KR100760342B1 - 저 저항성 실리콘 카바이드 - Google Patents

저 저항성 실리콘 카바이드 Download PDF

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Publication number
KR100760342B1
KR100760342B1 KR1020010009425A KR20010009425A KR100760342B1 KR 100760342 B1 KR100760342 B1 KR 100760342B1 KR 1020010009425 A KR1020010009425 A KR 1020010009425A KR 20010009425 A KR20010009425 A KR 20010009425A KR 100760342 B1 KR100760342 B1 KR 100760342B1
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South Korea
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silicon carbide
free standing
standing article
mandrel
cvd
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English (en)
Korean (ko)
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KR20010085556A (ko
Inventor
고엘라지텐드라에스.
픽커링마이클에이.
Original Assignee
롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨
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Publication of KR20010085556A publication Critical patent/KR20010085556A/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
KR1020010009425A 2000-02-24 2001-02-24 저 저항성 실리콘 카바이드 Expired - Lifetime KR100760342B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US18476600P 2000-02-24 2000-02-24
US60/184,766 2000-02-24

Publications (2)

Publication Number Publication Date
KR20010085556A KR20010085556A (ko) 2001-09-07
KR100760342B1 true KR100760342B1 (ko) 2007-09-20

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KR1020010009425A Expired - Lifetime KR100760342B1 (ko) 2000-02-24 2001-02-24 저 저항성 실리콘 카바이드

Country Status (6)

Country Link
US (1) US7018947B2 (enExample)
EP (1) EP1127955B1 (enExample)
JP (1) JP2001316821A (enExample)
KR (1) KR100760342B1 (enExample)
DE (1) DE60139359D1 (enExample)
TW (1) TW554065B (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6939821B2 (en) * 2000-02-24 2005-09-06 Shipley Company, L.L.C. Low resistivity silicon carbide
JP2002047066A (ja) * 2000-08-02 2002-02-12 Tokai Carbon Co Ltd ＳｉＣ成形体およびその製造方法
EP1205573A1 (en) * 2000-11-10 2002-05-15 Shipley Company LLC Silicon carbide with high thermal conductivity
US8202621B2 (en) * 2001-09-22 2012-06-19 Rohm And Haas Company Opaque low resistivity silicon carbide
KR100973464B1 (ko) * 2003-02-03 2010-08-02 주식회사 티포엘 게비온(gebion) 철망 연속 자동 제조장치
US7261919B2 (en) * 2003-11-18 2007-08-28 Flx Micro, Inc. Silicon carbide and other films and method of deposition
US20050123713A1 (en) * 2003-12-05 2005-06-09 Forrest David T. Articles formed by chemical vapor deposition and methods for their manufacture
US8114505B2 (en) * 2003-12-05 2012-02-14 Morgan Advanced Ceramics, Inc. Free-standing silicon carbide articles formed by chemical vapor deposition and methods for their manufacture
US7501765B2 (en) * 2004-10-01 2009-03-10 Illinois Tool Works Inc. Emitter electrodes formed of chemical vapor deposition silicon carbide
CN100430516C (zh) * 2005-03-18 2008-11-05 西北工业大学 碳/碳复合材料表面碳化硅纳米线的制备方法
JP2008252045A (ja) * 2007-03-30 2008-10-16 Mitsui Eng & Shipbuild Co Ltd プラズマ処置装置用電極
US8105649B1 (en) 2007-08-09 2012-01-31 Imaging Systems Technology Fabrication of silicon carbide shell
US7935618B2 (en) * 2007-09-26 2011-05-03 Micron Technology, Inc. Sputtering-less ultra-low energy ion implantation
CN103723731B (zh) * 2013-04-22 2015-10-21 太仓派欧技术咨询服务有限公司 一种复合式化学气相沉积碳化硅装置
US9384937B2 (en) * 2013-09-27 2016-07-05 Varian Semiconductor Equipment Associates, Inc. SiC coating in an ion implanter
FR3034771B1 (fr) * 2015-04-13 2019-04-19 Hutchinson Materiaux conducteurs thermiques et/ou electriques et leur procede de preparation
FR3034775B1 (fr) 2015-04-13 2018-09-28 Hutchinson Materiau pour le stockage thermique
JP2018035009A (ja) * 2016-08-29 2018-03-08 京セラ株式会社 ＳｉＣ材料およびそれを用いた半導体製造装置用部材
JP6609300B2 (ja) * 2017-12-21 2019-11-20 國家中山科學研究院 特定形状の炭化ケイ素の育成装置
KR20210003709A (ko) 2018-06-01 2021-01-12 (주) 디에스테크노 식각 특성이 향상된 화학기상증착 실리콘 카바이드 벌크
US11319629B2 (en) 2018-08-06 2022-05-03 Advanced Silicon Carbide Materials Method of making composite articles from silicon carbide
JP7077288B2 (ja) 2019-09-27 2022-05-30 東海カーボン株式会社 多結晶ＳｉＣ成形体
JP7155089B2 (ja) 2019-09-27 2022-10-18 東海カーボン株式会社 多結晶ＳｉＣ成形体
JP7239432B2 (ja) 2019-09-27 2023-03-14 東海カーボン株式会社 多結晶ＳｉＣ成形体の製造方法
JP2023061509A (ja) 2021-10-20 2023-05-02 株式会社サイコックス 多結晶炭化珪素基板の製造方法
KR102800944B1 (ko) 2022-03-07 2025-04-29 도까이 카본 가부시끼가이샤 다결정 SiC 성형체 및 그 제조 방법
EP4467682A4 (en) 2022-12-22 2025-07-30 Tokai Carbon Kk Polycrystalline sic molded article, and method for producing same
CN117051374A (zh) * 2023-08-18 2023-11-14 北京亦盛精密半导体有限公司 一种调节cvd碳化硅中氮含量的方法
EP4545679A1 (en) 2023-08-25 2025-04-30 Tokai Carbon Co., Ltd. BODY MOULDED IN POLYCRYSTALLINE SIC

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4772498A (en) * 1986-11-20 1988-09-20 Air Products And Chemicals, Inc. Silicon carbide capillaries
EP0582444A1 (en) * 1992-07-31 1994-02-09 Cvd Incorporated Ultra pure silicon carbide and high temperature semiconductor processing equipment made therefrom

Family Cites Families (14)

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US5093039A (en) * 1989-01-30 1992-03-03 Kazunori Kijima Highly pure sintered carbide with high electric conductivity and process of producing the same
US5071596A (en) 1989-10-23 1991-12-10 Cvd Incorporated Fabrication of lightweight ceramic mirrors by means of a chemical vapor deposition process
JPH03252307A (ja) * 1990-02-27 1991-11-11 Showa Denko Kk 多結晶炭化珪素
US5374412A (en) * 1992-07-31 1994-12-20 Cvd, Inc. Highly polishable, highly thermally conductive silicon carbide
TW337513B (en) * 1992-11-23 1998-08-01 Cvd Inc Chemical vapor deposition-produced silicon carbide having improved properties and preparation process thereof
US5332601A (en) * 1992-12-10 1994-07-26 The United States As Represented By The United States Department Of Energy Method of fabricating silicon carbide coatings on graphite surfaces
US5354580A (en) 1993-06-08 1994-10-11 Cvd Incorporated Triangular deposition chamber for a vapor deposition system
EP0792853B1 (en) * 1996-02-29 2001-04-25 Bridgestone Corporation Process for making a silicon carbide sintered body
US5683028A (en) 1996-05-03 1997-11-04 Cvd, Incorporated Bonding of silicon carbide components
JPH1167427A (ja) * 1997-08-27 1999-03-09 Bridgestone Corp ヒーター部品
US6090733A (en) * 1997-08-27 2000-07-18 Bridgestone Corporation Sintered silicon carbide and method for producing the same
JPH1179846A (ja) * 1997-09-01 1999-03-23 Tokai Carbon Co Ltd 炭化珪素成形体
JP4595153B2 (ja) * 2000-02-14 2010-12-08 旭硝子株式会社 炭化ケイ素体およびその製造方法
JP2002047066A (ja) * 2000-08-02 2002-02-12 Tokai Carbon Co Ltd ＳｉＣ成形体およびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4772498A (en) * 1986-11-20 1988-09-20 Air Products And Chemicals, Inc. Silicon carbide capillaries
EP0582444A1 (en) * 1992-07-31 1994-02-09 Cvd Incorporated Ultra pure silicon carbide and high temperature semiconductor processing equipment made therefrom

Also Published As

Publication number Publication date
JP2001316821A (ja) 2001-11-16
US7018947B2 (en) 2006-03-28
US20020004444A1 (en) 2002-01-10
TW554065B (en) 2003-09-21
KR20010085556A (ko) 2001-09-07
DE60139359D1 (de) 2009-09-10
EP1127955B1 (en) 2009-07-29
EP1127955A1 (en) 2001-08-29

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