JPWO2025094419A5 - - Google Patents

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Publication number
JPWO2025094419A5
JPWO2025094419A5 JP2024535491A JP2024535491A JPWO2025094419A5 JP WO2025094419 A5 JPWO2025094419 A5 JP WO2025094419A5 JP 2024535491 A JP2024535491 A JP 2024535491A JP 2024535491 A JP2024535491 A JP 2024535491A JP WO2025094419 A5 JPWO2025094419 A5 JP WO2025094419A5
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JP
Japan
Prior art keywords
electrode
dielectric
space
film
dielectric film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024535491A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025094419A1 (https=
JP7612315B1 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/001258 external-priority patent/WO2025094419A1/ja
Application granted granted Critical
Publication of JP7612315B1 publication Critical patent/JP7612315B1/ja
Publication of JPWO2025094419A1 publication Critical patent/JPWO2025094419A1/ja
Publication of JPWO2025094419A5 publication Critical patent/JPWO2025094419A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024535491A 2023-11-01 2024-01-18 活性ガス生成装置 Active JP7612315B1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPPCT/JP2023/039462 2023-11-01
JP2023039462 2023-11-01
PCT/JP2024/001258 WO2025094419A1 (ja) 2023-11-01 2024-01-18 活性ガス生成装置

Publications (3)

Publication Number Publication Date
JP7612315B1 JP7612315B1 (ja) 2025-01-14
JPWO2025094419A1 JPWO2025094419A1 (https=) 2025-05-08
JPWO2025094419A5 true JPWO2025094419A5 (https=) 2025-10-02

Family

ID=94213743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024535491A Active JP7612315B1 (ja) 2023-11-01 2024-01-18 活性ガス生成装置

Country Status (4)

Country Link
JP (1) JP7612315B1 (https=)
KR (1) KR20250090329A (https=)
CN (1) CN120239998A (https=)
TW (1) TW202533630A (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008186660A (ja) * 2007-01-29 2008-08-14 Kyocera Corp 電極構造体およびこれを用いたプラズマ生成装置
JP2009233535A (ja) * 2008-03-26 2009-10-15 Kyocera Corp 誘電性構造体、誘電性構造体の製造方法、誘電性構造体を用いた放電装置、並びに流体改質装置
GB2509063A (en) * 2012-12-18 2014-06-25 Linde Ag Plasma device with earth electrode
CN204014246U (zh) * 2014-09-02 2014-12-10 中国工程物理研究院流体物理研究所 多层介质阻挡放电低温等离子体产生装置
WO2019138456A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

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