JPWO2025094419A1 - - Google Patents
Info
- Publication number
- JPWO2025094419A1 JPWO2025094419A1 JP2024535491A JP2024535491A JPWO2025094419A1 JP WO2025094419 A1 JPWO2025094419 A1 JP WO2025094419A1 JP 2024535491 A JP2024535491 A JP 2024535491A JP 2024535491 A JP2024535491 A JP 2024535491A JP WO2025094419 A1 JPWO2025094419 A1 JP WO2025094419A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32348—Dielectric barrier discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2437—Multilayer systems
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPPCT/JP2023/039462 | 2023-11-01 | ||
| JP2023039462 | 2023-11-01 | ||
| PCT/JP2024/001258 WO2025094419A1 (ja) | 2023-11-01 | 2024-01-18 | 活性ガス生成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7612315B1 JP7612315B1 (ja) | 2025-01-14 |
| JPWO2025094419A1 true JPWO2025094419A1 (https=) | 2025-05-08 |
| JPWO2025094419A5 JPWO2025094419A5 (https=) | 2025-10-02 |
Family
ID=94213743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024535491A Active JP7612315B1 (ja) | 2023-11-01 | 2024-01-18 | 活性ガス生成装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7612315B1 (https=) |
| KR (1) | KR20250090329A (https=) |
| CN (1) | CN120239998A (https=) |
| TW (1) | TW202533630A (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008186660A (ja) * | 2007-01-29 | 2008-08-14 | Kyocera Corp | 電極構造体およびこれを用いたプラズマ生成装置 |
| JP2009233535A (ja) * | 2008-03-26 | 2009-10-15 | Kyocera Corp | 誘電性構造体、誘電性構造体の製造方法、誘電性構造体を用いた放電装置、並びに流体改質装置 |
| GB2509063A (en) * | 2012-12-18 | 2014-06-25 | Linde Ag | Plasma device with earth electrode |
| CN204014246U (zh) * | 2014-09-02 | 2014-12-10 | 中国工程物理研究院流体物理研究所 | 多层介质阻挡放电低温等离子体产生装置 |
| WO2019138456A1 (ja) | 2018-01-10 | 2019-07-18 | 東芝三菱電機産業システム株式会社 | 活性ガス生成装置 |
-
2024
- 2024-01-18 JP JP2024535491A patent/JP7612315B1/ja active Active
- 2024-01-18 KR KR1020257016111A patent/KR20250090329A/ko active Pending
- 2024-01-18 CN CN202480004857.2A patent/CN120239998A/zh active Pending
- 2024-08-08 TW TW113129792A patent/TW202533630A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW202533630A (zh) | 2025-08-16 |
| KR20250090329A (ko) | 2025-06-19 |
| CN120239998A (zh) | 2025-07-01 |
| JP7612315B1 (ja) | 2025-01-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240613 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20240613 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20241224 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20241224 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7612315 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |