KR100942527B1 - 전자부품 시험장치 - Google Patents

전자부품 시험장치 Download PDF

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Publication number
KR100942527B1
KR100942527B1 KR1020077024582A KR20077024582A KR100942527B1 KR 100942527 B1 KR100942527 B1 KR 100942527B1 KR 1020077024582 A KR1020077024582 A KR 1020077024582A KR 20077024582 A KR20077024582 A KR 20077024582A KR 100942527 B1 KR100942527 B1 KR 100942527B1
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KR
South Korea
Prior art keywords
electronic component
under test
component under
test
pitch
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KR1020077024582A
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English (en)
Korean (ko)
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KR20080057206A (ko
Inventor
마코토 사가와
Original Assignee
가부시키가이샤 아드반테스트
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Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20080057206A publication Critical patent/KR20080057206A/ko
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Publication of KR100942527B1 publication Critical patent/KR100942527B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Packaging Frangible Articles (AREA)
KR1020077024582A 2006-10-04 2006-10-04 전자부품 시험장치 Active KR100942527B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/319870 WO2008041334A1 (fr) 2006-10-04 2006-10-04 Appareil de test de composant électronique

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020097026216A Division KR20100017827A (ko) 2006-10-04 2006-10-04 전자부품 시험장치

Publications (2)

Publication Number Publication Date
KR20080057206A KR20080057206A (ko) 2008-06-24
KR100942527B1 true KR100942527B1 (ko) 2010-02-12

Family

ID=39268202

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020077024582A Active KR100942527B1 (ko) 2006-10-04 2006-10-04 전자부품 시험장치
KR1020097026216A Withdrawn KR20100017827A (ko) 2006-10-04 2006-10-04 전자부품 시험장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020097026216A Withdrawn KR20100017827A (ko) 2006-10-04 2006-10-04 전자부품 시험장치

Country Status (5)

Country Link
JP (1) JPWO2008041334A1 (https=)
KR (2) KR100942527B1 (https=)
CN (1) CN101258415B (https=)
TW (1) TW200821599A (https=)
WO (1) WO2008041334A1 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101499573B1 (ko) * 2010-06-16 2015-03-10 (주)테크윙 테스트핸들러에서의 반도체소자 언로딩방법
JP2013044684A (ja) * 2011-08-25 2013-03-04 Seiko Epson Corp ハンドラー、及び部品検査装置
JP2013137285A (ja) 2011-12-28 2013-07-11 Advantest Corp ピッチ変更装置、電子部品ハンドリング装置、及び電子部品試験装置
JP2013137284A (ja) 2011-12-28 2013-07-11 Advantest Corp 電子部品移載装置、電子部品ハンドリング装置、及び電子部品試験装置
JP2014224785A (ja) * 2013-05-17 2014-12-04 セイコーエプソン株式会社 ハンドラーおよび検査装置
JP2014228297A (ja) * 2013-05-20 2014-12-08 セイコーエプソン株式会社 ハンドラーおよび検査装置
KR102053081B1 (ko) * 2013-10-08 2019-12-06 (주)테크윙 테스트핸들러
CN104133173B (zh) * 2014-08-14 2017-02-01 潍坊路加精工有限公司 一种全自动测试装置
KR20160109484A (ko) 2015-03-11 2016-09-21 가부시키가이샤 어드밴티스트 반송 캐리어, 반송 장치, 및 베이스부
CN106405369A (zh) * 2015-07-31 2017-02-15 精工爱普生株式会社 电子部件输送装置以及电子部件检查装置
CN106813888B (zh) * 2015-11-27 2019-01-04 环维电子(上海)有限公司 冲击试验模块及其测试板
KR20170078209A (ko) * 2015-12-29 2017-07-07 (주)테크윙 반도체소자 테스트용 핸들러
JP2020012748A (ja) * 2018-07-19 2020-01-23 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
KR102053091B1 (ko) * 2019-06-20 2019-12-06 (주)테크윙 테스트핸들러
KR102762417B1 (ko) * 2023-11-21 2025-02-05 한미반도체 주식회사 본딩장치
KR102779986B1 (ko) * 2023-11-21 2025-03-13 한미반도체 주식회사 본딩장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264387A (ja) * 2000-03-16 2001-09-26 Nippon Eng Kk バーンインボード用ローダアンローダ装置における吸着ヘッドおよびその制御システム
KR20060019572A (ko) * 2003-06-06 2006-03-03 가부시키가이샤 아드반테스트 반송장치, 전자부품 핸들링 장치 및 전자부품 핸들링장치에서의 반송방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06302670A (ja) * 1993-04-15 1994-10-28 Hitachi Electron Eng Co Ltd 小形角型ワーク用非接触吸着ヘッド
JP2001004702A (ja) * 1999-06-22 2001-01-12 Advantest Corp 半導体試験装置のｉｃハンドラ装置
KR100349942B1 (ko) * 1999-12-06 2002-08-24 삼성전자 주식회사 램버스 핸들러

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264387A (ja) * 2000-03-16 2001-09-26 Nippon Eng Kk バーンインボード用ローダアンローダ装置における吸着ヘッドおよびその制御システム
KR20060019572A (ko) * 2003-06-06 2006-03-03 가부시키가이샤 아드반테스트 반송장치, 전자부품 핸들링 장치 및 전자부품 핸들링장치에서의 반송방법

Also Published As

Publication number Publication date
KR20080057206A (ko) 2008-06-24
KR20100017827A (ko) 2010-02-16
TW200821599A (en) 2008-05-16
JPWO2008041334A1 (ja) 2010-02-04
CN101258415A (zh) 2008-09-03
CN101258415B (zh) 2011-01-19
WO2008041334A1 (fr) 2008-04-10
TWI345063B (https=) 2011-07-11

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