JPWO2016132815A1 - 窒化物半導体自立基板作製方法 - Google Patents
窒化物半導体自立基板作製方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 140
- 239000004065 semiconductor Substances 0.000 title claims description 85
- 150000004767 nitrides Chemical class 0.000 title claims description 78
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 239000013078 crystal Substances 0.000 claims abstract description 69
- 238000000034 method Methods 0.000 claims abstract description 30
- 229910052594 sapphire Inorganic materials 0.000 claims description 12
- 239000010980 sapphire Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000001737 promoting effect Effects 0.000 claims description 5
- 230000004931 aggregating effect Effects 0.000 claims 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 25
- 229910021529 ammonia Inorganic materials 0.000 abstract description 11
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 abstract description 11
- 238000012545 processing Methods 0.000 abstract description 6
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 abstract 2
- 239000010408 film Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 6
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 6
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000005121 nitriding Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 150000004678 hydrides Chemical class 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 238000001947 vapour-phase growth Methods 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000002070 germicidal effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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Abstract
Description
はじめに、本発明の実施の形態1について説明する。図1は、本発明の実施の形態1における窒化物半導体自立基板作製方法を説明するための説明図である。
次に、本発明の実施の形態2について、図2を用いて説明する。図2は、本発明の実施の形態2における窒化物半導体自立基板作製方法を説明するための説明図である。前述した実施の形態1では、成長基板をサファイアから構成する場合について説明したが、これに限るものではない。成長基板は、ScAlMgO4の結晶から構成することで、より容易に、かつより結晶性のよい状態で窒化物半導体自立基板が作製できるようになる。以下、ScAlMgO4の結晶からなる成長基板を用いた実施の形態2における窒化物半導体自立基板作製方法について説明する。
次に、本発明の実施の形態3における他の窒化物半導体自立基板作製方法について、図3を用いて説明する。図3は、本発明の実施の形態3における窒化物半導体自立基板作製方法を説明するための説明図である。実施の形態3においても、ScAlMgO4の結晶からなる成長基板を用いる。
Claims (8)
- 結晶からなる成長基板の主表面上に、GaN、AlN、InGaN、およびInNのいずれかの窒化物半導体からなるバッファ層を形成する第1工程と、
前記バッファ層を加熱して単結晶化し、上面がN極性とされた六角柱状の複数の成長島からなる結晶化層を形成する第2工程と、
前記成長基板の平面に平行な方向への成長を促進させることにより前記成長島を凝集させて連続した成長層を形成する第3工程と、
前記成長層の上に、主表面をN極性とした状態で前記窒化物半導体を結晶成長して前記窒化物半導体の結晶からなるブールを形成する第4工程と、
前記ブールより前記成長基板を取り除く第5工程と、
前記ブールを分割して複数の窒化物半導体自立基板を作製する第6工程と
を備えることを特徴とする窒化物半導体自立基板作製方法。 - 請求項1記載の窒化物半導体自立基板作製方法において、
前記成長基板は、サファイアから構成されていることを特徴とする窒化物半導体自立基板作製方法。 - 請求項2記載の窒化物半導体自立基板作製方法において、
前記第1工程では、前記バッファ層を形成する前に結晶からなる成長基板の主表面を窒化することで、前記第4工程で、主表面をN極性とした状態で前記窒化物半導体を結晶成長する
ことを特徴とする窒化物半導体自立基板作製方法。 - 請求項1記載の窒化物半導体自立基板作製方法において、
前記成長基板は、ScAlMgO4の結晶から構成されていることを特徴とする窒化物半導体自立基板作製方法。 - 請求項4記載の窒化物半導体自立基板作製方法において、
前記第1工程では、前記バッファ層を形成する前に結晶からなる成長基板の主表面を窒化することで、前記第4工程で、主表面をN極性とした状態で前記窒化物半導体を結晶成長する
ことを特徴とする窒化物半導体自立基板作製方法。 - 請求項4記載の窒化物半導体自立基板作製方法において、
窒化物半導体は、GaN、InGaN、InNのいずれかであり、
前記第4工程では、前記成長層の上にAlNからなるAlN層を形成し、形成した前記AlN層の表面を酸化し、表面を酸化した前記AlN層の表面を窒化した後、主表面をN極性とした状態で前記窒化物半導体を結晶成長する
ことを特徴とする窒化物半導体自立基板作製方法。 - 請求項4記載の窒化物半導体自立基板作製方法において、
窒化物半導体は、AlNであり、
前記第4工程では、前記成長層の表面を酸化し、表面を酸化した前記成長層の表面を窒化した後、主表面をN極性とした状態で前記窒化物半導体を結晶成長する
ことを特徴とする窒化物半導体自立基板作製方法。 - 請求項1〜7のいずれか1項に記載の窒化物半導体自立基板作製方法において、
前記成長基板は、主表面がc面より0.4〜1.2°傾斜していることを特徴とする窒化物半導体自立基板作製方法。
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WO2021260529A1 (en) * | 2020-06-25 | 2021-12-30 | King Abdullah University Of Science And Technology | Ultraviolet light-emitting diode based on n-polar alingan alloys and method |
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WO2016132815A1 (ja) | 2016-08-25 |
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