JPWO2020111256A1 - 配線基板、電子装置及び電子モジュール - Google Patents
配線基板、電子装置及び電子モジュール Download PDFInfo
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- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
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- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
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- C04B2237/40—Metallic
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Abstract
Description
AlNを含む絶縁基板と、
Cuを含む導体層と、
前記絶縁基板と前記導体層との間に位置する中間層と、
を備え、
前記中間層は、前記絶縁基板に近い第1領域と、前記導体層に近い第2領域とにおいて、
Cuの濃度が、前記第1領域よりも前記第2領域が高く、
Alの濃度が、前記第2領域よりも前記第1領域が高い、構成とした。
上記の配線基板と、
前記配線基板に搭載された電子部品と、
を備える構成とした。
上記の電子装置と、
前記電子装置を搭載したモジュール用基板と、
を備える構成とした。
配線基板10における絶縁基板12は、構成元素の主成分としてAlN(窒化アルミニウム)を含む。導体層14は、構成元素がCu(銅)である。絶縁基板12と導体層14との界面には、中間層16が存在する。中間層16は、20nm〜80nm等の厚みを有する。
図3は、絶縁基板の界面周辺の構造を示す断面図である。
実施形態の配線基板10と、後述する所定条件のシンター処理を行っていない基板とについて、導体層14と絶縁基板12との密着強度について試験した。試験方法は、絶縁基板12を固定した第1冶具と、導体層14とを固定した第2冶具とに、界面に垂直な方向に互いを引き離す方向の引っ張り力を加え、最大の引っ張り強度を密着強度として測定した。引っ張り力を大きくしていくと、絶縁基板12と導体層14との界面が破壊される場合と、絶縁基板12が破壊される場合とがあり、破壊モードとして、絶縁基板12が破壊される割合を求めた。
図5は、実施形態の配線基板の製造方法の一例を説明する図である。
Claims (9)
- AlNを含む絶縁基板と、
Cuを含む導体層と、
前記絶縁基板と前記導体層との間に位置する中間層と、
を備え、
前記中間層は、前記絶縁基板に近い第1領域と、前記導体層に近い第2領域とにおいて、
Cuの濃度が、前記第1領域よりも前記第2領域が高く、
Alの濃度が、前記第2領域よりも前記第1領域が高い、
配線基板。 - Nの濃度が、前記第2領域よりも前記第1領域が高い、
請求項1記載の配線基板。 - 前記中間層は、Al及びNの濃度が、前記絶縁基板から前記導体層に向かって漸減している、
請求項1または請求項2に記載の配線基板。 - 前記絶縁基板は前記導体層側に複数の凹部を有し、
前記中間層が、前記凹部外及び前記凹部内に存在する、
請求項1から請求項3のいずれか一項に記載の配線基板。 - 前記中間層は、更にTi及びOを含む、
請求項4記載の配線基板。 - 前記中間層のTiが、前記凹部内の前記絶縁基板の界面に点在している、
請求項4記載の配線基板。 - 前記中間層の前記絶縁基板側から前記導体層側にかけて、Cの濃度が10at%以下である、
請求項1から請求項6のいずれか一項に記載の配線基板。 - 請求項1から請求項7のいずれか1項に記載の配線基板と、
前記配線基板に搭載された電子部品と、
を備える電子装置。 - 請求項8記載の電子装置と、
前記電子装置を搭載したモジュール用基板と、
を備える電子モジュール。
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JP2018224350 | 2018-11-30 | ||
JP2018224350 | 2018-11-30 | ||
PCT/JP2019/046867 WO2020111256A1 (ja) | 2018-11-30 | 2019-11-29 | 配線基板、電子装置及び電子モジュール |
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JPWO2020111256A1 true JPWO2020111256A1 (ja) | 2021-10-14 |
JP7239610B2 JP7239610B2 (ja) | 2023-03-14 |
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JP2020557872A Active JP7239610B2 (ja) | 2018-11-30 | 2019-11-29 | 配線基板、電子装置及び電子モジュール |
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US (1) | US11823966B2 (ja) |
EP (1) | EP3890006A4 (ja) |
JP (1) | JP7239610B2 (ja) |
CN (1) | CN113169136A (ja) |
WO (1) | WO2020111256A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60177634A (ja) * | 1984-02-24 | 1985-09-11 | Toshiba Corp | パワ−半導体モジユ−ル基板の製造方法 |
JPH05218229A (ja) * | 1992-01-28 | 1993-08-27 | Toshiba Corp | セラミック回路基板 |
JP2016058706A (ja) * | 2014-09-10 | 2016-04-21 | Jx金属株式会社 | 金属セラミック接合基板及び、その製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05182926A (ja) | 1991-12-30 | 1993-07-23 | Sony Corp | 配線形成方法 |
JP4077888B2 (ja) * | 1995-07-21 | 2008-04-23 | 株式会社東芝 | セラミックス回路基板 |
TWI514522B (zh) * | 2005-03-18 | 2015-12-21 | Dowa Electronics Materials Co | 副載置片及其製造方法 |
JP2007123798A (ja) * | 2005-09-28 | 2007-05-17 | Kyocera Corp | 配線基板および電子装置 |
WO2015141295A1 (ja) | 2014-03-20 | 2015-09-24 | 三菱マテリアル株式会社 | 接合体、パワーモジュール用基板、パワーモジュール、及び、接合体の製造方法 |
JP6482144B2 (ja) * | 2015-12-28 | 2019-03-13 | 日本碍子株式会社 | 接合基板および接合基板の製造方法 |
JP6965768B2 (ja) * | 2017-02-28 | 2021-11-10 | 三菱マテリアル株式会社 | 銅/セラミックス接合体、絶縁回路基板、及び、銅/セラミックス接合体の製造方法、絶縁回路基板の製造方法 |
-
2019
- 2019-11-29 WO PCT/JP2019/046867 patent/WO2020111256A1/ja unknown
- 2019-11-29 JP JP2020557872A patent/JP7239610B2/ja active Active
- 2019-11-29 EP EP19890821.2A patent/EP3890006A4/en active Pending
- 2019-11-29 US US17/297,890 patent/US11823966B2/en active Active
- 2019-11-29 CN CN201980077261.4A patent/CN113169136A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60177634A (ja) * | 1984-02-24 | 1985-09-11 | Toshiba Corp | パワ−半導体モジユ−ル基板の製造方法 |
JPH05218229A (ja) * | 1992-01-28 | 1993-08-27 | Toshiba Corp | セラミック回路基板 |
JP2016058706A (ja) * | 2014-09-10 | 2016-04-21 | Jx金属株式会社 | 金属セラミック接合基板及び、その製造方法 |
Also Published As
Publication number | Publication date |
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EP3890006A1 (en) | 2021-10-06 |
CN113169136A (zh) | 2021-07-23 |
EP3890006A4 (en) | 2022-08-17 |
US20220037220A1 (en) | 2022-02-03 |
US11823966B2 (en) | 2023-11-21 |
JP7239610B2 (ja) | 2023-03-14 |
WO2020111256A1 (ja) | 2020-06-04 |
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