KR20250002602A - 활성 가스 생성 장치 - Google Patents

활성 가스 생성 장치 Download PDF

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Publication number
KR20250002602A
KR20250002602A KR1020247038763A KR20247038763A KR20250002602A KR 20250002602 A KR20250002602 A KR 20250002602A KR 1020247038763 A KR1020247038763 A KR 1020247038763A KR 20247038763 A KR20247038763 A KR 20247038763A KR 20250002602 A KR20250002602 A KR 20250002602A
Authority
KR
South Korea
Prior art keywords
electrode
dielectric film
gas
space
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247038763A
Other languages
English (en)
Korean (ko)
Inventor
렌 아리타
Original Assignee
가부시키가이샤 티마이크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 티마이크 filed Critical 가부시키가이샤 티마이크
Publication of KR20250002602A publication Critical patent/KR20250002602A/ko
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
KR1020247038763A 2023-05-01 2023-05-01 활성 가스 생성 장치 Pending KR20250002602A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/017030 WO2024228233A1 (ja) 2023-05-01 2023-05-01 活性ガス生成装置

Publications (1)

Publication Number Publication Date
KR20250002602A true KR20250002602A (ko) 2025-01-07

Family

ID=91321816

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247038763A Pending KR20250002602A (ko) 2023-05-01 2023-05-01 활성 가스 생성 장치

Country Status (7)

Country Link
US (1) US20250331093A1 (https=)
EP (1) EP4709056A1 (https=)
JP (1) JP7493905B1 (https=)
KR (1) KR20250002602A (https=)
CN (1) CN119256626A (https=)
TW (1) TWI875468B (https=)
WO (1) WO2024228233A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019138456A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4804854B2 (ja) * 2005-09-28 2011-11-02 中国電力株式会社 複合トーチ型プラズマ溶射装置
JP5678603B2 (ja) * 2010-11-22 2015-03-04 株式会社Ihi 微粉炭バーナ
US11532458B2 (en) * 2018-05-30 2022-12-20 Toshiba Mitsubishi-Electric Industrial Systems Corporation Active gas generation apparatus
KR102510329B1 (ko) * 2018-06-25 2023-03-17 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 활성 가스 생성 장치 및 성막 처리 장치
CN113170567B (zh) * 2019-11-12 2023-11-28 东芝三菱电机产业系统株式会社 活性气体生成装置
US11839014B2 (en) * 2019-11-27 2023-12-05 Toshiba Mitsubishi-Electric Industrial Systems Corporation Active gas generating apparatus
EP4340548B1 (en) * 2022-05-18 2025-10-15 TMEIC Corporation Active-gas-generating apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019138456A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置

Also Published As

Publication number Publication date
JP7493905B1 (ja) 2024-06-03
JPWO2024228233A1 (https=) 2024-11-07
US20250331093A1 (en) 2025-10-23
EP4709056A1 (en) 2026-03-11
CN119256626A (zh) 2025-01-03
WO2024228233A1 (ja) 2024-11-07
TWI875468B (zh) 2025-03-01
TW202444955A (zh) 2024-11-16

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