JPWO2023105753A1 - - Google Patents

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Publication number
JPWO2023105753A1
JPWO2023105753A1 JP2022548153A JP2022548153A JPWO2023105753A1 JP WO2023105753 A1 JPWO2023105753 A1 JP WO2023105753A1 JP 2022548153 A JP2022548153 A JP 2022548153A JP 2022548153 A JP2022548153 A JP 2022548153A JP WO2023105753 A1 JPWO2023105753 A1 JP WO2023105753A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022548153A
Other languages
Japanese (ja)
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JP7289608B1 (ja
JPWO2023105753A5 (https=
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Publication of JP7289608B1 publication Critical patent/JP7289608B1/ja
Publication of JPWO2023105753A1 publication Critical patent/JPWO2023105753A1/ja
Publication of JPWO2023105753A5 publication Critical patent/JPWO2023105753A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2022548153A 2021-12-10 2021-12-10 活性ガス生成装置 Active JP7289608B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/045536 WO2023105753A1 (ja) 2021-12-10 2021-12-10 活性ガス生成装置

Publications (3)

Publication Number Publication Date
JP7289608B1 JP7289608B1 (ja) 2023-06-12
JPWO2023105753A1 true JPWO2023105753A1 (https=) 2023-06-15
JPWO2023105753A5 JPWO2023105753A5 (https=) 2023-11-09

Family

ID=86721439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022548153A Active JP7289608B1 (ja) 2021-12-10 2021-12-10 活性ガス生成装置

Country Status (2)

Country Link
JP (1) JP7289608B1 (https=)
WO (1) WO2023105753A1 (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005055678A1 (ja) * 2003-12-08 2007-12-06 日本碍子株式会社 プラズマ発生電極及びその製造方法、並びにプラズマ反応器
US11532458B2 (en) * 2018-05-30 2022-12-20 Toshiba Mitsubishi-Electric Industrial Systems Corporation Active gas generation apparatus

Also Published As

Publication number Publication date
JP7289608B1 (ja) 2023-06-12
WO2023105753A1 (ja) 2023-06-15

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