KR101578077B1 - 플라즈마 에칭 방법 - Google Patents

플라즈마 에칭 방법 Download PDF

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Publication number
KR101578077B1
KR101578077B1 KR1020140013015A KR20140013015A KR101578077B1 KR 101578077 B1 KR101578077 B1 KR 101578077B1 KR 1020140013015 A KR1020140013015 A KR 1020140013015A KR 20140013015 A KR20140013015 A KR 20140013015A KR 101578077 B1 KR101578077 B1 KR 101578077B1
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South Korea
Prior art keywords
film
gas
etching
magnetic film
metal
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Expired - Fee Related
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KR1020140013015A
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Korean (ko)
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KR20150007199A (ko
Inventor
다이스케 후지타
마코토 스야마
나오히로 야마모토
마사토 이시마루
겐타로 야마다
Original Assignee
가부시키가이샤 히다치 하이테크놀로지즈
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Publication of KR20150007199A publication Critical patent/KR20150007199A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/093—Manufacture or treatment of dielectric parts thereof by modifying materials of the dielectric parts
    • H10W20/095—Manufacture or treatment of dielectric parts thereof by modifying materials of the dielectric parts by irradiating with electromagnetic or particle radiation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Drying Of Semiconductors (AREA)
  • Hall/Mr Elements (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
KR1020140013015A 2013-07-10 2014-02-05 플라즈마 에칭 방법 Expired - Fee Related KR101578077B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2013-144118 2013-07-10
JP2013144118A JP2015018885A (ja) 2013-07-10 2013-07-10 プラズマエッチング方法

Publications (2)

Publication Number Publication Date
KR20150007199A KR20150007199A (ko) 2015-01-20
KR101578077B1 true KR101578077B1 (ko) 2015-12-16

Family

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KR1020140013015A Expired - Fee Related KR101578077B1 (ko) 2013-07-10 2014-02-05 플라즈마 에칭 방법

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Country Link
US (2) US9269892B2 (enExample)
JP (1) JP2015018885A (enExample)
KR (1) KR101578077B1 (enExample)
TW (1) TW201503257A (enExample)

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* Cited by examiner, † Cited by third party
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JP6227483B2 (ja) * 2014-05-30 2017-11-08 株式会社日立ハイテクノロジーズ プラズマ処理方法
US20160072055A1 (en) * 2014-09-08 2016-03-10 Satoshi Seto Manufacturing method of semiconductor memory device
JP2016164955A (ja) * 2015-03-06 2016-09-08 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
KR102409755B1 (ko) 2015-09-30 2022-06-16 삼성전자주식회사 자기 저항 메모리 소자 및 그 제조 방법
KR102615694B1 (ko) 2016-11-02 2023-12-21 삼성전자주식회사 정보 저장 소자 및 그 제조방법
US10522749B2 (en) * 2017-05-15 2019-12-31 Taiwan Semiconductor Manufacturing Company, Ltd. Combined physical and chemical etch to reduce magnetic tunnel junction (MTJ) sidewall damage
US10497567B2 (en) * 2017-08-07 2019-12-03 Applied Materials, Inc. Method of enhanced selectivity of hard mask using plasma treatments
JP6637612B2 (ja) * 2017-09-21 2020-01-29 株式会社日立ハイテクノロジーズ 磁気トンネル接合素子の製造方法およびプラズマ処理装置
JP7001703B2 (ja) * 2017-10-27 2022-01-20 東京エレクトロン株式会社 エッチング方法
CN109994476B (zh) * 2017-12-29 2021-03-16 上海磁宇信息科技有限公司 一种制备磁性随机存储器阵列单元的方法
CN117223091A (zh) * 2022-04-11 2023-12-12 株式会社日立高新技术 等离子处理方法

Citations (1)

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KR100814901B1 (ko) * 2007-05-22 2008-03-19 한국전자통신연구원 건식 식각 공정을 이용한 산화물 박막 트랜지스터 소자의제조방법

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US6893893B2 (en) * 2002-03-19 2005-05-17 Applied Materials Inc Method of preventing short circuits in magnetic film stacks
US6911346B2 (en) * 2002-04-03 2005-06-28 Applied Materials, Inc. Method of etching a magnetic material
US7115517B2 (en) * 2003-04-07 2006-10-03 Applied Materials, Inc. Method of fabricating a dual damascene interconnect structure
JP2004356179A (ja) 2003-05-27 2004-12-16 Sony Corp ドライエッチング方法及びその装置
JP2005079258A (ja) * 2003-08-29 2005-03-24 Canon Inc 磁性体のエッチング加工方法、磁気抵抗効果膜、および磁気ランダムアクセスメモリ
JP2006278456A (ja) * 2005-03-28 2006-10-12 Ulvac Japan Ltd トンネル接合素子のエッチング加工方法
JP2008065944A (ja) * 2006-09-08 2008-03-21 Ulvac Japan Ltd 磁性層パターンの形成方法、磁気抵抗素子の製造方法、及び磁気記憶媒体の製造方法
US7948044B2 (en) * 2008-04-09 2011-05-24 Magic Technologies, Inc. Low switching current MTJ element for ultra-high STT-RAM and a method for making the same
KR20120058113A (ko) * 2010-11-29 2012-06-07 삼성전자주식회사 자기 터널 접합 구조체의 제조 방법 및 이를 이용하는 자기 메모리 소자의 제조 방법
US8546263B2 (en) * 2011-04-27 2013-10-01 Applied Materials, Inc. Method of patterning of magnetic tunnel junctions
KR101574155B1 (ko) * 2011-06-24 2015-12-03 캐논 아네르바 가부시키가이샤 자기 저항 효과 소자의 제조 방법
JP2013051227A (ja) * 2011-08-30 2013-03-14 Hitachi High-Technologies Corp プラズマエッチング方法
KR101881932B1 (ko) * 2011-12-07 2018-07-27 삼성전자주식회사 자기 소자 및 그 제조 방법
KR101950004B1 (ko) * 2012-03-09 2019-02-19 삼성전자 주식회사 자기 소자
JP5883772B2 (ja) * 2012-11-27 2016-03-15 株式会社日立ハイテクノロジーズ プラズマ処理方法
JP6208017B2 (ja) * 2014-01-07 2017-10-04 株式会社日立ハイテクノロジーズ プラズマエッチング方法
US9390923B2 (en) * 2014-07-03 2016-07-12 Applied Materials, Inc. Methods of removing residual polymers formed during a boron-doped amorphous carbon layer etch process

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
KR100814901B1 (ko) * 2007-05-22 2008-03-19 한국전자통신연구원 건식 식각 공정을 이용한 산화물 박막 트랜지스터 소자의제조방법

Also Published As

Publication number Publication date
US9680090B2 (en) 2017-06-13
US20150017741A1 (en) 2015-01-15
JP2015018885A (ja) 2015-01-29
US9269892B2 (en) 2016-02-23
KR20150007199A (ko) 2015-01-20
US20160133834A1 (en) 2016-05-12
TWI562229B (enExample) 2016-12-11
TW201503257A (zh) 2015-01-16

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