DE60139359D1 - Siliziumkarbid mit geringem Widerstand - Google Patents

Siliziumkarbid mit geringem Widerstand

Info

Publication number
DE60139359D1
DE60139359D1 DE60139359T DE60139359T DE60139359D1 DE 60139359 D1 DE60139359 D1 DE 60139359D1 DE 60139359 T DE60139359 T DE 60139359T DE 60139359 T DE60139359 T DE 60139359T DE 60139359 D1 DE60139359 D1 DE 60139359D1
Authority
DE
Germany
Prior art keywords
silicon carbide
low resistance
resistance
low
carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60139359T
Other languages
English (en)
Inventor
Jitendra S Goela
Michael A Pickering
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Application granted granted Critical
Publication of DE60139359D1 publication Critical patent/DE60139359D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
DE60139359T 2000-02-24 2001-02-22 Siliziumkarbid mit geringem Widerstand Expired - Lifetime DE60139359D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18476600P 2000-02-24 2000-02-24

Publications (1)

Publication Number Publication Date
DE60139359D1 true DE60139359D1 (de) 2009-09-10

Family

ID=22678255

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60139359T Expired - Lifetime DE60139359D1 (de) 2000-02-24 2001-02-22 Siliziumkarbid mit geringem Widerstand

Country Status (6)

Country Link
US (1) US7018947B2 (de)
EP (1) EP1127955B1 (de)
JP (1) JP2001316821A (de)
KR (1) KR100760342B1 (de)
DE (1) DE60139359D1 (de)
TW (1) TW554065B (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6939821B2 (en) * 2000-02-24 2005-09-06 Shipley Company, L.L.C. Low resistivity silicon carbide
JP2002047066A (ja) * 2000-08-02 2002-02-12 Tokai Carbon Co Ltd ＳｉＣ成形体およびその製造方法
US6811761B2 (en) * 2000-11-10 2004-11-02 Shipley Company, L.L.C. Silicon carbide with high thermal conductivity
US8202621B2 (en) * 2001-09-22 2012-06-19 Rohm And Haas Company Opaque low resistivity silicon carbide
KR100973464B1 (ko) * 2003-02-03 2010-08-02 주식회사 티포엘 게비온(gebion) 철망 연속 자동 제조장치
US7261919B2 (en) * 2003-11-18 2007-08-28 Flx Micro, Inc. Silicon carbide and other films and method of deposition
US8114505B2 (en) * 2003-12-05 2012-02-14 Morgan Advanced Ceramics, Inc. Free-standing silicon carbide articles formed by chemical vapor deposition and methods for their manufacture
US20050123713A1 (en) * 2003-12-05 2005-06-09 Forrest David T. Articles formed by chemical vapor deposition and methods for their manufacture
US7501765B2 (en) * 2004-10-01 2009-03-10 Illinois Tool Works Inc. Emitter electrodes formed of chemical vapor deposition silicon carbide
CN100430516C (zh) * 2005-03-18 2008-11-05 西北工业大学 碳/碳复合材料表面碳化硅纳米线的制备方法
JP2008252045A (ja) * 2007-03-30 2008-10-16 Mitsui Eng & Shipbuild Co Ltd プラズマ処置装置用電極
US8105649B1 (en) 2007-08-09 2012-01-31 Imaging Systems Technology Fabrication of silicon carbide shell
US7935618B2 (en) * 2007-09-26 2011-05-03 Micron Technology, Inc. Sputtering-less ultra-low energy ion implantation
CN103723731B (zh) * 2013-04-22 2015-10-21 太仓派欧技术咨询服务有限公司 一种复合式化学气相沉积碳化硅装置
US9384937B2 (en) * 2013-09-27 2016-07-05 Varian Semiconductor Equipment Associates, Inc. SiC coating in an ion implanter
FR3034775B1 (fr) 2015-04-13 2018-09-28 Hutchinson Materiau pour le stockage thermique
FR3034771B1 (fr) * 2015-04-13 2019-04-19 Hutchinson Materiaux conducteurs thermiques et/ou electriques et leur procede de preparation
JP2018035009A (ja) * 2016-08-29 2018-03-08 京セラ株式会社 ＳｉＣ材料およびそれを用いた半導体製造装置用部材
JP6609300B2 (ja) * 2017-12-21 2019-11-20 國家中山科學研究院 特定形状の炭化ケイ素の育成装置
KR20220149760A (ko) 2018-06-01 2022-11-08 (주) 디에스테크노 식각 특성이 향상된 화학기상증착 실리콘 카바이드 벌크
US11319629B2 (en) 2018-08-06 2022-05-03 Advanced Silicon Carbide Materials Method of making composite articles from silicon carbide
JP7077288B2 (ja) 2019-09-27 2022-05-30 東海カーボン株式会社 多結晶ＳｉＣ成形体
JP7239432B2 (ja) 2019-09-27 2023-03-14 東海カーボン株式会社 多結晶ＳｉＣ成形体の製造方法
JP7155089B2 (ja) 2019-09-27 2022-10-18 東海カーボン株式会社 多結晶ＳｉＣ成形体
JP2023061509A (ja) 2021-10-20 2023-05-02 株式会社サイコックス 多結晶炭化珪素基板の製造方法
CN117120661A (zh) 2022-03-07 2023-11-24 东海炭素株式会社 多晶SiC成型体及其制造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4772498A (en) 1986-11-20 1988-09-20 Air Products And Chemicals, Inc. Silicon carbide capillaries
US5093039A (en) * 1989-01-30 1992-03-03 Kazunori Kijima Highly pure sintered carbide with high electric conductivity and process of producing the same
US5071596A (en) 1989-10-23 1991-12-10 Cvd Incorporated Fabrication of lightweight ceramic mirrors by means of a chemical vapor deposition process
JPH03252307A (ja) * 1990-02-27 1991-11-11 Showa Denko Kk 多結晶炭化珪素
CA2099788A1 (en) 1992-07-31 1994-02-01 Michael A. Pickering Ultra pure silicon carbide and high temperature semiconductor processing equipment made therefrom
US5374412A (en) * 1992-07-31 1994-12-20 Cvd, Inc. Highly polishable, highly thermally conductive silicon carbide
TW337513B (en) * 1992-11-23 1998-08-01 Cvd Inc Chemical vapor deposition-produced silicon carbide having improved properties and preparation process thereof
US5332601A (en) * 1992-12-10 1994-07-26 The United States As Represented By The United States Department Of Energy Method of fabricating silicon carbide coatings on graphite surfaces
US5354580A (en) 1993-06-08 1994-10-11 Cvd Incorporated Triangular deposition chamber for a vapor deposition system
DE69704638T2 (de) * 1996-02-29 2001-08-30 Bridgestone Corp Verfahren zur Herstellung eines Sinterkörpers aus Siliciumcarbid
US5683028A (en) 1996-05-03 1997-11-04 Cvd, Incorporated Bonding of silicon carbide components
US6090733A (en) * 1997-08-27 2000-07-18 Bridgestone Corporation Sintered silicon carbide and method for producing the same
JPH1167427A (ja) * 1997-08-27 1999-03-09 Bridgestone Corp ヒーター部品
JPH1179846A (ja) * 1997-09-01 1999-03-23 Tokai Carbon Co Ltd 炭化珪素成形体
JP4595153B2 (ja) * 2000-02-14 2010-12-08 旭硝子株式会社 炭化ケイ素体およびその製造方法
JP2002047066A (ja) * 2000-08-02 2002-02-12 Tokai Carbon Co Ltd ＳｉＣ成形体およびその製造方法

Also Published As

Publication number Publication date
EP1127955A1 (de) 2001-08-29
US20020004444A1 (en) 2002-01-10
EP1127955B1 (de) 2009-07-29
TW554065B (en) 2003-09-21
US7018947B2 (en) 2006-03-28
JP2001316821A (ja) 2001-11-16
KR20010085556A (ko) 2001-09-07
KR100760342B1 (ko) 2007-09-20

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Legal Events

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8364 No opposition during term of opposition