KR101462061B1 - 반도체장치 - Google Patents
반도체장치 Download PDFInfo
- Publication number
- KR101462061B1 KR101462061B1 KR1020097001273A KR20097001273A KR101462061B1 KR 101462061 B1 KR101462061 B1 KR 101462061B1 KR 1020097001273 A KR1020097001273 A KR 1020097001273A KR 20097001273 A KR20097001273 A KR 20097001273A KR 101462061 B1 KR101462061 B1 KR 101462061B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- layer
- liquid crystal
- dummy
- columnar spacers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2006-266287 | 2006-09-29 | ||
| JP2006266287 | 2006-09-29 | ||
| PCT/JP2007/068737 WO2008038686A1 (en) | 2006-09-29 | 2007-09-19 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090060263A KR20090060263A (ko) | 2009-06-11 |
| KR101462061B1 true KR101462061B1 (ko) | 2014-11-17 |
Family
ID=39230122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020097001273A Active KR101462061B1 (ko) | 2006-09-29 | 2007-09-19 | 반도체장치 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US8144301B2 (enExample) |
| JP (23) | JP4679672B2 (enExample) |
| KR (1) | KR101462061B1 (enExample) |
| CN (3) | CN101490610B (enExample) |
| TW (13) | TWI628495B (enExample) |
| WO (1) | WO2008038686A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101490610B (zh) * | 2006-09-29 | 2013-06-05 | 株式会社半导体能源研究所 | 半导体设备 |
| JP4636128B2 (ja) * | 2008-06-24 | 2011-02-23 | ソニー株式会社 | 入力装置および入力機能付き表示装置 |
| TWM368249U (en) * | 2009-05-12 | 2009-11-01 | Inventec Appliances Corp | Buffering protection structure and mobile telecommunication device having the same |
| JP6126775B2 (ja) | 2010-06-25 | 2017-05-10 | 株式会社半導体エネルギー研究所 | 表示装置 |
| CN102402354A (zh) * | 2010-09-10 | 2012-04-04 | 敦泰科技有限公司 | 具有网状电极的电容式触摸屏 |
| US20120081646A1 (en) * | 2010-09-30 | 2012-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
| KR101987042B1 (ko) * | 2012-11-19 | 2019-06-10 | 엘지디스플레이 주식회사 | 박막 트랜지스터 기판 |
| CN103149747B (zh) * | 2013-04-03 | 2016-05-18 | 深超光电(深圳)有限公司 | 液晶显示面板 |
| JP6184765B2 (ja) * | 2013-06-20 | 2017-08-23 | 株式会社ジャパンディスプレイ | 液晶表示装置の製造方法および液晶表示装置の製造装置 |
| KR20150029177A (ko) | 2013-09-09 | 2015-03-18 | 삼성디스플레이 주식회사 | 액정 표시 장치 |
| JP2016038433A (ja) | 2014-08-06 | 2016-03-22 | 株式会社ジャパンディスプレイ | 液晶表示装置 |
| KR20160130078A (ko) * | 2015-04-30 | 2016-11-10 | 삼성디스플레이 주식회사 | 액정 표시 장치 및 그 제조 방법 |
| JP6972538B2 (ja) * | 2016-11-14 | 2021-11-24 | 凸版印刷株式会社 | 液晶表示装置 |
| CN106896602B (zh) * | 2017-03-14 | 2020-02-07 | 上海中航光电子有限公司 | 阵列基板、显示面板、显示装置及制作方法 |
| CN109427251B (zh) * | 2017-08-31 | 2021-08-10 | 昆山国显光电有限公司 | 一种覆盖膜及柔性显示装置 |
| CN108010941B (zh) * | 2017-11-15 | 2020-08-11 | 纳晶科技股份有限公司 | 用于发光元件的封装结构及方法 |
| CN110148682B (zh) * | 2019-05-30 | 2021-06-08 | 昆山国显光电有限公司 | 一种显示面板 |
| CN113253520B (zh) * | 2021-04-30 | 2023-01-24 | 滁州惠科光电科技有限公司 | 一种显示面板及显示设备 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1062789A (ja) * | 1996-08-23 | 1998-03-06 | Sharp Corp | 液晶表示装置及びその製造方法 |
| JP2001077374A (ja) * | 1999-07-06 | 2001-03-23 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| JP2001093598A (ja) * | 1999-07-22 | 2001-04-06 | Semiconductor Energy Lab Co Ltd | コンタクト構造および半導体装置 |
| KR20010029895A (ko) * | 1999-07-06 | 2001-04-16 | 야마자끼 순페이 | 반도체 장치 및 그 제조 장치 |
Family Cites Families (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR960002202B1 (ko) * | 1991-02-04 | 1996-02-13 | 가부시끼가이샤 한도다이 에네르기 겐뀨쇼 | 액정 전기 광학 장치 제작 방법 |
| TW345654B (en) * | 1995-02-15 | 1998-11-21 | Handotai Energy Kenkyusho Kk | Active matrix display device |
| JPH08234212A (ja) * | 1995-02-28 | 1996-09-13 | Casio Comput Co Ltd | 液晶表示素子 |
| US6900855B1 (en) | 1995-10-12 | 2005-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device having resin black matrix over counter substrate |
| JPH09105953A (ja) | 1995-10-12 | 1997-04-22 | Semiconductor Energy Lab Co Ltd | 液晶表示装置 |
| JP2907137B2 (ja) * | 1996-08-05 | 1999-06-21 | 日本電気株式会社 | 液晶表示装置 |
| JPH1068955A (ja) * | 1996-08-29 | 1998-03-10 | Toshiba Corp | 液晶表示素子 |
| JP3394433B2 (ja) * | 1997-10-16 | 2003-04-07 | 株式会社日立製作所 | アクティブマトリクス液晶表示装置 |
| JP3022471B2 (ja) * | 1998-03-20 | 2000-03-21 | 日本電気株式会社 | 反射型液晶表示装置 |
| JP3661443B2 (ja) * | 1998-10-27 | 2005-06-15 | 株式会社日立製作所 | アクティブマトリクス液晶表示装置 |
| JP4298131B2 (ja) * | 1999-05-14 | 2009-07-15 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
| US6952020B1 (en) * | 1999-07-06 | 2005-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP3285011B2 (ja) * | 1999-07-14 | 2002-05-27 | 日本電気株式会社 | 液晶表示装置 |
| JP4637312B2 (ja) * | 2000-01-28 | 2011-02-23 | 株式会社半導体エネルギー研究所 | 液晶表示装置およびその作製方法 |
| JP4712210B2 (ja) * | 2000-03-24 | 2011-06-29 | 株式会社半導体エネルギー研究所 | 表示装置 |
| JP4884586B2 (ja) * | 2000-12-18 | 2012-02-29 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
| JP2002189217A (ja) | 2000-12-22 | 2002-07-05 | Matsushita Electric Ind Co Ltd | 液晶表示装置およびその製造方法ならびに画像表示応用装置 |
| US6809012B2 (en) * | 2001-01-18 | 2004-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Method of making a thin film transistor using laser annealing |
| JP2002221727A (ja) | 2001-01-29 | 2002-08-09 | Casio Comput Co Ltd | スペーサ形成方法 |
| JP3949897B2 (ja) * | 2001-01-29 | 2007-07-25 | 株式会社日立製作所 | 液晶表示装置 |
| JP2003131240A (ja) | 2001-10-29 | 2003-05-08 | Hitachi Ltd | 液晶表示装置 |
| JP3792670B2 (ja) * | 2002-04-04 | 2006-07-05 | Nec液晶テクノロジー株式会社 | 横電界方式のアクティブマトリクス型液晶表示装置及びその製造方法 |
| US6933528B2 (en) * | 2002-04-04 | 2005-08-23 | Nec Lcd Technologies, Ltd. | In-plane switching mode active matrix type liquid crystal display device and method of fabricating the same |
| US7253868B2 (en) * | 2002-08-21 | 2007-08-07 | Samsung Electronics Co., Ltd. | Liquid crystal display device comprising a plurality of spacers having compression ratios gradually increasing as advancing from a center to left and right edges of display region |
| JP4068485B2 (ja) | 2002-09-30 | 2008-03-26 | 株式会社東芝 | 画像合成方法、画像合成装置、画像合成プログラム |
| JP2004177848A (ja) | 2002-11-29 | 2004-06-24 | Hitachi Displays Ltd | 液晶表示装置 |
| JP2004252309A (ja) * | 2003-02-21 | 2004-09-09 | Seiko Epson Corp | 電気光学パネル及び電子機器 |
| JP4138672B2 (ja) * | 2003-03-27 | 2008-08-27 | セイコーエプソン株式会社 | 電気光学装置の製造方法 |
| US7286204B2 (en) * | 2003-03-28 | 2007-10-23 | Samsung Electronics Co., Ltd. | Spacers for display devices |
| TWI258112B (en) * | 2003-09-29 | 2006-07-11 | Chi Mei Optoelectronics Corp | Display panel and method for repairing the same |
| JP4360177B2 (ja) | 2003-10-30 | 2009-11-11 | セイコーエプソン株式会社 | 静止画像生成装置、静止画像生成方法、静止画像生成プログラム、および静止画像生成プログラムを記録した記録媒体 |
| KR100975806B1 (ko) * | 2003-10-13 | 2010-08-13 | 삼성전자주식회사 | 액정표시장치 |
| JP3892841B2 (ja) | 2003-10-27 | 2007-03-14 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
| TWI247959B (en) * | 2004-01-30 | 2006-01-21 | Chi Mei Optoelectronics Corp | Liquid crystal display device |
| TWI258619B (en) * | 2005-02-04 | 2006-07-21 | Chi Mei Optoelectronics Corp | Liquid crystal display device, color filter substrate and protrusion structure thereof, and manufacturing method therefor |
| KR100617039B1 (ko) * | 2004-02-26 | 2006-08-30 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치 및 이의 제조 방법 |
| JP2005250036A (ja) | 2004-03-03 | 2005-09-15 | Seiko Epson Corp | 電気光学装置および電子機器 |
| KR101086476B1 (ko) * | 2004-04-14 | 2011-11-25 | 엘지디스플레이 주식회사 | 액정표시패널 및 그 제조방법 |
| KR100672652B1 (ko) * | 2004-04-30 | 2007-01-24 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치 및 이의 제조 방법 |
| TWI261716B (en) * | 2004-05-13 | 2006-09-11 | Quanta Display Inc | Liquid crystal display apparatus and fabrication thereof |
| KR20060013147A (ko) * | 2004-08-06 | 2006-02-09 | 엘지.필립스 엘시디 주식회사 | 액정표시장치 제조방법 |
| KR100642490B1 (ko) * | 2004-09-16 | 2006-11-02 | 엘지.필립스 엘시디 주식회사 | 유기전계발광 소자 및 그 제조방법 |
| JP2006126788A (ja) * | 2004-09-29 | 2006-05-18 | Seiko Epson Corp | 液晶装置及び電子機器 |
| KR101182318B1 (ko) * | 2005-02-01 | 2012-09-20 | 엘지디스플레이 주식회사 | 횡전계형 액정 표시 장치 및 이의 제조 방법 |
| TWI254830B (en) * | 2005-05-11 | 2006-05-11 | Toppoly Optoelectronics Corp | A liquid crystal display device |
| JP2006330470A (ja) | 2005-05-27 | 2006-12-07 | Sharp Corp | 液晶表示装置及びその製造方法 |
| TWI396886B (zh) * | 2006-09-12 | 2013-05-21 | Chunghwa Picture Tubes Ltd | 液晶顯示面板及其製造方法 |
| CN101490610B (zh) * | 2006-09-29 | 2013-06-05 | 株式会社半导体能源研究所 | 半导体设备 |
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2007
- 2007-09-19 CN CN2007800269073A patent/CN101490610B/zh active Active
- 2007-09-19 CN CN201310159591.2A patent/CN103257491B/zh active Active
- 2007-09-19 KR KR1020097001273A patent/KR101462061B1/ko active Active
- 2007-09-19 WO PCT/JP2007/068737 patent/WO2008038686A1/en not_active Ceased
- 2007-09-19 CN CN201310159712.3A patent/CN103698944B/zh active Active
- 2007-09-24 US US11/902,554 patent/US8144301B2/en not_active Expired - Fee Related
- 2007-09-28 TW TW106114985A patent/TWI628495B/zh active
- 2007-09-28 TW TW105113974A patent/TWI572959B/zh active
- 2007-09-28 TW TW109102272A patent/TWI717982B/zh active
- 2007-09-28 TW TW109123592A patent/TWI720920B/zh active
- 2007-09-28 TW TW111105857A patent/TWI825591B/zh not_active IP Right Cessation
- 2007-09-28 TW TW109145324A patent/TWI758023B/zh active
- 2007-09-28 TW TW105139688A patent/TWI597550B/zh active
- 2007-09-28 TW TW096136340A patent/TWI434117B/zh active
- 2007-09-28 TW TW102131676A patent/TWI507802B/zh active
- 2007-09-28 TW TW108102242A patent/TWI705287B/zh active
- 2007-09-28 TW TW104128391A patent/TWI545383B/zh active
- 2007-09-28 TW TW102131674A patent/TWI507801B/zh active
- 2007-09-28 TW TW107117602A patent/TWI656389B/zh active
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2010
- 2010-11-04 JP JP2010247134A patent/JP4679672B2/ja active Active
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2011
- 2011-03-03 JP JP2011045968A patent/JP4927218B2/ja active Active
- 2011-06-29 JP JP2011143749A patent/JP4824140B2/ja active Active
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2012
- 2012-02-08 JP JP2012024839A patent/JP5351295B2/ja active Active
- 2012-03-16 US US13/421,933 patent/US8395745B2/en not_active Expired - Fee Related
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2013
- 2013-05-21 JP JP2013106785A patent/JP5380628B2/ja active Active
- 2013-09-30 JP JP2013203052A patent/JP5499210B2/ja active Active
- 2013-11-21 JP JP2013241150A patent/JP5487355B1/ja active Active
- 2013-12-12 JP JP2013256660A patent/JP5619266B2/ja active Active
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2014
- 2014-07-07 JP JP2014139606A patent/JP5683057B2/ja active Active
- 2014-07-30 JP JP2014154564A patent/JP5622992B2/ja active Active
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2015
- 2015-01-12 JP JP2015003755A patent/JP5993463B2/ja active Active
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2016
- 2016-08-19 JP JP2016161172A patent/JP6257716B2/ja active Active
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2017
- 2017-12-05 JP JP2017233578A patent/JP6611782B2/ja active Active
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2019
- 2019-07-26 JP JP2019137440A patent/JP6616548B2/ja active Active
- 2019-10-08 JP JP2019185019A patent/JP6932753B2/ja active Active
- 2019-11-07 JP JP2019201991A patent/JP2020034943A/ja not_active Withdrawn
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2020
- 2020-10-02 JP JP2020167432A patent/JP6845369B2/ja active Active
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2021
- 2021-09-24 JP JP2021155826A patent/JP7159421B2/ja active Active
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2022
- 2022-10-12 JP JP2022163650A patent/JP2022179669A/ja not_active Withdrawn
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1062789A (ja) * | 1996-08-23 | 1998-03-06 | Sharp Corp | 液晶表示装置及びその製造方法 |
| JP2001077374A (ja) * | 1999-07-06 | 2001-03-23 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| KR20010029895A (ko) * | 1999-07-06 | 2001-04-16 | 야마자끼 순페이 | 반도체 장치 및 그 제조 장치 |
| JP2001093598A (ja) * | 1999-07-22 | 2001-04-06 | Semiconductor Energy Lab Co Ltd | コンタクト構造および半導体装置 |
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| Publication | Publication Date | Title |
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| KR101462061B1 (ko) | 반도체장치 | |
| JP4700665B2 (ja) | 半導体装置 |
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