KR100882520B1 - 해상도를 개선하기 위한 미세 증착 제어 시스템에서의오버-클록킹 - Google Patents

해상도를 개선하기 위한 미세 증착 제어 시스템에서의오버-클록킹 Download PDF

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KR100882520B1
KR100882520B1 KR1020037015744A KR20037015744A KR100882520B1 KR 100882520 B1 KR100882520 B1 KR 100882520B1 KR 1020037015744 A KR1020037015744 A KR 1020037015744A KR 20037015744 A KR20037015744 A KR 20037015744A KR 100882520 B1 KR100882520 B1 KR 100882520B1
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head
nozzle
microdeposition
substrate
over
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KR20040029997A (ko
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찰스 오. 에드워드
데이비드 알베르탈리
하워드 월터 비엘리히
제임스 미들튼
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가부시키가이샤 아루박
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
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    • B29C64/10—Processes of additive manufacturing
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    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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    • H—ELECTRICITY
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    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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