KR100608391B1 - 통합된 인트라베이 버퍼, 운반, 그리고 스톡커 시스템 - Google Patents

통합된 인트라베이 버퍼, 운반, 그리고 스톡커 시스템 Download PDF

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Publication number
KR100608391B1
KR100608391B1 KR1019997009416A KR19997009416A KR100608391B1 KR 100608391 B1 KR100608391 B1 KR 100608391B1 KR 1019997009416 A KR1019997009416 A KR 1019997009416A KR 19997009416 A KR19997009416 A KR 19997009416A KR 100608391 B1 KR100608391 B1 KR 100608391B1
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KR
South Korea
Prior art keywords
tool
pod
bay
delete delete
pods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1019997009416A
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English (en)
Korean (ko)
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KR20010006331A (ko
Inventor
포스나이트윌리암제이.
Original Assignee
어사이스트 테크놀로지스, 인코포레이티드
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Application filed by 어사이스트 테크놀로지스, 인코포레이티드 filed Critical 어사이스트 테크놀로지스, 인코포레이티드
Publication of KR20010006331A publication Critical patent/KR20010006331A/ko
Application granted granted Critical
Publication of KR100608391B1 publication Critical patent/KR100608391B1/ko
Assigned to 크로씽 오토메이션, 인코포레이티드 reassignment 크로씽 오토메이션, 인코포레이티드 권리의 전부이전등록 Assignors: 어사이스트 테크놀로지스, 인코포레이티드
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/14—Stack holders or separators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3216—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3222—Loading to or unloading from a conveyor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Memory System Of A Hierarchy Structure (AREA)
KR1019997009416A 1997-04-14 1998-03-26 통합된 인트라베이 버퍼, 운반, 그리고 스톡커 시스템 Expired - Lifetime KR100608391B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/843,245 US5980183A (en) 1997-04-14 1997-04-14 Integrated intrabay buffer, delivery, and stocker system
US08/843,245 1997-04-14
PCT/US1998/005961 WO1998046503A1 (en) 1997-04-14 1998-03-26 Integrated intrabay buffer, delivery, and stocker system

Publications (2)

Publication Number Publication Date
KR20010006331A KR20010006331A (ko) 2001-01-26
KR100608391B1 true KR100608391B1 (ko) 2006-08-09

Family

ID=25289443

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019997009416A Expired - Lifetime KR100608391B1 (ko) 1997-04-14 1998-03-26 통합된 인트라베이 버퍼, 운반, 그리고 스톡커 시스템

Country Status (7)

Country Link
US (1) US5980183A (https=)
EP (1) EP1028905B1 (https=)
JP (1) JP4068160B2 (https=)
KR (1) KR100608391B1 (https=)
AT (1) ATE361551T1 (https=)
DE (1) DE69837718T2 (https=)
WO (1) WO1998046503A1 (https=)

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ATE361551T1 (de) 2007-05-15
EP1028905A4 (en) 2004-09-15
EP1028905A1 (en) 2000-08-23
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US5980183A (en) 1999-11-09
KR20010006331A (ko) 2001-01-26
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