KR100587619B1 - 비파괴 검사장치 - Google Patents
비파괴 검사장치 Download PDFInfo
- Publication number
- KR100587619B1 KR100587619B1 KR1020027005501A KR20027005501A KR100587619B1 KR 100587619 B1 KR100587619 B1 KR 100587619B1 KR 1020027005501 A KR1020027005501 A KR 1020027005501A KR 20027005501 A KR20027005501 A KR 20027005501A KR 100587619 B1 KR100587619 B1 KR 100587619B1
- Authority
- KR
- South Korea
- Prior art keywords
- power supply
- mold
- fixed
- ray generator
- mold power
- Prior art date
Links
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/08—Electrical details
- H05G1/10—Power supply arrangements for feeding the X-ray tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/028—Replacing parts of the gun; Relative adjustment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/025—X-ray tubes with structurally associated circuit elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/066—Details of electron optical components, e.g. cathode cups
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/04—Mounting the X-ray tube within a closed housing
- H05G1/06—X-ray tube and at least part of the power supply apparatus being mounted within the same housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- X-Ray Techniques (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (3)
- 교환 가능한 필라멘트부를 갖는 전자총으로부터 방출한 전자를 타겟에 조사하고, 상기 타겟으로부터 X선을 방출시키는 개방형 X선 발생장치로부터 발생시키는 X선을 검사 대상물에 조사시켜, 상기 검사 대상물의 상태를 X선 카메라에 의해서 촬상시키는 비파괴 검사장치에 있어서,상기 개방형 X선 발생장치는,내부에 코일부를 구비하는 동시에, 상기 코일부에 의해서 포위된 전자 통로를 구비하고, 펌프에 의해서 진공 흡입되는 통 형상부와,상기 통 형상부의 기단측에 고정되는 동시에, 고압 발생부를 수지 몰드한 몰드 전원부를 구비하고,상기 몰드 전원부를 아래로 하고, 상기 몰드 전원부와 반대의 상기 통 형상부의 단부에 설치된 상기 타켓을 위로 한 상태로, 상기 몰드 전원부가 베이스 판에 고정되며,상기 통 형상부는, 상기 몰드 전원부에 고정되는 고정부와 상기 고정부의 상부에 장착되는 탈착부를 구비하는 것을 특징으로 하는 비파괴 검사장치.
- 제 1 항에 있어서,상기 몰드 전원부는 진동 흡수판을 통해서 상기 베이스판에 고정한 것을 특징으로 하는, 비파괴 검사장치.
- 삭제
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-1999-00309835 | 1999-10-29 | ||
JP30983599A JP3934836B2 (ja) | 1999-10-29 | 1999-10-29 | 非破壊検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020060722A KR20020060722A (ko) | 2002-07-18 |
KR100587619B1 true KR100587619B1 (ko) | 2006-06-07 |
Family
ID=17997851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020027005501A KR100587619B1 (ko) | 1999-10-29 | 2000-10-27 | 비파괴 검사장치 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6600809B1 (ko) |
EP (1) | EP1233659B1 (ko) |
JP (1) | JP3934836B2 (ko) |
KR (1) | KR100587619B1 (ko) |
CN (1) | CN1161603C (ko) |
AU (1) | AU7960900A (ko) |
DE (1) | DE60037595T2 (ko) |
TW (1) | TW466532B (ko) |
WO (1) | WO2001033920A1 (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1751543B (zh) * | 2003-02-20 | 2011-02-02 | 因普有限公司 | 集成的x射线源模块 |
JP4664025B2 (ja) * | 2004-09-02 | 2011-04-06 | 浜松ホトニクス株式会社 | X線源 |
US7885386B2 (en) * | 2006-03-31 | 2011-02-08 | General Electric Company | Systems and apparatus for a compact low power X-ray generator |
JP2009068973A (ja) * | 2007-09-12 | 2009-04-02 | Hamamatsu Photonics Kk | 電子線照射装置 |
JP5153537B2 (ja) * | 2008-09-17 | 2013-02-27 | Tdkラムダ株式会社 | スイッチング電源装置 |
JP5406595B2 (ja) * | 2009-05-21 | 2014-02-05 | 株式会社日立製作所 | 電子線源用フィラメント構造体 |
US9601300B2 (en) * | 2010-04-09 | 2017-03-21 | Ge Sensing And Inspection Technologies Gmbh | Cathode element for a microfocus x-ray tube |
US8675817B2 (en) | 2010-07-30 | 2014-03-18 | Rigaku Corporation | Industrial X-ray generator |
US8903047B1 (en) * | 2010-11-02 | 2014-12-02 | Moxtek, Inc. | High voltage circuit with arc protection |
CN104854963B (zh) * | 2012-09-26 | 2020-02-21 | 株式会社尼康 | X线装置、及构造物的制造方法 |
CN102891059B (zh) * | 2012-10-31 | 2015-12-09 | 丹东奥龙射线仪器集团有限公司 | 开放式微焦点x射线管 |
DE102015213810B4 (de) * | 2015-07-22 | 2021-11-25 | Siemens Healthcare Gmbh | Hochspannungszuführung für einen Röntgenstrahler |
US20230317400A1 (en) * | 2022-03-29 | 2023-10-05 | Jeol Ltd. | Charged Particle Beam Source and Charged Particle Beam System |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2202687A (en) * | 1936-12-16 | 1940-05-28 | Philips Nv | High-voltage discharge tube |
US3812366A (en) * | 1971-03-08 | 1974-05-21 | Watkins Johnson Co | Composite x-ray tube/transformer assembly |
DE2537019B2 (de) * | 1975-08-20 | 1980-11-06 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Einen Röntgenstrahier, bestehend aus Röntgenröhre und Röhrengehäuse, oder eine Röntgenröhre mit Metallkolben enthaltende Anordnung |
JPS5814499A (ja) | 1981-07-20 | 1983-01-27 | Toshiba Corp | X線発生装置 |
US4521902A (en) * | 1983-07-05 | 1985-06-04 | Ridge, Inc. | Microfocus X-ray system |
JPH06188092A (ja) * | 1992-12-17 | 1994-07-08 | Hitachi Ltd | X線発生用タ−ゲットとx線源とx線撮像装置 |
JPH08162285A (ja) | 1994-10-03 | 1996-06-21 | Rigaku Corp | 回転対陰極x線管、x線発生装置、およびx線発生装置の組立方法 |
DE19509516C1 (de) | 1995-03-20 | 1996-09-26 | Medixtec Gmbh Medizinische Ger | Mikrofokus-Röntgeneinrichtung |
JP3717239B2 (ja) | 1996-07-19 | 2005-11-16 | 株式会社リガク | X線発生装置 |
-
1999
- 1999-10-29 JP JP30983599A patent/JP3934836B2/ja not_active Expired - Lifetime
-
2000
- 2000-10-27 CN CNB008151687A patent/CN1161603C/zh not_active Expired - Lifetime
- 2000-10-27 EP EP00970151A patent/EP1233659B1/en not_active Expired - Lifetime
- 2000-10-27 KR KR1020027005501A patent/KR100587619B1/ko active IP Right Grant
- 2000-10-27 WO PCT/JP2000/007561 patent/WO2001033920A1/ja active IP Right Grant
- 2000-10-27 AU AU79609/00A patent/AU7960900A/en not_active Abandoned
- 2000-10-27 TW TW089122698A patent/TW466532B/zh not_active IP Right Cessation
- 2000-10-27 US US10/111,802 patent/US6600809B1/en not_active Expired - Lifetime
- 2000-10-27 DE DE60037595T patent/DE60037595T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1161603C (zh) | 2004-08-11 |
DE60037595T2 (de) | 2008-12-11 |
US6600809B1 (en) | 2003-07-29 |
AU7960900A (en) | 2001-05-14 |
KR20020060722A (ko) | 2002-07-18 |
DE60037595D1 (de) | 2008-02-07 |
CN1387744A (zh) | 2002-12-25 |
WO2001033920A1 (fr) | 2001-05-10 |
JP2001135497A (ja) | 2001-05-18 |
EP1233659B1 (en) | 2007-12-26 |
JP3934836B2 (ja) | 2007-06-20 |
EP1233659A1 (en) | 2002-08-21 |
EP1233659A4 (en) | 2006-05-03 |
TW466532B (en) | 2001-12-01 |
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