KR101222387B1 - 기판 도포 장치 및 기판 도포 방법 - Google Patents

기판 도포 장치 및 기판 도포 방법 Download PDF

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Publication number
KR101222387B1
KR101222387B1 KR1020100026320A KR20100026320A KR101222387B1 KR 101222387 B1 KR101222387 B1 KR 101222387B1 KR 1020100026320 A KR1020100026320 A KR 1020100026320A KR 20100026320 A KR20100026320 A KR 20100026320A KR 101222387 B1 KR101222387 B1 KR 101222387B1
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South Korea
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substrate
nozzle
stage
board
gas flow
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English (en)
Korean (ko)
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KR20100108238A (ko
Inventor
요시노리 다카기
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다이니폰 스크린 세이조우 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

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  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)
KR1020100026320A 2009-03-27 2010-03-24 기판 도포 장치 및 기판 도포 방법 Active KR101222387B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009079303A JP5346643B2 (ja) 2009-03-27 2009-03-27 基板塗布装置および基板塗布方法
JPJP-P-2009-079303 2009-03-27

Publications (2)

Publication Number Publication Date
KR20100108238A KR20100108238A (ko) 2010-10-06
KR101222387B1 true KR101222387B1 (ko) 2013-01-15

Family

ID=43044236

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100026320A Active KR101222387B1 (ko) 2009-03-27 2010-03-24 기판 도포 장치 및 기판 도포 방법

Country Status (3)

Country Link
JP (1) JP5346643B2 (enrdf_load_stackoverflow)
KR (1) KR101222387B1 (enrdf_load_stackoverflow)
TW (1) TWI433731B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180082960A (ko) * 2017-01-11 2018-07-19 가부시키가이샤 스크린 홀딩스 기판 반송 장치 및 기판 반송 방법 그리고 기판 처리 장치

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102974508B (zh) * 2012-12-10 2016-08-10 京东方科技集团股份有限公司 涂布嘴防护件、涂布喷头组件
JP6737649B2 (ja) * 2016-07-04 2020-08-12 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
JP2018043200A (ja) * 2016-09-15 2018-03-22 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
JP2018113327A (ja) * 2017-01-11 2018-07-19 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP7029248B2 (ja) * 2017-08-22 2022-03-03 Hoya株式会社 レジスト膜付マスクブランク、及びフォトマスクの製造方法
CN107790329A (zh) * 2017-10-27 2018-03-13 珠海市博杰电子有限公司 一种高速高精密点胶机
US10804133B2 (en) * 2017-11-21 2020-10-13 Taiwan Semiconductor Manufacturing Co., Ltd. Article transferring method in semiconductor fabrication
JP6738373B2 (ja) * 2018-05-31 2020-08-12 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
ES3034603T3 (en) * 2021-08-05 2025-08-20 Lg Energy Solution Ltd Drying apparatus for manufacturing electrode and method for manufacturing electrode using same
CN119972446B (zh) * 2025-04-15 2025-07-08 德沪涂膜设备(苏州)有限公司 一种涂布系统以及涂布方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019396A (ja) 2004-06-30 2006-01-19 Tokyo Electron Ltd 基板処理装置
JP2007105623A (ja) 2005-10-13 2007-04-26 Tokyo Electron Ltd 塗布装置及び塗布方法
KR20070074482A (ko) * 2006-01-06 2007-07-12 도쿄 엘렉트론 가부시키가이샤 기판 반송 장치, 기판 반송 방법 및 컴퓨터 판독 가능한기억 매체
KR20090023243A (ko) * 2007-08-30 2009-03-04 도오꾜오까고오교 가부시끼가이샤 도포 장치 및 도포 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4325084B2 (ja) * 2000-06-19 2009-09-02 東レ株式会社 塗布方法およびそれを用いたカラーフィルタの製造方法
JP4670182B2 (ja) * 2001-05-25 2011-04-13 凸版印刷株式会社 単板連続塗布装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019396A (ja) 2004-06-30 2006-01-19 Tokyo Electron Ltd 基板処理装置
JP2007105623A (ja) 2005-10-13 2007-04-26 Tokyo Electron Ltd 塗布装置及び塗布方法
KR20070074482A (ko) * 2006-01-06 2007-07-12 도쿄 엘렉트론 가부시키가이샤 기판 반송 장치, 기판 반송 방법 및 컴퓨터 판독 가능한기억 매체
KR20090023243A (ko) * 2007-08-30 2009-03-04 도오꾜오까고오교 가부시끼가이샤 도포 장치 및 도포 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180082960A (ko) * 2017-01-11 2018-07-19 가부시키가이샤 스크린 홀딩스 기판 반송 장치 및 기판 반송 방법 그리고 기판 처리 장치
KR102117745B1 (ko) * 2017-01-11 2020-06-01 가부시키가이샤 스크린 홀딩스 기판 처리 방법 그리고 기판 처리 장치

Also Published As

Publication number Publication date
TW201039928A (en) 2010-11-16
JP2010227850A (ja) 2010-10-14
JP5346643B2 (ja) 2013-11-20
TWI433731B (zh) 2014-04-11
KR20100108238A (ko) 2010-10-06

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