JPWO2017029876A1 - 静電チャックヒータ - Google Patents
静電チャックヒータ Download PDFInfo
- Publication number
- JPWO2017029876A1 JPWO2017029876A1 JP2016575586A JP2016575586A JPWO2017029876A1 JP WO2017029876 A1 JPWO2017029876 A1 JP WO2017029876A1 JP 2016575586 A JP2016575586 A JP 2016575586A JP 2016575586 A JP2016575586 A JP 2016575586A JP WO2017029876 A1 JPWO2017029876 A1 JP WO2017029876A1
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- Prior art keywords
- heater
- electrode
- electrostatic chuck
- electrode region
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/286—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an organic material, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/016—Heaters using particular connecting means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Resistance Heating (AREA)
Abstract
Description
セラミックス焼結体に静電電極が埋設された静電チャックと、
1又は複数のヒータ電極を有する樹脂シートであって一方の面が前記静電チャックに樹脂接着されたシートヒータと、
前記シートヒータの他方の面に樹脂接着された金属製の支持台と、
を備えたものである。
Claims (8)
- セラミックス焼結体に静電電極が埋設された静電チャックと、
1又は複数のヒータ電極を有する樹脂シートであって一方の面が前記静電チャックに樹脂接着されたシートヒータと、
前記シートヒータの他方の面に樹脂接着された金属製の支持台と、
を備えた静電チャックヒータ。 - 前記シートヒータは、前記シートヒータの表面に平行で高さの異なる第1電極領域と第2電極領域を有し、前記第1電極領域は複数のヒータ電極が配置された領域であり、前記第2電極領域は前記複数のヒータ電極のそれぞれに給電する複数のジャンパ線が配置された領域であり、前記ジャンパ線のうち前記ヒータ電極に接続される一端とは反対側の他端が前記シートヒータの外周側の所定位置に配置されている、
請求項1に記載の静電チャックヒータ。 - 前記複数のジャンパ線は、それぞれ前記シートヒータの他方の面に設けられた複数のジャンパランドに電気的に接続され、
前記複数のジャンパランドは、前記支持台に設けられた貫通孔に面している、
請求項2に記載の静電チャックヒータ。 - 前記複数のジャンパランドは、2つ以上がひと組となるように複数の組に分けられ、
各組に属する前記ジャンパランドは、共通の前記貫通孔に面しており、該貫通孔に差し込まれた一つのフレキシブルな金属導線集合体を介して外部電源と電気的に接続される、
請求項3に記載の静電チャックヒータ。 - 前記シートヒータは、前記第1電極領域及び前記第2電極領域と平行で高さの異なる第3電極領域を有し、前記第3電極領域は前記複数のヒータ電極に電気的に接続された共通のグランド電極が配置された領域である、
請求項2〜4のいずれか1項に記載の静電チャックヒータ。 - 前記シートヒータは、前記第1電極領域及び前記第2電極領域と平行で高さの異なる第4電極領域を有し、前記第4電極領域は前記ヒータ電極より高出力の1以上の基準ヒータ電極が配置された領域である、
請求項2〜5のいずれか1項に記載の静電チャックヒータ。 - 前記第1電極領域、前記第2電極領域、前記第3電極領域及び前記第4電極領域は、前記シートヒータの前記一方の面から前記他方の面に向かってこの順で並んでいる、
請求項6に記載の静電チャックヒータ。 - 前記静電チャックと前記シートヒータとの樹脂接着及び前記シートヒータと前記支持台との樹脂接着には、ボンディングシートが利用されている、
請求項1〜7のいずれか1項に記載の静電チャックヒータ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562207484P | 2015-08-20 | 2015-08-20 | |
US62/207,484 | 2015-08-20 | ||
PCT/JP2016/068238 WO2017029876A1 (ja) | 2015-08-20 | 2016-06-20 | 静電チャックヒータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6129451B1 JP6129451B1 (ja) | 2017-05-17 |
JPWO2017029876A1 true JPWO2017029876A1 (ja) | 2017-08-17 |
Family
ID=58051154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016575586A Active JP6129451B1 (ja) | 2015-08-20 | 2016-06-20 | 静電チャックヒータ |
Country Status (6)
Country | Link |
---|---|
US (1) | US10292209B2 (ja) |
JP (1) | JP6129451B1 (ja) |
KR (1) | KR101776562B1 (ja) |
CN (1) | CN107113921B (ja) |
TW (1) | TWI683391B (ja) |
WO (1) | WO2017029876A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2021504925A (ja) * | 2017-11-21 | 2021-02-15 | ワトロー エレクトリック マニュファクチュアリング カンパニー | 経路層を持つ複数領域ペデスタルヒーター |
Families Citing this family (31)
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KR20170039781A (ko) * | 2015-10-01 | 2017-04-12 | 삼성디스플레이 주식회사 | 정전척 및 이를 포함하는 기판 처리 장치 |
JP6730861B2 (ja) * | 2016-06-22 | 2020-07-29 | 日本特殊陶業株式会社 | 保持装置 |
JP6698502B2 (ja) * | 2016-11-21 | 2020-05-27 | 東京エレクトロン株式会社 | 載置台及びプラズマ処理装置 |
TWI725288B (zh) * | 2017-02-01 | 2021-04-21 | 日商日本特殊陶業股份有限公司 | 保持裝置 |
JP7158131B2 (ja) * | 2017-05-30 | 2022-10-21 | 東京エレクトロン株式会社 | ステージ及びプラズマ処理装置 |
JP6850228B2 (ja) * | 2017-09-13 | 2021-03-31 | 日本特殊陶業株式会社 | 保持装置 |
KR102039403B1 (ko) | 2017-09-26 | 2019-11-01 | 한국화학연구원 | 고순도 테레프탈산 제조 시 반응기에서 배출되는 부산물로부터 초산을 분리하는 방법 및 장치 |
JP7052735B2 (ja) * | 2017-09-29 | 2022-04-12 | 住友大阪セメント株式会社 | 静電チャック装置 |
US11236422B2 (en) * | 2017-11-17 | 2022-02-01 | Lam Research Corporation | Multi zone substrate support for ALD film property correction and tunability |
US10306776B1 (en) * | 2017-11-29 | 2019-05-28 | Lam Research Corporation | Substrate processing system printed-circuit control board assembly with one or more heater layers |
US10633742B2 (en) | 2018-05-07 | 2020-04-28 | Lam Research Foundation | Use of voltage and current measurements to control dual zone ceramic pedestals |
JP2020004946A (ja) * | 2018-06-25 | 2020-01-09 | 日本特殊陶業株式会社 | 保持装置 |
US11908715B2 (en) | 2018-07-05 | 2024-02-20 | Lam Research Corporation | Dynamic temperature control of substrate support in substrate processing system |
US10872747B2 (en) | 2018-08-08 | 2020-12-22 | Lam Research Corporation | Controlling showerhead heating via resistive thermal measurements |
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JP2020064841A (ja) * | 2018-10-11 | 2020-04-23 | 日本発條株式会社 | ステージ、成膜装置、および膜加工装置 |
JP6754514B1 (ja) * | 2019-02-19 | 2020-09-09 | 日本碍子株式会社 | セラミックヒータ及びその製法 |
JP6918042B2 (ja) | 2019-03-26 | 2021-08-11 | 日本碍子株式会社 | ウエハ載置装置 |
US11562913B2 (en) * | 2019-04-25 | 2023-01-24 | Watlow Electric Manufacturing Company | Multi-zone azimuthal heater |
US11004710B2 (en) * | 2019-06-04 | 2021-05-11 | Applied Materials, Inc. | Wafer placement error detection based on measuring a current through an electrostatic chuck and solution for intervention |
TWI762978B (zh) | 2019-07-24 | 2022-05-01 | 美商恩特葛瑞斯股份有限公司 | 用於多層之靜電吸盤之接地機構及相關之方法 |
CN113039863B (zh) | 2019-09-18 | 2023-03-28 | 日本碍子株式会社 | 静电卡盘加热器 |
JP7445433B2 (ja) * | 2020-01-10 | 2024-03-07 | 日本特殊陶業株式会社 | 保持装置 |
JP7373409B2 (ja) * | 2020-01-10 | 2023-11-02 | 日本特殊陶業株式会社 | 保持装置 |
US11482444B2 (en) | 2020-03-10 | 2022-10-25 | Applied Materials, Inc. | High temperature micro-zone electrostatic chuck |
US11784080B2 (en) | 2020-03-10 | 2023-10-10 | Applied Materials, Inc. | High temperature micro-zone electrostatic chuck |
JP7202326B2 (ja) | 2020-03-11 | 2023-01-11 | 日本碍子株式会社 | セラミックヒータ |
DE102020107552A1 (de) | 2020-03-19 | 2021-09-23 | AIXTRON Ltd. | Heizvorrichtung für einen Suszeptor eines CVD-Reaktors |
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JP2022148714A (ja) * | 2021-03-24 | 2022-10-06 | 新光電気工業株式会社 | 静電チャック、基板固定装置 |
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-
2016
- 2016-06-20 KR KR1020177016997A patent/KR101776562B1/ko active IP Right Grant
- 2016-06-20 JP JP2016575586A patent/JP6129451B1/ja active Active
- 2016-06-20 CN CN201680004220.9A patent/CN107113921B/zh active Active
- 2016-06-20 WO PCT/JP2016/068238 patent/WO2017029876A1/ja active Application Filing
- 2016-06-27 TW TW105120131A patent/TWI683391B/zh active
-
2017
- 2017-06-09 US US15/618,328 patent/US10292209B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021504925A (ja) * | 2017-11-21 | 2021-02-15 | ワトロー エレクトリック マニュファクチュアリング カンパニー | 経路層を持つ複数領域ペデスタルヒーター |
Also Published As
Publication number | Publication date |
---|---|
CN107113921B (zh) | 2020-09-11 |
US20170280509A1 (en) | 2017-09-28 |
TW201714246A (zh) | 2017-04-16 |
CN107113921A (zh) | 2017-08-29 |
KR101776562B1 (ko) | 2017-09-07 |
US10292209B2 (en) | 2019-05-14 |
WO2017029876A1 (ja) | 2017-02-23 |
JP6129451B1 (ja) | 2017-05-17 |
TWI683391B (zh) | 2020-01-21 |
KR20170081269A (ko) | 2017-07-11 |
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