SG11202102014VA - Conveyance vehicle system - Google Patents

Conveyance vehicle system

Info

Publication number
SG11202102014VA
SG11202102014VA SG11202102014VA SG11202102014VA SG11202102014VA SG 11202102014V A SG11202102014V A SG 11202102014VA SG 11202102014V A SG11202102014V A SG 11202102014VA SG 11202102014V A SG11202102014V A SG 11202102014VA SG 11202102014V A SG11202102014V A SG 11202102014VA
Authority
SG
Singapore
Prior art keywords
vehicle system
conveyance vehicle
conveyance
vehicle
Prior art date
Application number
SG11202102014VA
Other languages
English (en)
Inventor
Kazumi Harasaki
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202102014VA publication Critical patent/SG11202102014VA/en

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41815Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4189Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
    • G05B19/41895Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system using automatic guided vehicles [AGV]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B61RAILWAYS
    • B61LGUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
    • B61L27/00Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
    • B61L27/30Trackside multiple control systems, e.g. switch-over between different systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B61RAILWAYS
    • B61LGUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
    • B61L27/00Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
    • B61L27/20Trackside control of safe travel of vehicle or train, e.g. braking curve calculation
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4189Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D1/00Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
    • G05D1/02Control of position or course in two dimensions
    • G05D1/021Control of position or course in two dimensions specially adapted to land vehicles
    • G05D1/0287Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
    • G05D1/0291Fleet control
    • G05D1/0297Fleet control by controlling means in a control room
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67276Production flow monitoring, e.g. for increasing throughput
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/31From computer integrated manufacturing till monitoring
    • G05B2219/31002Computer controlled agv conveys workpieces between buffer and cell
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/31From computer integrated manufacturing till monitoring
    • G05B2219/31454Keep track of vehicles
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/45Nc applications
    • G05B2219/45031Manufacturing semiconductor wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG11202102014VA 2018-09-04 2019-07-11 Conveyance vehicle system SG11202102014VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018165288 2018-09-04
PCT/JP2019/027597 WO2020049872A1 (ja) 2018-09-04 2019-07-11 搬送車システム

Publications (1)

Publication Number Publication Date
SG11202102014VA true SG11202102014VA (en) 2021-04-29

Family

ID=69723162

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202102014VA SG11202102014VA (en) 2018-09-04 2019-07-11 Conveyance vehicle system

Country Status (8)

Country Link
US (1) US11952026B2 (ja)
EP (1) EP3848769B1 (ja)
JP (1) JP7136214B2 (ja)
KR (1) KR102586754B1 (ja)
CN (1) CN112639649B (ja)
SG (1) SG11202102014VA (ja)
TW (1) TWI828745B (ja)
WO (1) WO2020049872A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11720095B2 (en) * 2020-06-23 2023-08-08 Ford Global Technologies, Llc Remote controlled flexible modular platform system
US11803181B2 (en) * 2020-06-23 2023-10-31 Ford Global Technologies, Llc Flexible modular platform plant navigation system
JP7287406B2 (ja) * 2021-01-12 2023-06-06 株式会社ダイフク 物品搬送システム
JP7380607B2 (ja) * 2021-01-21 2023-11-15 株式会社ダイフク 物品搬送設備

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5797330A (en) * 1996-07-31 1998-08-25 Li; Zhengzhong Mass transit system
JP2003044138A (ja) * 2001-07-30 2003-02-14 Murata Mach Ltd 無人搬送車システム
JP2004227059A (ja) * 2003-01-20 2004-08-12 Murata Mach Ltd 無人搬送車システム
JP2006221309A (ja) * 2005-02-09 2006-08-24 Murata Mach Ltd 搬送台車システム
JP4135721B2 (ja) * 2005-03-17 2008-08-20 村田機械株式会社 搬送車システム
JP4172466B2 (ja) * 2005-05-09 2008-10-29 村田機械株式会社 搬送台車システム
JP4462199B2 (ja) * 2006-01-30 2010-05-12 村田機械株式会社 搬送車システム
JP4366663B2 (ja) 2007-06-28 2009-11-18 村田機械株式会社 搬送台車システム
JP5105246B2 (ja) * 2008-07-28 2012-12-26 シンフォニアテクノロジー株式会社 搬送システム及び搬送システム用プログラム
US7698029B2 (en) * 2008-08-19 2010-04-13 The Boeing Company Autonomous asset transportation method, apparatus and computer program product
WO2010073475A1 (ja) * 2008-12-26 2010-07-01 村田機械株式会社 搬送車システムおよび搬送車制御方法
JP5418036B2 (ja) * 2009-07-21 2014-02-19 村田機械株式会社 搬送車システムと搬送車システムの管理方法
JP5146855B2 (ja) * 2010-08-09 2013-02-20 村田機械株式会社 天井走行車システム
DE102010060504A1 (de) * 2010-11-11 2012-05-16 Gottwald Port Technology Gmbh System für den Umschlag von Containern
US9836050B2 (en) * 2011-07-07 2017-12-05 Murata Machinery, Ltd. Guided vehicle system and guided vehicle control method
WO2013183376A1 (ja) * 2012-06-08 2013-12-12 村田機械株式会社 搬送システム及び搬送システムでの物品の一時保管方法
WO2014125727A1 (ja) * 2013-02-15 2014-08-21 村田機械株式会社 搬送設備と自動倉庫
CN104859683B (zh) * 2015-05-26 2016-08-31 北京交通大学 一种高速铁路列控系统的地面设备
CN107922116B (zh) * 2015-08-14 2019-11-22 村田机械株式会社 输送系统
CN108290684B (zh) * 2015-11-27 2020-06-23 村田机械株式会社 输送系统以及输送方法
JP6698399B2 (ja) * 2016-03-29 2020-05-27 北陽電機株式会社 搬送制御装置及び搬送台車の合流点通過方法
JP6520797B2 (ja) * 2016-04-11 2019-05-29 株式会社ダイフク 物品搬送設備
US10216188B2 (en) * 2016-07-25 2019-02-26 Amazon Technologies, Inc. Autonomous ground vehicles based at delivery locations
JP6717121B2 (ja) * 2016-08-29 2020-07-01 株式会社ダイフク 物品搬送設備
CN106627676B (zh) * 2016-12-09 2018-05-08 交控科技股份有限公司 一种区域控制器的资源控制权的动态分配方法
JP2020024476A (ja) * 2016-12-14 2020-02-13 村田機械株式会社 走行車システム
NO346519B1 (en) * 2017-11-02 2022-09-19 Autostore Tech As An automated storage and retrieval system, use of a multi trolley vehicle on the system and a method of operating the system

Also Published As

Publication number Publication date
JPWO2020049872A1 (ja) 2021-08-12
KR102586754B1 (ko) 2023-10-10
US20210179153A1 (en) 2021-06-17
EP3848769B1 (en) 2023-11-22
TW202026785A (zh) 2020-07-16
CN112639649A (zh) 2021-04-09
EP3848769A1 (en) 2021-07-14
US11952026B2 (en) 2024-04-09
EP3848769A4 (en) 2022-06-08
TWI828745B (zh) 2024-01-11
CN112639649B (zh) 2024-04-12
KR20210043673A (ko) 2021-04-21
JP7136214B2 (ja) 2022-09-13
WO2020049872A1 (ja) 2020-03-12

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