KR101120530B1 - 기판 수납용의 수납 용기 - Google Patents
기판 수납용의 수납 용기 Download PDFInfo
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- KR101120530B1 KR101120530B1 KR1020070089982A KR20070089982A KR101120530B1 KR 101120530 B1 KR101120530 B1 KR 101120530B1 KR 1020070089982 A KR1020070089982 A KR 1020070089982A KR 20070089982 A KR20070089982 A KR 20070089982A KR 101120530 B1 KR101120530 B1 KR 101120530B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
Description
Claims (11)
- 기판을 상하 방향으로 간격을 두고 배열한 상태에서 복수매 유지하도록 구성된 수납 용기로서,상기 수납 용기는, 상기 수납 용기의 일단 측의 제1 개구와, 상기 제1 개구와는 수평 방향으로 간격을 둔 타단 측에 설치된 제2 개구를 가지는, 전체적으로 사각형의 단면을 가지는 통형으로 형성되고, 상기 제1 개구는, 상기 기판을 한 장씩 출입시키기 위한 출입구로서 구성되고,상기 제2 개구로부터 상기 제1 개구를 향해 통풍시키는 팬 필터 유닛은, 상기 수납 용기에서의 상기 제2 개구의 영역에 설치되고,상기 용기 본체에서의 상기 출입구를 개폐하는 커버는, 닫힌 상태에서 상기 출입구의 일부를 통기구로서 개구한 상태로, 상기 용기 본체의 출입구의 영역에 형성되어 있고,상기 커버는 상하 방향으로 배열된 복수개의 커버 형성 부재를 구비하고,상기 닫힌 상태에서 인접하는 상기 커버 형성 부재 사이에 상기 통기구가 형성되고, 상기 커버 형성 부재 각각은 상기 출입구의 가로폭 방향을 따른 축심 주위에서 회전하고, 열린 상태에서 인접하는 상기 커버 형성 부재 사이에 기판 출입구가 형성되도록 구성되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항에 있어서,상기 통기구는, 상기 출입구의 가로폭과 동일한 가로폭을 가지는 슬릿형으로 형성되고, 또한 상하 방향으로 복수개 형성되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기
- 제2항에 있어서,상기 통기구는, 상기 용기 본체에 유지되는 복수매의 상기 기판 각각에 대응시킨 상태에서 상하 방향으로 복수개 형성되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항에 있어서,상기 커버는, 상기 기판의 출입을 허용하는 열린 상태에서, 인접하는 기판 출입구 사이를 닫는 형태로, 상기 출입구를 열도록 구성되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제4항에 있어서,상기 커버 형성 부재 각각은, 상기 출입구의 가로폭과 동일한 가로폭을 가지는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항 내지 제5항 중 어느 한 항에 있어서,상기 커버는 상기 닫힌 상태 측으로 복귀 가압되도록 구성되며,상방으로의 이동에 의해 상기 커버를 열린 상태로 조작하는 조작부는, 상기 용기 본체의 저면부로부터 하방으로 돌출하는 상태로 설치되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항 내지 제5항 중 어느 한 항에 있어서,상기 용기 본체의 횡측면부의 면을 따르는 방향으로의 이동에 의해 상기 커버를 열린 상태로 조작하는 조작부는, 상기 용기 본체의 횡측면부로부터 횡측방으로 돌출하는 상태로 설치되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항 내지 제5항 중 어느 한 항에 있어서,상하 방향을 따른 이동에 의해 상기 커버를 열린 상태로 조작하는 조작부는, 상기 조작부의 선단의 피조작 부분이 상기 용기 본체의 횡측벽의 전면부보다 전방으로 위치하는 상태로 구성되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항 내지 제5항 중 어느 한 항에 있어서,상기 커버는, 상기 용기 본체에 대해서 착탈할 수 있도록 장착되어 있는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항 내지 제5항 중 어느 한 항에 있어서,상기 팬 필터 유닛은, 프레임에 지지된 팬과 필터와 수전부를 구비하는 것을 특징으로 하는 기판 수납용의 수납 용기.
- 제1항 내지 제5항 중 어느 한 항에 있어서,상기 팬 필터 유닛은, 배터리를 구비하는 것을 특징으로 하는 기판 수납용의 수납 용기.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006248173 | 2006-09-13 | ||
JPJP-P-2006-00248173 | 2006-09-13 | ||
JPJP-P-2007-00202090 | 2007-08-02 | ||
JP2007202090A JP4953010B2 (ja) | 2006-09-13 | 2007-08-02 | 基板収納用の収納容器 |
Publications (2)
Publication Number | Publication Date |
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KR20080024445A KR20080024445A (ko) | 2008-03-18 |
KR101120530B1 true KR101120530B1 (ko) | 2012-03-07 |
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ID=39187456
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070089982A KR101120530B1 (ko) | 2006-09-13 | 2007-09-05 | 기판 수납용의 수납 용기 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7694817B2 (ko) |
JP (1) | JP4953010B2 (ko) |
KR (1) | KR101120530B1 (ko) |
CN (1) | CN101143637B (ko) |
TW (1) | TWI399329B (ko) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4577589B2 (ja) * | 2008-04-22 | 2010-11-10 | 株式会社ダイフク | 物品搬送装置 |
KR101110621B1 (ko) * | 2008-09-12 | 2012-02-28 | 가부시키가이샤 다이후쿠 | 기판용 수납 용기와 기판용 수납 용기를 위한 기판 반송 설비 |
JP5429523B2 (ja) * | 2008-09-12 | 2014-02-26 | 株式会社ダイフク | 基板用収納容器 |
DE102009040555B4 (de) * | 2009-09-08 | 2013-11-21 | Grenzebach Maschinenbau Gmbh | Verfahren und Vorrichtung zum Archivieren und /oder Zwischenlagern von Glasscheiben in Reinräumen |
JP5273479B2 (ja) * | 2009-10-23 | 2013-08-28 | 株式会社ダイフク | 基板用収納容器、及び、それを搬送する搬送設備 |
JP5168594B2 (ja) * | 2009-11-25 | 2013-03-21 | 株式会社ダイフク | 基板搬送設備 |
JP5656003B2 (ja) * | 2010-05-17 | 2015-01-21 | 株式会社ダイフク | カセットストッカ |
WO2012088172A2 (en) * | 2010-12-20 | 2012-06-28 | Entegris, Inc. | Front opening large substrate container |
KR20130005880A (ko) * | 2011-07-07 | 2013-01-16 | 삼성디스플레이 주식회사 | 기판 수납용 카세트 |
JP5741946B2 (ja) * | 2011-09-22 | 2015-07-01 | 株式会社ダイフク | 清浄気送風ユニット |
US20130123966A1 (en) * | 2011-11-14 | 2013-05-16 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Spatial three-dimensional inline handling system |
CN103158140A (zh) * | 2011-12-08 | 2013-06-19 | 苏州工业园区高登威科技有限公司 | 料架 |
CN104221136B (zh) * | 2012-04-16 | 2017-05-31 | 日商乐华股份有限公司 | 收纳容器、收纳容器的开闭器开闭单元、及使用它们的晶圆储料器 |
US9347681B2 (en) * | 2012-09-26 | 2016-05-24 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Cleanroom |
CN103693343B (zh) * | 2014-01-02 | 2016-01-06 | 北京七星华创电子股份有限公司 | 一种多层存储台装置 |
CN104973349A (zh) * | 2014-04-03 | 2015-10-14 | 四川虹视显示技术有限公司 | 玻璃基板储藏装置 |
CN104289621B (zh) * | 2014-08-01 | 2018-05-01 | 徐州德坤电气科技有限公司 | 一种基于数字总线的空调器翅片总成自动胀管系统 |
JP6414535B2 (ja) * | 2015-10-28 | 2018-10-31 | 株式会社ダイフク | 収納容器 |
JP6572854B2 (ja) * | 2016-09-09 | 2019-09-11 | 株式会社ダイフク | 容器収納設備 |
JP6610518B2 (ja) * | 2016-11-30 | 2019-11-27 | 株式会社ダイフク | 検査装置 |
CN110539956A (zh) * | 2019-08-07 | 2019-12-06 | 世源科技工程有限公司 | 一种卡匣围护装置 |
KR102492160B1 (ko) * | 2021-06-30 | 2023-01-26 | 주식회사 에스에프에이 | 스태커 크레인용 핸드모듈 및 이를 구비하는 스태커 크레인장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308169A (ja) | 2000-04-18 | 2001-11-02 | Kaapu:Kk | カセット用ボックス及び同ボックスの自動搬送装置並びに同装置の制御方法。 |
JP2003205991A (ja) | 2001-11-09 | 2003-07-22 | Yodogawa Hu-Tech Kk | 板状物搬送容器 |
US6875282B2 (en) | 2001-05-17 | 2005-04-05 | Ebara Corporation | Substrate transport container |
KR200410417Y1 (ko) * | 2005-10-07 | 2006-03-09 | 주식회사 신성이엔지 | 반송용 카세트 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0660758B2 (ja) * | 1990-09-21 | 1994-08-10 | 近藤工業株式会社 | クリーンストッカー装置 |
US6309437B1 (en) * | 1999-06-09 | 2001-10-30 | William H. Jones | Computer box filter cover |
JP3916380B2 (ja) * | 1999-07-06 | 2007-05-16 | 株式会社荏原製作所 | 基板搬送容器待機ステーション |
JP3939101B2 (ja) * | 2000-12-04 | 2007-07-04 | 株式会社荏原製作所 | 基板搬送方法および基板搬送容器 |
TW511650U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Ventilator device for cleaning container |
JP2003093825A (ja) * | 2001-09-27 | 2003-04-02 | Ebara Corp | ガス除去方法及びガス除去フィルタ |
US6767379B2 (en) * | 2001-10-29 | 2004-07-27 | William H. Jones | Computer box filter system |
TW200540922A (en) * | 2004-06-04 | 2005-12-16 | Kondoh Ind Ltd | Air-purifying equipment in a semiconductor wafer container |
JP2006032869A (ja) * | 2004-07-22 | 2006-02-02 | Matsushita Electric Ind Co Ltd | ウエハ保管装置、ウエハ保管方法、ウエハ搬送装置、およびウエハ搬送方法 |
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2007
- 2007-08-02 JP JP2007202090A patent/JP4953010B2/ja active Active
- 2007-08-29 TW TW096132054A patent/TWI399329B/zh active
- 2007-09-05 KR KR1020070089982A patent/KR101120530B1/ko active IP Right Grant
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308169A (ja) | 2000-04-18 | 2001-11-02 | Kaapu:Kk | カセット用ボックス及び同ボックスの自動搬送装置並びに同装置の制御方法。 |
US6875282B2 (en) | 2001-05-17 | 2005-04-05 | Ebara Corporation | Substrate transport container |
JP2003205991A (ja) | 2001-11-09 | 2003-07-22 | Yodogawa Hu-Tech Kk | 板状物搬送容器 |
KR200410417Y1 (ko) * | 2005-10-07 | 2006-03-09 | 주식회사 신성이엔지 | 반송용 카세트 |
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TWI399329B (zh) | 2013-06-21 |
JP4953010B2 (ja) | 2012-06-13 |
JP2008094494A (ja) | 2008-04-24 |
KR20080024445A (ko) | 2008-03-18 |
TW200817256A (en) | 2008-04-16 |
US20080067107A1 (en) | 2008-03-20 |
US7694817B2 (en) | 2010-04-13 |
CN101143637A (zh) | 2008-03-19 |
CN101143637B (zh) | 2010-12-08 |
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