KR100791132B1 - 매크로 검사 장치 및 매크로 검사 방법 - Google Patents

매크로 검사 장치 및 매크로 검사 방법 Download PDF

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Publication number
KR100791132B1
KR100791132B1 KR1020067010103A KR20067010103A KR100791132B1 KR 100791132 B1 KR100791132 B1 KR 100791132B1 KR 1020067010103 A KR1020067010103 A KR 1020067010103A KR 20067010103 A KR20067010103 A KR 20067010103A KR 100791132 B1 KR100791132 B1 KR 100791132B1
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KR
South Korea
Prior art keywords
substrate
substrate holder
holder
board
positioning
Prior art date
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KR1020067010103A
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English (en)
Korean (ko)
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KR20070037563A (ko
Inventor
히로유키 오카히라
노부오 후지사키
히로시 가토
Original Assignee
올림푸스 가부시키가이샤
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Application filed by 올림푸스 가부시키가이샤 filed Critical 올림푸스 가부시키가이샤
Publication of KR20070037563A publication Critical patent/KR20070037563A/ko
Application granted granted Critical
Publication of KR100791132B1 publication Critical patent/KR100791132B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
KR1020067010103A 2004-09-27 2005-09-26 매크로 검사 장치 및 매크로 검사 방법 KR100791132B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2004279990 2004-09-27
JP2004279991 2004-09-27
JP2004279992 2004-09-27
JPJP-P-2004-00279992 2004-09-27
JPJP-P-2004-00279991 2004-09-27
JPJP-P-2004-00279990 2004-09-27

Publications (2)

Publication Number Publication Date
KR20070037563A KR20070037563A (ko) 2007-04-05
KR100791132B1 true KR100791132B1 (ko) 2008-01-03

Family

ID=36118849

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067010103A KR100791132B1 (ko) 2004-09-27 2005-09-26 매크로 검사 장치 및 매크로 검사 방법

Country Status (5)

Country Link
JP (1) JP4729499B2 (zh)
KR (1) KR100791132B1 (zh)
CN (1) CN1906476B (zh)
TW (1) TW200614412A (zh)
WO (1) WO2006035703A1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5265099B2 (ja) * 2006-09-11 2013-08-14 オリンパス株式会社 基板検査装置
JP5553532B2 (ja) * 2009-06-04 2014-07-16 パナソニック株式会社 光学検査装置
JP2011141127A (ja) * 2010-01-05 2011-07-21 Avanstrate Taiwan Inc ガラス板の欠陥部分の目視検査方法及び目視検査装置
KR101367910B1 (ko) * 2011-12-30 2014-02-28 엘아이지에이디피 주식회사 기판 얼라인장치 및 이것을 포함하는 기판 검사장비
CN102540515B (zh) * 2012-01-12 2015-07-08 北京凌云光视数字图像技术有限公司 用于tft液晶屏的质量检测系统
CN102591044A (zh) * 2012-01-12 2012-07-18 北京凌云光视数字图像技术有限公司 Tft液晶屏的质量检测方法
KR102177156B1 (ko) 2014-03-10 2020-11-10 삼성전자주식회사 로봇 및 그를 구비한 기판 처리 장치
CN106198570B (zh) * 2016-08-15 2019-02-22 武汉华星光电技术有限公司 一种基板检测装置
CN106770364A (zh) * 2017-01-26 2017-05-31 江苏东旭亿泰智能装备有限公司 基板定位机构、宏观检查装置及宏观检查方法
CN106918934A (zh) * 2017-03-27 2017-07-04 武汉华星光电技术有限公司 基板宏观检查机
JP7046319B2 (ja) * 2017-04-20 2022-04-04 日本電気硝子株式会社 ガラス板の製造方法および製造装置
CN108613990A (zh) * 2018-07-13 2018-10-02 江苏东旭亿泰智能装备有限公司 一种微观和宏观复合检查机
CN109192673B (zh) * 2018-08-27 2021-09-17 苏州精濑光电有限公司 一种晶圆检测方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03101119A (ja) * 1989-09-14 1991-04-25 Hitachi Electron Eng Co Ltd 基板チャック機構
JP2001000199A (ja) * 1991-05-09 2001-01-09 Hitachi Ltd 核酸断片分子量分離パターンの検出方法
JP2003302346A (ja) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd 薄板ワークの表面検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001194312A (ja) * 1999-10-25 2001-07-19 Olympus Optical Co Ltd マクロ検査用ホルダ機構
KR20040053375A (ko) * 2000-08-24 2004-06-23 올림푸스 가부시키가이샤 외관검사장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03101119A (ja) * 1989-09-14 1991-04-25 Hitachi Electron Eng Co Ltd 基板チャック機構
JP2001000199A (ja) * 1991-05-09 2001-01-09 Hitachi Ltd 核酸断片分子量分離パターンの検出方法
JP2003302346A (ja) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd 薄板ワークの表面検査装置

Also Published As

Publication number Publication date
CN1906476B (zh) 2010-10-06
JPWO2006035703A1 (ja) 2008-05-15
JP4729499B2 (ja) 2011-07-20
TW200614412A (en) 2006-05-01
WO2006035703A1 (ja) 2006-04-06
KR20070037563A (ko) 2007-04-05
CN1906476A (zh) 2007-01-31

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