JPWO2024228233A5 - - Google Patents

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Publication number
JPWO2024228233A5
JPWO2024228233A5 JP2023562753A JP2023562753A JPWO2024228233A5 JP WO2024228233 A5 JPWO2024228233 A5 JP WO2024228233A5 JP 2023562753 A JP2023562753 A JP 2023562753A JP 2023562753 A JP2023562753 A JP 2023562753A JP WO2024228233 A5 JPWO2024228233 A5 JP WO2024228233A5
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JP
Japan
Prior art keywords
electrode
dielectric film
dielectric
region
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023562753A
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English (en)
Japanese (ja)
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JP7493905B1 (ja
JPWO2024228233A1 (https=
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Priority claimed from PCT/JP2023/017030 external-priority patent/WO2024228233A1/ja
Application granted granted Critical
Publication of JP7493905B1 publication Critical patent/JP7493905B1/ja
Publication of JPWO2024228233A1 publication Critical patent/JPWO2024228233A1/ja
Publication of JPWO2024228233A5 publication Critical patent/JPWO2024228233A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023562753A 2023-05-01 2023-05-01 活性ガス生成装置 Active JP7493905B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/017030 WO2024228233A1 (ja) 2023-05-01 2023-05-01 活性ガス生成装置

Publications (3)

Publication Number Publication Date
JP7493905B1 JP7493905B1 (ja) 2024-06-03
JPWO2024228233A1 JPWO2024228233A1 (https=) 2024-11-07
JPWO2024228233A5 true JPWO2024228233A5 (https=) 2025-04-08

Family

ID=91321816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023562753A Active JP7493905B1 (ja) 2023-05-01 2023-05-01 活性ガス生成装置

Country Status (7)

Country Link
US (1) US20250331093A1 (https=)
EP (1) EP4709056A1 (https=)
JP (1) JP7493905B1 (https=)
KR (1) KR20250002602A (https=)
CN (1) CN119256626A (https=)
TW (1) TWI875468B (https=)
WO (1) WO2024228233A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4804854B2 (ja) * 2005-09-28 2011-11-02 中国電力株式会社 複合トーチ型プラズマ溶射装置
JP5678603B2 (ja) * 2010-11-22 2015-03-04 株式会社Ihi 微粉炭バーナ
WO2019138456A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置
US11532458B2 (en) * 2018-05-30 2022-12-20 Toshiba Mitsubishi-Electric Industrial Systems Corporation Active gas generation apparatus
KR102510329B1 (ko) * 2018-06-25 2023-03-17 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 활성 가스 생성 장치 및 성막 처리 장치
CN113170567B (zh) * 2019-11-12 2023-11-28 东芝三菱电机产业系统株式会社 活性气体生成装置
US11839014B2 (en) * 2019-11-27 2023-12-05 Toshiba Mitsubishi-Electric Industrial Systems Corporation Active gas generating apparatus
EP4340548B1 (en) * 2022-05-18 2025-10-15 TMEIC Corporation Active-gas-generating apparatus

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