JP7612315B1 - 活性ガス生成装置 - Google Patents

活性ガス生成装置 Download PDF

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Publication number
JP7612315B1
JP7612315B1 JP2024535491A JP2024535491A JP7612315B1 JP 7612315 B1 JP7612315 B1 JP 7612315B1 JP 2024535491 A JP2024535491 A JP 2024535491A JP 2024535491 A JP2024535491 A JP 2024535491A JP 7612315 B1 JP7612315 B1 JP 7612315B1
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Japan
Prior art keywords
dielectric
electrode
film
dielectric film
space
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Active
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JP2024535491A
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English (en)
Japanese (ja)
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JPWO2025094419A1 (https=
JPWO2025094419A5 (https=
Inventor
廉 有田
祐司 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TMEIC Corp
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TMEIC Corp
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Priority claimed from PCT/JP2024/001258 external-priority patent/WO2025094419A1/ja
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Publication of JP7612315B1 publication Critical patent/JP7612315B1/ja
Publication of JPWO2025094419A1 publication Critical patent/JPWO2025094419A1/ja
Publication of JPWO2025094419A5 publication Critical patent/JPWO2025094419A5/ja
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2024535491A 2023-11-01 2024-01-18 活性ガス生成装置 Active JP7612315B1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPPCT/JP2023/039462 2023-11-01
JP2023039462 2023-11-01
PCT/JP2024/001258 WO2025094419A1 (ja) 2023-11-01 2024-01-18 活性ガス生成装置

Publications (3)

Publication Number Publication Date
JP7612315B1 true JP7612315B1 (ja) 2025-01-14
JPWO2025094419A1 JPWO2025094419A1 (https=) 2025-05-08
JPWO2025094419A5 JPWO2025094419A5 (https=) 2025-10-02

Family

ID=94213743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024535491A Active JP7612315B1 (ja) 2023-11-01 2024-01-18 活性ガス生成装置

Country Status (4)

Country Link
JP (1) JP7612315B1 (https=)
KR (1) KR20250090329A (https=)
CN (1) CN120239998A (https=)
TW (1) TW202533630A (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008186660A (ja) * 2007-01-29 2008-08-14 Kyocera Corp 電極構造体およびこれを用いたプラズマ生成装置
JP2009233535A (ja) * 2008-03-26 2009-10-15 Kyocera Corp 誘電性構造体、誘電性構造体の製造方法、誘電性構造体を用いた放電装置、並びに流体改質装置
CN204014246U (zh) * 2014-09-02 2014-12-10 中国工程物理研究院流体物理研究所 多层介质阻挡放电低温等离子体产生装置
JP2016507255A (ja) * 2012-12-18 2016-03-10 リンデ アクチエンゲゼルシャフトＬｉｎｄｅ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ プラズマの流れを提供する装置
WO2019138456A1 (ja) * 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008186660A (ja) * 2007-01-29 2008-08-14 Kyocera Corp 電極構造体およびこれを用いたプラズマ生成装置
JP2009233535A (ja) * 2008-03-26 2009-10-15 Kyocera Corp 誘電性構造体、誘電性構造体の製造方法、誘電性構造体を用いた放電装置、並びに流体改質装置
JP2016507255A (ja) * 2012-12-18 2016-03-10 リンデ アクチエンゲゼルシャフトＬｉｎｄｅ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ プラズマの流れを提供する装置
CN204014246U (zh) * 2014-09-02 2014-12-10 中国工程物理研究院流体物理研究所 多层介质阻挡放电低温等离子体产生装置
WO2019138456A1 (ja) * 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

Also Published As

Publication number Publication date
TW202533630A (zh) 2025-08-16
KR20250090329A (ko) 2025-06-19
JPWO2025094419A1 (https=) 2025-05-08
CN120239998A (zh) 2025-07-01

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