TW200740678A - Substrate transfer apparatus - Google Patents

Substrate transfer apparatus

Info

Publication number
TW200740678A
TW200740678A TW095115916A TW95115916A TW200740678A TW 200740678 A TW200740678 A TW 200740678A TW 095115916 A TW095115916 A TW 095115916A TW 95115916 A TW95115916 A TW 95115916A TW 200740678 A TW200740678 A TW 200740678A
Authority
TW
Taiwan
Prior art keywords
handling apparatus
substrate transfer
transfer apparatus
glass substrate
glass
Prior art date
Application number
TW095115916A
Other languages
English (en)
Other versions
TWI318959B (zh
Inventor
Takenori Yoshizawa
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Publication of TW200740678A publication Critical patent/TW200740678A/zh
Application granted granted Critical
Publication of TWI318959B publication Critical patent/TWI318959B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B65G49/069—Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Wrapping Of Specific Fragile Articles (AREA)
  • Specific Conveyance Elements (AREA)
TW095115916A 2005-06-17 2006-05-04 Substrate transfer apparatus TW200740678A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005177153 2005-06-17

Publications (2)

Publication Number Publication Date
TW200740678A true TW200740678A (en) 2007-11-01
TWI318959B TWI318959B (zh) 2010-01-01

Family

ID=37532077

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095115916A TW200740678A (en) 2005-06-17 2006-05-04 Substrate transfer apparatus

Country Status (5)

Country Link
JP (1) JPWO2006134709A1 (zh)
KR (1) KR100956807B1 (zh)
CN (1) CN101193811B (zh)
TW (1) TW200740678A (zh)
WO (1) WO2006134709A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9004839B2 (en) 2011-10-18 2015-04-14 Shenzhen China Star Optoelectronics Technology Co., Ltd. Glass substrate storage and transportation system and a glass substrate storage platform
CN102502260B (zh) * 2011-10-18 2013-11-06 深圳市华星光电技术有限公司 玻璃基板存储搬运系统以及玻璃基板存储平台
CN106315210B (zh) * 2015-07-10 2019-07-23 上海微电子装备（集团）股份有限公司 一种片盒存取设备及方法
CN105668206B (zh) 2016-03-23 2019-02-12 深圳市华星光电技术有限公司 玻璃基板的分流方法、分流装置及加工系统
CN106335791B (zh) * 2016-08-24 2019-01-22 京东方科技集团股份有限公司 叠片装置、叠片方法和基板强化设备
JP7117193B2 (ja) 2018-08-23 2022-08-12 川崎重工業株式会社 ロボット及びそれを備えるロボットシステム

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5710940A (en) * 1980-06-25 1982-01-20 Toshiba Corp Supplying method for lead frame
JPH0236368Y2 (zh) * 1985-09-28 1990-10-03
JPH065293Y2 (ja) * 1988-03-31 1994-02-09 日産自動車株式会社 パネルの積込み装置
JPH0734025Y2 (ja) * 1991-02-13 1995-08-02 ナショナル住宅産業株式会社 ワーク搬出装置
JPH07137830A (ja) * 1993-11-12 1995-05-30 Daiwa Kogyo Kk 製品整列機
DE19650689A1 (de) * 1996-12-06 1998-06-10 Focke & Co Vorrichtung zum Handhaben von Zuschnittstapeln
DE19815434A1 (de) * 1998-04-07 1999-10-14 Focke & Co Hubvorrichtung (Palettierer) mit Schwenkarm
DE19922873A1 (de) * 1999-05-19 2000-11-23 Krones Ag Vorrichtung zum Einbringen und/oder Ausbringen von Behältern
JP4282827B2 (ja) * 1999-06-11 2009-06-24 三島光産株式会社 ガラス基板搬送装置
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム

Also Published As

Publication number Publication date
WO2006134709A1 (ja) 2006-12-21
KR100956807B1 (ko) 2010-05-11
TWI318959B (zh) 2010-01-01
CN101193811B (zh) 2011-11-23
JPWO2006134709A1 (ja) 2009-01-08
CN101193811A (zh) 2008-06-04
KR20080014779A (ko) 2008-02-14

Similar Documents

Publication Publication Date Title
SG164350A1 (en) Substrate processing apparatus
TW200740678A (en) Substrate transfer apparatus
TW200802673A (en) Buffer system for adjusting first-in first-out
JP2010245036A5 (ja) 照明装置の製造装置
TW200519012A (en) Glass substrate transporting facility
TW200714538A (en) Movable transfer chamber and substrate-treating apparatus including the same
TW200715448A (en) Vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device manufacturing system
TWI367192B (en) Calibration of high speed loader to substrate transport system
EP2020024A4 (en) SUBSTRATE TRANSFER EQUIPMENT AND FAST SUBSTRATE PROCESSING SYSTEM THEREWITH
EP3061846A3 (en) Apparatus and method for high-throughput atomic layer deposition
EP2009685A4 (en) VERTICAL SUBSTRATE TRANSPORT DEVICE AND FILM DEPOSITION EQUIPMENT
FR2941447B1 (fr) Substrat en verre transparent et procede de fabrication d'un tel substrat.
TW200644050A (en) Transfer chamber between workstations
WO2016004643A9 (zh) 一种包装箱
FR2896912B1 (fr) Enceinte etanche pour le transport et le stockage de substrats semi-conducteurs
TW200716459A (en) Packing box for a glass substrate and a package structure of a glass substrate using the same
WO2008039702A3 (en) Substrate handling system and method
DK1851141T3 (da) Lagerelevatoranordning
ATE437976T1 (de) Vakuumbeschichtungsanlage
EP2166567A4 (en) Substrate transfer robot and vacuum processing device therefor
DE60332680D1 (de) Bildvorbereitungssystem zur Übertragung auf Substrate
TW200700302A (en) Conveyance system
TW200745368A (en) Gate valve and substrate-treating apparatus including the same
PH12015501537A1 (en) Coating liquid for forming alkali barrier layer, and article
TW200605167A (en) Small lot size lithography bays

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees