KR101358587B1 - 고체 이미지 센서 및 촬상 시스템 - Google Patents

고체 이미지 센서 및 촬상 시스템 Download PDF

Info

Publication number
KR101358587B1
KR101358587B1 KR1020110028185A KR20110028185A KR101358587B1 KR 101358587 B1 KR101358587 B1 KR 101358587B1 KR 1020110028185 A KR1020110028185 A KR 1020110028185A KR 20110028185 A KR20110028185 A KR 20110028185A KR 101358587 B1 KR101358587 B1 KR 101358587B1
Authority
KR
South Korea
Prior art keywords
insulating film
image sensor
state image
refractive index
solid state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020110028185A
Other languages
English (en)
Korean (ko)
Other versions
KR20110112206A (ko
Inventor
다다시 사와야마
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20110112206A publication Critical patent/KR20110112206A/ko
Application granted granted Critical
Publication of KR101358587B1 publication Critical patent/KR101358587B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/413Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8067Reflectors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8053Colour filters
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Color Television Image Signal Generators (AREA)
KR1020110028185A 2010-04-06 2011-03-29 고체 이미지 센서 및 촬상 시스템 Expired - Fee Related KR101358587B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2010-088192 2010-04-06
JP2010088192 2010-04-06
JPJP-P-2011-026532 2011-02-09
JP2011026532A JP5595298B2 (ja) 2010-04-06 2011-02-09 固体撮像装置及び撮像システム

Publications (2)

Publication Number Publication Date
KR20110112206A KR20110112206A (ko) 2011-10-12
KR101358587B1 true KR101358587B1 (ko) 2014-02-04

Family

ID=44247834

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110028185A Expired - Fee Related KR101358587B1 (ko) 2010-04-06 2011-03-29 고체 이미지 센서 및 촬상 시스템

Country Status (6)

Country Link
US (2) US8525907B2 (https=)
EP (1) EP2375448B1 (https=)
JP (1) JP5595298B2 (https=)
KR (1) KR101358587B1 (https=)
CN (1) CN102214668B (https=)
RU (1) RU2466478C1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12514023B2 (en) 2022-07-08 2025-12-30 Electronics And Telecommunications Research Institute Light-receiving device having electromagnetic interference removal function

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5314914B2 (ja) * 2008-04-04 2013-10-16 キヤノン株式会社 光電変換装置、撮像システム、設計方法、及び光電変換装置の製造方法
WO2009144644A1 (en) * 2008-05-27 2009-12-03 Nxp B.V. Light sensor arrangement
TWI376795B (en) * 2008-06-13 2012-11-11 Taiwan Semiconductor Mfg Image sensor device and method for manufacturing the same
KR101647779B1 (ko) * 2009-09-09 2016-08-11 삼성전자 주식회사 이미지 센서, 그 제조 방법, 및 상기 이미지 센서를 포함하는 장치
JP2013070030A (ja) * 2011-09-06 2013-04-18 Sony Corp 撮像素子、電子機器、並びに、情報処理装置
JP2013077678A (ja) * 2011-09-30 2013-04-25 Sony Corp 撮像素子、電子機器、並びに、製造方法
JP2013098503A (ja) * 2011-11-07 2013-05-20 Toshiba Corp 固体撮像素子
JP5845856B2 (ja) * 2011-11-30 2016-01-20 ソニー株式会社 固体撮像素子およびその製造方法、並びに電子機器
JP5542247B2 (ja) * 2012-03-30 2014-07-09 富士フイルム株式会社 撮像素子及び撮像装置
JP2014022649A (ja) * 2012-07-20 2014-02-03 Nikon Corp 固体撮像素子、撮像装置、及び電子機器
JP6053382B2 (ja) 2012-08-07 2016-12-27 キヤノン株式会社 撮像装置、撮像システム、および撮像装置の製造方法。
JP6045250B2 (ja) * 2012-08-10 2016-12-14 オリンパス株式会社 固体撮像装置および撮像装置
CN102881700B (zh) * 2012-09-18 2017-06-23 上海集成电路研发中心有限公司 一种cmos图像传感器及其制造方法
WO2014062970A1 (en) * 2012-10-17 2014-04-24 Gelsight, Inc. Three-dimensional digital impression and visualization of objects
US10203411B2 (en) * 2012-11-02 2019-02-12 Maxim Integrated Products, Inc. System and method for reducing ambient light sensitivity of infrared (IR) detectors
CN103022068B (zh) * 2012-12-24 2017-04-19 上海集成电路研发中心有限公司 一种cmos图像传感器及其制造方法
US8907385B2 (en) * 2012-12-27 2014-12-09 Taiwan Semiconductor Manufacturing Company, Ltd. Surface treatment for BSI image sensors
JP2014175623A (ja) * 2013-03-12 2014-09-22 Toshiba Corp 固体撮像装置及びその製造方法
DE102013104968B4 (de) * 2013-05-14 2020-12-31 ams Sensors Germany GmbH Sensoranordnung mit einem siliziumbasierten optischen Sensor und einem Substrat für funktionelle Schichtsysteme
JP6130221B2 (ja) * 2013-05-24 2017-05-17 ソニー株式会社 固体撮像装置、および電子機器
JP2015037120A (ja) * 2013-08-13 2015-02-23 株式会社東芝 固体撮像装置
US9859326B2 (en) * 2014-01-24 2018-01-02 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor devices, image sensors, and methods of manufacture thereof
US10223479B1 (en) * 2014-05-20 2019-03-05 State Farm Mutual Automobile Insurance Company Autonomous vehicle operation feature evaluation
JP6444066B2 (ja) * 2014-06-02 2018-12-26 キヤノン株式会社 光電変換装置および撮像システム
JP2016096254A (ja) * 2014-11-14 2016-05-26 キヤノン株式会社 固体撮像装置
JP2016127264A (ja) * 2014-12-26 2016-07-11 ソニー株式会社 固体撮像素子およびその製造方法、並びに電子機器
JP6539123B2 (ja) * 2015-06-18 2019-07-03 キヤノン株式会社 固体撮像装置及びその製造方法ならびにカメラ
CN108604590A (zh) 2016-01-29 2018-09-28 Towerjazz松下半导体有限公司 固体摄像装置
JP6744748B2 (ja) * 2016-04-06 2020-08-19 キヤノン株式会社 固体撮像装置及びその製造方法
KR102632442B1 (ko) * 2018-05-09 2024-01-31 삼성전자주식회사 이미지 센서 및 전자 장치
JP2020113573A (ja) * 2019-01-08 2020-07-27 キヤノン株式会社 光電変換装置
TWI878310B (zh) * 2019-06-26 2025-04-01 日商索尼半導體解決方案公司 半導體裝置
US11698296B2 (en) * 2019-09-25 2023-07-11 Stmicroelectronics (Crolles 2) Sas Light sensor using pixel optical diffraction gratings having different pitches
WO2021062663A1 (zh) 2019-09-30 2021-04-08 Oppo广东移动通信有限公司 图像传感器、摄像头组件及移动终端
CN110649057B (zh) * 2019-09-30 2021-03-05 Oppo广东移动通信有限公司 图像传感器、摄像头组件及移动终端
WO2021062661A1 (zh) 2019-09-30 2021-04-08 Oppo广东移动通信有限公司 图像传感器、摄像头组件及移动终端
US11398512B2 (en) * 2019-12-19 2022-07-26 Taiwan Semiconductor Manufacturing Company, Ltd. Photo-sensing device and manufacturing method thereof
CN111430567A (zh) * 2020-03-31 2020-07-17 武汉华星光电半导体显示技术有限公司 一种显示面板及其制备方法
EP4179369A1 (en) * 2020-07-10 2023-05-17 Acacia Communications, Inc. Optical waveguide passivation for moisture protection
JP7457989B2 (ja) * 2020-07-30 2024-03-29 パナソニックIpマネジメント株式会社 光検出器、固体撮像素子、及び、光検出器の製造方法
US12604550B2 (en) * 2022-07-14 2026-04-14 Visera Technologies Company Limited Image sensor and method for reducing image signal processor
TWI864979B (zh) * 2023-08-21 2024-12-01 菱光科技股份有限公司 接觸式影像感測器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1341235A2 (en) 2002-02-28 2003-09-03 Canon Kabushiki Kaisha Image pickup apparatus
US20080251873A1 (en) 2006-12-13 2008-10-16 Matsushita Electric Industrial Co., Ltd. Solid-state imaging device, manufactoring method thereof and camera
US7666704B2 (en) 2005-04-22 2010-02-23 Panasonic Corporation Solid-state image pickup element, method for manufacturing such solid-state image pickup element and optical waveguide forming device
JP2010056247A (ja) 2008-08-27 2010-03-11 Canon Inc 撮像センサ及び撮像装置

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2757624B2 (ja) * 1991-10-21 1998-05-25 日本電気株式会社 赤外線固体撮像素子及びその製造方法
JPH08293462A (ja) * 1995-02-21 1996-11-05 Seiko Epson Corp 半導体装置の製造方法
JP3204216B2 (ja) * 1998-06-24 2001-09-04 日本電気株式会社 固体撮像装置およびその製造方法
JP3824469B2 (ja) * 2000-04-03 2006-09-20 シャープ株式会社 固体撮像装置、及びその製造方法
JP3959734B2 (ja) * 2001-12-28 2007-08-15 ソニー株式会社 固体撮像素子およびその製造方法
JP4165077B2 (ja) 2002-01-28 2008-10-15 ソニー株式会社 半導体撮像装置
JP2003249632A (ja) 2002-02-22 2003-09-05 Sony Corp 固体撮像素子およびその製造方法
JP4123415B2 (ja) * 2002-05-20 2008-07-23 ソニー株式会社 固体撮像装置
KR101089684B1 (ko) 2002-12-13 2011-12-07 소니 주식회사 고체 촬상 소자 및 그 제조방법
JP4120543B2 (ja) * 2002-12-25 2008-07-16 ソニー株式会社 固体撮像素子およびその製造方法
JP4123060B2 (ja) 2003-06-11 2008-07-23 ソニー株式会社 固体撮像素子及びその製造方法
JP2006049825A (ja) 2004-07-08 2006-02-16 Matsushita Electric Ind Co Ltd 固体撮像素子およびその製造方法
US7298955B2 (en) * 2005-03-30 2007-11-20 Fujifilm Corporation Solid-state image pickup element and method of producing the same
JP2006351788A (ja) * 2005-06-15 2006-12-28 Fujifilm Holdings Corp 固体撮像素子およびその製造方法
JP2007012676A (ja) * 2005-06-28 2007-01-18 Fujifilm Holdings Corp 固体撮像素子の製造方法および固体撮像素子
US8013409B2 (en) 2005-09-27 2011-09-06 Canon Kabushiki Kaisha Photoelectric conversion device and fabrication method therefor
JP4972924B2 (ja) * 2005-12-19 2012-07-11 ソニー株式会社 固体撮像装置およびその製造方法、並びにカメラ
JP2007201091A (ja) 2006-01-25 2007-08-09 Fujifilm Corp 固体撮像素子の製造方法
JP2007287872A (ja) * 2006-04-14 2007-11-01 Fujifilm Corp 半導体素子及び半導体素子の製造方法
JP2007305690A (ja) * 2006-05-09 2007-11-22 Matsushita Electric Ind Co Ltd 固体撮像装置用素子及びその製造方法
JP2008091800A (ja) 2006-10-04 2008-04-17 Canon Inc 撮像素子及びその製造方法並びに撮像システム
JP4697258B2 (ja) * 2008-05-09 2011-06-08 ソニー株式会社 固体撮像装置と電子機器
JP2010123745A (ja) 2008-11-19 2010-06-03 Sony Corp 固体撮像装置、カメラ
JP5402092B2 (ja) * 2009-03-04 2014-01-29 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法および電子機器
JP2011108759A (ja) 2009-11-13 2011-06-02 Canon Inc 固体撮像装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1341235A2 (en) 2002-02-28 2003-09-03 Canon Kabushiki Kaisha Image pickup apparatus
US7666704B2 (en) 2005-04-22 2010-02-23 Panasonic Corporation Solid-state image pickup element, method for manufacturing such solid-state image pickup element and optical waveguide forming device
US20080251873A1 (en) 2006-12-13 2008-10-16 Matsushita Electric Industrial Co., Ltd. Solid-state imaging device, manufactoring method thereof and camera
JP2010056247A (ja) 2008-08-27 2010-03-11 Canon Inc 撮像センサ及び撮像装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12514023B2 (en) 2022-07-08 2025-12-30 Electronics And Telecommunications Research Institute Light-receiving device having electromagnetic interference removal function

Also Published As

Publication number Publication date
EP2375448B1 (en) 2015-08-12
US8525907B2 (en) 2013-09-03
KR20110112206A (ko) 2011-10-12
US20110242350A1 (en) 2011-10-06
CN102214668B (zh) 2014-12-10
US20130307109A1 (en) 2013-11-21
EP2375448A2 (en) 2011-10-12
US9054243B2 (en) 2015-06-09
JP5595298B2 (ja) 2014-09-24
RU2466478C1 (ru) 2012-11-10
RU2011113183A (ru) 2012-10-10
CN102214668A (zh) 2011-10-12
JP2011233862A (ja) 2011-11-17
EP2375448A3 (en) 2012-08-29

Similar Documents

Publication Publication Date Title
KR101358587B1 (ko) 고체 이미지 센서 및 촬상 시스템
US8648943B2 (en) Solid-state imaging device and camera module
US8395686B2 (en) Solid-state imaging device, method of manufacturing the same, and camera
JP6060851B2 (ja) 固体撮像装置の製造方法
US8334497B2 (en) Image sensor comprising a waveguide structure and imaging apparatus
US8633559B2 (en) Solid-state imaging device, method of manufacturing the same, and electronic apparatus
US9030587B2 (en) Solid-state image sensor with light-guiding portion
JP7636339B2 (ja) 撮像素子および撮像装置並びに撮像素子の製造方法
JP4696104B2 (ja) 裏面照射型固体撮像素子及びその製造方法
US20160027840A1 (en) Solid-state imaging device
JP4971616B2 (ja) 撮像装置
JP2010118477A (ja) 光電変換装置及び撮像システム
JP2011023455A (ja) 固体撮像装置
JP2014096476A (ja) 固体撮像素子及びその製造方法
KR101068905B1 (ko) 광전변환장치, 촬상 시스템, 광전변환장치의 설계방법 및 광전변환장치의 제조방법
JP2011238636A (ja) 固体撮像素子及びその製造方法

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20161227

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20171226

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20190122

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20200114

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20210128

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20210128

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000