KR101091748B1 - 레이저 가공 장치 - Google Patents

레이저 가공 장치 Download PDF

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Publication number
KR101091748B1
KR101091748B1 KR1020040016956A KR20040016956A KR101091748B1 KR 101091748 B1 KR101091748 B1 KR 101091748B1 KR 1020040016956 A KR1020040016956 A KR 1020040016956A KR 20040016956 A KR20040016956 A KR 20040016956A KR 101091748 B1 KR101091748 B1 KR 101091748B1
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KR
South Korea
Prior art keywords
laser
processing
light
split light
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020040016956A
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English (en)
Korean (ko)
Other versions
KR20040081066A (ko
Inventor
사다오 모리
히로유키 스가와라
히로시 아오야마
Original Assignee
히다치 비아 메카닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20040081066A publication Critical patent/KR20040081066A/ko
Application granted granted Critical
Publication of KR101091748B1 publication Critical patent/KR101091748B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/04—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work
    • B23K37/0408—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work for planar work
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
KR1020040016956A 2003-03-14 2004-03-12 레이저 가공 장치 Expired - Fee Related KR101091748B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003070256A JP4662411B2 (ja) 2003-03-14 2003-03-14 レーザ加工装置
JPJP-P-2003-00070256 2003-03-14

Publications (2)

Publication Number Publication Date
KR20040081066A KR20040081066A (ko) 2004-09-20
KR101091748B1 true KR101091748B1 (ko) 2011-12-08

Family

ID=33287051

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040016956A Expired - Fee Related KR101091748B1 (ko) 2003-03-14 2004-03-12 레이저 가공 장치

Country Status (5)

Country Link
US (1) US7521650B2 (enExample)
JP (1) JP4662411B2 (enExample)
KR (1) KR101091748B1 (enExample)
CN (1) CN100586633C (enExample)
TW (1) TW200422131A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382795B (zh) * 2005-03-04 2013-01-11 Hitachi Via Mechanics Ltd A method of opening a printed circuit board and an opening device for a printed circuit board
KR20080079828A (ko) * 2007-02-28 2008-09-02 주식회사 이오테크닉스 레이저 가공 장치 및 방법
KR100817825B1 (ko) * 2007-05-02 2008-03-31 주식회사 이오테크닉스 레이저 가공장치
TWI395630B (zh) * 2009-06-30 2013-05-11 Mitsuboshi Diamond Ind Co Ltd 使用雷射光之玻璃基板加工裝置
JP6457472B2 (ja) * 2016-12-14 2019-01-23 ファナック株式会社 制御システム及び機械学習装置
DE112018006546T5 (de) * 2017-12-20 2020-08-27 Sony Corporation Laservorrichtung und laserverarbeitungsverfahren

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US20020163730A1 (en) * 2001-02-22 2002-11-07 Yoshikazu Sugiyama Illumination optical system and laser processor having the same
US20020196534A1 (en) * 2001-06-19 2002-12-26 Lizotte Todd E. Laser beam delivery system with trepanning module
KR100478906B1 (ko) 1999-02-23 2005-03-28 세이코 엡슨 가부시키가이샤 편광 변환 광학계, 조명 광학계, 및 투사기
KR100522236B1 (ko) 1999-03-02 2005-10-19 세이코 엡슨 가부시키가이샤 투사형 표시 장치 및 이것에 사용되는 프리즘

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JPS5833803A (ja) 1981-08-21 1983-02-28 日本電気株式会社 高速レ−ザトリミング装置
JPS61207088A (ja) * 1985-03-12 1986-09-13 Nippon Hoso Kyokai <Nhk> レ−ザ出力合成装置
JPS6286839A (ja) * 1985-10-14 1987-04-21 Nec Corp トリミング装置
EP0266203B1 (en) * 1986-10-30 1994-07-06 Canon Kabushiki Kaisha An illumination device
US4787747A (en) * 1987-11-13 1988-11-29 Zygo Corporation Straightness of travel interferometer
JPH01289586A (ja) * 1988-05-13 1989-11-21 Nec Corp レーザートリミング装置
JPH03184687A (ja) * 1989-12-15 1991-08-12 Mitsubishi Electric Corp レーザ加工装置
DE4035266C2 (de) * 1990-11-02 1995-11-16 Jenoptik Jena Gmbh Verfahren und Anordnung zur Thermowellenanalyse
JPH05327100A (ja) * 1992-05-26 1993-12-10 Hoya Corp 固体レーザ装置
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US5825043A (en) * 1996-10-07 1998-10-20 Nikon Precision Inc. Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus
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JP3063688B2 (ja) * 1997-07-30 2000-07-12 日本電気株式会社 レーザ加工装置及びその制御方法並びにその制御プログラムを記録した記録媒体
JP3642930B2 (ja) * 1997-08-25 2005-04-27 松下電器産業株式会社 複数軸レーザ加工方法およびその装置
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JP3237832B2 (ja) 1999-03-12 2001-12-10 住友重機械工業株式会社 レーザ加工装置及びレーザ穴あけ加工方法
JP2002542043A (ja) 1999-04-27 2002-12-10 ジーエスアイ ルモニクス インコーポレイテッド 多重レーザビームを使用する材料処理システム及び方法
JP3817970B2 (ja) * 1999-05-31 2006-09-06 ウシオ電機株式会社 偏光ビームスプリッタおよびそれを用いた液晶表示素子の配向膜光配向用偏光光照射装置
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KR100478906B1 (ko) 1999-02-23 2005-03-28 세이코 엡슨 가부시키가이샤 편광 변환 광학계, 조명 광학계, 및 투사기
KR100522236B1 (ko) 1999-03-02 2005-10-19 세이코 엡슨 가부시키가이샤 투사형 표시 장치 및 이것에 사용되는 프리즘
US20020163730A1 (en) * 2001-02-22 2002-11-07 Yoshikazu Sugiyama Illumination optical system and laser processor having the same
US20020196534A1 (en) * 2001-06-19 2002-12-26 Lizotte Todd E. Laser beam delivery system with trepanning module

Also Published As

Publication number Publication date
TWI323682B (enExample) 2010-04-21
CN1530200A (zh) 2004-09-22
US20050127051A1 (en) 2005-06-16
KR20040081066A (ko) 2004-09-20
JP4662411B2 (ja) 2011-03-30
CN100586633C (zh) 2010-02-03
JP2004276063A (ja) 2004-10-07
US7521650B2 (en) 2009-04-21
TW200422131A (en) 2004-11-01

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