JPWO2020049872A1 - 搬送車システム - Google Patents
搬送車システム Download PDFInfo
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- JPWO2020049872A1 JPWO2020049872A1 JP2020541045A JP2020541045A JPWO2020049872A1 JP WO2020049872 A1 JPWO2020049872 A1 JP WO2020049872A1 JP 2020541045 A JP2020541045 A JP 2020541045A JP 2020541045 A JP2020541045 A JP 2020541045A JP WO2020049872 A1 JPWO2020049872 A1 JP WO2020049872A1
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- 230000005540 biological transmission Effects 0.000 claims abstract description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 12
- 238000012546 transfer Methods 0.000 abstract description 3
- 230000032258 transport Effects 0.000 description 234
- GTWMZDSMZWCFBR-UHFFFAOYSA-N chembl3139982 Chemical compound C=12C3=CC=4OCOC=4C=C3CC[N+]2=CC2=C(OC)C(OC)=CC=C2C=1CCCC(C=1C=CC=CC=1)C1=CC=CC=C1 GTWMZDSMZWCFBR-UHFFFAOYSA-N 0.000 description 20
- 238000012545 processing Methods 0.000 description 11
- 230000003028 elevating effect Effects 0.000 description 10
- 239000000872 buffer Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41815—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
- G05B19/41895—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system using automatic guided vehicles [AGV]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
- B61L27/00—Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
- B61L27/30—Trackside multiple control systems, e.g. switch-over between different systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
- B61L27/00—Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
- B61L27/20—Trackside control of safe travel of vehicle or train, e.g. braking curve calculation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
- G05D1/0291—Fleet control
- G05D1/0297—Fleet control by controlling means in a control room
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31002—Computer controlled agv conveys workpieces between buffer and cell
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31454—Keep track of vehicles
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- General Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Aviation & Aerospace Engineering (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (5)
- 複数のエリアに跨って設けられた軌道と、
前記軌道に沿って一方向に走行する複数の搬送車と、
前記軌道に沿って配置され、前記搬送車との間で物品の受け渡しが行われる複数の載置部と、
前記載置部に載置された前記物品を搬送するように指示する搬送指令を上位コントローラから受信し、複数の前記エリアのそれぞれを管轄エリアとして、当該管轄エリア内の前記搬送車に各種指令を実行させる複数のエリアコントローラと、を備え、
一の管轄エリアにおいて、前記一の管轄エリアとは異なる他の管轄エリアを経由しないと進入できない区間である特殊区間に属する前記載置部を特殊載置部としたとき、
前記エリアコントローラは、自身の管轄エリアである自管轄エリアに属する一の前記特殊載置部に対する前記搬送指令を前記上位コントローラから受け付けると、前記他の管轄エリア内の前記搬送車を制御する他のエリアコントローラに対し前記自管轄エリアに向かって空き搬送車を移動させる移動指令を送信すると共に、前記移動指令の送信後に前記自管轄エリア内に発生した空き搬送車に前記搬送指令を実行させる、搬送車システム。 - 前記エリアコントローラが前記移動指令の送信後に検知する前記自管轄エリア内の空き搬送車は、前記他の管轄エリアから前記自管轄エリアに進入する空き搬送車、又は、前記自管轄エリアに属する前記特殊載置部に前記物品を載置することによって発生する空き搬送車である、請求項1記載の搬送車システム。
- 前記エリアコントローラは、前記自管轄エリア内に発生した空き搬送車に前記搬送指令を実行させると、前記他のエリアコントローラに送信した前記移動指令を消去する、請求項1又は2記載の搬送車システム。
- 前記エリアコントローラは、前記他のエリアコントローラに前記移動指令を送信する前に、前記自管轄エリア内に空き搬送車が存在するか否かを検索する、請求項1〜3の何れか一項記載の搬送車システム。
- 前記エリアコントローラは、前記他のエリアコントローラに前記移動指令を送信する前に、前記自管轄エリア内かつ一の前記特殊載置部よりも上流側に空き搬送車が存在するか否かを検索する、請求項4記載の搬送車システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018165288 | 2018-09-04 | ||
JP2018165288 | 2018-09-04 | ||
PCT/JP2019/027597 WO2020049872A1 (ja) | 2018-09-04 | 2019-07-11 | 搬送車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020049872A1 true JPWO2020049872A1 (ja) | 2021-08-12 |
JP7136214B2 JP7136214B2 (ja) | 2022-09-13 |
Family
ID=69723162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020541045A Active JP7136214B2 (ja) | 2018-09-04 | 2019-07-11 | 搬送車システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US11952026B2 (ja) |
EP (1) | EP3848769B1 (ja) |
JP (1) | JP7136214B2 (ja) |
KR (1) | KR102586754B1 (ja) |
CN (1) | CN112639649B (ja) |
SG (1) | SG11202102014VA (ja) |
TW (1) | TWI828745B (ja) |
WO (1) | WO2020049872A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11803181B2 (en) * | 2020-06-23 | 2023-10-31 | Ford Global Technologies, Llc | Flexible modular platform plant navigation system |
US11720095B2 (en) * | 2020-06-23 | 2023-08-08 | Ford Global Technologies, Llc | Remote controlled flexible modular platform system |
JP7283456B2 (ja) * | 2020-09-09 | 2023-05-30 | 株式会社ダイフク | 物品搬送設備 |
JP7380607B2 (ja) * | 2021-01-21 | 2023-11-15 | 株式会社ダイフク | 物品搬送設備 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006221309A (ja) * | 2005-02-09 | 2006-08-24 | Murata Mach Ltd | 搬送台車システム |
JP2006313463A (ja) * | 2005-05-09 | 2006-11-16 | Murata Mach Ltd | 搬送台車システム |
WO2017090334A1 (ja) * | 2015-11-27 | 2017-06-01 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Family Cites Families (24)
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US5797330A (en) * | 1996-07-31 | 1998-08-25 | Li; Zhengzhong | Mass transit system |
JP2003044138A (ja) * | 2001-07-30 | 2003-02-14 | Murata Mach Ltd | 無人搬送車システム |
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JP5146855B2 (ja) * | 2010-08-09 | 2013-02-20 | 村田機械株式会社 | 天井走行車システム |
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-
2019
- 2019-07-11 CN CN201980057090.9A patent/CN112639649B/zh active Active
- 2019-07-11 SG SG11202102014VA patent/SG11202102014VA/en unknown
- 2019-07-11 EP EP19858620.8A patent/EP3848769B1/en active Active
- 2019-07-11 US US17/271,633 patent/US11952026B2/en active Active
- 2019-07-11 JP JP2020541045A patent/JP7136214B2/ja active Active
- 2019-07-11 KR KR1020217008041A patent/KR102586754B1/ko active IP Right Grant
- 2019-07-11 WO PCT/JP2019/027597 patent/WO2020049872A1/ja unknown
- 2019-08-30 TW TW108131345A patent/TWI828745B/zh active
Patent Citations (3)
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JP2006221309A (ja) * | 2005-02-09 | 2006-08-24 | Murata Mach Ltd | 搬送台車システム |
JP2006313463A (ja) * | 2005-05-09 | 2006-11-16 | Murata Mach Ltd | 搬送台車システム |
WO2017090334A1 (ja) * | 2015-11-27 | 2017-06-01 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Also Published As
Publication number | Publication date |
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TW202026785A (zh) | 2020-07-16 |
EP3848769A4 (en) | 2022-06-08 |
US20210179153A1 (en) | 2021-06-17 |
EP3848769B1 (en) | 2023-11-22 |
KR102586754B1 (ko) | 2023-10-10 |
CN112639649B (zh) | 2024-04-12 |
EP3848769A1 (en) | 2021-07-14 |
US11952026B2 (en) | 2024-04-09 |
SG11202102014VA (en) | 2021-04-29 |
JP7136214B2 (ja) | 2022-09-13 |
KR20210043673A (ko) | 2021-04-21 |
TWI828745B (zh) | 2024-01-11 |
CN112639649A (zh) | 2021-04-09 |
WO2020049872A1 (ja) | 2020-03-12 |
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