JPWO2018163338A1 - 有機elデバイスの製造方法および成膜装置 - Google Patents
有機elデバイスの製造方法および成膜装置 Download PDFInfo
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Abstract
Description
以下、本発明の実施形態によって製造され得る表示装置の構成例を説明する。なお、本発明の実施形態は、以下に例示する実施形態に限定されない。
図13から図15を参照して、本発明の実施形態1によるOLED表示装置の製造方法を説明する。
実施形態1について説明した有機バリア層14Aの形成は、アクリルモノマーなどの光硬化性樹脂を段差部分に偏在させる。以下に説明する実施形態2のOLED表示装置の製造方法は、少なくとも平坦部上の一部にも樹脂層(例えばアクリル樹脂層)を形成し、樹脂層を部分的にアッシングすることによって有機バリア層を形成する工程を包含している。最初に形成する樹脂層の厚さを調整する(例えば、100nm未満とする)、レーザビームの照射領域を選択する、および/または、アッシング条件(時間を含む)を調整することによって、種々の形態の有機バリア層を形成することができる。すなわち、実施形態1で説明したOLED表示装置100Aが有する有機バリア層14Aを形成することもできるし、平坦部の一部または全部を実質的に覆う有機バリア層(中実部)を形成することもできる。なお、有機バリア層の面積が大きいと、耐屈曲性を向上させる効果が得られる。以下では、主に、平坦部の一部または全部を覆う有機バリア層(中実部)を有するTFE構造を有するOLED表示装置およびその製造方法を説明する。なお、TFE構造を形成する前の素子基板の構造、特に、引出し配線および端子の構造ならびにTFTの構造は、実施形態1で説明したいずれであってもよい。
2 :バックプレーン回路
3 :OLED
4 :偏光板
10、10A、10B、10C、10D :薄膜封止構造(TFE構造)
12、12A、12B、12C、12D :第1無機バリア層(SiN層)
14、14A、14B、14D :有機バリア層(アクリル樹脂層)
14Da :有機バリア層の開口部
14Db :有機バリア層の中実部
14Ds :有機バリア層の表面(アッシング後)
14Dsa :有機バリア層の表面(アッシング前)
16A、16B、16C、16D :第2無機バリア層(SiN層)
16Dc :欠陥
16Dd :凹部
20 :素子基板
26 :アクリルモノマー
26p :アクリルモノマーの蒸気または霧状のアクリルモノマー
100、100A :有機EL表示装置
210 :チャンバー
212 :ステージ
220 :シャワープレート
222 :貫通孔
224 :間隙部
230 :光源装置
232 :レーザビーム
234 :隔壁
Claims (14)
- アクティブ領域および前記アクティブ領域の外側に位置する周辺領域を有する基板と、前記基板に支持される電気回路であって前記アクティブ領域上に形成された複数の有機EL素子および前記複数の有機EL素子を駆動するバックプレーン回路を含む電気回路とを備え、前記バックプレーン回路は、それぞれが前記周辺領域上の端子を含む複数の引出し配線を有する、素子基板を用意する工程と、
前記素子基板における前記複数の有機EL素子の上および前記複数の引出し配線の前記アクティブ領域側の部分の上に薄膜封止構造を形成する工程と、
を含み、
前記薄膜封止構造を形成する工程は、
第1無機バリア層を前記素子基板上に形成する工程と、
前記第1無機バリア層上に液状の光硬化性樹脂を凝縮させる工程と、
波長400nm以下のレーザビームによって前記光硬化性樹脂の選択された領域を照射し、前記光硬化性樹脂の少なくとも一部を硬化させて光硬化樹脂層を形成する工程であって、前記複数の引出し配線のそれぞれに前記光硬化樹脂層の開口部を形成する、工程と、
前記光硬化樹脂層の表面の一部をアッシングして、有機バリア層を形成する工程と、
前記有機バリア層を覆う第2無機バリア層を前記第1無機バリア層上に形成する工程と、
を含む、有機ELデバイスの製造方法。 - 前記液状の光硬化性樹脂を凝縮させる工程において、前記第1無機バリア層の平坦部上に凝縮した前記光硬化性樹脂の厚さは100nm以上500nm以下である、請求項1に記載の製造方法。
- 前記有機バリア層を形成する工程は、少なくとも1個の半導体レーザ素子が出射したレーザ光から前記レーザビームを生成することを含む、請求項1または2に記載の製造方法。
- 前記基板は、フレキシブル基板である、請求項1から3のいずれかに記載の製造方法。
- 前記光硬化性樹脂はアクリルモノマーを含む、請求項1から4のいずれかに記載の製造方法。
- 基板と、前記基板上に配列された複数の有機ELデバイスとを備える素子基板を用意する工程と、
前記素子基板に薄膜封止構造を形成する工程と、
を含み、
前記薄膜封止構造を形成する工程は、
第1無機バリア層を前記素子基板上に形成する工程と、
前記第1無機バリア層上に光硬化性樹脂を凝縮させる工程と、
レーザビームによって前記光硬化性樹脂の選択された複数の領域を照射し、前記光硬化性樹脂の少なくとも一部を硬化させて光硬化樹脂層を形成する工程と、
前記光硬化性樹脂の硬化しなかった部分を除去する工程と、
前記基板上に残存する前記光硬化樹脂層を覆う第2無機バリア層を前記第1無機バリア層上に形成する工程と、
を含む、有機ELデバイスの製造方法。 - 前記光硬化性樹脂の前記複数の領域は、前記第1無機バリア層と前記第2無機バリア層とが前記有機バリア層を介さずに接触する領域によって各有機ELデバイスのアクティブ領域が囲まれるように選択される、請求項6に記載の製造方法。
- 前記光硬化性樹脂の前記複数の領域は、それぞれ、相互に離間している、請求項6または7に記載の製造方法。
- 基板を支持するステージを備えるチャンバーと、
前記チャンバー内に蒸気または霧状の光硬化性樹脂を供給する原料供給装置と、
前記ステージに支持されている前記基板の選択された複数の領域をレーザビームで照射する光源装置と、
を備え、
前記光源装置は、
前記レーザビームを出射する少なくとも1個の半導体レーザ素子と、
前記半導体レーザ素子から出射された前記レーザビームの前記基板上における強度分布を調節する光学装置と、
を備える、成膜装置。 - 前記光学装置は、前記レーザビームで前記基板の選択された前記複数の領域を走査する少なくとも1個の可動ミラーを有している、請求項9に記載の成膜装置。
- 前記光源装置は、前記少なくとも1個の半導体レーザ素子を含む複数の半導体レーザ素子を備えており、前記複数の半導体レーザ素子から放射された複数のレーザビームで前記基板の選択された前記複数の領域を照射する、請求項9に記載の成膜装置。
- 前記光源装置は、前記複数の半導体レーザ素子を前記基板に対して移動させる駆動装置を有している、請求項11に記載の成膜装置。
- 前記光学装置は、前記強度分布を調整して、前記基板上に凝縮した前記光硬化性樹脂の少なくとも一部を硬化しないように前記強度分布を調整する、請求項9から12のいずれかに記載の成膜装置。
- 前記光学装置は、前記強度分布を変調する透過型または反射型の空間光変調素子を有している、請求項9から13のいずれかに記載の成膜装置。
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2018163338A1 (ja) * | 2017-03-08 | 2018-09-13 | 堺ディスプレイプロダクト株式会社 | 有機elデバイスの製造方法および成膜装置 |
US10754387B2 (en) * | 2017-09-29 | 2020-08-25 | Sharp Kabushiki Kaisha | Flexible display device |
US10581028B2 (en) * | 2017-11-29 | 2020-03-03 | Sakai Display Products Corporation | Method for producing organic electroluminescent display device |
US10950682B2 (en) * | 2017-11-29 | 2021-03-16 | Sakai Display Products Corporation | Method for manufacturing organic electroluminescent device |
CN109546006B (zh) * | 2018-12-17 | 2020-09-08 | 武汉华星光电半导体显示技术有限公司 | 柔性oled显示面板及其制作方法 |
KR20200130550A (ko) * | 2019-05-08 | 2020-11-19 | 삼성디스플레이 주식회사 | 표시 장치 및 표시 장치의 제조 방법 |
WO2023234136A1 (ja) * | 2022-06-03 | 2023-12-07 | 東洋紡株式会社 | 光電変換素子の機能層の製造方法および光電変換素子の製造方法 |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4776766B2 (ja) * | 1999-10-26 | 2011-09-21 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2003272834A (ja) | 2002-03-20 | 2003-09-26 | Denso Corp | 表示装置 |
JP2003288026A (ja) * | 2002-03-28 | 2003-10-10 | Sanyo Electric Co Ltd | エレクトロルミネッセンス表示装置の製造方法 |
US6949389B2 (en) * | 2002-05-02 | 2005-09-27 | Osram Opto Semiconductors Gmbh | Encapsulation for organic light emitting diodes devices |
DE10318187B4 (de) * | 2002-05-02 | 2010-03-18 | Osram Opto Semiconductors Gmbh | Verkapselungsverfahren für organische Leuchtdiodenbauelemente |
JP2005100685A (ja) * | 2003-09-22 | 2005-04-14 | Toshiba Matsushita Display Technology Co Ltd | 表示装置及び表示装置の製造方法 |
US20050212419A1 (en) * | 2004-03-23 | 2005-09-29 | Eastman Kodak Company | Encapsulating oled devices |
JP4432863B2 (ja) * | 2005-09-05 | 2010-03-17 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置及び電子機器 |
JP2007250370A (ja) * | 2006-03-16 | 2007-09-27 | Canon Inc | 有機発光素子及びその製造方法 |
KR20070103204A (ko) | 2006-04-18 | 2007-10-23 | 주식회사 동진쎄미켐 | 우수한 열전도도를 갖는 광경화성 수지 조성물 |
RU2401846C2 (ru) * | 2006-04-25 | 2010-10-20 | Учреждение Российской академии наук Институт синтетических полимерных материалов им. Н.С. Ениколопова РАН (ИСПМ РАН) | Функциональные полиорганосилоксаны и композиция, способная к отверждению на их основе |
JP4337852B2 (ja) * | 2006-08-30 | 2009-09-30 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置とその製造方法及び電子機器 |
JP2008161749A (ja) * | 2006-12-27 | 2008-07-17 | Miyachi Technos Corp | 樹脂硬化装置 |
US8395568B2 (en) * | 2007-05-31 | 2013-03-12 | Nthdegree Technologies Worldwide Inc | Light emitting, photovoltaic or other electronic apparatus and system |
JP5296343B2 (ja) | 2007-07-31 | 2013-09-25 | 住友化学株式会社 | バリア層つき基板、表示素子および表示素子の製造方法 |
JP5071152B2 (ja) | 2008-02-28 | 2012-11-14 | ソニー株式会社 | 表示装置の製造方法および照明装置の製造方法 |
AU2009234506B2 (en) * | 2008-04-09 | 2013-11-21 | Agency For Science, Technology And Research | Multilayer film for encapsulating oxygen and/or moisture sensitive electronic devices |
CN103154303B (zh) * | 2010-10-20 | 2016-01-06 | 株式会社爱发科 | 有机膜形成装置以及有机膜形成方法 |
JP5981115B2 (ja) | 2011-09-20 | 2016-08-31 | 株式会社アルバック | 成膜装置 |
KR101503401B1 (ko) * | 2012-03-05 | 2015-03-17 | 삼성디스플레이 주식회사 | 유기 발광 장치의 제조 방법 |
JP5988619B2 (ja) * | 2012-03-06 | 2016-09-07 | 株式会社アルバック | 成膜装置、成膜方法 |
JP2013247021A (ja) | 2012-05-28 | 2013-12-09 | Canon Inc | 表示装置及びその製造方法 |
JP6186697B2 (ja) * | 2012-10-29 | 2017-08-30 | セイコーエプソン株式会社 | 有機el装置の製造方法、有機el装置、電子機器 |
JP6054763B2 (ja) * | 2013-02-12 | 2016-12-27 | 株式会社ジャパンディスプレイ | 有機el表示装置 |
JP6139196B2 (ja) | 2013-03-15 | 2017-05-31 | 株式会社ジャパンディスプレイ | 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法 |
US10276827B2 (en) | 2013-06-07 | 2019-04-30 | Ulvac, Inc. | Device structure and method of producing the same |
TWI777433B (zh) * | 2013-09-06 | 2022-09-11 | 日商半導體能源研究所股份有限公司 | 發光裝置以及發光裝置的製造方法 |
KR102279921B1 (ko) * | 2014-02-12 | 2021-07-22 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
JP6374188B2 (ja) | 2014-03-14 | 2018-08-15 | 東京エレクトロン株式会社 | 封止構造の形成方法、封止構造の製造装置、並びに有機el素子構造の製造方法、及びその製造装置 |
TWI602863B (zh) * | 2014-03-27 | 2017-10-21 | Lg化學股份有限公司 | 封裝膜及含彼之有機電子裝置 |
JP5880679B2 (ja) * | 2014-07-16 | 2016-03-09 | 住友化学株式会社 | 発光素子の製造方法 |
JP6490921B2 (ja) | 2014-08-08 | 2019-03-27 | 株式会社ジャパンディスプレイ | 表示装置、及びその製造方法 |
JP6307384B2 (ja) | 2014-08-11 | 2018-04-04 | 株式会社ジャパンディスプレイ | 有機el表示装置 |
TWI565380B (zh) * | 2014-09-30 | 2017-01-01 | 友達光電股份有限公司 | 顯示裝置及其製造方法 |
JP2016076467A (ja) * | 2014-10-09 | 2016-05-12 | 株式会社ジャパンディスプレイ | 有機el表示装置の製造方法及びそれに用いる成膜装置 |
US10696840B2 (en) * | 2014-11-26 | 2020-06-30 | Kyocera Corporation | Resin composition for semiconductor encapsulation and semiconductor device |
JP2016115884A (ja) * | 2014-12-17 | 2016-06-23 | 凸版印刷株式会社 | 半導体装置及びその製造方法 |
KR102402195B1 (ko) * | 2015-06-30 | 2022-05-25 | 엘지디스플레이 주식회사 | 유기발광 표시장치 |
WO2018163338A1 (ja) * | 2017-03-08 | 2018-09-13 | 堺ディスプレイプロダクト株式会社 | 有機elデバイスの製造方法および成膜装置 |
WO2018167923A1 (ja) * | 2017-03-16 | 2018-09-20 | 堺ディスプレイプロダクト株式会社 | 有機elデバイスの製造方法、成膜方法および成膜装置 |
CN107565052B (zh) * | 2017-08-25 | 2020-04-17 | 京东方科技集团股份有限公司 | 封装结构及其制造方法、显示装置 |
US10516001B2 (en) * | 2017-10-26 | 2019-12-24 | Sakai Display Products Corporation | Method and apparatus for producing flexible OLED device |
JP6387209B1 (ja) * | 2017-10-26 | 2018-09-05 | 堺ディスプレイプロダクト株式会社 | フレキシブルoledデバイスの製造方法および製造装置 |
US10581028B2 (en) * | 2017-11-29 | 2020-03-03 | Sakai Display Products Corporation | Method for producing organic electroluminescent display device |
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