JPWO2023105753A5 - - Google Patents
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- Publication number
- JPWO2023105753A5 JPWO2023105753A5 JP2022548153A JP2022548153A JPWO2023105753A5 JP WO2023105753 A5 JPWO2023105753 A5 JP WO2023105753A5 JP 2022548153 A JP2022548153 A JP 2022548153A JP 2022548153 A JP2022548153 A JP 2022548153A JP WO2023105753 A5 JPWO2023105753 A5 JP WO2023105753A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- film
- gas
- metal electrode
- discharge field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 37
- 239000002994 raw material Substances 0.000 claims description 5
- 230000003213 activating effect Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 5
- 239000000470 constituent Substances 0.000 claims 5
- 230000002093 peripheral effect Effects 0.000 claims 4
- 239000012212 insulator Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/045536 WO2023105753A1 (ja) | 2021-12-10 | 2021-12-10 | 活性ガス生成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7289608B1 JP7289608B1 (ja) | 2023-06-12 |
| JPWO2023105753A1 JPWO2023105753A1 (https=) | 2023-06-15 |
| JPWO2023105753A5 true JPWO2023105753A5 (https=) | 2023-11-09 |
Family
ID=86721439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022548153A Active JP7289608B1 (ja) | 2021-12-10 | 2021-12-10 | 活性ガス生成装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7289608B1 (https=) |
| WO (1) | WO2023105753A1 (https=) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2005055678A1 (ja) * | 2003-12-08 | 2007-12-06 | 日本碍子株式会社 | プラズマ発生電極及びその製造方法、並びにプラズマ反応器 |
| US11532458B2 (en) * | 2018-05-30 | 2022-12-20 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Active gas generation apparatus |
-
2021
- 2021-12-10 WO PCT/JP2021/045536 patent/WO2023105753A1/ja not_active Ceased
- 2021-12-10 JP JP2022548153A patent/JP7289608B1/ja active Active
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