JPWO2024228233A1 - - Google Patents
Info
- Publication number
- JPWO2024228233A1 JPWO2024228233A1 JP2023562753A JP2023562753A JPWO2024228233A1 JP WO2024228233 A1 JPWO2024228233 A1 JP WO2024228233A1 JP 2023562753 A JP2023562753 A JP 2023562753A JP 2023562753 A JP2023562753 A JP 2023562753A JP WO2024228233 A1 JPWO2024228233 A1 JP WO2024228233A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32348—Dielectric barrier discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/017030 WO2024228233A1 (ja) | 2023-05-01 | 2023-05-01 | 活性ガス生成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7493905B1 JP7493905B1 (ja) | 2024-06-03 |
| JPWO2024228233A1 true JPWO2024228233A1 (https=) | 2024-11-07 |
| JPWO2024228233A5 JPWO2024228233A5 (https=) | 2025-04-08 |
Family
ID=91321816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023562753A Active JP7493905B1 (ja) | 2023-05-01 | 2023-05-01 | 活性ガス生成装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20250331093A1 (https=) |
| EP (1) | EP4709056A1 (https=) |
| JP (1) | JP7493905B1 (https=) |
| KR (1) | KR20250002602A (https=) |
| CN (1) | CN119256626A (https=) |
| TW (1) | TWI875468B (https=) |
| WO (1) | WO2024228233A1 (https=) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4804854B2 (ja) * | 2005-09-28 | 2011-11-02 | 中国電力株式会社 | 複合トーチ型プラズマ溶射装置 |
| JP5678603B2 (ja) * | 2010-11-22 | 2015-03-04 | 株式会社Ihi | 微粉炭バーナ |
| WO2019138456A1 (ja) | 2018-01-10 | 2019-07-18 | 東芝三菱電機産業システム株式会社 | 活性ガス生成装置 |
| US11532458B2 (en) * | 2018-05-30 | 2022-12-20 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Active gas generation apparatus |
| KR102510329B1 (ko) * | 2018-06-25 | 2023-03-17 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | 활성 가스 생성 장치 및 성막 처리 장치 |
| CN113170567B (zh) * | 2019-11-12 | 2023-11-28 | 东芝三菱电机产业系统株式会社 | 活性气体生成装置 |
| US11839014B2 (en) * | 2019-11-27 | 2023-12-05 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Active gas generating apparatus |
| EP4340548B1 (en) * | 2022-05-18 | 2025-10-15 | TMEIC Corporation | Active-gas-generating apparatus |
-
2023
- 2023-05-01 KR KR1020247038763A patent/KR20250002602A/ko active Pending
- 2023-05-01 CN CN202380039675.4A patent/CN119256626A/zh active Pending
- 2023-05-01 JP JP2023562753A patent/JP7493905B1/ja active Active
- 2023-05-01 EP EP23935748.6A patent/EP4709056A1/en active Pending
- 2023-05-01 US US18/868,181 patent/US20250331093A1/en active Pending
- 2023-05-01 WO PCT/JP2023/017030 patent/WO2024228233A1/ja not_active Ceased
-
2024
- 2024-02-06 TW TW113104754A patent/TWI875468B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| JP7493905B1 (ja) | 2024-06-03 |
| US20250331093A1 (en) | 2025-10-23 |
| EP4709056A1 (en) | 2026-03-11 |
| CN119256626A (zh) | 2025-01-03 |
| WO2024228233A1 (ja) | 2024-11-07 |
| TWI875468B (zh) | 2025-03-01 |
| KR20250002602A (ko) | 2025-01-07 |
| TW202444955A (zh) | 2024-11-16 |
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