KR100956807B1 - 기판 반송 장치 및 그를 사용한 기판 반송 방법 - Google Patents

기판 반송 장치 및 그를 사용한 기판 반송 방법 Download PDF

Info

Publication number
KR100956807B1
KR100956807B1 KR1020077026701A KR20077026701A KR100956807B1 KR 100956807 B1 KR100956807 B1 KR 100956807B1 KR 1020077026701 A KR1020077026701 A KR 1020077026701A KR 20077026701 A KR20077026701 A KR 20077026701A KR 100956807 B1 KR100956807 B1 KR 100956807B1
Authority
KR
South Korea
Prior art keywords
substrate
handling
glass substrate
board
paper
Prior art date
Application number
KR1020077026701A
Other languages
English (en)
Korean (ko)
Other versions
KR20080014779A (ko
Inventor
타케노리 요시자와
Original Assignee
샤프 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 샤프 가부시키가이샤 filed Critical 샤프 가부시키가이샤
Publication of KR20080014779A publication Critical patent/KR20080014779A/ko
Application granted granted Critical
Publication of KR100956807B1 publication Critical patent/KR100956807B1/ko

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B65G49/069—Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
  • Wrapping Of Specific Fragile Articles (AREA)
KR1020077026701A 2005-06-17 2006-04-05 기판 반송 장치 및 그를 사용한 기판 반송 방법 KR100956807B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005177153 2005-06-17
JPJP-P-2005-00177153 2005-06-17

Publications (2)

Publication Number Publication Date
KR20080014779A KR20080014779A (ko) 2008-02-14
KR100956807B1 true KR100956807B1 (ko) 2010-05-11

Family

ID=37532077

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077026701A KR100956807B1 (ko) 2005-06-17 2006-04-05 기판 반송 장치 및 그를 사용한 기판 반송 방법

Country Status (5)

Country Link
JP (1) JPWO2006134709A1 (zh)
KR (1) KR100956807B1 (zh)
CN (1) CN101193811B (zh)
TW (1) TW200740678A (zh)
WO (1) WO2006134709A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102502260B (zh) * 2011-10-18 2013-11-06 深圳市华星光电技术有限公司 玻璃基板存储搬运系统以及玻璃基板存储平台
US9004839B2 (en) 2011-10-18 2015-04-14 Shenzhen China Star Optoelectronics Technology Co., Ltd. Glass substrate storage and transportation system and a glass substrate storage platform
CN106315210B (zh) * 2015-07-10 2019-07-23 上海微电子装备（集团）股份有限公司 一种片盒存取设备及方法
CN105668206B (zh) 2016-03-23 2019-02-12 深圳市华星光电技术有限公司 玻璃基板的分流方法、分流装置及加工系统
CN106335791B (zh) * 2016-08-24 2019-01-22 京东方科技集团股份有限公司 叠片装置、叠片方法和基板强化设备
JP7117193B2 (ja) 2018-08-23 2022-08-12 川崎重工業株式会社 ロボット及びそれを備えるロボットシステム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236368Y2 (zh) * 1985-09-28 1990-10-03
JPH07137830A (ja) * 1993-11-12 1995-05-30 Daiwa Kogyo Kk 製品整列機
JPH0734025Y2 (ja) * 1991-02-13 1995-08-02 ナショナル住宅産業株式会社 ワーク搬出装置
KR20010071540A (ko) * 1999-05-19 2001-07-28 볼케르 크론세데어 용기의 삽입 및/또는 인출을 위한 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5710940A (en) * 1980-06-25 1982-01-20 Toshiba Corp Supplying method for lead frame
JPH065293Y2 (ja) * 1988-03-31 1994-02-09 日産自動車株式会社 パネルの積込み装置
DE19650689A1 (de) * 1996-12-06 1998-06-10 Focke & Co Vorrichtung zum Handhaben von Zuschnittstapeln
DE19815434A1 (de) * 1998-04-07 1999-10-14 Focke & Co Hubvorrichtung (Palettierer) mit Schwenkarm
JP4282827B2 (ja) * 1999-06-11 2009-06-24 三島光産株式会社 ガラス基板搬送装置
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236368Y2 (zh) * 1985-09-28 1990-10-03
JPH0734025Y2 (ja) * 1991-02-13 1995-08-02 ナショナル住宅産業株式会社 ワーク搬出装置
JPH07137830A (ja) * 1993-11-12 1995-05-30 Daiwa Kogyo Kk 製品整列機
KR20010071540A (ko) * 1999-05-19 2001-07-28 볼케르 크론세데어 용기의 삽입 및/또는 인출을 위한 장치

Also Published As

Publication number Publication date
CN101193811B (zh) 2011-11-23
TWI318959B (zh) 2010-01-01
KR20080014779A (ko) 2008-02-14
TW200740678A (en) 2007-11-01
CN101193811A (zh) 2008-06-04
WO2006134709A1 (ja) 2006-12-21
JPWO2006134709A1 (ja) 2009-01-08

Similar Documents

Publication Publication Date Title
KR100956807B1 (ko) 기판 반송 장치 및 그를 사용한 기판 반송 방법
TW473931B (en) Workpiece dividing system, and pellet-shifting apparatus
JP4853204B2 (ja) 板状物の搬送方法および板状物の搬送装置
KR20000011438A (ko) 전자부품실장장치및전자부품실장방법
JP4282827B2 (ja) ガラス基板搬送装置
JP4348520B2 (ja) 搬送システム
JP2003051528A (ja) 基板用搬送装置
KR100678304B1 (ko) 유리기판 포장 시스템
KR101931818B1 (ko) 곤포 용기, 곤포체 및 곤포 방법
JP6079044B2 (ja) 枠体搬送装置および枠体搬送装置を用いた枠体搬送方法
KR20070013189A (ko) 매엽반송용 트레이
JP4856935B2 (ja) 被搬送物の移載装置
JP3948012B2 (ja) 梱包体及びこの梱包体の搬送方法
JP2008081269A (ja) 板状物の受け取り方法および板状物の受け取り装置
JP2008260535A (ja) 板状体搬送具
JP4289093B2 (ja) トレイ搬送システム
JP4269222B2 (ja) トレイ搬送システム
JP2008137682A (ja) トレイ開梱梱包装置およびトレイ開梱梱包方法
KR100929637B1 (ko) 설비 연결 장치 및 이를 갖는 인-라인 반도체 설비
WO2022176605A1 (ja) ガラス板梱包体、及びガラス板梱包体の開梱方法
CN113548454B (zh) 一种钢化玻璃包装盒的一体搬运装置及安装设备
JP3174880B2 (ja) 荷物搬送及び保管具
JP2007035765A (ja) 枚葉搬送用トレイおよびトレイマガジン
JP2000072280A (ja) フィルムの搬送装置
JP2003155034A (ja) パレットおよびそれを用いる積付け装置

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20130404

Year of fee payment: 4

LAPS Lapse due to unpaid annual fee