TW200606399A - Inspection method, and inspection device for surface shape - Google Patents

Inspection method, and inspection device for surface shape

Info

Publication number
TW200606399A
TW200606399A TW094118386A TW94118386A TW200606399A TW 200606399 A TW200606399 A TW 200606399A TW 094118386 A TW094118386 A TW 094118386A TW 94118386 A TW94118386 A TW 94118386A TW 200606399 A TW200606399 A TW 200606399A
Authority
TW
Taiwan
Prior art keywords
tabular body
stripe pattern
surface shape
reflected image
transparent tabular
Prior art date
Application number
TW094118386A
Other languages
English (en)
Other versions
TWI372235B (zh
Inventor
Yoshiyuki Sonda
Kimiaki Oto
Munehisa Kato
Atsushi Kiyama
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of TW200606399A publication Critical patent/TW200606399A/zh
Application granted granted Critical
Publication of TWI372235B publication Critical patent/TWI372235B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
    • G01N33/386—Glass
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Signal Processing (AREA)
  • Quality & Reliability (AREA)
  • Optics & Photonics (AREA)
  • Ceramic Engineering (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW094118386A 2004-06-04 2005-06-03 Inspection method, and inspection device for surface shape TW200606399A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004167621A JP4645068B2 (ja) 2004-06-04 2004-06-04 表面形状の検査方法および検査装置

Publications (2)

Publication Number Publication Date
TW200606399A true TW200606399A (en) 2006-02-16
TWI372235B TWI372235B (zh) 2012-09-11

Family

ID=35463002

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094118386A TW200606399A (en) 2004-06-04 2005-06-03 Inspection method, and inspection device for surface shape

Country Status (6)

Country Link
US (1) US7394536B2 (zh)
EP (2) EP1750087B1 (zh)
JP (1) JP4645068B2 (zh)
KR (1) KR100828981B1 (zh)
TW (1) TW200606399A (zh)
WO (1) WO2005119172A1 (zh)

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JP4924426B2 (ja) 2005-07-15 2012-04-25 旭硝子株式会社 形状検査方法および装置
US7589844B2 (en) * 2005-07-15 2009-09-15 Asahi Glass Company, Limited Shape inspection method and apparatus
JP4907201B2 (ja) * 2006-03-20 2012-03-28 株式会社神戸製鋼所 形状測定装置
DE102006015792A1 (de) 2006-04-05 2007-10-18 Isra Surface Vision Gmbh Verfahren und System zur Formmessung einer reflektierenden Oberfläche
EP1882896B1 (de) * 2006-07-24 2014-12-17 3D-Shape GmbH Dreidimensionale Vermessung der Form und der lokalen Oberflächennormalen von spiegelnden Objekten
US7471383B2 (en) * 2006-12-19 2008-12-30 Pilkington North America, Inc. Method of automated quantitative analysis of distortion in shaped vehicle glass by reflected optical imaging
US8284392B2 (en) 2007-03-13 2012-10-09 3D-Shape Gmbh Method and apparatus for the three-dimensional measurement of the shape and the local surface normal of preferably specular objects
JP5485889B2 (ja) 2007-08-17 2014-05-07 レニショウ パブリック リミテッド カンパニー 位相解析測定を行う装置および方法
US7843557B2 (en) 2007-09-28 2010-11-30 Cardinal Scientific, Inc. Method and system for detecting retroreflectors
JP5034891B2 (ja) * 2007-11-21 2012-09-26 旭硝子株式会社 透明板状体の形状測定装置及び板ガラスの製造方法
DE112009000272T5 (de) * 2008-07-30 2011-06-09 Aisin AW Co., Ltd., Anjo-shi Antriebseinheit und Fahrzeug
US8441532B2 (en) * 2009-02-24 2013-05-14 Corning Incorporated Shape measurement of specular reflective surface
GB0915904D0 (en) 2009-09-11 2009-10-14 Renishaw Plc Non-contact object inspection
FR2951544A1 (fr) * 2009-10-21 2011-04-22 Saint Gobain Procede d'analyse de la qualite d'un vitrage
CN102939512A (zh) 2010-06-07 2013-02-20 旭硝子株式会社 形状测定装置、形状测定方法及玻璃板的制造方法
KR20130090326A (ko) 2010-06-15 2013-08-13 아사히 가라스 가부시키가이샤 형상 측정 장치, 형상 측정 방법 및 유리판의 제조 방법
US8351051B2 (en) 2010-11-25 2013-01-08 Semisysco Co., Ltd. System and method of measuring irregularity of a glass substrate
KR101249758B1 (ko) * 2010-11-25 2013-04-02 (주)쎄미시스코 유리 기판의 불균일도 측정 시스템 및 방법
US20120133761A1 (en) * 2010-11-30 2012-05-31 Angstrom, Inc. Uneven area inspection system
JP5529829B2 (ja) * 2011-11-01 2014-06-25 株式会社神戸製鋼所 高さ測定装置及び高さ測定方法
US9349182B2 (en) * 2011-11-10 2016-05-24 Carestream Health, Inc. 3D intraoral measurements using optical multiline method
US9295532B2 (en) * 2011-11-10 2016-03-29 Carestream Health, Inc. 3D intraoral measurements using optical multiline method
JP5749150B2 (ja) * 2011-12-22 2015-07-15 株式会社Sumco シリカガラスルツボの赤外吸収スペクトルの三次元分布の決定方法、シリコン単結晶の製造方法
EP2860490A4 (en) * 2012-06-12 2016-03-02 Shima Seiki Mfg THREE-DIMENSIONAL MEASURING APPARATUS AND THREE-DIMENSIONAL MEASURING METHOD
CN105849503B (zh) * 2013-12-27 2019-04-16 Ａｇｃ株式会社 形状测定装置、形状测定方法及玻璃板的制造方法
CN103995000B (zh) * 2014-05-15 2017-01-11 京东方科技集团股份有限公司 一种显示基板的检查装置及检查系统
JP6694873B2 (ja) 2014-08-28 2020-05-20 ケアストリーム ヘルス インク 歯の表面に従ってセンサ画素配列を照射画素配列にマッピングするための装置の作動方法、及び、歯の表面輪郭画像を提供する装置の作動方法
JP5923644B2 (ja) * 2015-05-13 2016-05-24 株式会社Sumco シリカガラスルツボの赤外吸収スペクトルの三次元分布の決定方法、シリコン単結晶の製造方法
CN105091784A (zh) * 2015-06-30 2015-11-25 东莞市盟拓光电科技有限公司 用于表面为镜面或透明表面的被测物的三维成像系统
JP6642223B2 (ja) 2016-04-13 2020-02-05 Ａｇｃ株式会社 透明板表面検査装置、透明板表面検査方法、およびガラス板の製造方法
DE102016223671A1 (de) 2016-11-29 2018-05-30 Continental Automotive Gmbh Leuchtsystem zur Ermittlung geometrischer Eigenschaften sowie Fahrerassistenzsystem und Verfahren dazu
KR102199314B1 (ko) * 2019-03-07 2021-01-06 (주) 인텍플러스 디스플레이 패널 검사장치
JP7083856B2 (ja) * 2020-01-07 2022-06-13 日本電子株式会社 高さ測定装置、荷電粒子線装置、および高さ測定方法

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US5475452A (en) * 1994-02-24 1995-12-12 Keravision, Inc. Device and method for mapping objects
DE19643018B4 (de) 1996-10-18 2010-06-17 Isra Surface Vision Gmbh Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
JP3411829B2 (ja) 1997-07-02 2003-06-03 旭硝子株式会社 表面形状の評価方法および評価装置
FR2817042B1 (fr) * 2000-11-22 2003-06-20 Saint Gobain Procede et dispositif d'analyse de la surface d'un substrat
JP2004167621A (ja) 2002-11-19 2004-06-17 Toyo Advanced Technologies Co Ltd ホーニング加工装置の砥石径拡縮部材の作動方法およびホーニング加工装置

Also Published As

Publication number Publication date
EP2278270A3 (en) 2011-10-19
US7394536B2 (en) 2008-07-01
TWI372235B (zh) 2012-09-11
WO2005119172A1 (ja) 2005-12-15
EP1750087B1 (en) 2011-12-21
JP2005345383A (ja) 2005-12-15
JP4645068B2 (ja) 2011-03-09
KR20070019984A (ko) 2007-02-16
EP2278270A2 (en) 2011-01-26
KR100828981B1 (ko) 2008-05-14
EP1750087A4 (en) 2008-03-26
US20070091319A1 (en) 2007-04-26
EP1750087A1 (en) 2007-02-07

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