JPWO2024057424A5 - - Google Patents

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Publication number
JPWO2024057424A5
JPWO2024057424A5 JP2023517797A JP2023517797A JPWO2024057424A5 JP WO2024057424 A5 JPWO2024057424 A5 JP WO2024057424A5 JP 2023517797 A JP2023517797 A JP 2023517797A JP 2023517797 A JP2023517797 A JP 2023517797A JP WO2024057424 A5 JPWO2024057424 A5 JP WO2024057424A5
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JP
Japan
Prior art keywords
grooves
space
electrode structures
ground electrode
discharge space
Prior art date
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Application number
JP2023517797A
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English (en)
Japanese (ja)
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JP7366513B1 (ja
JPWO2024057424A1 (https=
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Priority claimed from PCT/JP2022/034306 external-priority patent/WO2024057424A1/ja
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Publication of JP7366513B1 publication Critical patent/JP7366513B1/ja
Publication of JPWO2024057424A1 publication Critical patent/JPWO2024057424A1/ja
Publication of JPWO2024057424A5 publication Critical patent/JPWO2024057424A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023517797A 2022-09-14 2022-09-14 活性ガス生成装置 Active JP7366513B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/034306 WO2024057424A1 (ja) 2022-09-14 2022-09-14 活性ガス生成装置

Publications (3)

Publication Number Publication Date
JP7366513B1 JP7366513B1 (ja) 2023-10-23
JPWO2024057424A1 JPWO2024057424A1 (https=) 2024-03-21
JPWO2024057424A5 true JPWO2024057424A5 (https=) 2024-08-21

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ID=88418527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023517797A Active JP7366513B1 (ja) 2022-09-14 2022-09-14 活性ガス生成装置

Country Status (7)

Country Link
US (1) US20240429028A1 (https=)
EP (1) EP4401514A4 (https=)
JP (1) JP7366513B1 (https=)
KR (1) KR102939982B1 (https=)
CN (1) CN118044338A (https=)
TW (1) TWI875036B (https=)
WO (1) WO2024057424A1 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557564A (en) * 1978-06-30 1980-01-19 Sumitomo Precision Prod Co Ltd Ozonizer
JPH071592U (ja) * 1993-06-10 1995-01-10 啓平 李 コロナ発生器
EP1645730B1 (en) * 2003-07-10 2012-02-15 NGK Insulators, Ltd. Plasma generating electrode and plasma reactor
US7767167B2 (en) * 2003-07-28 2010-08-03 Iono2X Engineering, L.L.C. Dielectric barrier discharge cell with hermetically sealed electrodes, apparatus and method for the treatment of odor and volatile organic compound contaminants in air emissions, and for purifying gases and sterilizing surfaces
KR101254342B1 (ko) * 2006-10-17 2013-04-12 엘지전자 주식회사 플라즈마 발생 장치
US9120073B2 (en) * 2009-06-05 2015-09-01 Eon Labs, Llc Distributed dielectric barrier discharge reactor
JP6175721B2 (ja) * 2012-11-09 2017-08-09 株式会社渡辺商行 オゾン発生装置、及び、オゾン発生方法
EP2960358A1 (en) * 2014-06-25 2015-12-30 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Plasma source and surface treatment method
US20160233059A1 (en) * 2015-02-06 2016-08-11 Ionfield Holdings, Llc Methods and systems for generating plasma to clean objects
WO2019138453A1 (ja) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 活性ガス生成装置及び成膜処理装置
KR102510329B1 (ko) * 2018-06-25 2023-03-17 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 활성 가스 생성 장치 및 성막 처리 장치

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