KR101424017B1 - 기판 검사 장치 - Google Patents

기판 검사 장치 Download PDF

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Publication number
KR101424017B1
KR101424017B1 KR1020070091423A KR20070091423A KR101424017B1 KR 101424017 B1 KR101424017 B1 KR 101424017B1 KR 1020070091423 A KR1020070091423 A KR 1020070091423A KR 20070091423 A KR20070091423 A KR 20070091423A KR 101424017 B1 KR101424017 B1 KR 101424017B1
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KR
South Korea
Prior art keywords
substrate
inspection
section
stage
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020070091423A
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English (en)
Korean (ko)
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KR20080023647A (ko
Inventor
히로시 후지모리
Original Assignee
올림푸스 가부시키가이샤
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Publication of KR20080023647A publication Critical patent/KR20080023647A/ko
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Publication of KR101424017B1 publication Critical patent/KR101424017B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
KR1020070091423A 2006-09-11 2007-09-10 기판 검사 장치 Expired - Fee Related KR101424017B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00245739 2006-09-11
JP2006245739A JP5265099B2 (ja) 2006-09-11 2006-09-11 基板検査装置

Publications (2)

Publication Number Publication Date
KR20080023647A KR20080023647A (ko) 2008-03-14
KR101424017B1 true KR101424017B1 (ko) 2014-07-28

Family

ID=39207522

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070091423A Expired - Fee Related KR101424017B1 (ko) 2006-09-11 2007-09-10 기판 검사 장치

Country Status (4)

Country Link
JP (1) JP5265099B2 (https=)
KR (1) KR101424017B1 (https=)
CN (1) CN101144920B (https=)
TW (1) TWI416095B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5317618B2 (ja) * 2008-10-06 2013-10-16 株式会社日立ハイテクノロジーズ 表示パネルモジュール組立装置及び基板搬送装置
JP5380225B2 (ja) * 2009-09-24 2014-01-08 株式会社日立ハイテクノロジーズ ガラス基板の検査装置
JP5683333B2 (ja) * 2011-03-10 2015-03-11 東レエンジニアリング株式会社 基板検査装置及び方法
CN102320472B (zh) * 2011-06-03 2013-07-10 深圳市华星光电技术有限公司 基板传送系统及传送方法
KR101773494B1 (ko) * 2013-02-26 2017-08-31 가부시키가이샤 아이에이치아이 반송 장치
TWI472767B (zh) * 2014-01-22 2015-02-11 Utechzone Co Ltd Detection device
US10289930B2 (en) * 2017-02-09 2019-05-14 Glasstech, Inc. System and associated for online measurement of the optical characteristics of a glass sheet
KR102140869B1 (ko) * 2018-09-14 2020-08-03 양승현 Pcb기판 이송장치
US11867747B2 (en) 2019-01-24 2024-01-09 Koh Young Technology Inc. Transfer apparatus for inspection apparatus, inspection apparatus, and object inspection method using same
CN109926792B (zh) * 2019-04-25 2021-04-06 大族激光科技产业集团股份有限公司 一种激光切割载台
CN112595722B (zh) * 2021-03-02 2021-06-08 苏州天准科技股份有限公司 一种分段式气浮平台、平台模组和检测设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置
JP2006237482A (ja) * 2005-02-28 2006-09-07 Tokyo Electron Ltd 基板処理装置及び基板処理方法及び基板処理プログラム

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0527215A (ja) 1991-07-23 1993-02-05 Toshiba Corp 基板搬送装置
IL131282A (en) * 1999-08-05 2009-02-11 Orbotech Ltd Apparatus and methods for inspection of objects
JP2005010221A (ja) * 2003-06-16 2005-01-13 Kowa:Kk ガラス基板熱処理装置
JP4426276B2 (ja) * 2003-10-06 2010-03-03 住友重機械工業株式会社 搬送装置、塗布システム、及び検査システム
KR101023729B1 (ko) * 2004-06-30 2011-03-25 엘지디스플레이 주식회사 대형 기판을 반송하는 셔틀 및 반송 방법
KR20060007187A (ko) * 2004-07-19 2006-01-24 삼성전자주식회사 기판의 처리방법과 처리장치
TW200614412A (en) * 2004-09-27 2006-05-01 Olympus Corp Macroscopic inspection apparatus and macroscopic inspection method
JP4579670B2 (ja) * 2004-12-16 2010-11-10 芝浦メカトロニクス株式会社 部品の圧着装置及び圧着方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置
JP2006237482A (ja) * 2005-02-28 2006-09-07 Tokyo Electron Ltd 基板処理装置及び基板処理方法及び基板処理プログラム

Also Published As

Publication number Publication date
TW200819734A (en) 2008-05-01
JP5265099B2 (ja) 2013-08-14
CN101144920B (zh) 2011-11-09
CN101144920A (zh) 2008-03-19
TWI416095B (zh) 2013-11-21
JP2008063130A (ja) 2008-03-21
KR20080023647A (ko) 2008-03-14

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