JP5529258B2 - ガラス基板の保持用膜体、及びガラス基板の研磨方法 - Google Patents
ガラス基板の保持用膜体、及びガラス基板の研磨方法 Download PDFInfo
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- JP5529258B2 JP5529258B2 JP2012506727A JP2012506727A JP5529258B2 JP 5529258 B2 JP5529258 B2 JP 5529258B2 JP 2012506727 A JP2012506727 A JP 2012506727A JP 2012506727 A JP2012506727 A JP 2012506727A JP 5529258 B2 JP5529258 B2 JP 5529258B2
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- glass substrate
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- 239000011521 glass Substances 0.000 title claims description 112
- 239000000758 substrate Substances 0.000 title claims description 109
- 238000005498 polishing Methods 0.000 title claims description 69
- 238000000034 method Methods 0.000 title claims description 6
- 239000000853 adhesive Substances 0.000 claims description 89
- 230000001070 adhesive effect Effects 0.000 claims description 80
- 238000010030 laminating Methods 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 229920002635 polyurethane Polymers 0.000 description 6
- 239000004814 polyurethane Substances 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 239000002344 surface layer Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 230000001771 impaired effect Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920005749 polyurethane resin Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
- B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/05—Interconnection of layers the layers not being connected over the whole surface, e.g. discontinuous connection or patterned connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
Description
また、特許文献1の研磨装置では、研磨ヘッドに取り付けられる自己吸着型の保持用膜体にガラス基板を吸着保持させることにより、ガラス基板を研磨ヘッドに取り付けるようにしている。
2 両面接着シート
3 バックプレート
4 凸状部
4A 凹状部
5 凹状部
5A 凸状部
10 研磨装置
12、112、212 保持用膜体
14 研磨ヘッド
16 プレート
18 研磨パッド
20 研磨テーブル
22 スラリ供給孔
24 吸引孔
26 スピンドル
28 回転/昇降装置
30 制御部
32 自己吸着型シート
34、34A、34B 両面接着シート
36 バックプレート
38 基材
40 接着剤
42 弾性シート材
44 係合部材
G ガラス基板
Claims (6)
- 自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、
前記自己吸着シート及び前記両面接着シートが、各々同一面内に配置された複数枚の前記自己吸着型シート及び前記両面接着シートからなり、該複数枚の自己吸着型シート及び両面接着シートは、隣接する自己吸着型シート及び両面接着シートがそれぞれ所定の隙間をもって前記バックプレートに貼り付けられているガラス基板の保持用膜体。 - 自己吸着型シートが両面接着シートを介してバックプレートに貼り付けられて構成されるとともに、前記自己吸着型シートにガラス基板が吸着保持されるガラス基板の保持用膜体において、
前記両面接着シートが、同一面内に配置された複数枚の両面接着シートからなり、少なくとも2枚重ねに貼着され、同一面内の複数枚の両面接着シートは、それぞれ所定の隙間をもって貼り付けられるとともに、両面接着シートの間の所定の隙間が、両面接着シートの積層方向に隣接する両面接着シートの間の所定の隙間と、両面接着シートの積層方向において重ならないガラス基板の保持用膜体。 - 前記所定の隙間が、0.5mm±0.5mmである請求項1又は2に記載のガラス基板の保持用膜体。
- 前記ガラス基板のサイズが、3130mm×2880mm以上である請求項1〜3のいずれか1項に記載のガラス基板の保持用膜体。
- 前記保持用膜体のサイズが、3200mm×3000mm以上である請求項4に記載のガラス基板の保持用膜体。
- 請求項1〜5のいずれか1項に記載のガラス基板の保持用膜体によってガラス基板を吸着保持し、該ガラス基板の被研磨面を研磨パッドに押し付けて、ガラス基板の被研磨面を必要な平坦度に研磨するガラス基板の研磨方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2010/055283 WO2011118010A1 (ja) | 2010-03-25 | 2010-03-25 | ガラス基板の保持用膜体、及びガラス基板の研磨方法 |
Publications (2)
Publication Number | Publication Date |
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JPWO2011118010A1 JPWO2011118010A1 (ja) | 2013-07-04 |
JP5529258B2 true JP5529258B2 (ja) | 2014-06-25 |
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JP2012506727A Active JP5529258B2 (ja) | 2010-03-25 | 2010-03-25 | ガラス基板の保持用膜体、及びガラス基板の研磨方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5529258B2 (ja) |
KR (1) | KR101598248B1 (ja) |
CN (1) | CN102811837B (ja) |
WO (1) | WO2011118010A1 (ja) |
Families Citing this family (3)
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JP7205423B2 (ja) * | 2018-12-17 | 2023-01-17 | Agc株式会社 | ガラス基板の保持用膜体、及びガラス基板の研磨方法 |
CN110634400B (zh) * | 2019-08-22 | 2021-04-27 | 武汉华星光电技术有限公司 | 背光模组、显示装置及背光模组的制作方法 |
CN116393336B (zh) * | 2023-06-09 | 2023-08-18 | 太原科技大学 | 用于磁致伸缩材料薄膜基体旋转涂布的夹具及其使用方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02220838A (ja) * | 1989-02-22 | 1990-09-04 | Rodeele Nitta Kk | 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布 |
JP2001138233A (ja) * | 1999-11-19 | 2001-05-22 | Sony Corp | 研磨装置、研磨方法および研磨工具の洗浄方法 |
JP2002337048A (ja) * | 2001-05-15 | 2002-11-26 | Shin Etsu Handotai Co Ltd | ワークの研磨方法 |
JP2008036798A (ja) * | 2006-08-09 | 2008-02-21 | Nitta Haas Inc | 被加工物保持材およびその製造方法 |
JP2009119533A (ja) * | 2007-11-12 | 2009-06-04 | Fujibo Holdings Inc | 保持パッド |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000087004A (ja) * | 1998-09-17 | 2000-03-28 | Nitta Ind Corp | 被加工物用保持剤およびそれを用いた被加工物の脱着方法 |
JP4207153B2 (ja) | 2002-07-31 | 2009-01-14 | 旭硝子株式会社 | 基板の研磨方法及びその装置 |
JP2005051055A (ja) * | 2003-07-29 | 2005-02-24 | Tokyo Electron Ltd | 貼合せ方法および貼合せ装置 |
JP4034320B2 (ja) * | 2005-05-24 | 2008-01-16 | 富士紡ホールディングス株式会社 | 保持パッド |
JP4562598B2 (ja) | 2005-07-04 | 2010-10-13 | 富士紡ホールディングス株式会社 | 研磨布 |
JP4948935B2 (ja) * | 2006-08-08 | 2012-06-06 | 富士紡ホールディングス株式会社 | 研磨布 |
-
2010
- 2010-03-25 CN CN201080065758.3A patent/CN102811837B/zh active Active
- 2010-03-25 WO PCT/JP2010/055283 patent/WO2011118010A1/ja active Application Filing
- 2010-03-25 KR KR1020127025047A patent/KR101598248B1/ko active IP Right Grant
- 2010-03-25 JP JP2012506727A patent/JP5529258B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02220838A (ja) * | 1989-02-22 | 1990-09-04 | Rodeele Nitta Kk | 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布 |
JP2001138233A (ja) * | 1999-11-19 | 2001-05-22 | Sony Corp | 研磨装置、研磨方法および研磨工具の洗浄方法 |
JP2002337048A (ja) * | 2001-05-15 | 2002-11-26 | Shin Etsu Handotai Co Ltd | ワークの研磨方法 |
JP2008036798A (ja) * | 2006-08-09 | 2008-02-21 | Nitta Haas Inc | 被加工物保持材およびその製造方法 |
JP2009119533A (ja) * | 2007-11-12 | 2009-06-04 | Fujibo Holdings Inc | 保持パッド |
Also Published As
Publication number | Publication date |
---|---|
KR101598248B1 (ko) | 2016-02-26 |
CN102811837B (zh) | 2015-12-02 |
JPWO2011118010A1 (ja) | 2013-07-04 |
CN102811837A (zh) | 2012-12-05 |
WO2011118010A1 (ja) | 2011-09-29 |
KR20130033360A (ko) | 2013-04-03 |
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