KR100790981B1 - 칼라필터, 칼라필터 어레이 및 그의 제조방법과 이미지센서 - Google Patents

칼라필터, 칼라필터 어레이 및 그의 제조방법과 이미지센서 Download PDF

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Publication number
KR100790981B1
KR100790981B1 KR1020060013710A KR20060013710A KR100790981B1 KR 100790981 B1 KR100790981 B1 KR 100790981B1 KR 1020060013710 A KR1020060013710 A KR 1020060013710A KR 20060013710 A KR20060013710 A KR 20060013710A KR 100790981 B1 KR100790981 B1 KR 100790981B1
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South Korea
Prior art keywords
film
inorganic film
inorganic
color filter
silicon
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Expired - Fee Related
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KR1020060013710A
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English (en)
Korean (ko)
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KR20070081627A (ko
Inventor
문창록
백기현
이덕형
황성호
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삼성전자주식회사
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Priority to KR1020060013710A priority Critical patent/KR100790981B1/ko
Priority to US11/668,120 priority patent/US7875947B2/en
Priority to DE102007006921A priority patent/DE102007006921B4/de
Priority to JP2007030810A priority patent/JP5247042B2/ja
Priority to TW096104756A priority patent/TWI361487B/zh
Publication of KR20070081627A publication Critical patent/KR20070081627A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8053—Colour filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Color Television Image Signal Generators (AREA)
  • Light Receiving Elements (AREA)
KR1020060013710A 2006-02-13 2006-02-13 칼라필터, 칼라필터 어레이 및 그의 제조방법과 이미지센서 Expired - Fee Related KR100790981B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020060013710A KR100790981B1 (ko) 2006-02-13 2006-02-13 칼라필터, 칼라필터 어레이 및 그의 제조방법과 이미지센서
US11/668,120 US7875947B2 (en) 2006-02-13 2007-01-29 Filter, color filter array, method of manufacturing the color filter array, and image sensor
DE102007006921A DE102007006921B4 (de) 2006-02-13 2007-02-06 Farbfilter, Farbfilterfeld, Verfahren zur Herstellung und Bildsensor
JP2007030810A JP5247042B2 (ja) 2006-02-13 2007-02-09 カラーフィルタアレイ及びイメージセンサー
TW096104756A TWI361487B (en) 2006-02-13 2007-02-09 Filter, color filter array, method of manufacturing the color filter array, and image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060013710A KR100790981B1 (ko) 2006-02-13 2006-02-13 칼라필터, 칼라필터 어레이 및 그의 제조방법과 이미지센서

Publications (2)

Publication Number Publication Date
KR20070081627A KR20070081627A (ko) 2007-08-17
KR100790981B1 true KR100790981B1 (ko) 2008-01-02

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KR1020060013710A Expired - Fee Related KR100790981B1 (ko) 2006-02-13 2006-02-13 칼라필터, 칼라필터 어레이 및 그의 제조방법과 이미지센서

Country Status (5)

Country Link
US (1) US7875947B2 (enExample)
JP (1) JP5247042B2 (enExample)
KR (1) KR100790981B1 (enExample)
DE (1) DE102007006921B4 (enExample)
TW (1) TWI361487B (enExample)

Cited By (1)

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KR101220143B1 (ko) 2011-06-27 2013-01-11 어보브반도체 주식회사 수광 대역이 상이한 수광 소자들이 단일칩화된 반도체 장치, 집적회로 및 반도체 집적회로 제조 방법

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CN101459184B (zh) * 2007-12-13 2011-03-23 中芯国际集成电路制造(上海)有限公司 在cmos上感测图像的系统和方法
US7924504B2 (en) * 2008-01-01 2011-04-12 United Microelectronics Corp. Color filter structure having inorganic layers
US8063465B2 (en) * 2008-02-08 2011-11-22 Omnivision Technologies, Inc. Backside illuminated imaging sensor with vertical pixel sensor
US7701636B2 (en) 2008-03-06 2010-04-20 Aptina Imaging Corporation Gradient index microlenses and method of formation
KR101500344B1 (ko) * 2008-08-26 2015-03-09 삼성전자 주식회사 이미지 센서
US7833818B2 (en) 2008-12-14 2010-11-16 United Microelectronics Corp. Integrated structure of MEMS device and CMOS image sensor device and fabricating method thereof
US8264377B2 (en) 2009-03-02 2012-09-11 Griffith Gregory M Aircraft collision avoidance system
JP4741015B2 (ja) * 2009-03-27 2011-08-03 富士フイルム株式会社 撮像素子
JP5534927B2 (ja) 2010-05-06 2014-07-02 株式会社東芝 固体撮像装置
US8643140B2 (en) 2011-07-11 2014-02-04 United Microelectronics Corp. Suspended beam for use in MEMS device
US8525354B2 (en) 2011-10-13 2013-09-03 United Microelectronics Corporation Bond pad structure and fabricating method thereof
US9568362B2 (en) 2012-12-19 2017-02-14 Viavi Solutions Inc. Spectroscopic assembly and method
US9448346B2 (en) 2012-12-19 2016-09-20 Viavi Solutions Inc. Sensor device including one or more metal-dielectric optical filters
US10197716B2 (en) 2012-12-19 2019-02-05 Viavi Solutions Inc. Metal-dielectric optical filter, sensor device, and fabrication method
KR102149937B1 (ko) * 2013-02-22 2020-09-01 삼성전자주식회사 광전 소자 및 이미지 센서
US8981501B2 (en) 2013-04-25 2015-03-17 United Microelectronics Corp. Semiconductor device and method of forming the same
US9746678B2 (en) * 2014-04-11 2017-08-29 Applied Materials Light wave separation lattices and methods of forming light wave separation lattices
US9293488B2 (en) * 2014-05-07 2016-03-22 Visera Technologies Company Limited Image sensing device
CA2952388A1 (en) * 2014-06-18 2015-12-23 Viavi Solutions, Inc. Metal-dielectric optical filter, sensor device, and fabrication method
CN104157790B (zh) * 2014-06-30 2017-03-15 上海天马有机发光显示技术有限公司 一种有机发光薄膜封装结构，其器件、装置及制造方法
KR102240020B1 (ko) 2014-08-29 2021-04-14 삼성전자주식회사 컬러 필터를 포함하는 전자 장치
KR102648400B1 (ko) * 2016-02-22 2024-03-18 삼성디스플레이 주식회사 양자점 컬러 필터 및 이를 구비하는 표시 장치
EP3258493B1 (en) 2016-06-16 2021-01-27 ams AG System-on-chip camera with integrated light sensor(s) and method of producing a system-on-chip camera
JP7062692B2 (ja) 2018-02-20 2022-05-06 インテリジェント クリーニング イクイップメント ホールディングス カンパニー リミテッド 追跡装置、物体追跡システム、及び関連する使用方法
CN109148500A (zh) * 2018-08-28 2019-01-04 德淮半导体有限公司 双层彩色滤光器及其形成方法
CN109891278B (zh) * 2019-01-23 2021-10-15 京东方科技集团股份有限公司 滤光结构、滤光层以及显示面板
US11789188B2 (en) * 2019-07-19 2023-10-17 Viavi Solutions Inc. Optical filter
JP2022069852A (ja) * 2020-10-26 2022-05-12 ローム株式会社 マルチカラーセンサ及びマルチカラーセンサ装置
US11682313B2 (en) 2021-03-17 2023-06-20 Gregory M. Griffith Sensor assembly for use in association with aircraft collision avoidance system and method of using the same
CN119365817A (zh) * 2023-03-28 2025-01-24 京东方科技集团股份有限公司 彩色滤光片及其制备方法、阵列基板和显示装置

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KR101220143B1 (ko) 2011-06-27 2013-01-11 어보브반도체 주식회사 수광 대역이 상이한 수광 소자들이 단일칩화된 반도체 장치, 집적회로 및 반도체 집적회로 제조 방법

Also Published As

Publication number Publication date
US20070187793A1 (en) 2007-08-16
DE102007006921B4 (de) 2009-06-10
DE102007006921A1 (de) 2007-09-20
JP2007219515A (ja) 2007-08-30
KR20070081627A (ko) 2007-08-17
JP5247042B2 (ja) 2013-07-24
TWI361487B (en) 2012-04-01
US7875947B2 (en) 2011-01-25
TW200737508A (en) 2007-10-01

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