KR100849801B1 - 엑시머 램프 장치 - Google Patents

엑시머 램프 장치 Download PDF

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Publication number
KR100849801B1
KR100849801B1 KR1020050061050A KR20050061050A KR100849801B1 KR 100849801 B1 KR100849801 B1 KR 100849801B1 KR 1020050061050 A KR1020050061050 A KR 1020050061050A KR 20050061050 A KR20050061050 A KR 20050061050A KR 100849801 B1 KR100849801 B1 KR 100849801B1
Authority
KR
South Korea
Prior art keywords
lamp
unit
excimer lamp
frame
excimer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020050061050A
Other languages
English (en)
Korean (ko)
Other versions
KR20060049916A (ko
Inventor
사토시 무라카미
히데키 후지츠구
겐이치 히로세
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20060049916A publication Critical patent/KR20060049916A/ko
Application granted granted Critical
Publication of KR100849801B1 publication Critical patent/KR100849801B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/60—Cooling arrangements characterised by the use of a forced flow of gas, e.g. air
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
KR1020050061050A 2004-09-13 2005-07-07 엑시머 램프 장치 Expired - Fee Related KR100849801B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00265237 2004-09-13
JP2004265237 2004-09-13
JP2005142792A JP4380591B2 (ja) 2004-09-13 2005-05-16 エキシマランプ装置
JPJP-P-2005-00142792 2005-05-16

Publications (2)

Publication Number Publication Date
KR20060049916A KR20060049916A (ko) 2006-05-19
KR100849801B1 true KR100849801B1 (ko) 2008-07-31

Family

ID=36377509

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050061050A Expired - Fee Related KR100849801B1 (ko) 2004-09-13 2005-07-07 엑시머 램프 장치

Country Status (4)

Country Link
JP (1) JP4380591B2 (enExample)
KR (1) KR100849801B1 (enExample)
CN (1) CN1750230B (enExample)
TW (1) TW200609990A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5146808B2 (ja) * 2007-10-05 2013-02-20 ウシオ電機株式会社 紫外線照射装置
JP5146061B2 (ja) * 2008-04-10 2013-02-20 ウシオ電機株式会社 エキシマランプおよびこれを備えたランプユニット
JP5504896B2 (ja) * 2010-01-07 2014-05-28 ウシオ電機株式会社 ランプユニット
JP6364953B2 (ja) * 2014-05-23 2018-08-01 岩崎電気株式会社 冷却構造体、及び光源ユニット
JP6844292B2 (ja) * 2017-02-09 2021-03-17 ウシオ電機株式会社 光照射器および光照射装置
EP3998116A4 (en) * 2019-08-05 2023-01-11 Ushio Denki Kabushiki Kaisha UV RADIATION DEVICE
CN112582251A (zh) * 2020-12-29 2021-03-30 清华四川能源互联网研究院 射频无极准分子固化灯
JP2025027727A (ja) 2023-08-17 2025-02-28 ウシオ電機株式会社 光処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030040037A (ko) * 2001-11-13 2003-05-22 우시오덴키 가부시키가이샤 유전체 배리어 방전 램프에 의한 처리 장치, 및 처리 방법
JP2003346727A (ja) * 2002-05-27 2003-12-05 Ushio Inc エキシマ光照射装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112935U (ja) * 1983-01-21 1984-07-30 株式会社精密エンタプライズ Ｕｖ／ｏ↓３クリ−ニング装置の筐体構造
JPH079294Y2 (ja) * 1990-04-25 1995-03-06 株式会社テック 照明器具
JPH08309304A (ja) * 1995-05-19 1996-11-26 Japan Storage Battery Co Ltd 紫外線洗浄方法及びその装置
JP2001113163A (ja) * 1999-10-20 2001-04-24 Hoya Schott Kk 紫外光照射装置及び方法
JP4035680B2 (ja) * 1999-11-19 2008-01-23 リコープリンティングシステムズ株式会社 定着装置およびそれを用いた印刷装置
JP3743270B2 (ja) * 2000-07-12 2006-02-08 松下電工株式会社 表示用照明器具
JP3972586B2 (ja) * 2001-02-21 2007-09-05 ウシオ電機株式会社 光照射処理装置
JP2004113984A (ja) * 2002-09-27 2004-04-15 Japan Storage Battery Co Ltd 紫外線照射装置
JP2004152842A (ja) * 2002-10-29 2004-05-27 Ushio Inc 紫外光照射による処理方法および紫外光照射装置
JP4196649B2 (ja) * 2002-11-19 2008-12-17 ウシオ電機株式会社 エキシマ光源装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030040037A (ko) * 2001-11-13 2003-05-22 우시오덴키 가부시키가이샤 유전체 배리어 방전 램프에 의한 처리 장치, 및 처리 방법
JP2003346727A (ja) * 2002-05-27 2003-12-05 Ushio Inc エキシマ光照射装置

Also Published As

Publication number Publication date
JP2006108069A (ja) 2006-04-20
CN1750230B (zh) 2010-08-18
JP4380591B2 (ja) 2009-12-09
CN1750230A (zh) 2006-03-22
KR20060049916A (ko) 2006-05-19
TW200609990A (en) 2006-03-16
TWI332672B (enExample) 2010-11-01

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