KR100286622B1 - 정전척 및 그 사용방법 - Google Patents

정전척 및 그 사용방법 Download PDF

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Publication number
KR100286622B1
KR100286622B1 KR1019950058350A KR19950058350A KR100286622B1 KR 100286622 B1 KR100286622 B1 KR 100286622B1 KR 1019950058350 A KR1019950058350 A KR 1019950058350A KR 19950058350 A KR19950058350 A KR 19950058350A KR 100286622 B1 KR100286622 B1 KR 100286622B1
Authority
KR
South Korea
Prior art keywords
wafer
ejector pin
electrostatic chuck
ejector
back surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019950058350A
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English (en)
Korean (ko)
Other versions
KR960026538A (ko
Inventor
요시히사 모리타
노부오 오쿠무라
도시오 나카니시
Original Assignee
고지마 마타오
스미토모 긴조쿠 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고지마 마타오, 스미토모 긴조쿠 고교 가부시키가이샤 filed Critical 고지마 마타오
Publication of KR960026538A publication Critical patent/KR960026538A/ko
Application granted granted Critical
Publication of KR100286622B1 publication Critical patent/KR100286622B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Drying Of Semiconductors (AREA)
KR1019950058350A 1994-12-28 1995-12-27 정전척 및 그 사용방법 Expired - Fee Related KR100286622B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP32715094 1994-12-28
JP94-327150 1994-12-28
JP18283695A JP3082624B2 (ja) 1994-12-28 1995-07-19 静電チャックの使用方法
JP95-182836 1995-07-19

Publications (2)

Publication Number Publication Date
KR960026538A KR960026538A (ko) 1996-07-22
KR100286622B1 true KR100286622B1 (ko) 2001-05-02

Family

ID=26501488

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950058350A Expired - Fee Related KR100286622B1 (ko) 1994-12-28 1995-12-27 정전척 및 그 사용방법

Country Status (5)

Country Link
US (1) US5815366A (enExample)
EP (1) EP0720217B1 (enExample)
JP (1) JP3082624B2 (enExample)
KR (1) KR100286622B1 (enExample)
DE (1) DE69518398D1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
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KR20180056790A (ko) * 2015-10-15 2018-05-29 어플라이드 머티어리얼스, 인코포레이티드 기판 캐리어 시스템

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JP3249765B2 (ja) * 1997-05-07 2002-01-21 東京エレクトロン株式会社 基板処理装置
JP3163973B2 (ja) * 1996-03-26 2001-05-08 日本電気株式会社 半導体ウエハ・チャック装置及び半導体ウエハの剥離方法
JP3954177B2 (ja) * 1997-01-29 2007-08-08 日本碍子株式会社 金属部材とセラミックス部材との接合構造およびその製造方法
US6456480B1 (en) * 1997-03-25 2002-09-24 Tokyo Electron Limited Processing apparatus and a processing method
AT411304B (de) * 1997-06-18 2003-11-25 Sez Ag Träger für scheibenförmige gegenstände, insbesondere silizium-wafer
US6033482A (en) * 1998-04-10 2000-03-07 Applied Materials, Inc. Method for igniting a plasma in a plasma processing chamber
JP3298528B2 (ja) * 1998-12-10 2002-07-02 日本電気株式会社 回路設計方法および装置、情報記憶媒体、集積回路装置
US6169652B1 (en) * 1999-03-12 2001-01-02 Euv, L.L.C. Electrostatically screened, voltage-controlled electrostatic chuck
JP2001057359A (ja) * 1999-08-17 2001-02-27 Tokyo Electron Ltd プラズマ処理装置
EP1217655A1 (de) * 2000-12-23 2002-06-26 VenTec Gesellschaft für Venturekapital und Unternehmensberatung Methode zur Handhabung dünner Wafer
US20020126437A1 (en) * 2001-03-12 2002-09-12 Winbond Electronics Corporation Electrostatic chuck system and method for maintaining the same
US6665168B2 (en) * 2001-03-30 2003-12-16 Taiwan Semiconductor Manufacturing Co. Ltd Electrostatic chuck apparatus and method for efficiently dechucking a substrate therefrom
US6481723B1 (en) * 2001-03-30 2002-11-19 Lam Research Corporation Lift pin impact management
TWI246873B (en) * 2001-07-10 2006-01-01 Tokyo Electron Ltd Plasma processing device
US6864563B1 (en) * 2002-05-30 2005-03-08 Lsi Logic Corporation Grounding mechanism for semiconductor devices
EP1391786B1 (en) * 2002-08-23 2010-10-06 ASML Netherlands B.V. Chuck, lithographic apparatus and device manufacturing method
US7092231B2 (en) 2002-08-23 2006-08-15 Asml Netherlands B.V. Chuck, lithographic apparatus and device manufacturing method
JP2004152929A (ja) * 2002-10-30 2004-05-27 Nec Electronics Corp 半導体装置及びその製造方法
US7500445B2 (en) * 2003-01-27 2009-03-10 Applied Materials, Inc. Method and apparatus for cleaning a CVD chamber
US7301623B1 (en) * 2003-12-16 2007-11-27 Nanometrics Incorporated Transferring, buffering and measuring a substrate in a metrology system
US20060162739A1 (en) * 2005-01-21 2006-07-27 Nikon Corporation Cleaning chuck in situ
CN100343952C (zh) * 2005-12-05 2007-10-17 北京北方微电子基地设备工艺研究中心有限责任公司 一种硅片卸载工艺
CN100362645C (zh) * 2005-12-07 2008-01-16 北京北方微电子基地设备工艺研究中心有限责任公司 顶针装置
CN101352108B (zh) * 2005-12-28 2011-12-07 夏普株式会社 台装置和等离子体处理装置
US20070212200A1 (en) * 2006-03-09 2007-09-13 Tokyo Electron Limited Lifter and target object processing apparatus provided with lifter
JP4933814B2 (ja) * 2006-03-30 2012-05-16 株式会社ブイ・テクノロジー 作業装置におけるワーク受け渡し装置
JP2008198739A (ja) * 2007-02-09 2008-08-28 Tokyo Electron Ltd 載置台構造、これを用いた処理装置及びこの装置の使用方法
US8497980B2 (en) * 2007-03-19 2013-07-30 Nikon Corporation Holding apparatus, exposure apparatus, exposure method, and device manufacturing method
JP5302541B2 (ja) * 2008-01-09 2013-10-02 株式会社日立ハイテクノロジーズ プラズマ処理装置
US8681472B2 (en) * 2008-06-20 2014-03-25 Varian Semiconductor Equipment Associates, Inc. Platen ground pin for connecting substrate to ground
US9953849B2 (en) 2008-06-20 2018-04-24 Varian Semiconductor Equipment Associates, Inc. Platen for reducing particle contamination on a substrate and a method thereof
JP2010087342A (ja) * 2008-10-01 2010-04-15 Toray Eng Co Ltd リフトピン
JP2010087343A (ja) * 2008-10-01 2010-04-15 Toray Eng Co Ltd 基板処理装置及び基板載置方法
US7952851B2 (en) 2008-10-31 2011-05-31 Axcelis Technologies, Inc. Wafer grounding method for electrostatic clamps
US8902560B2 (en) * 2008-10-31 2014-12-02 Axcelis Technologies, Inc. Electrostatic chuck ground punch
US11615941B2 (en) 2009-05-01 2023-03-28 Advanced Energy Industries, Inc. System, method, and apparatus for controlling ion energy distribution in plasma processing systems
US11978611B2 (en) * 2009-05-01 2024-05-07 Advanced Energy Industries, Inc. Apparatus with switches to produce a waveform
DE102011011531B4 (de) * 2011-02-17 2014-08-14 Audi Ag Auswerferanordnung zur Entformung eines Gussbauteils aus einer Gießform eines Gießwerkzeugs
US9608549B2 (en) * 2011-09-30 2017-03-28 Applied Materials, Inc. Electrostatic chuck
US9999947B2 (en) * 2015-05-01 2018-06-19 Component Re-Engineering Company, Inc. Method for repairing heaters and chucks used in semiconductor processing
US10438833B2 (en) * 2016-02-16 2019-10-08 Lam Research Corporation Wafer lift ring system for wafer transfer
JP7170449B2 (ja) * 2018-07-30 2022-11-14 東京エレクトロン株式会社 載置台機構、処理装置及び載置台機構の動作方法
CN109985823A (zh) * 2019-05-06 2019-07-09 山东泓瑞光电科技有限公司 一种led晶片自动分选机用缓冲过渡平台
CN112518364B (zh) * 2020-10-27 2022-07-19 合肥哈工联进智能装备有限公司 一种用于工装锁紧的脱能式设备
US12181801B2 (en) 2021-05-03 2024-12-31 Applied Materials, Inc. Chamber and methods of treating a substrate after exposure to radiation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63131521A (ja) * 1986-11-21 1988-06-03 Tokuda Seisakusho Ltd ドライエツチング装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
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JPS60121970A (ja) * 1983-12-01 1985-06-29 Toshiba Mach Co Ltd 静電チャック
JP2692323B2 (ja) * 1989-08-08 1997-12-17 富士電機株式会社 半導体ウエハ保持装置
US5179498A (en) * 1990-05-17 1993-01-12 Tokyo Electron Limited Electrostatic chuck device
JP3230821B2 (ja) * 1991-01-28 2001-11-19 株式会社東芝 プッシャーピン付き静電チャック
JPH05129421A (ja) * 1991-11-07 1993-05-25 Fujitsu Ltd 静電チヤツク
US5310453A (en) * 1992-02-13 1994-05-10 Tokyo Electron Yamanashi Limited Plasma process method using an electrostatic chuck
JPH05226292A (ja) * 1992-02-13 1993-09-03 Tokyo Electron Yamanashi Kk プラズマ処理開始方法
KR100238629B1 (ko) * 1992-12-17 2000-01-15 히가시 데쓰로 정전척을 가지는 재치대 및 이것을 이용한 플라즈마 처리장치
JP3264391B2 (ja) * 1993-05-17 2002-03-11 東京エレクトロン株式会社 静電吸着体の離脱装置
JPH06252253A (ja) * 1993-02-26 1994-09-09 Sumitomo Metal Ind Ltd 静電チャック
US5459632A (en) * 1994-03-07 1995-10-17 Applied Materials, Inc. Releasing a workpiece from an electrostatic chuck

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JPS63131521A (ja) * 1986-11-21 1988-06-03 Tokuda Seisakusho Ltd ドライエツチング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180056790A (ko) * 2015-10-15 2018-05-29 어플라이드 머티어리얼스, 인코포레이티드 기판 캐리어 시스템
KR102615853B1 (ko) 2015-10-15 2023-12-21 어플라이드 머티어리얼스, 인코포레이티드 기판 캐리어 시스템

Also Published As

Publication number Publication date
EP0720217B1 (en) 2000-08-16
US5815366A (en) 1998-09-29
KR960026538A (ko) 1996-07-22
JP3082624B2 (ja) 2000-08-28
DE69518398D1 (de) 2000-09-21
JPH08236604A (ja) 1996-09-13
EP0720217A3 (enExample) 1996-07-17
EP0720217A2 (en) 1996-07-03

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