KR100564348B1 - 반도체 위치 검출기 - Google Patents

반도체 위치 검출기 Download PDF

Info

Publication number
KR100564348B1
KR100564348B1 KR1020007015059A KR20007015059A KR100564348B1 KR 100564348 B1 KR100564348 B1 KR 100564348B1 KR 1020007015059 A KR1020007015059 A KR 1020007015059A KR 20007015059 A KR20007015059 A KR 20007015059A KR 100564348 B1 KR100564348 B1 KR 100564348B1
Authority
KR
South Korea
Prior art keywords
semiconductor
conductive layer
position detector
semiconductor position
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020007015059A
Other languages
English (en)
Korean (ko)
Other versions
KR20010071693A (ko
Inventor
다케시타타추오
사카키바라마사유키
노다코우지
Original Assignee
하마마츠 포토닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하마마츠 포토닉스 가부시키가이샤 filed Critical 하마마츠 포토닉스 가부시키가이샤
Publication of KR20010071693A publication Critical patent/KR20010071693A/ko
Application granted granted Critical
Publication of KR100564348B1 publication Critical patent/KR100564348B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/95—Circuit arrangements
    • H10F77/953—Circuit arrangements for devices having potential barriers
    • H10F77/957—Circuit arrangements for devices having potential barriers for position-sensitive photodetectors, e.g. lateral-effect photodiodes or quadrant photodiodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Optical Distance (AREA)
  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
KR1020007015059A 1998-06-30 1999-06-28 반도체 위치 검출기 Expired - Fee Related KR100564348B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP18464398 1998-06-30
JP98-184643 1998-06-30
JP99-072005 1999-03-17
JP07200599A JP4220058B2 (ja) 1998-06-30 1999-03-17 半導体位置検出器

Publications (2)

Publication Number Publication Date
KR20010071693A KR20010071693A (ko) 2001-07-31
KR100564348B1 true KR100564348B1 (ko) 2006-03-27

Family

ID=26413134

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007015059A Expired - Fee Related KR100564348B1 (ko) 1998-06-30 1999-06-28 반도체 위치 검출기

Country Status (8)

Country Link
US (1) US6459109B2 (enExample)
EP (1) EP1113504A4 (enExample)
JP (1) JP4220058B2 (enExample)
KR (1) KR100564348B1 (enExample)
CN (1) CN100356588C (enExample)
AU (1) AU4290199A (enExample)
TW (1) TW417310B (enExample)
WO (1) WO2000001018A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001068724A (ja) * 1999-08-25 2001-03-16 Hamamatsu Photonics Kk 測距装置
US8144156B1 (en) * 2003-12-31 2012-03-27 Zii Labs Inc. Ltd. Sequencer with async SIMD array
US7768085B2 (en) 2005-10-11 2010-08-03 Icemos Technology Ltd. Photodetector array using isolation diffusions as crosstalk inhibitors between adjacent photodiodes
USD554084S1 (en) * 2005-10-31 2007-10-30 Kabushiki Kaisha Toshiba Portion of a semiconductor apparatus mounting-position accuracy measurement jig
DE102006013461B3 (de) 2006-03-23 2007-11-15 Prüftechnik Dieter Busch AG Photodetektoranordnung, Messanordnung mit einer Photodetektoranordnung und Verfahren zum Betrieb einer Messanordnung
DE102006013460B3 (de) 2006-03-23 2007-11-08 Prüftechnik Dieter Busch AG Photodetektoranordnung, Messanordnung mit einer Photodetektoranordnung und Verfahren zum Betrieb einer Messanordnung
PT2644205T (pt) 2007-04-12 2018-10-19 Brigham & Womens Hospital Inc Direcionamento a abcb5 para tratamento oncológico
US7605361B2 (en) * 2007-07-09 2009-10-20 Denso Corporation Fuel property detection device
CA3001382C (en) * 2008-02-14 2020-10-27 Spiracur Inc. Devices and methods for treatment of damaged tissue
CN112838021B (zh) * 2020-12-31 2023-07-18 杭州广立微电子股份有限公司 一种判断器件与切断层相对位置的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8501489A (nl) * 1985-05-24 1986-12-16 Philips Nv Positie-gevoelige stralingsdetector.
DE3728691A1 (de) * 1986-08-28 1988-03-10 Nissan Motor Lichtempfindlicher positionssensor
JPH0783134B2 (ja) * 1987-07-31 1995-09-06 松下電子工業株式会社 光電変換装置
JP2658175B2 (ja) * 1988-05-16 1997-09-30 日産自動車株式会社 半導体位置センサ
JP2717839B2 (ja) * 1989-03-20 1998-02-25 松下電子工業株式会社 光半導体装置
US4887140A (en) * 1989-04-27 1989-12-12 Board Of Regents, The Univ. Of Texas System Clover design lateral effect position-sensitive device
JPH0766983B2 (ja) * 1990-04-27 1995-07-19 新日本製鐵株式会社 光位置検出用半導体装置
JPH0513808A (ja) * 1990-12-18 1993-01-22 Hamamatsu Photonics Kk 二次元光位置検出素子
JP2931122B2 (ja) * 1991-04-11 1999-08-09 浜松ホトニクス株式会社 一次元光位置検出素子
US5561287A (en) * 1994-09-30 1996-10-01 Board Of Regents Of The University Of Colorado Dual photodetector for determining peak intensity of pixels in an array using a winner take all photodiode intensity circuit and a lateral effect transistor pad position circuit
JPH1012856A (ja) * 1996-06-27 1998-01-16 Olympus Optical Co Ltd 位置検知センサ

Also Published As

Publication number Publication date
CN100356588C (zh) 2007-12-19
JP2000082840A (ja) 2000-03-21
US6459109B2 (en) 2002-10-01
AU4290199A (en) 2000-01-17
EP1113504A4 (en) 2003-09-03
US20010001499A1 (en) 2001-05-24
KR20010071693A (ko) 2001-07-31
JP4220058B2 (ja) 2009-02-04
CN1308776A (zh) 2001-08-15
WO2000001018A1 (en) 2000-01-06
EP1113504A1 (en) 2001-07-04
TW417310B (en) 2001-01-01

Similar Documents

Publication Publication Date Title
JP5405512B2 (ja) 半導体光検出素子及び放射線検出装置
US7333182B2 (en) Range finder and method of reducing signal noise therefrom
US6815790B2 (en) Position sensing detector for the detection of light within two dimensions
US5547879A (en) Method of making position sensing photosensor device
KR890004476B1 (ko) 반도체 광검출기 장치
KR19990008434A (ko) 공면 ｘ-선 포토다이오드 조립체
KR100564348B1 (ko) 반도체 위치 검출기
IL192209A (en) Semiconductor radiation detector optimized for detecting visible light
JP2931122B2 (ja) 一次元光位置検出素子
EP1071140B1 (en) Semiconductor position sensor
JPH1146010A (ja) アバランシェフォトダイオード
JP3836935B2 (ja) 半導体位置検出器
JP2000022202A (ja) 半導体位置検出器
JP4180708B2 (ja) 半導体位置検出器
JPH0644640B2 (ja) 入射位置検出用半導体装置
JPH08130324A (ja) 高耐圧プレーナ型受光素子
JP4197775B2 (ja) 半導体位置検出器
JP2968656B2 (ja) ポジションセンサ
JPH0760887B2 (ja) 半導体光電変換装置
JP2945698B2 (ja) 光半導体装置
JP2001015797A (ja) 光入射位置検出用半導体装置およびその製造方法
JPH0543308B2 (enExample)
JPH0762605B2 (ja) 半導体光位置検出器
JPH0763098B2 (ja) 半導体式ｆｇａ装置
JPH09283788A (ja) 光半導体集積回路

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R17-X000 Change to representative recorded

St.27 status event code: A-5-5-R10-R17-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20120223

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20130321

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20130321

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000