KR100424024B1 - 텅스텐/알루미늄층을사용하는집적회로내부배선및그제조방법 - Google Patents

텅스텐/알루미늄층을사용하는집적회로내부배선및그제조방법 Download PDF

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Publication number
KR100424024B1
KR100424024B1 KR1019960009023A KR19960009023A KR100424024B1 KR 100424024 B1 KR100424024 B1 KR 100424024B1 KR 1019960009023 A KR1019960009023 A KR 1019960009023A KR 19960009023 A KR19960009023 A KR 19960009023A KR 100424024 B1 KR100424024 B1 KR 100424024B1
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KR
South Korea
Prior art keywords
layer
tungsten
barrier layer
conductive
aluminum
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Expired - Fee Related
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KR1019960009023A
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English (en)
Korean (ko)
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KR960035841A (ko
Inventor
클라우스 펠트너
Original Assignee
지멘스 악티엔게젤샤프트
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Application granted granted Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/033—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics
    • H10W20/036—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics the barrier, adhesion or liner layers being within a main fill metal
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/033—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/033—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics
    • H10W20/035—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics combinations of barrier, adhesion or liner layers, e.g. multi-layered barrier layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/081—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
    • H10W20/084—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts for dual-damascene structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/425—Barrier, adhesion or liner layers

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1019960009023A 1995-03-30 1996-03-29 텅스텐/알루미늄층을사용하는집적회로내부배선및그제조방법 Expired - Fee Related KR100424024B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41355795A 1995-03-30 1995-03-30
US08/413557 1995-03-30

Publications (2)

Publication Number Publication Date
KR960035841A KR960035841A (ko) 1996-10-28
KR100424024B1 true KR100424024B1 (ko) 2004-06-23

Family

ID=23637690

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960009023A Expired - Fee Related KR100424024B1 (ko) 1995-03-30 1996-03-29 텅스텐/알루미늄층을사용하는집적회로내부배선및그제조방법

Country Status (5)

Country Link
US (2) US5840625A (https=)
EP (1) EP0735585A3 (https=)
JP (1) JPH08330505A (https=)
KR (1) KR100424024B1 (https=)
TW (1) TW290731B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100546173B1 (ko) * 1998-09-21 2006-04-14 주식회사 하이닉스반도체 반도체소자의 금속배선 형성방법

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KR100230392B1 (ko) * 1996-12-05 1999-11-15 윤종용 반도체 소자의 콘택 플러그 형성방법
US6429120B1 (en) 2000-01-18 2002-08-06 Micron Technology, Inc. Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals
KR100243272B1 (ko) * 1996-12-20 2000-03-02 윤종용 반도체 소자의 콘택 플러그 형성방법
US6054768A (en) * 1997-10-02 2000-04-25 Micron Technology, Inc. Metal fill by treatment of mobility layers
US6281121B1 (en) * 1998-03-06 2001-08-28 Advanced Micro Devices, Inc. Damascene metal interconnects using highly directional deposition of barrier and/or seed layers including (III) filling metal
US6051496A (en) * 1998-09-17 2000-04-18 Taiwan Semiconductor Manufacturing Company Use of stop layer for chemical mechanical polishing of CU damascene
US6478976B1 (en) * 1998-12-30 2002-11-12 Stmicroelectronics, Inc. Apparatus and method for contacting a conductive layer
JP3048567B1 (ja) * 1999-02-18 2000-06-05 沖電気工業株式会社 半導体装置の製造方法
US6144099A (en) * 1999-03-30 2000-11-07 Advanced Micro Devices, Inc. Semiconductor metalization barrier
US6391761B1 (en) 1999-09-20 2002-05-21 Taiwan Semiconductor Manufacturing Company Method to form dual damascene structures using a linear passivation
US7262130B1 (en) * 2000-01-18 2007-08-28 Micron Technology, Inc. Methods for making integrated-circuit wiring from copper, silver, gold, and other metals
US7211512B1 (en) 2000-01-18 2007-05-01 Micron Technology, Inc. Selective electroless-plated copper metallization
US6420262B1 (en) * 2000-01-18 2002-07-16 Micron Technology, Inc. Structures and methods to enhance copper metallization
US6812130B1 (en) 2000-02-09 2004-11-02 Infineon Technologies Ag Self-aligned dual damascene etch using a polymer
US6534866B1 (en) 2000-04-13 2003-03-18 Micron Technology, Inc. Dual damascene interconnect
US6674167B1 (en) 2000-05-31 2004-01-06 Micron Technology, Inc. Multilevel copper interconnect with double passivation
JP4587604B2 (ja) * 2001-06-13 2010-11-24 富士通セミコンダクター株式会社 半導体装置の製造方法
JP3980387B2 (ja) * 2002-03-20 2007-09-26 富士通株式会社 容量検出型センサ及びその製造方法
US6888251B2 (en) * 2002-07-01 2005-05-03 International Business Machines Corporation Metal spacer in single and dual damascene processing
US8471390B2 (en) * 2006-05-12 2013-06-25 Vishay-Siliconix Power MOSFET contact metallization
DE102006025405B4 (de) * 2006-05-31 2018-03-29 Globalfoundries Inc. Verfahren zur Herstellung einer Metallisierungsschicht eines Halbleiterbauelements mit unterschiedlich dicken Metallleitungen
US20070283832A1 (en) * 2006-06-09 2007-12-13 Apple Computer, Inc. Imprint circuit patterning
US8723325B2 (en) * 2009-05-06 2014-05-13 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and method of forming a pad structure having enhanced reliability
US9306056B2 (en) 2009-10-30 2016-04-05 Vishay-Siliconix Semiconductor device with trench-like feed-throughs
US8569168B2 (en) 2012-02-13 2013-10-29 International Business Machines Corporation Dual-metal self-aligned wires and vias
AU2016235941B2 (en) * 2015-03-24 2020-07-02 Vesuvius Usa Corporation Metallurgical vessel lining with configured perforation structure
CN108122820B (zh) * 2016-11-29 2020-06-02 中芯国际集成电路制造(上海)有限公司 互连结构及其制造方法
US11705414B2 (en) * 2017-10-05 2023-07-18 Texas Instruments Incorporated Structure and method for semiconductor packaging
DE102019131909B4 (de) 2018-11-30 2024-10-02 Taiwan Semiconductor Manufacturing Co., Ltd. Vorrichtung und herstellungsverfahren

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KR930024105A (ko) * 1992-05-16 1993-12-21 박원희 텅스텐질화박막을 베리어메탈로 이용한 실리콘 반도체소자의 알루미늄금속배선 형성방법
KR940001272A (ko) * 1992-06-16 1994-01-11 김광호 금속배선 형성방법

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JPH01107558A (ja) * 1987-10-20 1989-04-25 Matsushita Electric Ind Co Ltd 金属薄膜配線の製造方法
US4997789A (en) * 1988-10-31 1991-03-05 Texas Instruments Incorporated Aluminum contact etch mask and etchstop for tungsten etchback
US5202287A (en) * 1989-01-06 1993-04-13 International Business Machines Corporation Method for a two step selective deposition of refractory metals utilizing SiH4 reduction and H2 reduction
US5141897A (en) * 1990-03-23 1992-08-25 At&T Bell Laboratories Method of making integrated circuit interconnection
US5200539A (en) * 1990-08-27 1993-04-06 Louisiana State University Board Of Supervisors, A Governing Body Of Louisiana State University Agricultural And Mechanical College Homogeneous bimetallic hydroformylation catalysts, and processes utilizing these catalysts for conducting hydroformylation reactions
DE69102851T2 (de) * 1990-10-09 1995-02-16 Nippon Electric Co Verfahren zur Herstellung eines Ti/TiN/Al Kontaktes unter Benutzung eines reaktiven Zerstäubungsprozesses.
JPH04320330A (ja) * 1991-04-19 1992-11-11 Sharp Corp 半導体装置のコンタクト部の形成方法
US5192703A (en) * 1991-10-31 1993-03-09 Micron Technology, Inc. Method of making tungsten contact core stack capacitor
US5300813A (en) * 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5262354A (en) * 1992-02-26 1993-11-16 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
KR930024105A (ko) * 1992-05-16 1993-12-21 박원희 텅스텐질화박막을 베리어메탈로 이용한 실리콘 반도체소자의 알루미늄금속배선 형성방법
KR940001272A (ko) * 1992-06-16 1994-01-11 김광호 금속배선 형성방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100546173B1 (ko) * 1998-09-21 2006-04-14 주식회사 하이닉스반도체 반도체소자의 금속배선 형성방법

Also Published As

Publication number Publication date
EP0735585A3 (en) 1997-01-15
US5840625A (en) 1998-11-24
TW290731B (https=) 1996-11-11
US6016008A (en) 2000-01-18
JPH08330505A (ja) 1996-12-13
KR960035841A (ko) 1996-10-28
EP0735585A2 (en) 1996-10-02

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