KR100828981B1 - 표면 형상의 검사 방법 및 검사 장치 - Google Patents

표면 형상의 검사 방법 및 검사 장치 Download PDF

Info

Publication number
KR100828981B1
KR100828981B1 KR1020067017982A KR20067017982A KR100828981B1 KR 100828981 B1 KR100828981 B1 KR 100828981B1 KR 1020067017982 A KR1020067017982 A KR 1020067017982A KR 20067017982 A KR20067017982 A KR 20067017982A KR 100828981 B1 KR100828981 B1 KR 100828981B1
Authority
KR
South Korea
Prior art keywords
transparent plate
image
surface shape
shaped object
stripe pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020067017982A
Other languages
English (en)
Korean (ko)
Other versions
KR20070019984A (ko
Inventor
요시유키 손다
기미아키 오토
무네히사 가토
아츠시 기야마
Original Assignee
아사히 가라스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아사히 가라스 가부시키가이샤 filed Critical 아사히 가라스 가부시키가이샤
Publication of KR20070019984A publication Critical patent/KR20070019984A/ko
Application granted granted Critical
Publication of KR100828981B1 publication Critical patent/KR100828981B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
    • G01N33/386—Glass
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Signal Processing (AREA)
  • Quality & Reliability (AREA)
  • Optics & Photonics (AREA)
  • Ceramic Engineering (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020067017982A 2004-06-04 2005-06-02 표면 형상의 검사 방법 및 검사 장치 Expired - Lifetime KR100828981B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004167621A JP4645068B2 (ja) 2004-06-04 2004-06-04 表面形状の検査方法および検査装置
JPJP-P-2004-00167621 2004-06-04

Publications (2)

Publication Number Publication Date
KR20070019984A KR20070019984A (ko) 2007-02-16
KR100828981B1 true KR100828981B1 (ko) 2008-05-14

Family

ID=35463002

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067017982A Expired - Lifetime KR100828981B1 (ko) 2004-06-04 2005-06-02 표면 형상의 검사 방법 및 검사 장치

Country Status (6)

Country Link
US (1) US7394536B2 (cg-RX-API-DMAC7.html)
EP (2) EP1750087B1 (cg-RX-API-DMAC7.html)
JP (1) JP4645068B2 (cg-RX-API-DMAC7.html)
KR (1) KR100828981B1 (cg-RX-API-DMAC7.html)
TW (1) TW200606399A (cg-RX-API-DMAC7.html)
WO (1) WO2005119172A1 (cg-RX-API-DMAC7.html)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7589844B2 (en) * 2005-07-15 2009-09-15 Asahi Glass Company, Limited Shape inspection method and apparatus
EP1906139B1 (en) 2005-07-15 2015-11-04 Asahi Glass Company, Limited Shape inspection method and device
JP4907201B2 (ja) * 2006-03-20 2012-03-28 株式会社神戸製鋼所 形状測定装置
DE102006015792A1 (de) * 2006-04-05 2007-10-18 Isra Surface Vision Gmbh Verfahren und System zur Formmessung einer reflektierenden Oberfläche
EP1882896B1 (de) * 2006-07-24 2014-12-17 3D-Shape GmbH Dreidimensionale Vermessung der Form und der lokalen Oberflächennormalen von spiegelnden Objekten
US7471383B2 (en) * 2006-12-19 2008-12-30 Pilkington North America, Inc. Method of automated quantitative analysis of distortion in shaped vehicle glass by reflected optical imaging
US8284392B2 (en) 2007-03-13 2012-10-09 3D-Shape Gmbh Method and apparatus for the three-dimensional measurement of the shape and the local surface normal of preferably specular objects
WO2009024756A1 (en) 2007-08-17 2009-02-26 Renishaw Plc Non-contact measurement apparatus and method
US7843557B2 (en) * 2007-09-28 2010-11-30 Cardinal Scientific, Inc. Method and system for detecting retroreflectors
JP5034891B2 (ja) * 2007-11-21 2012-09-26 旭硝子株式会社 透明板状体の形状測定装置及び板ガラスの製造方法
JP5158201B2 (ja) * 2008-07-30 2013-03-06 アイシン・エィ・ダブリュ株式会社 駆動装置および車両
US8441532B2 (en) * 2009-02-24 2013-05-14 Corning Incorporated Shape measurement of specular reflective surface
GB0915904D0 (en) 2009-09-11 2009-10-14 Renishaw Plc Non-contact object inspection
FR2951544A1 (fr) * 2009-10-21 2011-04-22 Saint Gobain Procede d'analyse de la qualite d'un vitrage
WO2011155447A1 (ja) * 2010-06-07 2011-12-15 旭硝子株式会社 形状測定装置、形状測定方法、およびガラス板の製造方法
CN102939513B (zh) 2010-06-15 2016-09-07 旭硝子株式会社 形状测定装置、形状测定方法及玻璃板的制造方法
KR101249758B1 (ko) * 2010-11-25 2013-04-02 (주)쎄미시스코 유리 기판의 불균일도 측정 시스템 및 방법
US20120133761A1 (en) * 2010-11-30 2012-05-31 Angstrom, Inc. Uneven area inspection system
JP5529829B2 (ja) * 2011-11-01 2014-06-25 株式会社神戸製鋼所 高さ測定装置及び高さ測定方法
US9349182B2 (en) * 2011-11-10 2016-05-24 Carestream Health, Inc. 3D intraoral measurements using optical multiline method
US9295532B2 (en) * 2011-11-10 2016-03-29 Carestream Health, Inc. 3D intraoral measurements using optical multiline method
JP5749150B2 (ja) * 2011-12-22 2015-07-15 株式会社Sumco シリカガラスルツボの赤外吸収スペクトルの三次元分布の決定方法、シリコン単結晶の製造方法
WO2013187203A1 (ja) * 2012-06-12 2013-12-19 株式会社島精機製作所 ３次元計測装置と３次元計測方法
CN105849503B (zh) * 2013-12-27 2019-04-16 Ａｇｃ株式会社 形状测定装置、形状测定方法及玻璃板的制造方法
CN103995000B (zh) * 2014-05-15 2017-01-11 京东方科技集团股份有限公司 一种显示基板的检查装置及检查系统
ES2680587T3 (es) 2014-08-28 2018-09-10 Carestream Dental Technology Topco Limited Mediciones 3-D intraorales usando un procedimiento óptico de múltiples líneas
JP5923644B2 (ja) * 2015-05-13 2016-05-24 株式会社Sumco シリカガラスルツボの赤外吸収スペクトルの三次元分布の決定方法、シリコン単結晶の製造方法
CN105091784A (zh) * 2015-06-30 2015-11-25 东莞市盟拓光电科技有限公司 用于表面为镜面或透明表面的被测物的三维成像系统
JP6642223B2 (ja) 2016-04-13 2020-02-05 Ａｇｃ株式会社 透明板表面検査装置、透明板表面検査方法、およびガラス板の製造方法
DE102016223671A1 (de) * 2016-11-29 2018-05-30 Continental Automotive Gmbh Leuchtsystem zur Ermittlung geometrischer Eigenschaften sowie Fahrerassistenzsystem und Verfahren dazu
EP3827246B1 (en) * 2018-07-24 2024-04-17 Glasstech, Inc. System and method for measuring a surface in contoured glass sheets
KR102199314B1 (ko) * 2019-03-07 2021-01-06 (주) 인텍플러스 디스플레이 패널 검사장치
JP7083856B2 (ja) * 2020-01-07 2022-06-13 日本電子株式会社 高さ測定装置、荷電粒子線装置、および高さ測定方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001502800A (ja) * 1996-10-18 2001-02-27 インノメス・ゲゼルシャフト・フュア・メステクニク・エム・ベー・ハー 反射表面の経路を測定する方法及び装置
JP2004514882A (ja) 2000-11-22 2004-05-20 サン−ゴバン　グラス　フランス 基板表面の走査方法および装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5475452A (en) 1994-02-24 1995-12-12 Keravision, Inc. Device and method for mapping objects
JP3411829B2 (ja) 1997-07-02 2003-06-03 旭硝子株式会社 表面形状の評価方法および評価装置
JP2004167621A (ja) 2002-11-19 2004-06-17 Toyo Advanced Technologies Co Ltd ホーニング加工装置の砥石径拡縮部材の作動方法およびホーニング加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001502800A (ja) * 1996-10-18 2001-02-27 インノメス・ゲゼルシャフト・フュア・メステクニク・エム・ベー・ハー 反射表面の経路を測定する方法及び装置
JP2004514882A (ja) 2000-11-22 2004-05-20 サン−ゴバン　グラス　フランス 基板表面の走査方法および装置

Also Published As

Publication number Publication date
EP1750087A1 (en) 2007-02-07
JP2005345383A (ja) 2005-12-15
TWI372235B (cg-RX-API-DMAC7.html) 2012-09-11
EP2278270A2 (en) 2011-01-26
US20070091319A1 (en) 2007-04-26
KR20070019984A (ko) 2007-02-16
EP1750087B1 (en) 2011-12-21
WO2005119172A1 (ja) 2005-12-15
TW200606399A (en) 2006-02-16
US7394536B2 (en) 2008-07-01
JP4645068B2 (ja) 2011-03-09
EP2278270A3 (en) 2011-10-19
EP1750087A4 (en) 2008-03-26

Similar Documents

Publication Publication Date Title
KR20070019984A (ko) 표면 형상의 검사 방법 및 검사 장치
JP5190405B2 (ja) ガラス表面の異物検査装置及びその方法
JP6327370B2 (ja) 計測用具、校正方法、校正装置及びプログラム
EP0501683B1 (en) Technique for enhanced two-dimensional imaging
KR101177299B1 (ko) 평판 유리 표면 이물질 검사 장치
KR20120006452A (ko) 표면 형상의 평가 방법 및 표면 형상의 평가 장치
JP5280768B2 (ja) 車両周辺監視装置
US7561259B2 (en) Lamination status inspecting apparatus, lamination status inspecting method, and recording medium storing lamination status detecting program
KR20120065948A (ko) 표면 형상의 평가 방법 및 표면 형상의 평가 장치
CN102445168A (zh) 表面形状的检查方法及检查装置
CN101673043B (zh) 广角畸变测试系统及方法
US20230366823A1 (en) Auto focus system for inspection of high-density parts
JP2009300137A (ja) 画像処理によるラインセンサ仰角測定装置
JP4108829B2 (ja) 厚み欠陥検査装置及びその検査方法
TW584708B (en) Method and apparatus for measuring a line width
KR102868765B1 (ko) 미니 엘이디 장착 검사 방법
CN1844899A (zh) 检测宽物品的方法
JPH0720059A (ja) 透視歪の測定方法および装置
US20250085527A1 (en) Calibration target, fourier ptychographic imaging system and method for calibrating a fourier ptychographic imaging system
JP7266300B2 (ja) 物体検知システム及び物体検知システム用プログラム
JP4520794B2 (ja) 線条検査方法および装置
KR101103347B1 (ko) 평판 유리 표면 이물질 검사 장치
JPH0794971B2 (ja) 断面形状検知方法
JP4300802B2 (ja) マーク位置検出装置、マーク位置検出方法、重ね合わせ測定装置、および、重ね合わせ測定方法
JPH07104136B2 (ja) 端子の傾き検出方法

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20130419

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20140425

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

FPAY Annual fee payment

Payment date: 20150428

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

FPAY Annual fee payment

Payment date: 20180427

Year of fee payment: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 14

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 15

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 16

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 17

PC1801 Expiration of term

St.27 status event code: N-4-6-H10-H14-oth-PC1801

Not in force date: 20250603

Ip right cessation event data comment text: Termination Category : EXPIRATION_OF_DURATION