TW202533630A - 活性氣體生成裝置 - Google Patents

活性氣體生成裝置

Info

Publication number
TW202533630A
TW202533630A TW113129792A TW113129792A TW202533630A TW 202533630 A TW202533630 A TW 202533630A TW 113129792 A TW113129792 A TW 113129792A TW 113129792 A TW113129792 A TW 113129792A TW 202533630 A TW202533630 A TW 202533630A
Authority
TW
Taiwan
Prior art keywords
dielectric
electrode
film
dielectric film
aforementioned
Prior art date
Application number
TW113129792A
Other languages
English (en)
Chinese (zh)
Inventor
有田廉
小野祐司
Original Assignee
日商Ｔｍｅｉｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2024/001258 external-priority patent/WO2025094419A1/ja
Application filed by 日商Ｔｍｅｉｃ股份有限公司 filed Critical 日商Ｔｍｅｉｃ股份有限公司
Publication of TW202533630A publication Critical patent/TW202533630A/zh

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW113129792A 2023-11-01 2024-08-08 活性氣體生成裝置 TW202533630A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
WOPCT/JP2023/039462 2023-11-01
JP2023039462 2023-11-01
WOPCT/JP2024/001258 2024-01-18
PCT/JP2024/001258 WO2025094419A1 (ja) 2023-11-01 2024-01-18 活性ガス生成装置

Publications (1)

Publication Number Publication Date
TW202533630A true TW202533630A (zh) 2025-08-16

Family

ID=94213743

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113129792A TW202533630A (zh) 2023-11-01 2024-08-08 活性氣體生成裝置

Country Status (4)

Country Link
JP (1) JP7612315B1 (https=)
KR (1) KR20250090329A (https=)
CN (1) CN120239998A (https=)
TW (1) TW202533630A (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008186660A (ja) * 2007-01-29 2008-08-14 Kyocera Corp 電極構造体およびこれを用いたプラズマ生成装置
JP2009233535A (ja) * 2008-03-26 2009-10-15 Kyocera Corp 誘電性構造体、誘電性構造体の製造方法、誘電性構造体を用いた放電装置、並びに流体改質装置
GB2509063A (en) * 2012-12-18 2014-06-25 Linde Ag Plasma device with earth electrode
CN204014246U (zh) * 2014-09-02 2014-12-10 中国工程物理研究院流体物理研究所 多层介质阻挡放电低温等离子体产生装置
WO2019138456A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

Also Published As

Publication number Publication date
KR20250090329A (ko) 2025-06-19
JPWO2025094419A1 (https=) 2025-05-08
CN120239998A (zh) 2025-07-01
JP7612315B1 (ja) 2025-01-14

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