KR100824394B1 - 검사 지그 및 검사 장치 - Google Patents
검사 지그 및 검사 장치 Download PDFInfo
- Publication number
- KR100824394B1 KR100824394B1 KR1020050095610A KR20050095610A KR100824394B1 KR 100824394 B1 KR100824394 B1 KR 100824394B1 KR 1020050095610 A KR1020050095610 A KR 1020050095610A KR 20050095610 A KR20050095610 A KR 20050095610A KR 100824394 B1 KR100824394 B1 KR 100824394B1
- Authority
- KR
- South Korea
- Prior art keywords
- rear end
- probe
- insertion hole
- end side
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2005-00123162 | 2005-04-21 | ||
JP2005123162A JP2005338065A (ja) | 2004-04-26 | 2005-04-21 | 検査冶具および検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060111248A KR20060111248A (ko) | 2006-10-26 |
KR100824394B1 true KR100824394B1 (ko) | 2008-04-22 |
Family
ID=37195047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050095610A Expired - Fee Related KR100824394B1 (ko) | 2005-04-21 | 2005-10-11 | 검사 지그 및 검사 장치 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100824394B1 (enrdf_load_stackoverflow) |
CN (1) | CN100535676C (enrdf_load_stackoverflow) |
TW (1) | TW200638046A (enrdf_load_stackoverflow) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3849948B1 (ja) * | 2005-11-16 | 2006-11-22 | 日本電産リード株式会社 | 基板検査用治具及び検査用プローブ |
JP5651333B2 (ja) * | 2007-07-17 | 2015-01-14 | 日本発條株式会社 | プローブユニット |
JP2009036532A (ja) * | 2007-07-31 | 2009-02-19 | Koyo Technos:Kk | 検査冶具および検査装置 |
KR101037974B1 (ko) * | 2009-05-20 | 2011-05-30 | 주식회사 메디오션 | 프로브 지지체 및 그 제조방법 |
KR101459667B1 (ko) * | 2013-07-22 | 2014-11-12 | 바이옵트로 주식회사 | 지그 장치 |
CN103983816A (zh) * | 2014-05-15 | 2014-08-13 | 珠海市运泰利自动化设备有限公司 | 高精度测试模组 |
JP6537315B2 (ja) * | 2015-03-23 | 2019-07-03 | オルガン針株式会社 | ワイヤープローブ用治具 |
KR101656047B1 (ko) * | 2016-03-23 | 2016-09-09 | 주식회사 나노시스 | 기판 검사용 지그 |
US11293976B1 (en) * | 2020-09-25 | 2022-04-05 | Essai, Inc. | Integrated circuit device test tooling with dual angle cavities |
KR102649845B1 (ko) * | 2023-11-29 | 2024-03-21 | 주식회사 나노시스 | 반도체 소자 테스터 지그 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0758169A (ja) * | 1993-07-23 | 1995-03-03 | Internatl Business Mach Corp <Ibm> | バックリングビームテストプローブアセンブリ |
JPH09274054A (ja) * | 1996-04-08 | 1997-10-21 | Furukawa Electric Co Ltd:The | プローバー |
KR20020020980A (ko) * | 2000-09-13 | 2002-03-18 | 키타무라 이사오 | 기판 검사용 검사 지그 및 그 검사 지그를 구비한기판검사장치 |
KR20040093023A (ko) * | 2003-04-25 | 2004-11-04 | 가부시키가이샤 요코오 | 검사용 동축 프로브 및 그것을 이용한 검사 유닛 |
KR20040093040A (ko) * | 2003-04-25 | 2004-11-04 | 가부시키가이샤 요코오 | Ic 소켓 |
-
2005
- 2005-10-09 CN CNB2005101134540A patent/CN100535676C/zh not_active Expired - Fee Related
- 2005-10-11 KR KR1020050095610A patent/KR100824394B1/ko not_active Expired - Fee Related
- 2005-10-12 TW TW094135464A patent/TW200638046A/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0758169A (ja) * | 1993-07-23 | 1995-03-03 | Internatl Business Mach Corp <Ibm> | バックリングビームテストプローブアセンブリ |
JPH09274054A (ja) * | 1996-04-08 | 1997-10-21 | Furukawa Electric Co Ltd:The | プローバー |
KR20020020980A (ko) * | 2000-09-13 | 2002-03-18 | 키타무라 이사오 | 기판 검사용 검사 지그 및 그 검사 지그를 구비한기판검사장치 |
KR20040093023A (ko) * | 2003-04-25 | 2004-11-04 | 가부시키가이샤 요코오 | 검사용 동축 프로브 및 그것을 이용한 검사 유닛 |
KR20040093040A (ko) * | 2003-04-25 | 2004-11-04 | 가부시키가이샤 요코오 | Ic 소켓 |
Also Published As
Publication number | Publication date |
---|---|
KR20060111248A (ko) | 2006-10-26 |
CN1854744A (zh) | 2006-11-01 |
TW200638046A (en) | 2006-11-01 |
CN100535676C (zh) | 2009-09-02 |
TWI292826B (enrdf_load_stackoverflow) | 2008-01-21 |
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