KR100192188B1 - 멀티 레일의 파워 격자 응용을 위한 정전기 방전 보호회로 - Google Patents
멀티 레일의 파워 격자 응용을 위한 정전기 방전 보호회로 Download PDFInfo
- Publication number
- KR100192188B1 KR100192188B1 KR1019950031591A KR19950031591A KR100192188B1 KR 100192188 B1 KR100192188 B1 KR 100192188B1 KR 1019950031591 A KR1019950031591 A KR 1019950031591A KR 19950031591 A KR19950031591 A KR 19950031591A KR 100192188 B1 KR100192188 B1 KR 100192188B1
- Authority
- KR
- South Korea
- Prior art keywords
- esd
- well
- diode
- power
- vss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
- H10D89/921—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs characterised by the configuration of the interconnections connecting the protective arrangements, e.g. ESD buses
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/003—Modifications for increasing the reliability for protection
- H03K19/00315—Modifications for increasing the reliability for protection in field-effect transistor circuits
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Computing Systems (AREA)
- General Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31225594A | 1994-09-26 | 1994-09-26 | |
| US8/312,255 | 1994-09-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR960012546A KR960012546A (ko) | 1996-04-20 |
| KR100192188B1 true KR100192188B1 (ko) | 1999-06-15 |
Family
ID=23210595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950031591A Expired - Fee Related KR100192188B1 (ko) | 1994-09-26 | 1995-09-25 | 멀티 레일의 파워 격자 응용을 위한 정전기 방전 보호회로 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5945713A (enExample) |
| EP (1) | EP0703622A2 (enExample) |
| JP (1) | JPH08111508A (enExample) |
| KR (1) | KR100192188B1 (enExample) |
| TW (1) | TW289153B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100386079B1 (ko) * | 1996-06-14 | 2003-09-19 | 주식회사 하이닉스반도체 | 정전방전(esd)구조 |
Families Citing this family (66)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3861426B2 (ja) * | 1996-12-27 | 2006-12-20 | セイコーエプソン株式会社 | 半導体装置の保護回路 |
| KR100230736B1 (ko) * | 1997-06-25 | 1999-11-15 | 김영환 | 반도체 소자의 정전기 방지 구조 및 그의 제조방법(Structure of protecting electrostatic discharge for semiconductor device and method for manufacturing the same) |
| US6205500B1 (en) * | 1997-09-24 | 2001-03-20 | Compaq Computer Corp. | System and method for electrically isolating a device from higher voltage devices |
| KR100470994B1 (ko) * | 1997-10-06 | 2005-07-07 | 삼성전자주식회사 | 반도체장치의정전기보호장치 |
| WO2000014803A1 (en) * | 1998-09-03 | 2000-03-16 | Koninklijke Philips Electronics N.V. | Low trigger and holding voltage scr device for esd protection |
| JP2000232203A (ja) | 1999-02-10 | 2000-08-22 | Nec Corp | ラテラルバイポーラ型入出力保護装置 |
| US6424013B1 (en) * | 1999-07-09 | 2002-07-23 | Texas Instruments Incorporated | Body-triggered ESD protection circuit |
| JP3425574B2 (ja) * | 1999-07-19 | 2003-07-14 | Necエレクトロニクス株式会社 | 半導体集積回路の入出力保護装置 |
| US6388857B1 (en) | 1999-07-23 | 2002-05-14 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor circuit device with improved surge resistance |
| JP3926975B2 (ja) | 1999-09-22 | 2007-06-06 | 株式会社東芝 | スタック型mosトランジスタ保護回路 |
| JP3450244B2 (ja) * | 1999-12-03 | 2003-09-22 | Necエレクトロニクス株式会社 | 半導体保護装置 |
| US6466423B1 (en) * | 2000-01-06 | 2002-10-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Electrostatic discharge protection device for mixed voltage application |
| US6462380B1 (en) * | 2000-01-21 | 2002-10-08 | Texas Instruments Incorporated | ESD protection circuit for advanced technologies |
| US6624998B2 (en) | 2000-01-24 | 2003-09-23 | Medtronic, Inc. | Electrostatic discharge protection scheme in low potential drop environments |
| US6366435B1 (en) * | 2000-02-04 | 2002-04-02 | United Microelectronics Corp. | Multiple sources ESD protection for an epitaxy wafer substrate |
| DE50013834D1 (de) | 2000-04-12 | 2007-01-18 | Infineon Technologies Ag | ESD-Latch-up-Schutzschaltung für eine integrierte Schaltung |
| TW445575B (en) * | 2000-05-20 | 2001-07-11 | Nanya Technology Corp | Dynamic random access memory with guard ring and its manufacture method |
| JP2002083931A (ja) * | 2000-09-08 | 2002-03-22 | Nec Corp | 半導体集積回路装置 |
| US6671153B1 (en) | 2000-09-11 | 2003-12-30 | Taiwan Semiconductor Manufacturing Company | Low-leakage diode string for use in the power-rail ESD clamp circuits |
| US6784496B1 (en) * | 2000-09-25 | 2004-08-31 | Texas Instruments Incorporated | Circuit and method for an integrated charged device model clamp |
| US6437407B1 (en) | 2000-11-07 | 2002-08-20 | Industrial Technology Research Institute | Charged device model electrostatic discharge protection for integrated circuits |
| KR20020085101A (ko) * | 2001-05-04 | 2002-11-16 | 삼성전자 주식회사 | 다이오드를 이용한 정전기적 방전으로부터의 보호 회로 |
| US6822294B1 (en) * | 2001-06-29 | 2004-11-23 | National Semiconductor Corporation | High holding voltage LVTSCR |
| US6605493B1 (en) * | 2001-08-29 | 2003-08-12 | Taiwan Semiconductor Manufacturing Company | Silicon controlled rectifier ESD structures with trench isolation |
| US6885078B2 (en) * | 2001-11-09 | 2005-04-26 | Lsi Logic Corporation | Circuit isolation utilizing MeV implantation |
| CN1244152C (zh) * | 2001-11-16 | 2006-03-01 | 松下电器产业株式会社 | 半导体装置 |
| US6492244B1 (en) * | 2001-11-21 | 2002-12-10 | International Business Machines Corporation | Method and semiconductor structure for implementing buried dual rail power distribution and integrated decoupling capacitance for silicon on insulator (SOI) devices |
| US6624660B2 (en) | 2001-12-06 | 2003-09-23 | Micron Technology, Inc. | CMOS output driver for semiconductor device and related method for improving latch-up immunity in a CMOS output driver |
| US7280332B2 (en) * | 2002-01-18 | 2007-10-09 | The Regents Of The University Of California | On-chip ESD protection circuit for compound semiconductor heterojunction bipolar transistor RF circuits |
| US7384854B2 (en) * | 2002-03-08 | 2008-06-10 | International Business Machines Corporation | Method of forming low capacitance ESD robust diodes |
| US7020857B2 (en) * | 2002-05-20 | 2006-03-28 | International Business Machines Corporation | Method and apparatus for providing noise suppression in a integrated circuit |
| US6849479B2 (en) * | 2002-12-03 | 2005-02-01 | Taiwan Semiconductor Manufacturing Company | Substrate based ESD network protection method for flip chip design |
| EP1453092A3 (en) * | 2003-02-27 | 2004-09-08 | NEC Electronics Corporation | Semiconductor integrated device and apparatus for designing the same |
| US7167350B2 (en) * | 2003-11-14 | 2007-01-23 | Texas Instruments Incorporated | Design implementation to suppress latchup in voltage tolerant circuits |
| CN100338780C (zh) * | 2003-12-10 | 2007-09-19 | 上海华虹Nec电子有限公司 | 嵌位二极管结构(四) |
| US7112853B2 (en) * | 2003-12-17 | 2006-09-26 | Broadcom Corporation | System for ESD protection with extra headroom in relatively low supply voltage integrated circuits |
| KR100605580B1 (ko) | 2003-12-29 | 2006-07-28 | 주식회사 하이닉스반도체 | 정전기 보호회로 |
| JP4590888B2 (ja) | 2004-03-15 | 2010-12-01 | 株式会社デンソー | 半導体出力回路 |
| US20050275037A1 (en) * | 2004-06-12 | 2005-12-15 | Chung Shine C | Semiconductor devices with high voltage tolerance |
| US7405445B2 (en) * | 2004-06-18 | 2008-07-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and method for ESD protection |
| US7042028B1 (en) * | 2005-03-14 | 2006-05-09 | System General Corp. | Electrostatic discharge device |
| US7566914B2 (en) | 2005-07-07 | 2009-07-28 | Intersil Americas Inc. | Devices with adjustable dual-polarity trigger- and holding-voltage/current for high level of electrostatic discharge protection in sub-micron mixed signal CMOS/BiCMOS integrated circuits |
| US7825473B2 (en) * | 2005-07-21 | 2010-11-02 | Industrial Technology Research Institute | Initial-on SCR device for on-chip ESD protection |
| US7535105B2 (en) * | 2005-08-02 | 2009-05-19 | International Business Machines Corporation | Inter-chip ESD protection structure for high speed and high frequency devices |
| US7813092B2 (en) * | 2005-09-19 | 2010-10-12 | The Regents Of The University Of California | ESD unit protection cell for distributed amplifiers |
| US7859803B2 (en) * | 2005-09-19 | 2010-12-28 | The Regents Of The University Of California | Voltage overload protection circuits |
| DE102005047000A1 (de) * | 2005-09-30 | 2007-04-12 | Infineon Technologies Ag | Halbleiterstruktur zur Ableitung eines Überspannungsimpulses und Verfahren zur Herstellung desselben |
| JP4798610B2 (ja) * | 2006-01-13 | 2011-10-19 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US8350318B2 (en) * | 2006-03-06 | 2013-01-08 | Semiconductor Components Industries, Llc | Method of forming an MOS transistor and structure therefor |
| DE102006028721B3 (de) * | 2006-06-20 | 2007-11-29 | Atmel Germany Gmbh | Halbleiterschutzstruktur für eine elektrostatische Entladung |
| JP5041749B2 (ja) | 2006-07-13 | 2012-10-03 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US8077439B2 (en) * | 2008-04-17 | 2011-12-13 | Broadcom Corporation | Method and system for mitigating risk of electrostatic discharge for a system on chip (SOC) |
| JP4822292B2 (ja) | 2008-12-17 | 2011-11-24 | 三菱電機株式会社 | 半導体装置 |
| US7989282B2 (en) * | 2009-03-26 | 2011-08-02 | International Business Machines Corporation | Structure and method for latchup improvement using through wafer via latchup guard ring |
| TWI422007B (zh) * | 2010-01-18 | 2014-01-01 | Macronix Int Co Ltd | 一種包含環繞井之具有靜電放電容忍的輸入/輸出墊電路 |
| CN102142412B (zh) * | 2010-02-02 | 2013-06-19 | 旺宏电子股份有限公司 | 一种包含环绕井的具有静电放电容忍的输入/输出垫电路 |
| US9153570B2 (en) * | 2010-02-25 | 2015-10-06 | Macronix International Co., Ltd. | ESD tolerant I/O pad circuit including a surrounding well |
| US9761521B1 (en) | 2014-10-21 | 2017-09-12 | Macom Connectivity Solutions, Llc | Flexible and robust power grid connectivity |
| EP3200235A1 (en) * | 2016-01-28 | 2017-08-02 | Nxp B.V. | Semiconductor switch device and a method of making a semiconductor switch device |
| US10186514B1 (en) * | 2017-09-06 | 2019-01-22 | Qualcomm Incorporated | Bi-stable static random access memory (SRAM) bit cells formed from III-V compounds and configured to achieve higher operating speeds |
| US10312244B2 (en) | 2017-09-19 | 2019-06-04 | Qualcomm Incorporated | Bi-stable static random access memory (SRAM) bit cells that facilitate direct writing for storage |
| US10128229B1 (en) | 2017-11-13 | 2018-11-13 | Micron Technology, Inc. | Semiconductor devices with package-level configurability |
| US10483241B1 (en) | 2018-06-27 | 2019-11-19 | Micron Technology, Inc. | Semiconductor devices with through silicon vias and package-level configurability |
| US10867991B2 (en) * | 2018-12-27 | 2020-12-15 | Micron Technology, Inc. | Semiconductor devices with package-level configurability |
| US12349470B2 (en) * | 2019-09-18 | 2025-07-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device having multiple electrostatic discharge (ESD) paths |
| TWI768451B (zh) * | 2020-08-31 | 2022-06-21 | 創意電子股份有限公司 | 半導體結構以及靜電放電保護電路 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0669142B2 (ja) * | 1983-04-15 | 1994-08-31 | 株式会社日立製作所 | 半導体集積回路装置 |
| US5157573A (en) * | 1989-05-12 | 1992-10-20 | Western Digital Corporation | ESD protection circuit with segmented buffer transistor |
| US5151619A (en) | 1990-10-11 | 1992-09-29 | International Business Machines Corporation | Cmos off chip driver circuit |
| US5246872A (en) * | 1991-01-30 | 1993-09-21 | National Semiconductor Corporation | Electrostatic discharge protection device and a method for simultaneously forming MOS devices with both lightly doped and non lightly doped source and drain regions |
| US5237395A (en) * | 1991-05-28 | 1993-08-17 | Western Digital Corporation | Power rail ESD protection circuit |
| US5477414A (en) * | 1993-05-03 | 1995-12-19 | Xilinx, Inc. | ESD protection circuit |
| CA2115230A1 (en) * | 1994-02-08 | 1995-08-09 | Jonathan H. Orchard-Webb | Esd protection circuit |
| US5521789A (en) * | 1994-03-15 | 1996-05-28 | National Semiconductor Corporation | BICMOS electrostatic discharge protection circuit |
| US5389811A (en) * | 1994-04-14 | 1995-02-14 | Analog Devices, Incorporated | Fault-protected overvoltage switch employing isolated transistor tubs |
| US5535086A (en) * | 1994-09-22 | 1996-07-09 | National Semiconductor Corp. | ESD protection circuit and method for BICMOS devices |
| US5610791A (en) * | 1994-09-26 | 1997-03-11 | International Business Machines Corporation | Power sequence independent electrostatic discharge protection circuits |
-
1995
- 1995-03-23 TW TW084102814A patent/TW289153B/zh not_active IP Right Cessation
- 1995-08-08 EP EP95480105A patent/EP0703622A2/en not_active Withdrawn
- 1995-09-25 JP JP7246004A patent/JPH08111508A/ja active Pending
- 1995-09-25 KR KR1019950031591A patent/KR100192188B1/ko not_active Expired - Fee Related
-
1996
- 1996-12-12 US US08/763,998 patent/US5945713A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100386079B1 (ko) * | 1996-06-14 | 2003-09-19 | 주식회사 하이닉스반도체 | 정전방전(esd)구조 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08111508A (ja) | 1996-04-30 |
| EP0703622A2 (en) | 1996-03-27 |
| US5945713A (en) | 1999-08-31 |
| KR960012546A (ko) | 1996-04-20 |
| TW289153B (enExample) | 1996-10-21 |
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