KR20250090329A - 활성 가스 생성 장치 - Google Patents

활성 가스 생성 장치 Download PDF

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Publication number
KR20250090329A
KR20250090329A KR1020257016111A KR20257016111A KR20250090329A KR 20250090329 A KR20250090329 A KR 20250090329A KR 1020257016111 A KR1020257016111 A KR 1020257016111A KR 20257016111 A KR20257016111 A KR 20257016111A KR 20250090329 A KR20250090329 A KR 20250090329A
Authority
KR
South Korea
Prior art keywords
dielectric
electrode
film
dielectric film
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257016111A
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English (en)
Korean (ko)
Inventor
렌 아리타
유지 오노
Original Assignee
가부시키가이샤 티마이크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 티마이크 filed Critical 가부시키가이샤 티마이크
Priority claimed from PCT/JP2024/001258 external-priority patent/WO2025094419A1/ja
Publication of KR20250090329A publication Critical patent/KR20250090329A/ko
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
KR1020257016111A 2023-11-01 2024-01-18 활성 가스 생성 장치 Pending KR20250090329A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPPCT/JP2023/039462 2023-11-01
JP2023039462 2023-11-01
PCT/JP2024/001258 WO2025094419A1 (ja) 2023-11-01 2024-01-18 活性ガス生成装置

Publications (1)

Publication Number Publication Date
KR20250090329A true KR20250090329A (ko) 2025-06-19

Family

ID=94213743

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257016111A Pending KR20250090329A (ko) 2023-11-01 2024-01-18 활성 가스 생성 장치

Country Status (4)

Country Link
JP (1) JP7612315B1 (https=)
KR (1) KR20250090329A (https=)
CN (1) CN120239998A (https=)
TW (1) TW202533630A (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019138456A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008186660A (ja) * 2007-01-29 2008-08-14 Kyocera Corp 電極構造体およびこれを用いたプラズマ生成装置
JP2009233535A (ja) * 2008-03-26 2009-10-15 Kyocera Corp 誘電性構造体、誘電性構造体の製造方法、誘電性構造体を用いた放電装置、並びに流体改質装置
GB2509063A (en) * 2012-12-18 2014-06-25 Linde Ag Plasma device with earth electrode
CN204014246U (zh) * 2014-09-02 2014-12-10 中国工程物理研究院流体物理研究所 多层介质阻挡放电低温等离子体产生装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019138456A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

Also Published As

Publication number Publication date
TW202533630A (zh) 2025-08-16
JPWO2025094419A1 (https=) 2025-05-08
CN120239998A (zh) 2025-07-01
JP7612315B1 (ja) 2025-01-14

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St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

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P13-X000 Application amended

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PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

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