JPWO2022239285A5 - - Google Patents
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- Publication number
- JPWO2022239285A5 JPWO2022239285A5 JP2023520757A JP2023520757A JPWO2022239285A5 JP WO2022239285 A5 JPWO2022239285 A5 JP WO2022239285A5 JP 2023520757 A JP2023520757 A JP 2023520757A JP 2023520757 A JP2023520757 A JP 2023520757A JP WO2022239285 A5 JPWO2022239285 A5 JP WO2022239285A5
- Authority
- JP
- Japan
- Prior art keywords
- trench
- region
- semiconductor device
- trench bottom
- bottom portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021080625 | 2021-05-11 | ||
| JP2021080625 | 2021-05-11 | ||
| PCT/JP2021/045159 WO2022239285A1 (ja) | 2021-05-11 | 2021-12-08 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022239285A1 JPWO2022239285A1 (enExample) | 2022-11-17 |
| JPWO2022239285A5 true JPWO2022239285A5 (enExample) | 2023-07-19 |
| JP7613570B2 JP7613570B2 (ja) | 2025-01-15 |
Family
ID=84028093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023520757A Active JP7613570B2 (ja) | 2021-05-11 | 2021-12-08 | 半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12495564B2 (enExample) |
| JP (1) | JP7613570B2 (enExample) |
| CN (1) | CN116349006A (enExample) |
| DE (1) | DE112021004603T5 (enExample) |
| WO (1) | WO2022239285A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117561612A (zh) * | 2022-01-20 | 2024-02-13 | 富士电机株式会社 | 半导体装置 |
| JPWO2024185313A1 (enExample) * | 2023-03-07 | 2024-09-12 | ||
| DE112024000313T5 (de) * | 2023-08-07 | 2025-12-04 | Fuji Electric Co., Ltd. | Halbleitervorrichtung |
| CN117577669B (zh) * | 2023-11-16 | 2024-07-30 | 浙江旺荣半导体有限公司 | 一种逆导型绝缘栅双极晶体管 |
| JP2025132606A (ja) * | 2024-02-29 | 2025-09-10 | ミネベアパワーデバイス株式会社 | 半導体装置、および、電力変換装置 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6392273B1 (en) * | 2000-01-14 | 2002-05-21 | Rockwell Science Center, Llc | Trench insulated-gate bipolar transistor with improved safe-operating-area |
| JP5034315B2 (ja) | 2006-05-19 | 2012-09-26 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
| JP5396953B2 (ja) * | 2009-03-19 | 2014-01-22 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
| JP5013436B2 (ja) * | 2009-06-04 | 2012-08-29 | 三菱電機株式会社 | 電力用半導体装置 |
| JP6283468B2 (ja) | 2013-03-01 | 2018-02-21 | 株式会社豊田中央研究所 | 逆導通ｉｇｂｔ |
| DE102013213026A1 (de) * | 2013-07-03 | 2015-01-08 | Robert Bosch Gmbh | Feldplatten-Trench-FET sowie ein Halbleiterbauelement |
| JP6728953B2 (ja) | 2015-07-16 | 2020-07-22 | 富士電機株式会社 | 半導体装置及びその製造方法 |
| JP6658021B2 (ja) | 2016-02-03 | 2020-03-04 | 株式会社デンソー | 半導体装置 |
| JP2018152426A (ja) | 2017-03-10 | 2018-09-27 | 富士電機株式会社 | 半導体装置 |
| JP6871058B2 (ja) * | 2017-05-22 | 2021-05-12 | 株式会社東芝 | 半導体装置、インバータ回路、駆動装置、車両、及び、昇降機 |
| DE102017124871B4 (de) | 2017-10-24 | 2021-06-17 | Infineon Technologies Ag | Leistungshalbleiter-Vorrichtung und Verfahren zum Herstellen einer Leistungshalbleiter-Vorrichtung |
| CN110574146B (zh) | 2017-11-16 | 2024-02-13 | 富士电机株式会社 | 半导体装置 |
| JP7404702B2 (ja) * | 2019-08-09 | 2023-12-26 | 富士電機株式会社 | 半導体装置 |
| GB2590716B (en) * | 2019-12-30 | 2023-12-20 | Mqsemi Ag | Fortified trench planar MOS power transistor |
| DE112021002169T5 (de) * | 2020-12-07 | 2023-06-29 | Fuji Electric Co., Ltd. | Halbleitervorrichtung |
| JP7487692B2 (ja) * | 2021-03-11 | 2024-05-21 | 株式会社デンソー | 電界効果トランジスタ |
-
2021
- 2021-12-08 WO PCT/JP2021/045159 patent/WO2022239285A1/ja not_active Ceased
- 2021-12-08 DE DE112021004603.9T patent/DE112021004603T5/de active Pending
- 2021-12-08 CN CN202180072875.0A patent/CN116349006A/zh active Pending
- 2021-12-08 JP JP2023520757A patent/JP7613570B2/ja active Active
-
2023
- 2023-04-18 US US18/302,773 patent/US12495564B2/en active Active
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