CN100535676C - 检查夹具及检查装置 - Google Patents
检查夹具及检查装置 Download PDFInfo
- Publication number
- CN100535676C CN100535676C CNB2005101134540A CN200510113454A CN100535676C CN 100535676 C CN100535676 C CN 100535676C CN B2005101134540 A CNB2005101134540 A CN B2005101134540A CN 200510113454 A CN200510113454 A CN 200510113454A CN 100535676 C CN100535676 C CN 100535676C
- Authority
- CN
- China
- Prior art keywords
- end side
- probe
- insertion hole
- hole
- side insertion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 124
- 239000000523 sample Substances 0.000 claims abstract description 294
- 238000003780 insertion Methods 0.000 claims abstract description 201
- 230000037431 insertion Effects 0.000 claims abstract description 201
- 239000011247 coating layer Substances 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- -1 tungsten Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005123162 | 2005-04-21 | ||
JP2005123162A JP2005338065A (ja) | 2004-04-26 | 2005-04-21 | 検査冶具および検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1854744A CN1854744A (zh) | 2006-11-01 |
CN100535676C true CN100535676C (zh) | 2009-09-02 |
Family
ID=37195047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101134540A Expired - Fee Related CN100535676C (zh) | 2005-04-21 | 2005-10-09 | 检查夹具及检查装置 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100824394B1 (enrdf_load_stackoverflow) |
CN (1) | CN100535676C (enrdf_load_stackoverflow) |
TW (1) | TW200638046A (enrdf_load_stackoverflow) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3849948B1 (ja) * | 2005-11-16 | 2006-11-22 | 日本電産リード株式会社 | 基板検査用治具及び検査用プローブ |
JP5651333B2 (ja) * | 2007-07-17 | 2015-01-14 | 日本発條株式会社 | プローブユニット |
JP2009036532A (ja) * | 2007-07-31 | 2009-02-19 | Koyo Technos:Kk | 検査冶具および検査装置 |
KR101037974B1 (ko) * | 2009-05-20 | 2011-05-30 | 주식회사 메디오션 | 프로브 지지체 및 그 제조방법 |
KR101459667B1 (ko) * | 2013-07-22 | 2014-11-12 | 바이옵트로 주식회사 | 지그 장치 |
CN103983816A (zh) * | 2014-05-15 | 2014-08-13 | 珠海市运泰利自动化设备有限公司 | 高精度测试模组 |
JP6537315B2 (ja) * | 2015-03-23 | 2019-07-03 | オルガン針株式会社 | ワイヤープローブ用治具 |
KR101656047B1 (ko) * | 2016-03-23 | 2016-09-09 | 주식회사 나노시스 | 기판 검사용 지그 |
US11293976B1 (en) * | 2020-09-25 | 2022-04-05 | Essai, Inc. | Integrated circuit device test tooling with dual angle cavities |
KR102649845B1 (ko) * | 2023-11-29 | 2024-03-21 | 주식회사 나노시스 | 반도체 소자 테스터 지그 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69326609T2 (de) * | 1993-07-23 | 2000-04-27 | International Business Machines Corp., Armonk | Testsondenanordnung mit Knicknadeln |
JPH09274054A (ja) * | 1996-04-08 | 1997-10-21 | Furukawa Electric Co Ltd:The | プローバー |
JP3505495B2 (ja) * | 2000-09-13 | 2004-03-08 | 日本電産リード株式会社 | 基板検査用検査治具、該検査治具を備えた基板検査装置および基板検査用検査治具の組立方法 |
JP2004325306A (ja) * | 2003-04-25 | 2004-11-18 | Yokowo Co Ltd | 検査用同軸プローブおよびそれを用いた検査ユニット |
JP4242199B2 (ja) * | 2003-04-25 | 2009-03-18 | 株式会社ヨコオ | Icソケット |
-
2005
- 2005-10-09 CN CNB2005101134540A patent/CN100535676C/zh not_active Expired - Fee Related
- 2005-10-11 KR KR1020050095610A patent/KR100824394B1/ko not_active Expired - Fee Related
- 2005-10-12 TW TW094135464A patent/TW200638046A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI292826B (enrdf_load_stackoverflow) | 2008-01-21 |
TW200638046A (en) | 2006-11-01 |
KR100824394B1 (ko) | 2008-04-22 |
KR20060111248A (ko) | 2006-10-26 |
CN1854744A (zh) | 2006-11-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090902 |