Thereby, according to the film | membrane body for holding | maintenance of this invention, the quality of the glass substrate after grinding | polishing can be improved.
　本発明は、前記目的を達成するために、自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、前記両面接着シートが、同一面内に配置された複数枚の両面接着シートからなり、該複数枚の両面接着シートは、隣接する両面接着シートがそれぞれ所定の隙間をもって前記自己吸着型シート及び前記バックプレートに貼り付けられているガラス基板の保持用膜体を提供する。 In order to achieve the above object, the present invention is configured such that a self-adsorbing sheet is attached to a back plate via a double-sided adhesive sheet, and a glass substrate is adsorbed and held on the self-adsorbing sheet. In the holding film body, the double-sided adhesive sheet is composed of a plurality of double-sided adhesive sheets arranged in the same plane, and the double-sided adhesive sheets are adjacent to each other with a predetermined gap therebetween. A self-adsorptive sheet and a glass substrate holding film attached to the back plate are provided.
　本発明によれば、同一面内に配される複数枚の両面接着シートを使用して１枚の自己吸着型シートをバックプレートに接着させてもよいが、このとき、両面接着シートは少なくとも２枚重ねに貼着されてもよい。そして、同一面内の複数枚の両面接着シートは、それぞれ所定の隙間をもって貼り付けられるとともに、同一平面内の両面接着シートの間の所定の隙間が、両面接着シートの積層方向に隣接する両面接着シートの間の所定の隙間と、両面接着シートの積層方向において重ならないように貼り付けられる。 According to the present invention, a single self-adhesive sheet may be adhered to the back plate using a plurality of double-sided adhesive sheets arranged in the same plane. It may be stuck on a stack of sheets. The plurality of double-sided adhesive sheets in the same plane are each attached with a predetermined gap, and the predetermined gap between the double-sided adhesive sheets in the same plane is adjacent to the lamination direction of the double-sided adhesive sheet. Affixed so as not to overlap a predetermined gap between the sheets in the laminating direction of the double-sided adhesive sheet.
　このような保持用膜体によって保持されて研磨されたガラス基板は、前記隙間が転写されて研磨されることで、その表面に凸状部が形成されるが、両面接着シートの積層方向に隣接する前記隙間は、両面接着シートの積層方向に重ならない（すなわち、図面上において上下方向に重ならず左右方向にずれている）ため、隙間による転写量を抑えることができる。よって、本発明によれば、ガラス基板の表面に形成される凸状部の高さを低く抑えることができるので、研磨後のガラス基板の品質がより一層向上する。 The glass substrate held and polished by such a holding film body has a convex portion formed on the surface when the gap is transferred and polished, but is adjacent to the lamination direction of the double-sided adhesive sheet. Since the gap does not overlap in the stacking direction of the double-sided adhesive sheet (that is, does not overlap in the vertical direction but shifts in the horizontal direction in the drawing), the transfer amount due to the gap can be suppressed. Therefore, according to this invention, since the height of the convex part formed in the surface of a glass substrate can be restrained low, the quality of the glass substrate after grinding | polishing improves further.
　本発明によれば、前記所定の隙間は、０．５ｍｍ±０．５ｍｍに設定されることが好ましい。すなわち、本発明で言う所定の隙間は０ｍｍを含み、０～１．０ｍｍが好ましい。隙間が０ｍｍの場合には、研磨後のガラス基板への転写による凹状部、凸状部が発生せず、また、隙間が１．０ｍｍ以下であれば、ガラス基板への転写によって形成された凸状部は、ディスプレイ用ガラス基板の品質に影響を与えないので好ましい。 According to the present invention, the predetermined gap is preferably set to 0.5 mm ± 0.5 mm. That is, the predetermined gap referred to in the present invention includes 0 mm and is preferably 0 to 1.0 mm. When the gap is 0 mm, there are no concave parts or convex parts due to the transfer to the glass substrate after polishing, and when the gap is 1.0 mm or less, the convex parts formed by the transfer to the glass substrate are formed. The shape portion is preferable because it does not affect the quality of the glass substrate for display.
　また、本発明によれば、前記ガラス基板のサイズは、３１３０（ｍｍ）×２８８０（ｍｍ）以上であることが好ましい。すなわち、本発明の保持用膜体は、Ｇ１０サイズと称されるサイズ以上のサイズのガラス基板を保持し、そのガラス基板を研磨することができる。 Moreover, according to the present invention, the size of the glass substrate is preferably 3130 (mm) × 2880 (mm) or more. That is, the holding film body of the present invention can hold a glass substrate having a size equal to or larger than a size called G10 size and polish the glass substrate.
　また、本発明によれば、前記保持用膜体のサイズは、３２００（ｍｍ）×３０００（ｍｍ）以上であることが好ましい。上述したＧ１０サイズ以上のガラス基板を保持するには、３２００（ｍｍ）×３０００（ｍｍ）以上のサイズを有する保持用膜体を使用することが好ましい。 Moreover, according to the present invention, it is preferable that the size of the holding film body is 3200 (mm) × 3000 (mm) or more. In order to hold the glass substrate of G10 size or more, it is preferable to use a holding film body having a size of 3200 (mm) × 3000 (mm) or more.
　本発明は、前記目的を達成するために、本発明のガラス基板の保持用膜体によってガラス基板を吸着保持し、該ガラス基板の被研磨面を研磨パッドに押し付けて、ガラス基板の被研磨面を必要な平坦度に研磨することを特徴とするガラス基板の研磨方法を提供する。 In order to achieve the above object, the present invention achieves the object by adsorbing and holding a glass substrate by the glass substrate holding film body of the present invention, pressing the polished surface of the glass substrate against a polishing pad, and polishing the surface of the glass substrate. A method for polishing a glass substrate is provided, wherein the glass substrate is polished to a required flatness.
　これにより、本発明によれば、研磨後のガラス基板の品質を向上させることができる。 Thereby, according to this invention, the quality of the glass substrate after grinding | polishing can be improved.
　以上説明したように本発明によれば、同一面内に配された複数枚の両面接着シートの隣接する両面接着シートを、それぞれ所定の隙間をもってバックプレートに貼り付けることで、研磨後のガラス基板の品質を向上させることができる。 As described above, according to the present invention, the two-sided adhesive sheets adjacent to each other on the same surface are attached to the back plate with a predetermined gap, thereby polishing the glass substrate after polishing. Can improve the quality.
図１は実施の形態のガラス基板の保持用膜体が適用されたガラス基板の研磨装置の斜視図である。FIG. 1 is a perspective view of a glass substrate polishing apparatus to which the glass substrate holding film body of the embodiment is applied. 図２は図１に示した研磨装置の要部構造を示す拡大断面図である。FIG. 2 is an enlarged cross-sectional view showing the main structure of the polishing apparatus shown in FIG. 図３は第１の実施の形態の保持用膜体の斜視図である。FIG. 3 is a perspective view of the holding film body according to the first embodiment. 図４は図３に示した保持用膜体の断面図である。4 is a cross-sectional view of the holding film body shown in FIG. 図５は図３に示した保持用膜体にガラス基板が吸着保持された断面図である。FIG. 5 is a sectional view in which a glass substrate is adsorbed and held on the holding film body shown in FIG. 図６（Ａ）は隙間をもって貼着した２枚の両面接着シートによって自己吸着型シートをバックプレートに貼着した断面図であり、図６（Ｂ）はガラス基板の表面に形成された凸状部の説明図である。FIG. 6A is a cross-sectional view in which a self-adhesive sheet is attached to the back plate by two double-sided adhesive sheets attached with a gap, and FIG. 6B is a convex shape formed on the surface of the glass substrate. It is explanatory drawing of a part. 図７は第２の実施の形態の保持用膜体の断面図である。FIG. 7 is a cross-sectional view of the holding film body according to the second embodiment. 図８は第３の実施の形態の保持用膜体の断面図である。FIG. 8 is a cross-sectional view of the holding film body according to the third embodiment. 図９（Ａ）は２枚の両面接着シートの端部を重ねて自己吸着型シートをバックプレートに貼着した断面図であり、図９（Ｂ）はガラス基板の表面に形成された凹状部の説明図である。FIG. 9A is a cross-sectional view in which the ends of two double-sided adhesive sheets are overlapped and the self-adhesive sheet is attached to the back plate, and FIG. 9B is a concave portion formed on the surface of the glass substrate. It is explanatory drawing of.
　以下、添付図面に従って本発明に係るガラス基板の保持用膜体、及びガラス基板の研磨方法の好ましい実施の形態について説明する。 Hereinafter, preferred embodiments of a glass substrate holding film body and a glass substrate polishing method according to the present invention will be described with reference to the accompanying drawings.
　図１は、実施の形態のガラス基板の保持用膜体が適用されるガラス基板の研磨装置１０の斜視図が示されている。また、図２には、研磨装置１０の要部構造を示す拡大断面図が示されている。 FIG. 1 is a perspective view of a glass substrate polishing apparatus 10 to which the glass substrate holding film body of the embodiment is applied. FIG. 2 is an enlarged cross-sectional view showing the main structure of the polishing apparatus 10.
　この研磨装置１０は、矩形状に製造されたマザーガラス基板（例えば、一辺が３１３０ｍｍ×２８８０ｍｍ（Ｇ１０サイズ）以上、厚み０．７ｍｍ）Ｇの被研磨面Ａを液晶ディスプレイ用ガラス基板に必要な平坦度に研磨する研磨装置であり、その構成は、ガラス基板Ｇを実施の形態の保持用膜体１２を介してその下面で保持する研磨ヘッド１４と、アルミニウム製のプレート１６を介して研磨パッド１８をその上面で保持する研磨テーブル２０とから構成されている。マザーガラス基板（以下、ガラス基板と称する）Ｇは、自己吸着作用のあるバッキング材等からなる保持用膜体１２に保持されるとともに、研磨ヘッド１４によって被研磨面Ａが研磨パッド１８に押し付けられることにより、被研磨面Ａが必要な平坦度に研磨される。保持用膜体１２は、上記サイズの大型のガラス基板Ｇを吸着保持するために、３２００（ｍｍ）×３０００（ｍｍ）以上のサイズを有することが好ましい。なお、保持用膜体１２の詳細構造については後述する。 This polishing apparatus 10 is a flat mother board having a rectangular shape and a surface to be polished A having a side of 3130 mm × 2880 mm (G10 size or more, thickness 0.7 mm) G required for a glass substrate for liquid crystal display. The polishing apparatus is configured to polish the glass substrate G at its lower surface via the holding film body 12 of the embodiment and the polishing pad 18 via the aluminum plate 16. And a polishing table 20 that holds the upper surface thereof. A mother glass substrate (hereinafter referred to as a glass substrate) G is held by a holding film body 12 made of a self-adsorbing backing material or the like, and the surface to be polished A is pressed against the polishing pad 18 by the polishing head 14. As a result, the surface A to be polished is polished to the required flatness. The holding film body 12 preferably has a size of 3200 (mm) × 3000 (mm) or more in order to suck and hold the large glass substrate G having the above size. The detailed structure of the holding film body 12 will be described later.
　研磨中においては図２に示すように、研磨テーブル２０とプレート１６とに貫通形成された多数のスラリ供給孔２２、２２…から、酸化セリウム水溶液等の研磨スラリが研磨パッド１８の下面側から供給される。これにより、研磨パッド１８が研磨スラリによって浸された状態となり、この状態でガラス基板Ｇが研磨される。スラリ供給孔２２、２２…は、研磨テーブル２０とプレート１６において密にかつ均一に形成されているため、研磨パッド１８に研磨スラリが均一に供給される。なお、研磨パッド１８としては、例えば発泡ポリウレタンタイプやスウェードタイプのものが使用され、プレート１６に貼着されている。また、研磨パッド１８は１枚ものでもよいが、ガラス基板Ｇのサイズに対応してそのサイズも大きいことから、複数枚の分割パッドを組み合わせて１枚の研磨パッド１８とすることもできる。更に、研磨テーブル２０には多数の吸引孔２４、２４…が貫通形成されており、これらの吸引孔２４、２４…は不図示のサクションポンプにバルブを介して接続されている。したがって、前記バルブを開放することにより、サクションポンプの吸引力が吸引孔２４、２４…に伝達されるので、プレート１６が研磨テーブル２０の上面に吸着保持される。また、前記バルブを閉鎖することにより、サクションポンプの吸引力が解除されるので、研磨パッド１８のメンテナンス、交換の際に研磨テーブル２０から研磨パッド１８をプレート１６とともに取り外すことができる。 During polishing, as shown in FIG. 2, a polishing slurry such as a cerium oxide aqueous solution is supplied from the lower surface side of the polishing pad 18 through a large number of slurry supply holes 22 formed in the polishing table 20 and the plate 16. Is done. As a result, the polishing pad 18 is immersed in the polishing slurry, and the glass substrate G is polished in this state. The slurry supply holes 22, 22... Are formed densely and uniformly in the polishing table 20 and the plate 16, so that the polishing slurry is supplied uniformly to the polishing pad 18. As the polishing pad 18, for example, a foamed polyurethane type or a suede type is used and is adhered to the plate 16. Further, the number of the polishing pad 18 may be one, but since the size thereof is large corresponding to the size of the glass substrate G, a single polishing pad 18 can be formed by combining a plurality of divided pads. Further, a large number of suction holes 24, 24... Are formed through the polishing table 20, and these suction holes 24, 24... Are connected to a suction pump (not shown) via a valve. Therefore, by opening the valve, the suction force of the suction pump is transmitted to the suction holes 24, 24..., So that the plate 16 is adsorbed and held on the upper surface of the polishing table 20. Further, since the suction force of the suction pump is released by closing the valve, the polishing pad 18 can be removed from the polishing table 20 together with the plate 16 when the polishing pad 18 is maintained or replaced.
　図１に示すように研磨ヘッド１４の上部中央には、スピンドル２６が固定され、このスピンドル２６には回転／昇降装置２８が連結されている。回転／昇降装置２８は、研磨装置１０全体を統括制御する制御部３０によって、ガラス基板Ｇの研磨に好適な回転数及び下降動作（押圧力）に制御されている。 As shown in FIG. 1, a spindle 26 is fixed to the upper center of the polishing head 14, and a rotation / lifting device 28 is connected to the spindle 26. The rotation / lifting device 28 is controlled to a rotation number and a lowering operation (pressing force) suitable for polishing the glass substrate G by a control unit 30 that performs overall control of the polishing device 10.
　図３には、第１の実施の形態の保持用膜体１２の斜視図が示され、図４には、保持用膜体１２の断面図が示されている。また、図５には、保持用膜体１２にガラス基板Ｇが吸着保持された断面図が示されている。なお、図３の保持用膜体１２は、天地逆さまで示されている。 FIG. 3 is a perspective view of the holding film body 12 according to the first embodiment, and FIG. 4 is a cross-sectional view of the holding film body 12. FIG. 5 shows a cross-sectional view in which the glass substrate G is sucked and held on the holding film body 12. The holding film body 12 in FIG. 3 is shown upside down.
　これらの図に示すように保持用膜体１２は、１枚の自己吸着型シート３２が同一面内に配された２枚の両面接着シート３４、３４を介してアルミニウム製のバックプレート３６に貼り付けられて構成されるとともに、図５に示すように自己吸着型シート３２にガラス基板Ｇが吸着保持される。なお、図３～図５には、１枚の自己吸着型シート３２を２枚の両面接着シート３４、３４を使用してバックプレート３６に接着した保持用膜体１２を例示したが、１枚の自己吸着型シート３２を同一面内に配された３枚以上の両面接着シート３４、３４…を使用してバックプレート３６に接着した保持用膜体１２であってもよい。 As shown in these figures, the holding film body 12 is attached to an aluminum back plate 36 via two double- sided adhesive sheets 34 and 34 in which one self-adsorbing sheet 32 is arranged in the same plane. In addition, the glass substrate G is adsorbed and held on the self-adsorption type sheet 32 as shown in FIG. 3 to 5 exemplify the holding film body 12 in which one self-adsorbing sheet 32 is bonded to the back plate 36 using two double- sided adhesive sheets 34, 34. The self-adsorptive sheet 32 may be the holding film body 12 bonded to the back plate 36 using three or more double- sided adhesive sheets 34, 34... Arranged in the same plane.
　自己吸着型シート３２は、特許文献２に開示されているようなポリウレタン樹脂で形成されたポリウレタンシートであり、その厚さは約０．８ｍｍである。このポリウレタンシートは、その表面層に微多孔が形成され、表面層に水等の液体を含ませることにより、表面層の微多孔に浸入した液体の表面張力によってガラス基板Ｇを吸着保持することができる。また、両面接着シート３４は、ポリエチレンテレフタレート（ＰＥＴ）等の基材３８の両面に接着剤４０、４０が塗布されることにより構成され、その厚さは約０．２ｍｍである。 The self-adsorbing sheet 32 is a polyurethane sheet formed of a polyurethane resin as disclosed in Patent Document 2 and has a thickness of about 0.8 mm. In this polyurethane sheet, a microporous layer is formed on the surface layer, and when the surface layer contains a liquid such as water, the glass substrate G can be adsorbed and held by the surface tension of the liquid that has entered the microporous layer of the surface layer. it can. The double-sided adhesive sheet 34 is formed by applying adhesives 40 and 40 to both sides of a base material 38 such as polyethylene terephthalate (PET), and the thickness thereof is about 0.2 mm.
　図３～図５に示す保持用膜体１２では、１枚の自己吸着型シート３２に、同一面内に配された両面接着シート３４、３４が２枚使用され、２枚の両面接着シート３４、３４は、所定の隙間ｓをもって自己吸着型シート３２及びバックプレート３６に貼り付けられている。 In the holding film body 12 shown in FIG. 3 to FIG. 5, two double- sided adhesive sheets 34, 34 arranged in the same plane are used for one self-adsorbing sheet 32, and two double-sided adhesive sheets 34 are used. , 34 are affixed to the self-adsorptive sheet 32 and the back plate 36 with a predetermined gap s.
　このように構成された保持用膜体１２によれば、２枚の両面接着シート３４、３４を使用して１枚の自己吸着型シート３２をバックプレート３６に接着させるが、このとき、両面接着シート３４、３４を所定の隙間ｓをもって自己吸着型シート３２及びバックプレート３６に貼り付ける。 According to the holding film body 12 configured as described above, the two self-adhesive sheets 32 are bonded to the back plate 36 using the two double- sided adhesive sheets 34, 34. The sheets 34 and 34 are attached to the self-adsorptive sheet 32 and the back plate 36 with a predetermined gap s.
　このような保持用膜体１２によって保持されて研磨されたガラス基板Ｇは、図６（Ａ）に示すように隙間ｓに位置する自己吸着型シート３２の一部分３２ａが、研磨時の押圧力等により隙間ｓに入り込むため、その隙間ｓに対応する自己吸着型シート３２の吸着面に凹状部３２ｂが生じる。したがって、その凹状部３２ｂに吸着保持されているガラス基板Ｇの一部分Ｇ１が凸状となって変形し、これがガラス基板Ｇの被研磨面に凹状部５となって転写される。凹状部５が転写された状態でガラス基板Ｇを研磨すると、その凹状部５が研磨されないことから、研磨後のガラス基板Ｇは、この凹状部５となった部分が図６（Ｂ）に示すように逆に凸状部５Ａとなって現れる。しかし、ガラス基板Ｇの表面に形成される凸状部５Ａの高さ量ａは、図９に示した従来の凹状部４Ａの深さ量ｂと比較してその絶対量が小さくなるので、ガラス基板Ｇの平坦性を損なわせるものではない。 As shown in FIG. 6A, the glass substrate G held and polished by the holding film body 12 has a portion 32a of the self-adsorptive sheet 32 positioned in the gap s as shown in FIG. Therefore, the concave portion 32b is formed on the suction surface of the self-adsorptive sheet 32 corresponding to the gap s. Therefore, a part G1 of the glass substrate G adsorbed and held in the concave portion 32b is deformed in a convex shape, and this is transferred to the polished surface of the glass substrate G as the concave portion 5. When the glass substrate G is polished in a state where the concave portion 5 is transferred, the concave portion 5 is not polished. Therefore, the polished glass substrate G has a portion where the concave portion 5 is formed as shown in FIG. On the contrary, it appears as a convex portion 5A. However, since the height amount a of the convex portion 5A formed on the surface of the glass substrate G is smaller than the depth amount b of the conventional concave portion 4A shown in FIG. This does not impair the flatness of the substrate G.
　これにより、第１の実施の形態の保持用膜体１２によれば、研磨後のガラス基板Ｇの品質を向上させることができる。 Thereby, according to the holding film body 12 of the first embodiment, the quality of the polished glass substrate G can be improved.
　なお、保持用膜体１２のバックプレート３６には、図５に示すようにドーナツ形状の弾性シート材４２が取り付けられ、この弾性シート材４２の外周には複数の係合部材４４、４４…が固定されている。保持用膜体１２は、弾性シート材４２を張設してこれらの係合部材４４、４４…を図１の研磨ヘッド１４のフック部（不図示）に係合させることにより研磨ヘッド１４に装着される。 As shown in FIG. 5, a donut-shaped elastic sheet material 42 is attached to the back plate 36 of the holding film body 12, and a plurality of engaging members 44, 44. It is fixed. The holding film body 12 is attached to the polishing head 14 by stretching an elastic sheet material 42 and engaging these engaging members 44, 44... With a hook portion (not shown) of the polishing head 14 of FIG. Is done.
　図７には、第２の実施の形態の保持用膜体１１２の断面図が示されており、図３に示した保持用膜体１２と同一類似の部材については同一の符号を付して説明する。 FIG. 7 shows a cross-sectional view of the holding film body 112 of the second embodiment, and members similar to those of the holding film body 12 shown in FIG. explain.
　保持用膜体１１２は、自己吸着型シート３２Ａ、３２Ａ及び両面接着シート３４、３４が各々同一面内に配されるとともに各々２枚使用され、かつ各々２枚の自己吸着型シート３２Ａ、３２Ａ及び両面接着シート３４、３４が、所定の隙間ｓをもってバックプレート３６に貼り付けられている。なお、図７には、各々２枚の自己吸着型シート３２Ａ、３２Ａと両面接着シート３４、３４とをバックプレート３６に接着した保持用膜体１１２を例示したが、各々３枚以上の自己吸着型シート３２Ａ、３２Ａ…と両面接着シート３４、３４…とをバックプレート３６に接着した保持用膜体１１２であってもよい。 The holding film body 112 includes two self- adsorptive sheets 32A, 32A and two self- adsorptive sheets 32A, 32A and two self- adsorptive sheets 32A, 32A. Double- sided adhesive sheets 34, 34 are attached to the back plate 36 with a predetermined gap s. 7 illustrates the holding film body 112 in which the two self- adsorptive sheets 32A and 32A and the double- sided adhesive sheets 34 and 34 are bonded to the back plate 36, respectively. The holding film body 112 in which the mold sheets 32A, 32A... And the double- sided adhesive sheets 34, 34.
　このように構成された保持用膜体１１２によれば、２枚の自己吸着型シート３２Ａ、３２Ａを、２枚の自己吸着型シート３２Ａ、３２Ａ毎に貼着された両面接着シート３４、３４を使用してバックプレート３６に接着させるが、このとき、自己吸着型シート３２Ａ、３２Ａ及び両面接着シート３４、３４を所定の隙間ｓをもってバックプレート３６に貼り付ける。 According to the holding film body 112 configured as described above, the two self-adsorbing sheets 32A and 32A are bonded to the two self-adsorbing sheets 32A and 32A. The self- adsorptive sheets 32A and 32A and the double- sided adhesive sheets 34 and 34 are attached to the back plate 36 with a predetermined gap s.
　このような保持用膜体１１２によって保持されて研磨されたガラス基板Ｇは、図６（Ａ）、図６（Ｂ）で示したように、隙間ｓが転写されて研磨されることで、その表面に凸状部５Ａが形成されるものの、凸状部５Ａの高さ量ａは、図９（Ｂ）に示した凹状部４Ａの深さ量ｂと比較してその絶対量が小さくなるので、ガラス基板Ｇの平坦性を損なわせるものではない。 As shown in FIGS. 6A and 6B, the glass substrate G held and polished by the holding film body 112 is polished with the gap s transferred and polished. Although the convex portion 5A is formed on the surface, the absolute amount of the height amount a of the convex portion 5A is smaller than the depth amount b of the concave portion 4A shown in FIG. 9B. The flatness of the glass substrate G is not impaired.
　これにより、第２の実施の形態の保持用膜体１１２によれば、研磨後のガラス基板Ｇの品質を向上させることができる。 Thereby, according to the holding film body 112 of the second embodiment, the quality of the polished glass substrate G can be improved.
　なお、隙間ｓの形成方向は、ガラス基板Ｇの元となる板ガラスを製造するフロート製造装置によるガラスリボンの引き出し方向と同一とすることが好ましい。すなわち、隙間ｓによってガラス基板Ｇに生じる凹状溝の方向を、ガラスリボンの引き出しによって生じる、板ガラスの表面に生じる筋の方向と同一とすることにより、凸状溝が目立たなくなるので好ましい。 In addition, it is preferable that the forming direction of the gap s is the same as the drawing direction of the glass ribbon by the float manufacturing apparatus that manufactures the glass sheet that is the base of the glass substrate G. That is, it is preferable that the direction of the concave groove generated in the glass substrate G by the gap s is the same as the direction of the streaks generated on the surface of the plate glass generated by pulling out the glass ribbon, since the convex groove becomes inconspicuous.
　また、所定の隙間ｓは、０．５ｍｍ±０．５ｍｍに設定されることが好ましい。すなわち、実施例で規定する所定の隙間ｓは０ｍｍを含み、０～１．０ｍｍが好ましい。隙間が０ｍｍの場合には、研磨後のガラス基板Ｇに転写による凹状部４Ａ、凸状部５Ａが発生せず、また、隙間が１．０ｍｍ以下であれば、ガラス基板Ｇに転写によって形成された凸状部５Ａは、ディスプレイ用ガラス基板Ｇの品質に影響を与えない。 The predetermined gap s is preferably set to 0.5 mm ± 0.5 mm. That is, the predetermined gap s defined in the embodiment includes 0 mm and is preferably 0 to 1.0 mm. When the gap is 0 mm, the concave portion 4A and the convex portion 5A are not generated by the transfer on the polished glass substrate G, and when the gap is 1.0 mm or less, the glass substrate G is formed by transfer. The convex portion 5A does not affect the quality of the display glass substrate G.
　図８には、第３の実施の形態の保持用膜体２１２の断面図が示されており、図３に示した保持用膜体１２と同一類似の部材については同一の符号を付して説明する。 FIG. 8 shows a cross-sectional view of the holding film body 212 of the third embodiment, and members similar to those of the holding film body 12 shown in FIG. explain.
　保持用膜体２１２は、１枚の自己吸着型シート３２に両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂが２枚重ねに貼着されている。また、自己吸着型シート３２に直接貼り付けられた同一面内の両面接着シート３４Ａ、３４Ａは所定の隙間ｓ１をもって貼り付けられ、これらの両面接着シート３４Ａ、３４Ａに貼り付けられた同一面内の両面接着シート３４Ｂ、３４Ｂも同様に所定の隙間ｓ２をもって貼り付けられている。更に、２枚重ねに貼着された各々の両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂ間の隙間ｓ１、ｓ２が両面接着シートの積層方向に重ならない（すなわち、図面上において上下方向に重ならず左右方向にずれる）ように、両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂが貼着されている。 The holding film body 212 has a double-sided adhesive sheet 34 </ b> A, 34 </ b> A, 34 </ b> B, 34 </ b> B attached to one self-adsorptive sheet 32. In addition, the double- sided adhesive sheets 34A and 34A in the same plane that are directly attached to the self-adsorption type sheet 32 are attached with a predetermined gap s1, and the same-side adhesives that are attached to these double- sided adhesive sheets 34A and 34A. Similarly, the double-sided adhesive sheets 34B and 34B are attached with a predetermined gap s2. Further, the gaps s1 and s2 between the double- sided adhesive sheets 34A, 34A, 34B, and 34B that are stuck in two layers do not overlap in the stacking direction of the double-sided adhesive sheets (that is, they do not overlap vertically in the drawing). Double- sided adhesive sheets 34A, 34A, 34B, and 34B are attached so as to shift in the left-right direction.
　なお、実施の形態の保持用膜体２１２では、４枚の両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂを使用し、これらの両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂを２枚重ねに配置した例を示しているが、両面接着シートを６枚以上使用して３枚重ね以上に配置した保持用膜体であってもよい。 In the holding film body 212 of the embodiment, four double- sided adhesive sheets 34A, 34A, 34B, and 34B are used, and these double- sided adhesive sheets 34A, 34A, 34B, and 34B are arranged in two layers. However, it may be a holding film body in which three or more double-sided adhesive sheets are used and arranged in three or more layers.
　このように構成された保持用膜体２１２によれば、４枚の両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂを使用して１枚の自己吸着型シート３２をバックプレート３６に接着させるが、このとき、両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂは少なくとも２枚重ねに貼着され、そして、両面接着シート３４Ａ、３４Ａは所定の隙間ｓ１をもって貼り付けられ、これらの両面接着シート３４Ａ、３４Ａに貼り付けられた同一面内の両面接着シート３４Ｂ、３４Ｂも同様に所定の隙間ｓ２をもってバックプレート３６に貼り付けられるとともに、２枚重ねに貼着された各々の両面接着シート３４Ａ、３４Ａ、３４Ｂ、３４Ｂ間の隙間ｓ１、ｓ２が両面接着シートの積層方向に重ならない（すなわち、図面上において上下方向に重ならず左右方向にずれる）ように貼り付けられる。 According to the holding film body 212 configured in this way, the four self-adhesive sheets 32 are adhered to the back plate 36 using the four double- sided adhesive sheets 34A, 34A, 34B, 34B. At the time, the double- sided adhesive sheets 34A, 34A, 34B, 34B are attached in a stack of two sheets, and the double- sided adhesive sheets 34A, 34A are attached with a predetermined gap s1, and are attached to these double- sided adhesive sheets 34A, 34A. The attached double-sided adhesive sheets 34B and 34B in the same plane are similarly attached to the back plate 36 with a predetermined gap s2, and the double- sided adhesive sheets 34A, 34A, 34B and 34B attached in two layers are also attached. The gaps s1 and s2 between them do not overlap in the laminating direction of the double-sided adhesive sheet (that is, they do not overlap in the vertical direction on the drawing and left Affixed to the displaced) so that the direction.
　このような保持用膜体２１２によって保持されて研磨されたガラス基板Ｇは、隙間ｓ１、ｓ２が転写されて研磨されることで、その表面に二つの凸状部５Ａ、５Ａ（図６参照）が形成されるが、二つの隙間ｓ１、ｓ２は、両面接着シートの積層方向に重ならない（すなわち、図面上において上下方向に重ならず左右方向にずれている）ため、隙間ｓ１、ｓ２による転写量を抑えることができる。すなわち、両面接着シート３４Ａ、３４Ａの隙間ｓ１の下方には、この隙間ｓ１による自己吸着型シート３２の変形を補強すべく、図中右側の両面接着シート３４Ｂが隙間ｓ１を塞ぐように配置されているからであり、また、両面接着シート３４Ｂ、３４Ｂの隙間ｓ２の上方には、この隙間ｓ２による自己吸着型シート３２の変形を補強すべく、図中左側の両面接着シート３４Ａが隙間ｓ２を塞ぐように配置されているからである。 The glass substrate G held and polished by such a holding film body 212 is polished with the gaps s1 and s2 transferred, so that two convex portions 5A and 5A are formed on the surface (see FIG. 6). However, the two gaps s1 and s2 do not overlap in the laminating direction of the double-sided adhesive sheet (that is, they do not overlap in the vertical direction but are shifted in the left-right direction on the drawing). The amount can be reduced. That is, below the gap s1 between the double- sided adhesive sheets 34A and 34A, the double-sided adhesive sheet 34B on the right side in the drawing is arranged to close the gap s1 in order to reinforce the deformation of the self-adsorptive sheet 32 due to the gap s1. Also, above the gap s2 between the double-sided adhesive sheets 34B, 34B, the double-sided adhesive sheet 34A on the left side in the drawing closes the gap s2 in order to reinforce the deformation of the self-adsorptive sheet 32 due to the gap s2. It is because it is arranged like this.
　よって、実施の形態の保持用膜体２１２によれば、ガラス基板Ｇの表面に形成される凸状部５Ａ（図６参照）の高さを低く抑えることができるので、研磨後のガラス基板Ｇの品質がより一層向上する。 Therefore, according to the holding film body 212 of the embodiment, the height of the convex portion 5A (see FIG. 6) formed on the surface of the glass substrate G can be kept low. The quality of the product is further improved.
　なお、隙間ｓ１、ｓ２は、図３の隙間ｓと同一であることが好ましい。また、隙間ｓ１、ｓ２の形成方向は、ガラス基板Ｇの元となる板ガラスを製造するフロート製造装置によるガラスリボンの引き出し方向と同一とすることが好ましい。 The gaps s1 and s2 are preferably the same as the gap s in FIG. In addition, the formation direction of the gaps s1 and s2 is preferably the same as the drawing direction of the glass ribbon by the float manufacturing apparatus that manufactures the glass sheet that is the base of the glass substrate G.
　１          自己吸着型シート
　２          両面接着シート
　３          バックプレート
　４          凸状部
　４Ａ        凹状部
　５          凹状部
　５Ａ        凸状部
　１０        研磨装置
　１２、１１２、２１２      保持用膜体
　１４        研磨ヘッド
　１６        プレート
　１８        研磨パッド
　２０        研磨テーブル
　２２        スラリ供給孔
　２４        吸引孔
　２６        スピンドル
　２８        回転／昇降装置
　３０        制御部
　３２        自己吸着型シート
　３４、３４Ａ、３４Ｂ      両面接着シート
　３６        バックプレート
　３８        基材
　４０        接着剤
　４２        弾性シート材
　４４        係合部材
　Ｇ          ガラス基板 DESCRIPTION OF SYMBOLS 1 Self-adsorption type sheet 2 Double-sided adhesive sheet 3 Back plate 4 Convex part 4A Concave part 5 Concave part 5A Convex part 10 Polishing device 12, 112, 212 Film body for holding 14 Polishing head 16 Plate 18 Polishing pad 20 Polishing table 22 Slurry supply hole 24 Suction hole 26 Spindle 28 Rotating / elevating device 30 Control unit 32 Self- adsorptive sheet 34, 34A, 34B Double-sided adhesive sheet 36 Back plate 38 Base material 40 Adhesive 42 Elastic sheet material 44 Engaging member G Glass substrate

Claims (7)

  1. 　自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、
    　前記両面接着シートが、同一面内に配置された複数枚の両面接着シートからなり、該複数枚の両面接着シートは、隣接する両面接着シートがそれぞれ所定の隙間をもって前記自己吸着型シート及び前記バックプレートに貼り付けられているガラス基板の保持用膜体。     In the holding film body of the glass substrate in which the self-adsorptive sheet is configured to be attached to the back plate via the double-sided adhesive sheet, and the glass substrate is adsorbed and held on the self-adsorptive sheet,
    The double-sided adhesive sheet is composed of a plurality of double-sided adhesive sheets arranged in the same plane, and the plurality of double-sided adhesive sheets are adjacent to each other with a predetermined gap between the self-adsorptive sheet and the back. A film body for holding a glass substrate attached to a plate.
  2. 　自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、
    　前記自己吸着シート及び前記両面接着シートが、各々同一面内に配置された複数枚の前記自己吸着型シート及び前記両面接着シートからなり、該複数枚の自己吸着型シート及び両面接着シートは、隣接する自己吸着型シート及び両面接着シートがそれぞれ所定の隙間をもって前記バックプレートに貼り付けられているガラス基板の保持用膜体。     In the holding film body of the glass substrate in which the self-adsorptive sheet is configured to be attached to the back plate via the double-sided adhesive sheet, and the glass substrate is adsorbed and held on the self-adsorptive sheet,
    The self-adsorptive sheet and the double-sided adhesive sheet are each composed of a plurality of the self-adsorptive sheets and the double-sided adhesive sheets disposed in the same plane, and the plurality of self-adsorptive sheets and double-sided adhesive sheets are adjacent to each other. A glass substrate holding film body in which a self-adhesive sheet and a double-sided adhesive sheet are attached to the back plate with a predetermined gap.
  3. 　自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、
    　前記両面接着シートが、同一面内に配置された複数枚の両面接着シートからなり、少なくとも２枚重ねに貼着され、同一面内の複数枚の両面接着シートは、それぞれ所定の隙間をもって貼り付けられるとともに、両面接着シートの間の所定の隙間が、両面接着シートの積層方向に隣接する両面接着シートの間の所定の隙間と、両面接着シートの積層方向において重ならないガラス基板の保持用膜体。     In the holding film body of the glass substrate in which the self-adsorptive sheet is configured to be attached to the back plate via the double-sided adhesive sheet, and the glass substrate is adsorbed and held on the self-adsorptive sheet,
    The double-sided adhesive sheet is composed of a plurality of double-sided adhesive sheets arranged in the same plane, and is attached in a stack of at least two sheets, and the plurality of double-sided adhesive sheets in the same plane are respectively attached with a predetermined gap. And the predetermined gap between the double-sided adhesive sheets is not overlapped with the predetermined gap between the double-sided adhesive sheets adjacent to each other in the laminating direction of the double-sided adhesive sheets. .
  4. 　前記所定の隙間が、０．５ｍｍ±０．５ｍｍである請求項１～３に記載のガラス基板の保持用膜体。 The glass substrate holding film body according to any one of claims 1 to 3, wherein the predetermined gap is 0.5 mm ± 0.5 mm.
  5. 　前記ガラス基板のサイズが、３１３０ｍｍ×２８８０ｍｍ以上である請求項１～４のいずれか１項に記載のガラス基板の保持用膜体。 The glass substrate holding film body according to any one of claims 1 to 4, wherein a size of the glass substrate is 3130 mm x 2880 mm or more.
  6. 　前記保持用膜体のサイズが、３２００ｍｍ×３０００ｍｍ以上である請求項５に記載のガラス基板の保持用膜体。 The holding film body for a glass substrate according to claim 5, wherein the holding film body has a size of 3200 mm × 3000 mm or more.
  7. 　請求項１～６のいずれか１項に記載のガラス基板の保持用膜体によってガラス基板を吸着保持し、該ガラス基板の被研磨面を研磨パッドに押し付けて、ガラス基板の被研磨面を必要な平坦度に研磨するガラス基板の研磨方法。 A glass substrate is adsorbed and held by the glass substrate holding film body according to any one of claims 1 to 6, and the surface to be polished of the glass substrate is pressed against a polishing pad so that the surface to be polished of the glass substrate is necessary. A method for polishing a glass substrate, which is polished to a flatness.
PCT/JP2010/055283 2010-03-25 2010-03-25 Film for holding glass substrate and method for polishing glass substrate WO2011118010A1 (en)

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