JP5346643B2 - 基板塗布装置および基板塗布方法 - Google Patents

基板塗布装置および基板塗布方法 Download PDF

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Publication number
JP5346643B2
JP5346643B2 JP2009079303A JP2009079303A JP5346643B2 JP 5346643 B2 JP5346643 B2 JP 5346643B2 JP 2009079303 A JP2009079303 A JP 2009079303A JP 2009079303 A JP2009079303 A JP 2009079303A JP 5346643 B2 JP5346643 B2 JP 5346643B2
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Japan
Prior art keywords
substrate
nozzle
stage
gas flow
gas
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JP2009079303A
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English (en)
Japanese (ja)
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JP2010227850A5 (enrdf_load_stackoverflow
JP2010227850A (ja
Inventor
善則 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2009079303A priority Critical patent/JP5346643B2/ja
Priority to TW099106182A priority patent/TWI433731B/zh
Priority to KR1020100026320A priority patent/KR101222387B1/ko
Publication of JP2010227850A publication Critical patent/JP2010227850A/ja
Publication of JP2010227850A5 publication Critical patent/JP2010227850A5/ja
Application granted granted Critical
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)
JP2009079303A 2009-03-27 2009-03-27 基板塗布装置および基板塗布方法 Active JP5346643B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009079303A JP5346643B2 (ja) 2009-03-27 2009-03-27 基板塗布装置および基板塗布方法
TW099106182A TWI433731B (zh) 2009-03-27 2010-03-03 基板塗佈裝置及基板塗佈方法
KR1020100026320A KR101222387B1 (ko) 2009-03-27 2010-03-24 기판 도포 장치 및 기판 도포 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009079303A JP5346643B2 (ja) 2009-03-27 2009-03-27 基板塗布装置および基板塗布方法

Publications (3)

Publication Number Publication Date
JP2010227850A JP2010227850A (ja) 2010-10-14
JP2010227850A5 JP2010227850A5 (enrdf_load_stackoverflow) 2010-12-09
JP5346643B2 true JP5346643B2 (ja) 2013-11-20

Family

ID=43044236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009079303A Active JP5346643B2 (ja) 2009-03-27 2009-03-27 基板塗布装置および基板塗布方法

Country Status (3)

Country Link
JP (1) JP5346643B2 (enrdf_load_stackoverflow)
KR (1) KR101222387B1 (enrdf_load_stackoverflow)
TW (1) TWI433731B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018043200A (ja) * 2016-09-15 2018-03-22 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
CN108305847A (zh) * 2017-01-11 2018-07-20 株式会社斯库林集团 基板搬运装置、基板搬运方法以及基板处理装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102974508B (zh) * 2012-12-10 2016-08-10 京东方科技集团股份有限公司 涂布嘴防护件、涂布喷头组件
JP6737649B2 (ja) * 2016-07-04 2020-08-12 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
JP2018113327A (ja) * 2017-01-11 2018-07-19 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP7029248B2 (ja) * 2017-08-22 2022-03-03 Hoya株式会社 レジスト膜付マスクブランク、及びフォトマスクの製造方法
CN107790329A (zh) * 2017-10-27 2018-03-13 珠海市博杰电子有限公司 一种高速高精密点胶机
US10804133B2 (en) * 2017-11-21 2020-10-13 Taiwan Semiconductor Manufacturing Co., Ltd. Article transferring method in semiconductor fabrication
JP6738373B2 (ja) * 2018-05-31 2020-08-12 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
ES3034603T3 (en) * 2021-08-05 2025-08-20 Lg Energy Solution Ltd Drying apparatus for manufacturing electrode and method for manufacturing electrode using same
CN119972446B (zh) * 2025-04-15 2025-07-08 德沪涂膜设备(苏州)有限公司 一种涂布系统以及涂布方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4325084B2 (ja) * 2000-06-19 2009-09-02 東レ株式会社 塗布方法およびそれを用いたカラーフィルタの製造方法
JP4670182B2 (ja) * 2001-05-25 2011-04-13 凸版印刷株式会社 単板連続塗布装置
JP4429825B2 (ja) 2004-06-30 2010-03-10 東京エレクトロン株式会社 基板処理装置
JP4673180B2 (ja) 2005-10-13 2011-04-20 東京エレクトロン株式会社 塗布装置及び塗布方法
JP4594241B2 (ja) * 2006-01-06 2010-12-08 東京エレクトロン株式会社 基板搬送装置、基板搬送方法及びコンピュータプログラム
JP4942589B2 (ja) * 2007-08-30 2012-05-30 東京応化工業株式会社 塗布装置及び塗布方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018043200A (ja) * 2016-09-15 2018-03-22 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
CN108305847A (zh) * 2017-01-11 2018-07-20 株式会社斯库林集团 基板搬运装置、基板搬运方法以及基板处理装置

Also Published As

Publication number Publication date
KR101222387B1 (ko) 2013-01-15
TW201039928A (en) 2010-11-16
JP2010227850A (ja) 2010-10-14
TWI433731B (zh) 2014-04-11
KR20100108238A (ko) 2010-10-06

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