JPWO2016194241A1 - 配線用基板の製造方法 - Google Patents
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
- H05K1/113—Via provided in pad; Pad over filled via
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09563—Metal filled via
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
製造例1
絶縁基板として、孔径が50μmの貫通孔50個が500μmの等間隔で直線上に設けられたシリコン基板(直径:150mm、厚さ:300μm)を用いた。ロードロック式スパッタリング装置(アルバック社製、形式:CS−200)を用いて当該シリコン基板の一方表面にシード層として厚さ50nmのチタン層を形成させた後、厚さ300nmの銅層を形成させた。シード層には図1(b)に示される突出部3aが形成されており、突出部3aの長さLは約20μmであり、厚さDは約150nmであった。
製造例1で得られたシード層を有するシリコン基板を用い、シード層が形成されている面にマスキングフィルム(厚さが30μmのポリエチレン製フィルム)を貼り付けることにより、当該シード層が形成されている面をマスキングフィルムで被覆した。
絶縁基板として、孔径が60μmの貫通孔50個が120μmの等間隔で直線上に設けられたシリコン基板(直径:150mm、厚さ:350μm)を用いた。
実施例II−1
絶縁基板として、孔径が50μmの貫通孔50個が500μmの等間隔で直線上に設けられたシリコン基板(直径:150mm、厚さ:300μm)を用いた。ロードロック式スパッタリング装置(アルバック社製、形式:CS−200)を用いて当該シリコン基板の一方表面に厚さ50nmのチタン層を形成させた後、厚さ300nmの銅層を形成させることにより、シード層を形成させた。
実施例II−1において、金属層が形成された貫通孔の開口部の直径が、金属層が形成される前の貫通孔の開口部の直径の20%となるように貫通孔の内部に金属層を形成させたこと以外は、実施例II−1と同様にして配線用基板を得た。
実施例II−1において、金属層が形成された貫通孔の開口部の直径が、金属層が形成される前の貫通孔の開口部の直径の45%となるように貫通孔の内部に金属層を形成させたこと以外は、実施例II−1と同様にして配線用基板を得た。
実施例II−1において、金属層が形成された貫通孔の開口部の直径が、金属層が形成される前の貫通孔の開口部の直径の100%となるように貫通孔の内部に金属層を形成させることにより、貫通孔を閉塞させたこと以外は、実施例II−1と同様にして配線用基板を得た。
実施例II−1において、シリコン基板のシード層が形成された面と銅からなる陽極とが対向するようにして電気銅めっきを行なう操作を省略したこと以外は、実施例II−1と同様にして配線用基板を得た。
絶縁基板として、孔径が60μmの貫通孔50個が120μmの等間隔で直線上に設けられたシリコン基板(直径:150mm、厚さ:350μm)を用いた。ロードロック式スパッタリング装置(アルバック社製、形式:CS−200)を用いて当該シリコン基板の全面に厚さ50nmのチタン層を形成させた後、厚さ300nmの銅層を形成させた。
2 貫通孔
3 シード層
4 マスキングフィルム
5 陽極
6 電解槽
7 めっき浴
8 金属層
8a 金属層の表面
9 レジスト層
10 電極
11 貫通孔
12 マスキングフィルム
13 金属層
Claims (2)
- 貫通孔を有する絶縁基板を用いて配線用基板を製造する方法であって、絶縁基板の一方表面にシード層を形成させ、シード層が形成された面をマスキングフィルムで被覆し、絶縁基板のシード層が形成されている面の反対面と陽極とが対向するように絶縁基板および陽極を配設して電気めっきを施し、貫通孔内で金属層を形成させた後、マスキングフィルムを除去することを特徴とする配線用基板の製造方法。
- 貫通孔を有する絶縁基板を用いて配線用基板を製造する方法であって、
絶縁基板の一方表面にシード層を形成させ、
形成されたシード層上で電極が形成されない電極非形成部にレジスト層を形成させるとともに、シード層が形成された面の反対面をマスキングフィルムで被覆し、
シード層が形成された面に電気めっきを施すことによって貫通孔の内部に金属層を形成させる際に、金属層が形成された貫通孔の開口部の直径が、金属層が形成される前の貫通孔の開口部の直径の10〜50%となるように貫通孔の内部に金属層を形成させ、
シード層が形成された面をマスキングフィルムで被覆するとともに、シード層が形成された面の反対面に被覆されているマスキングフィルムを除去し、
シード層が形成された面の反対面から電気めっきを施し、貫通孔内に金属層を形成させることにより、電極を形成させた後、
シード層に形成されたマスキングフィルム、レジスト層およびシード層を除去する
ことを特徴とする配線用基板の製造方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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JP2015110989 | 2015-05-31 | ||
JP2015110988 | 2015-05-31 | ||
JP2015110988 | 2015-05-31 | ||
JP2015110989 | 2015-05-31 | ||
PCT/JP2015/070125 WO2016194241A1 (ja) | 2015-05-31 | 2015-07-14 | 配線用基板の製造方法 |
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EP (1) | EP3307035B1 (ja) |
JP (2) | JP6307167B2 (ja) |
KR (2) | KR101849158B1 (ja) |
CN (2) | CN106416439B (ja) |
TW (2) | TWI722290B (ja) |
WO (1) | WO2016194241A1 (ja) |
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WO2005027605A1 (ja) * | 2003-09-09 | 2005-03-24 | Hoya Corporation | 両面配線ガラス基板の製造方法 |
WO2006057175A1 (ja) * | 2004-11-24 | 2006-06-01 | Dai Nippon Printing Co., Ltd. | 導電材充填スルーホール基板の製造方法 |
JP2007095743A (ja) * | 2005-09-27 | 2007-04-12 | Matsushita Electric Works Ltd | 貫通孔配線及びその製造方法 |
JP2010021327A (ja) * | 2008-07-10 | 2010-01-28 | Shinko Electric Ind Co Ltd | 配線基板の製造方法 |
US20130313122A1 (en) * | 2012-05-24 | 2013-11-28 | Viking Tech Corporation | Method For Fabricating Conductive Structures of Substrate |
JP5558614B1 (ja) * | 2013-08-26 | 2014-07-23 | 清川メッキ工業株式会社 | 配線用基板の製造方法 |
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CN108738249A (zh) | 2018-11-02 |
TW201834517A (zh) | 2018-09-16 |
KR20170132913A (ko) | 2017-12-05 |
CN106416439B (zh) | 2018-07-24 |
EP3307035B1 (en) | 2020-02-26 |
TWI722290B (zh) | 2021-03-21 |
KR101849158B1 (ko) | 2018-04-16 |
KR20180036805A (ko) | 2018-04-09 |
WO2016194241A1 (ja) | 2016-12-08 |
TW201642718A (zh) | 2016-12-01 |
CN108738249B (zh) | 2022-04-26 |
KR102072425B1 (ko) | 2020-02-03 |
CN106416439A (zh) | 2017-02-15 |
JP2018088560A (ja) | 2018-06-07 |
EP3307035A1 (en) | 2018-04-11 |
JP6307167B2 (ja) | 2018-04-04 |
TWI630856B (zh) | 2018-07-21 |
EP3307035A4 (en) | 2019-02-20 |
JP6622835B2 (ja) | 2019-12-18 |
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